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    Magnetron sputtering apparatus and method for manufacturing semiconductor device
    5.
    发明授权
    Magnetron sputtering apparatus and method for manufacturing semiconductor device 有权
    磁控溅射装置及半导体装置的制造方法

    公开(公告)号：US08016985B2

    公开(公告)日：2011-09-13

    申请号：US11858494

    申请日：2007-09-20

    申请人： Shigeki Matsunaka ,  Osamu Yamazaki

    发明人： Shigeki Matsunaka ,  Osamu Yamazaki

    IPC分类号： C23C14/35

    CPC分类号： C23C14/35 ,  H01L21/2855 ,  H01L21/76843 ,  H01L21/76871

    摘要： A magnetron sputtering apparatus includes: a target provided in a sputtering chamber; a susceptor opposed to the target; a high-frequency power supply connected to the susceptor; a plate provided outside the sputtering chamber and coaxial with a central axis of the target; a rotary motion mechanism configured to rotate the plate about the central axis; S-pole magnets placed on one side of the plate with their S-pole end directed to the target; and first and second N-pole magnets placed on the one side of the plate with their N-pole end directed to the target. The first N-pole magnets are placed along a circle coaxial with the plate and opposed to an outer peripheral vicinity of the target. The S-pole magnets are placed inside the first N-pole magnets and along a circle coaxial with the plate. The second N-pole magnets are placed inside the S-pole magnets and along a circle coaxial with the plate. Magnetic flux density of the first N-pole magnets and the second N-pole magnets are higher than magnetic flux density of the S-pole magnets.

    摘要翻译： 磁控溅射装置包括：设置在溅射室中的靶; 与目标相反的感受者; 连接到基座的高频电源; 设置在溅射室外部并与靶的中心轴同轴的板; 旋转运动机构，其构造成围绕所述中心轴线旋转所述板; 放置在板的一侧的S极磁体，其S极端指向目标; 并且第一和第二N极磁体放置在板的一侧，其N极端指向靶。 第一N极磁体沿着与板同轴的圆形放置，并与靶的外周附近相对。 S极磁体放置在第一N极磁体内并沿着与板同轴的圆。 第二N极磁体放置在S极磁体内并沿着与该板同轴的圆周。 第一N极磁体和第二N极磁体的磁通密度高于S极磁体的磁通密度。

    IMAGE CORRECTING DEVICE AND METHOD, AND COMPUTER PROGRAM
    7.
    发明申请
    IMAGE CORRECTING DEVICE AND METHOD, AND COMPUTER PROGRAM 审中-公开
    图像校正装置和方法以及计算机程序

    公开(公告)号：US20090226094A1

    公开(公告)日：2009-09-10

    申请号：US12440789

    申请日：2006-09-13

    申请人： Osamu Yamazaki

    发明人： Osamu Yamazaki

    IPC分类号： G06K9/46 ,  G06K9/40

    CPC分类号： G06T7/74 ,  G06T2207/30208

    摘要： An image correcting device (1) is include of a feature point detecting element (3, 4 and 5) for detecting sets of feature points (QA0, QA1, . . . ) from a plurality of images (2) picked up at a plurality of places (a, b) by a pickup element, a change detecting element (7) for detecting relative changes among images with respect to the detected sets of the feature points, and a first specifying element (8) for specifying rotation quantities of the image pickup element among the places in accordance with the detected changes. The feature point detecting element detects set of points belonging to a plane-like stationary object (310) as sets of feature points.

    摘要翻译： 图像校正装置（1）包括特征点检测元件（3,4和5），用于检测从多个拾取的多个图像（2）中的特征点集合（QA0，QA1 ...） 以及用于检测图像之间相对于所检测的特征点组的相对变化的变化检测元件（7），以及用于指定所述特征点的旋转量的第一指定元件（8） 根据检测到的变化，位置之间的图像拾取元件。 特征点检测元件将属于平面状静止物体（310）的点集合检测为特征点集合。

    Sheet for Forming a Protective Film for Chips
    9.
    发明申请
    Sheet for Forming a Protective Film for Chips 审中-公开
    形成芯片保护膜的工作表

