Process for producing single crystal
    5.
    发明授权
    Process for producing single crystal 有权
    单晶生产工艺

    公开(公告)号:US08486190B2

    公开(公告)日:2013-07-16

    申请号:US12234799

    申请日:2008-09-22

    IPC分类号: C30B9/04

    摘要: A raw material mixture containing an easily oxidizable material is weighed. The raw material mixture is melted and then solidified within a reaction vessel 1 set in a non-oxidizing atmosphere to thereby produce a solidified matter 19. The reaction vessel 1 and the solidified matter 19 are heated in a non-oxidizing atmosphere within a crystal growth apparatus to melt the solidified matter to thereby produce a solution. A single crystal is grown from the solution.

    摘要翻译: 称量含有容易氧化的材料的原料混合物。 将原料混合物熔化,然后在设置在非氧化性气氛中的反应容器1内固化,从而产生固化物19.反应容器1和固化物19在晶体生长中的非氧化性气氛中加热 熔化固化物从而产生溶液的装置。 从溶液中生长单晶。

    Method for producing group III nitride-based compound semiconductor
    6.
    发明授权
    Method for producing group III nitride-based compound semiconductor 有权
    制备III族氮化物基化合物半导体的方法

    公开(公告)号:US08361222B2

    公开(公告)日:2013-01-29

    申请号:US12081943

    申请日:2008-04-23

    摘要: In the production of GaN through the flux method, deposition of miscellaneous crystals on the nitrogen-face of a GaN self-standing substrate and waste of raw materials are prevented. Four arrangements of crucibles and a GaN self-standing substrate are exemplified. In FIG. 1A, a nitrogen-face of a self-standing substrate comes into close contact with a sloped flat inner wall of a crucible. In FIG. 1B, a nitrogen-face of a self-standing substrate comes into close contact with a horizontally facing flat inner wall of a crucible, and the substrate is fixed by means of a jig. In FIG. 1C, a jig is provided on a flat bottom of a crucible, and two GaN self-standing substrates are fixed by means of the jig so that the nitrogen-faces of the substrates come into close contact with each other. In FIG. 1D, a jig is provided on a flat bottom of a crucible, and a GaN self-standing substrate is fixed on the jig so that the nitrogen-face of the substrate is covered with the jig. A flux mixture of molten gallium and sodium is charged into each crucible, and a GaN single crystal is grown on a gallium-face under pressurized nitrogen.

    摘要翻译: 在通过助熔剂制造GaN的情况下,可以防止在GaN自立基板的氮面上沉积杂晶,原料的浪费。 例示了四个坩埚和GaN自立衬底的布置。 在图 如图1A所示,自立基板的氮面与坩埚的倾斜的平坦的内壁紧密接触。 在图 如图1B所示,自立基板的氮面与坩埚的水平方向的平坦的内壁紧密接触,通过夹具固定基板。 在图 如图1C所示,在坩埚的平坦底部设置夹具,通过夹具固定两个GaN自立基板,使得基板的氮面彼此紧密接触。 在图 如图1D所示,在坩埚的平坦底部设置夹具,并且将GaN自立基板固定在夹具上,使得基板的氮面被夹具覆盖。 将熔融的镓和钠的助熔剂混合物装入每个坩埚中,并且在加压氮气下在镓面上生长GaN单晶。

    Production Methods of Semiconductor Crystal and Semiconductor Substrate
    8.
    发明申请
    Production Methods of Semiconductor Crystal and Semiconductor Substrate 审中-公开
    半导体晶体和半导体基板的生产方法

    公开(公告)号:US20090155580A1

    公开(公告)日:2009-06-18

    申请号:US12225389

    申请日:2007-04-05

    IPC分类号: C30B19/02 B32B9/00 B32B1/00

    摘要: To provide a semiconductor substrate of high quality suitable for fabricating an electronic device or an optical device. The present invention provides a method for producing a semiconductor substrate for an electronic device or an optical device, the method including reacting nitrogen (N) with gallium (Ga), aluminum (Al), or indium (In), which are group III elements, in a flux mixture containing a plurality of metal elements selected from among alkali metals and alkaline earth metals, to thereby grow a group III nitride based compound semiconductor crystal. The group III nitride based compound semiconductor crystal is grown while the flux mixture and the group III element are mixed under stirring. At least a portion of a base substrate on which the group III nitride based compound semiconductor crystal is grown is formed of a flux-soluble material, and the flux-soluble material is dissolved in the flux mixture, at a temperature near the growth temperature of the group III nitride based compound semiconductor crystal, during the course of growth of the semiconductor crystal or after completion of growth of the semiconductor crystal.

