Forming method of ferroelectric capacitor and manufacturing method of semiconductor device
    2.
    发明申请
    Forming method of ferroelectric capacitor and manufacturing method of semiconductor device 审中-公开
    铁电电容器的形成方法和半导体器件的制造方法

    公开(公告)号:US20070122917A1

    公开(公告)日:2007-05-31

    申请号:US11407207

    申请日:2006-04-20

    IPC分类号: H01L21/00 H01L21/8242

    摘要: Disclosed is a ferroelectric capacitor forming method of allowing a FeRAM to be stably mass-produced. In forming the ferroelectric capacitor for the FeRAM, a PZT layer is formed on a lower electrode layer by a sputtering method. Then, a first RTA treatment for crystallizing the PZT is performed in an environment controlled such that predetermined capacitor performance such as a data holding property can be obtained regardless of the amount of a target previously used (used hours) in the sputtering method. For example, the O2 gas flow rate is controlled in an appropriate range during the first RTA treatment. Thereafter, formation of an upper electrode layer or a second RTA treatment is performed. As a result, the ferroelectric capacitor having predetermined capacitor performance can be formed with high yield, so that the FeRAM can be stably mass-produced.

    摘要翻译: 公开了一种允许稳定批量生产FeRAM的铁电电容器形成方法。 在形成FeRAM的铁电电容器时,通过溅射法在下电极层上形成PZT层。 然后,在控制环境中进行用于结晶PZT的第一RTA处理,使得可以获得诸如数据保持特性的预定电容器性能,而与溅射方法中先前使用的目标量(使用时数)无关。 例如,在第一次RTA处理期间将O 2气体流量控制在适当的范围内。 此后,进行上电极层的形成或第二RTA处理。 结果,可以以高产率形成具有预定电容器性能的铁电电容器,从而可以稳定地批量生产FeRAM。

    Film forming apparatus
    4.
    发明授权
    Film forming apparatus 有权
    成膜装置

    公开(公告)号:US09163311B2

    公开(公告)日:2015-10-20

    申请号:US13333137

    申请日:2011-12-21

    摘要: Provided is a film forming apparatus for forming a film on a substrate maintained within a film forming container by supplying a raw material gas to the substrate. The film forming container includes a substrate maintaining unit, a supply mechanism configured to include a supply pipe with supply holes formed thereon to supply a raw material gas to the interior of the film forming container through the supply holes, an exhaust mechanism configured to include an exhaust pipe with exhaust holes formed thereon to exhaust gas from the interior of the film forming container through the exhaust holes, and a controller configured to control the substrate maintaining unit, the supply mechanism, and the exhaust mechanism. The supply holes and the exhaust holes are formed to face each other with the substrate maintained in the substrate maintaining unit interposed therebetween.

    摘要翻译: 本发明提供一种成膜装置,其通过向基板供给原料气体而在保持在成膜容器内的基板上形成膜。 成膜容器包括基板保持单元,供给机构,其构造成包括供给管,其上形成有供给孔,供给孔通过供给孔向成膜容器的内部供给原料气体;排气机构, 排气管,其上形成有排气孔,通过排气孔从成膜容器的内部排出气体;以及控制器,被配置为控制基板保持单元,供给机构和排气机构。 供给孔和排气孔形成为彼此面对,并且基板保持在基板保持单元之间。

    Mobile terminal device and positioning method
    6.
    发明授权
    Mobile terminal device and positioning method 有权
    移动终端设备及定位方法

    公开(公告)号:US09026135B2

    公开(公告)日:2015-05-05

    申请号:US13641019

    申请日:2011-04-11

    申请人: Makoto Takahashi

    发明人: Makoto Takahashi

    CPC分类号: G01S19/34 G01S19/25

    摘要: There are provided a mobile terminal device and a positioning method, in which power saving is enabled. When an environment estimating unit determines that the mobile terminal device is currently located in an indoor environment, an autonomous GPS positioning regulating unit thereof regulates implementation of an autonomous positioning operation by an autonomous GPS positioning unit to enable the suppression of wasteful power consumption caused by the implementation of the autonomous GPS positioning operation that has no possibility of being successful at a current time. In the meanwhile, an assist information acquiring processing unit of an A-GPS positioning unit is made to perform an assist information acquiring process that is a former process of the A-GPS positioning operation. When the location accuracy of outline location information acquired has a good result of a level 3 or higher, the outline location information is provided as a positioning result.

