摘要:
Electronic device is provided, including: a base wafer whose surface is made of silicon crystal; a Group 3-5 compound semiconductor crystal formed directly or indirectly on partial region of the silicon crystal; an electronic element including a portion of the Group 3-5 compound semiconductor crystal as active layer; an insulating film formed directly or indirectly on the base wafer and covering the electronic element; an electrode formed directly or indirectly on the insulating film; a first coupling wiring extending through the insulating film, having at least a portion thereof formed directly or indirectly on the insulating film, and electrically coupling the electronic element with the electrode; a passive element formed directly or indirectly on the insulating film; a second coupling wiring extending through the insulating film, having at least a portion thereof formed directly or indirectly on the insulating film, and electrically coupling the electronic element with the passive element.
摘要:
To improve the flatness of the surface and improve the reliability of a semiconductor device when expitaxially growing semiconductor crystal layers of different types on a single silicon wafer, provided is a semiconductor wafer which includes: a base wafer having a silicon crystal in the surface thereof, the silicon crystal having a first dent and a second dent; a first Group IVB semiconductor crystal located in the first dent and exposed; a second Group IVB semiconductor crystal located in the second dent; and a Group III-V compound semiconductor crystal located above the second Group IVB semiconductor crystal in the second dent and exposed.
摘要:
A sensor includes: a base wafer containing silicon; a seed member provided directly or indirectly on the base wafer; and a photothermal absorber that is made of a Group 3-5 compound semiconductor lattice-matching or pseudo lattice-matching the seed member and being capable of generating a carrier upon absorbing light or heat, where the photothermal absorber outputs an electric signal in response to incident light to be introduced into the photothermal absorber or heat to be applied to the photothermal absorber. A semiconductor wafer includes: a base wafer containing silicon; a seed member provided directly or indirectly on the base wafer; and a photothermal absorber that is made of a Group 3-5 compound semiconductor lattice-matching or pseudo lattice-matching the seed member and being capable of generating a carrier upon absorbing light or heat.
摘要:
A semiconductor wafer includes a base wafer, a first crystal layer, a second crystal layer and a third crystal layer. The first crystal layer has a first surface having a same orientation as the base wafer, and a second surface having a different orientation from the first surface, the second crystal layer has a third surface having the same orientation as the first surface, and a fourth surface having the same orientation as the second surface, the third crystal layer is in contact with a part of the third surface and the fourth surface. A thickness ratio of the second crystal layer in a region adjoining the first surface to a region adjoining the second surface is larger than a thickness ratio of the third crystal layer in a region adjoining the third surface to a region adjoining the fourth surface.
摘要:
A semiconductor wafer includes a base wafer, a sacrificial layer that is lattice-matched or pseudo lattice-matched to the base wafer, a first crystal layer that is formed on the sacrificial layer and made of an epitaxial crystal of SixGe1-x, (0≦x
摘要翻译:半导体晶片包括基底晶片,与基底晶片进行晶格匹配或伪晶格匹配的牺牲层,形成在牺牲层上并由SixGe1-x的外延晶体制成的第一晶体层(0&nlE ; x <1);以及第二晶体层,其形成在第一晶体层上并且由具有比第一晶体层更大的带隙的组3-5化合物半导体的外延晶体制成。 基底晶片例如由单晶GaAs制成。 牺牲层例如由InmAlnGa1-m-nAs(0&nlE; m <1,0