    摘要翻译: 提供适合于制造电子器件或光学器件的高品质的半导体衬底。 本发明提供了一种用于制造电子器件或光学器件的半导体衬底的方法,所述方法包括使氮(N)与镓(Ga),铝(Al)或铟(In)反应,其为III族元素 在含有选自碱金属和碱土金属中的多种金属元素的助熔剂混合物中,从而生长III族氮化物类化合物半导体晶体。 在熔融混合物和III族元素在搅拌下混合,生长III族氮化物基化合物半导体晶体。 在其上生长III族氮化物基化合物半导体晶体的基底基板的至少一部分由助溶剂材料形成,并且将助熔剂材料溶解在助熔剂混合物中,在接近生长温度的温度 III族氮化物基化合物半导体晶体,在半导体晶体生长过程中或半导体晶体生长完成之后。

    PROCESS FOR PRODUCING SINGLE CRYSTAL
    9.
    发明申请
    PROCESS FOR PRODUCING SINGLE CRYSTAL 有权
    生产单晶的方法

    公开(公告)号:US20090038539A1

    公开(公告)日:2009-02-12

    申请号:US12234799

    申请日:2008-09-22

    IPC分类号: C30B9/00

    摘要: A raw material mixture containing an easily oxidizable material is weighed. The raw material mixture is melted and then solidified within a reaction vessel 1 set in a non-oxidizing atmosphere to thereby produce a solidified matter 19. The reaction vessel 1 and the solidified matter 19 are heated in a non-oxidizing atmosphere within a crystal growth apparatus to melt the solidified matter to thereby produce a solution. A single crystal is grown from the solution.

    摘要翻译: 称量含有容易氧化的材料的原料混合物。 将原料混合物熔化,然后在设置在非氧化性气氛中的反应容器1内固化,从而产生固化物19.反应容器1和固化物19在晶体生长中的非氧化性气氛中加热 熔化固化物从而产生溶液的装置。 从溶液中生长单晶。

    Crystal growing apparatus
    10.
    发明申请
    Crystal growing apparatus 有权
    水晶生长装置

    公开(公告)号:US20080223288A1

    公开(公告)日:2008-09-18

    申请号:US12073904

    申请日:2008-03-11

    IPC分类号: C30B9/12

    摘要: An object of the invention is to carry out the flux method with improved work efficiency while maintaining the purity of flux at high level and saving flux material cost. The sodium-purifying apparatus includes a sodium-holding-and-management apparatus for maintaining purified sodium (Na) in a liquid state. Liquid sodium is supplied into a sodium-holding-and-management apparatus through a liquid-sodium supply piping maintained at 100° C. to 200° C. The sodium-holding-and-management apparatus further has an argon-gas-purifying apparatus for controlling the condition of argon (Ar) gas that fills the internal space thereof. Thus, by opening and closing a faucet at desired timing, purified liquid sodium (Na) supplied from the sodium-purifying apparatus can be introduced into a crucible as appropriate via the liquid-sodium supply piping, the sodium-holding-and-management apparatus, and the piping.

    摘要翻译: 本发明的目的是在保持高水平的助焊剂纯度的同时,实现提高工作效率的助焊剂方法,节约焊剂材料成本。 钠纯化装置包括用于保持液态的纯化钠(Na)的钠保持和管理装置。 液态钠通过保持在100℃至200℃的液态钠供应管道供应到保钠管理装置中。钠保持和管理装置还具有氩气净化装置 用于控制填充其内部空间的氩(Ar)气体的状态。 因此,通过在期望的时间打开和关闭水龙头,可以通过液体钠供应管道,钠保持管理装置适当地将从钠纯化装置供应的纯化液体钠(Na) ,和管道。