    摘要翻译: 提供了能够省电的移动终端装置和定位方法。 当环境估计单元确定移动终端设备当前位于室内环境中时,自主GPS定位调节单元通过自主GPS定位单元来调节自主定位操作的实现,以便能够抑制由 实施在当前时间无法成功的自主GPS定位操作。 同时,使A-GPS定位单元的辅助信息获取处理单元执行作为A-GPS定位操作的前一处理的辅助信息获取处理。 当获取的轮廓位置信息的位置精度具有3级或更高级别的良好结果时,轮廓位置信息被提供作为定位结果。

    Mobile terminal, system and method
    7.
    发明授权
    Mobile terminal, system and method 有权
    移动终端,系统和方法

    公开(公告)号:US08965684B2

    公开(公告)日:2015-02-24

    申请号:US13880988

    申请日:2011-11-28

    申请人: Makoto Takahashi

    发明人: Makoto Takahashi

    摘要: The present invention pertains to a mobile terminal having an autonomous navigation function, said mobile terminal comprising: a map application which performs map matching on the current position of the mobile terminal on a route to a destination; a measurement unit which detects the movement of the mobile terminal, and which provides sensor information representing the number of steps and travel direction; a position calculation unit which determines the current position of the mobile terminal; a travel direction correction unit which, when it has been estimated that a user is walking straight by determining whether the amount of change of the user's travel direction is within a prescribed range in a prescribed period, corrects the user's travel direction according to the orientation of the straight parts when the user is walking straight on the route; and a current position correction unit which, on the basis of the corrected travel direction and the starting time and starting point when walking straight, recalculates the current position of the mobile terminal from the starting point, and corrects the current position of the mobile terminal according to the recalculated current position.

    摘要翻译: 本发明涉及一种具有自主导航功能的移动终端,所述移动终端包括:地图应用,其在到达目的地的路由上对移动终端的当前位置执行地图匹配; 测量单元,其检测移动终端的移动,并且提供表示步数和行进方向的传感器信息; 位置计算单元,确定移动终端的当前位置; 行驶方向校正单元,通过判断用户的行驶方向的变化量是否在规定期间内在规定范围内的情况下,当估计用户正在行走时,根据用户的行进方向根据 当用户在路线上直走时,直线部分; 以及当前位置校正单元,其基于校正的行进方向和行走时的开始时间和起点,从起点重新计算移动终端的当前位置,并根据移动终端的当前位置进行修正 到重新计算的当前位置。

    Mobile terminal and control method therefor
    8.
    发明授权
    Mobile terminal and control method therefor 有权
    移动终端及其控制方法

    公开(公告)号:US08903417B2

    公开(公告)日:2014-12-02

    申请号:US13517913

    申请日:2010-12-07

    IPC分类号: H04W24/00 H04M1/725 H04W4/02

    摘要: A mobile terminal receives information adapted to the current location of the mobile terminal via a mobile communication network from an information service providing communication apparatus that sends information adapted to current locations of mobile terminals to mobile terminals. The mobile terminal repeats identifying the location of the mobile terminal, and calculates a linear movement distance of the mobile terminal between a past location of the mobile terminal and the current location of the mobile terminal. The mobile terminal transmits a signal indicating the current location if the linear movement distance is greater than a threshold, but does not transmit the signal indicating the current location if the linear movement distance is less than the threshold.

    摘要翻译: 移动终端经由移动通信网络从适合于移动终端的当前位置的信息的信息服务提供通信装置接收适合于移动终端的当前位置的信息。 移动终端重复识别移动终端的位置,并且计算移动终端在移动终端的过去位置与移动终端的当前位置之间的线性移动距离。 如果线性移动距离大于阈值,则移动终端发送指示当前位置的信号,但是如果线性移动距离小于阈值,则不发送指示当前位置的信号。

    Mobile communication terminal and location system selection method
    10.
    发明授权
    Mobile communication terminal and location system selection method 有权
    移动通信终端和定位系统选择方法

    公开(公告)号:US08818421B2

    公开(公告)日:2014-08-26

    申请号:US13699125

    申请日:2011-05-25

    IPC分类号: H04W24/00

    摘要: A mobile communication terminal (1) includes a mobile communication unit (13) that receives broadcast signals from base stations (2a, 2b, . . . ) through mobile communication, a wireless LAN positioning unit (12) that performs positioning calculation using wireless LAN communication, a GPS positioning unit (11) that performs positioning calculation through GPS positioning, a comparison unit (14) that compares the number of base stations from which broadcast signals are receivable by the mobile communication unit (13) with a predetermined number and determines whether the number of base stations is large or small, and a positioning system selection unit (15) that controls the wireless LAN positioning unit (12) to perform positioning calculation when the number of base stations is determined to be large and controls the GPS positioning unit (11) to perform positioning calculation when the number of base stations is determined to be small.

    摘要翻译: 移动通信终端(1)包括通过移动通信从基站(2a,2b ...)接收广播信号的移动通信单元(13),使用无线LAN执行定位计算的无线LAN定位单元(12) 通信,通过GPS定位执行定位计算的GPS定位单元(11),比较单元(14),其将广播信号可由移动通信单元(13)接收的基站的数量与预定数量进行比较,并且确定 基站的数量是多少还是小的,以及定位系统选择单元(15),当定位基站的数量大并控制GPS定位时,控制无线LAN定位单元(12)进行定位计算 单元(11)在基站的数量被确定为小时执行定位计算。