摘要:
A method for manufacturing a semiconductor device comprises: forming a lower electrode on a semiconductor substrate, sputtering a ferroelectric film on the lower electrode using a target, thermal treating the ferroelectric film in an atmosphere containing oxygen in accordance with an accumulated period of use of the target for fabricating the ferroelectric film, and forming an upper electrode on the ferroelectric film.
摘要:
Disclosed is a ferroelectric capacitor forming method of allowing a FeRAM to be stably mass-produced. In forming the ferroelectric capacitor for the FeRAM, a PZT layer is formed on a lower electrode layer by a sputtering method. Then, a first RTA treatment for crystallizing the PZT is performed in an environment controlled such that predetermined capacitor performance such as a data holding property can be obtained regardless of the amount of a target previously used (used hours) in the sputtering method. For example, the O2 gas flow rate is controlled in an appropriate range during the first RTA treatment. Thereafter, formation of an upper electrode layer or a second RTA treatment is performed. As a result, the ferroelectric capacitor having predetermined capacitor performance can be formed with high yield, so that the FeRAM can be stably mass-produced.
摘要:
An apparatus for producing metal oxide nanofibers includes a jetting unit, a mixing unit, a heating unit, and a cooling unit. The jetting unit jets particles made of a metal. The mixing unit prepares a mixture by mixing the metal particles and a gas containing an oxidizing component that includes oxygen in molecules of the component. The heating unit heats the mixture to raise the temperature of the mixture up to a temperature at which the metal evaporates. The cooling unit cools the product thus-produced in the heating unit.
摘要:
Provided is a film forming apparatus for forming a film on a substrate maintained within a film forming container by supplying a raw material gas to the substrate. The film forming container includes a substrate maintaining unit, a supply mechanism configured to include a supply pipe with supply holes formed thereon to supply a raw material gas to the interior of the film forming container through the supply holes, an exhaust mechanism configured to include an exhaust pipe with exhaust holes formed thereon to exhaust gas from the interior of the film forming container through the exhaust holes, and a controller configured to control the substrate maintaining unit, the supply mechanism, and the exhaust mechanism. The supply holes and the exhaust holes are formed to face each other with the substrate maintained in the substrate maintaining unit interposed therebetween.
摘要:
A low alloy steel ingot contains from 0.15 to 0.30% of C, from 0.03 to 0.2% of Si, from 0.5 to 2.0% of Mn, from 0.1 to 1.3% of Ni, from 1.5 to 3.5% of Cr, from 0.1 to 1.0% of Mo, and more than 0.15 to 0.35% of V, and optionally Ni, with a balance being Fe and unavoidable impurities. Performing quality heat treatment including a quenching step and a tempering step to the low alloy steel ingot to obtain a material, which has a grain size number of from 3 to 7 and is free from pro-eutectoid ferrite in a metallographic structure thereof, and which has a tensile strength of from 760 to 860 MPa and a fracture appearance transition temperature of not higher than 40° C.
摘要:
There are provided a mobile terminal device and a positioning method, in which power saving is enabled. When an environment estimating unit determines that the mobile terminal device is currently located in an indoor environment, an autonomous GPS positioning regulating unit thereof regulates implementation of an autonomous positioning operation by an autonomous GPS positioning unit to enable the suppression of wasteful power consumption caused by the implementation of the autonomous GPS positioning operation that has no possibility of being successful at a current time. In the meanwhile, an assist information acquiring processing unit of an A-GPS positioning unit is made to perform an assist information acquiring process that is a former process of the A-GPS positioning operation. When the location accuracy of outline location information acquired has a good result of a level 3 or higher, the outline location information is provided as a positioning result.
摘要:
The present invention pertains to a mobile terminal having an autonomous navigation function, said mobile terminal comprising: a map application which performs map matching on the current position of the mobile terminal on a route to a destination; a measurement unit which detects the movement of the mobile terminal, and which provides sensor information representing the number of steps and travel direction; a position calculation unit which determines the current position of the mobile terminal; a travel direction correction unit which, when it has been estimated that a user is walking straight by determining whether the amount of change of the user's travel direction is within a prescribed range in a prescribed period, corrects the user's travel direction according to the orientation of the straight parts when the user is walking straight on the route; and a current position correction unit which, on the basis of the corrected travel direction and the starting time and starting point when walking straight, recalculates the current position of the mobile terminal from the starting point, and corrects the current position of the mobile terminal according to the recalculated current position.
摘要:
A mobile terminal receives information adapted to the current location of the mobile terminal via a mobile communication network from an information service providing communication apparatus that sends information adapted to current locations of mobile terminals to mobile terminals. The mobile terminal repeats identifying the location of the mobile terminal, and calculates a linear movement distance of the mobile terminal between a past location of the mobile terminal and the current location of the mobile terminal. The mobile terminal transmits a signal indicating the current location if the linear movement distance is greater than a threshold, but does not transmit the signal indicating the current location if the linear movement distance is less than the threshold.
摘要:
A flow channel structure includes a substrate having a flow channel formed therein, and plural fibrous bristles extending from the inner wall of the flow channel. The flow channel is configured to allow a solution to flow through the flow channel. The inner wall of the flow channel is made of silicon. The flow channel is configured to allow a solution to flow through the flow channel. This flow channel structure can homogenize the solution inside the flow channel.
摘要:
A mobile communication terminal (1) includes a mobile communication unit (13) that receives broadcast signals from base stations (2a, 2b, . . . ) through mobile communication, a wireless LAN positioning unit (12) that performs positioning calculation using wireless LAN communication, a GPS positioning unit (11) that performs positioning calculation through GPS positioning, a comparison unit (14) that compares the number of base stations from which broadcast signals are receivable by the mobile communication unit (13) with a predetermined number and determines whether the number of base stations is large or small, and a positioning system selection unit (15) that controls the wireless LAN positioning unit (12) to perform positioning calculation when the number of base stations is determined to be large and controls the GPS positioning unit (11) to perform positioning calculation when the number of base stations is determined to be small.