    公开(公告)号：US20090053518A1

    公开(公告)日：2009-02-26

    申请号：US12294389

    申请日：2007-03-23

    申请人： Naoya Saiki ,  Tomonori Shinoda ,  Osamu Yamazaki

    发明人： Naoya Saiki ,  Tomonori Shinoda ,  Osamu Yamazaki

    IPC分类号： B32B33/00

    CPC分类号： H01L23/3157 ,  B41M5/267 ,  C08L33/062 ,  C08L33/08 ,  C08L63/00 ,  C09J7/35 ,  C09J2203/326 ,  C09J2463/00 ,  H01L21/6835 ,  H01L23/293 ,  H01L23/544 ,  H01L2223/5448 ,  H01L2224/16 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01079 ,  Y10T428/2839 ,  C08L2666/04

    摘要： Described is a sheet for forming a protective film, which can be used suitably in a process where marking is made on the protective film formed on work such as a wafer and the like. The sheet includes a release sheet and a protective film forming layer provided on the release surface of the release sheet, wherein the protective film forming layer includes 100 parts by weight of an epoxy resin, 50 to 200 parts by weight of a binder polymer, and 100 to 2,000 parts by weight of fillers, 30% by weight or more of total 100% by weight of the said epoxy resin being selected from epoxy resins represented by the following formulae (I) and (II); wherein, X's are —O—, —OCH(CH3)O— and the like; R's are a polyether skeleton and the like; and n's are in the range of 1 to 10.

    摘要翻译： 描述了用于形成保护膜的片材，其可以在在诸如晶片等的工件上形成的保护膜上进行标记的工艺中适当地使用。 该片材包括设置在剥离片的剥离表面上的剥离片和保护膜形成层，其中保护膜形成层包括100重量份的环氧树脂，50-200重量份的粘合剂聚合物和 100-2000重量份的填料，30重量％或更多的总共100重量％的所述环氧树脂选自由下式（I）和（II）表示的环氧树脂; 其中，X为-O - ， - OCH（CH 3）O-等; R是聚醚骨架等; n的范围为1〜10。

    Navigation device, navigation method, route data generation program, recording medium containing route data generation program, and server device in navigation system
    10.
    发明申请
    Navigation device, navigation method, route data generation program, recording medium containing route data generation program, and server device in navigation system 审中-公开
    导航装置，导航方法，路线数据生成程序，包含路线数据生成程序的记录介质，以及导航系统中的服务器装置

    公开(公告)号：US20060241862A1

    公开(公告)日：2006-10-26

    申请号：US10551754

    申请日：2004-04-01

    申请人： Naohiko Ichihara ,  Shinichi Sugie ,  Osamu Yamazaki ,  Hiroto Inoue ,  Hiroyuki Suda ,  Motoyuki Yamashita ,  Takehiko Shioda

    发明人： Naohiko Ichihara ,  Shinichi Sugie ,  Osamu Yamazaki ,  Hiroto Inoue ,  Hiroyuki Suda ,  Motoyuki Yamashita ,  Takehiko Shioda

    IPC分类号： G01C21/34

    CPC分类号： G01C21/343

    摘要： To provide with a navigation apparatus capable of efficient route guidance in which a date on which route guidance process is performed coincides with an available date and time, and in consideration with a stay length. The navigation apparatus in this implementation is provided with a GPS reception section, a sensor section, a map data storage section in which data such as map data is recorded in advance, and a system control section which generates design data and performs process management on the basis of the generated design data. The system control section searches routes on the basis of spot data groups related to an extracted destination, generates route data on the basis of the search results, the spot data and an input departure time, and manages route guidance on the basis of the generated route data.

    摘要翻译： 提供一种能够进行有效的路径引导的导航装置，其中进行路线引导处理的日期与可用日期和时间一致，并考虑到停留长度。 本实施方式的导航装置具备：GPS接收部，传感器部，地图数据存储部，预先记录有地图数据等的数据;以及系统控制部，其生成设计数据，对 生成设计数据的基础。 系统控制部根据与提取的目的地有关的点数据组来搜索路线，基于搜索结果，点数据和输入出发时间生成路线数据，并根据生成路线来管理路线引导 数据。