Electrolytic processing method
    1.
    发明申请
    Electrolytic processing method 审中-公开
    电解加工方法

    公开(公告)号:US20070034525A1

    公开(公告)日:2007-02-15

    申请号:US11203545

    申请日:2005-08-12

    IPC分类号: B23H9/00

    CPC分类号: B23H5/08

    摘要: An electrolytic processing method is used to remove a metal film formed on a surface of a substrate. The electrolytic processing method includes providing a feeding electrode 31 and a processing electrode 32 on a table 12, providing an insulating member 36 between the feeding electrode and the processing electrode, holding the substrate W by a substrate carrier 11, bringing the substrate into contact with the insulating member, supplying first and second electrolytic processing liquids to gaps between the feeding electrode and the substrate and between the processing electrode and the substrate, respectively, while the first and second electrolytic processing liquids are electrically isolated, applying voltage between the feeding electrode and the processing electrode, and making a relative movement between the substrate carrier and the table to electrically process the metal film.

    摘要翻译: 使用电解处理方法去除在基板的表面上形成的金属膜。 电解处理方法包括在台12上设置馈电电极31和处理电极32,在馈电电极和处理电极之间提供绝缘构件36,通过衬底载体11保持衬底W,使衬底与 所述绝缘构件在所述第一和第二电解处理液体被电绝缘的同时,在所述馈电电极和所述衬底之间以及所述处理电极和所述衬底之间的间隙中分别供应第一和第二电解处理液体, 处理电极,并且在基板载体和工作台之间进行相对运动以对金属膜进行电加工。

    Electrolytic processing apparatus
    2.
    发明申请
    Electrolytic processing apparatus 审中-公开
    电解处理装置

    公开(公告)号:US20070034502A1

    公开(公告)日:2007-02-15

    申请号:US11202899

    申请日:2005-08-12

    IPC分类号: C25D17/00

    摘要: An electrolytic processing apparatus is used to remove a metal film formed on a surface of a substrate. The electrolytic processing apparatus includes a feeding electrode 31 for feeding electricity to a metal film 6 on a substrate W, a processing electrode 32 for processing the metal film 6, a substrate carrier 11 for holding the substrate W, a first supply passage 51 for supplying a first electrolytic processing liquid, a second supply passage 52 for supplying a second electrolytic processing liquid, an insulating member 36 for electrically isolating the first electrolytic processing liquid and the second electrolytic processing liquid, a table 12 on which the feeding electrode 31, the processing electrode 32, and the insulating member 36 are disposed, and a relative movement mechanism 17 for making a relative movement between the table 12 and the substrate carrier 11.

    摘要翻译: 使用电解处理装置去除形成在基板表面上的金属膜。 该电解处理装置包括用于向基板W上的金属膜6供电的供电电极31,用于处理金属膜6的处理电极32,用于保持基板W的基板载体11,用于供给的第一供给通道51 第一电解处理液,用于供给第二电解处理液的第二供应通道52,用于电隔离第一电解处理液和第二电解处理液的绝缘构件36,供给电极31,处理 电极32和绝缘部件36,以及用于在工作台12和基板载体11之间进行相对移动的相对移动机构17。

    Chemical mechanical polishing endpoint detection system and method
    3.
    发明授权
    Chemical mechanical polishing endpoint detection system and method 失效
    化学机械抛光终点检测系统及方法

    公开(公告)号:US06913514B2

    公开(公告)日:2005-07-05

    申请号:US10602034

    申请日:2003-06-23

    IPC分类号: B24B37/20 B24B49/12 B24D7/12

    CPC分类号: B24B37/205 B24B49/12

    摘要: The system includes a polishing pad, a pad height sensor; a window; and a window raising mechanism. The polishing pad has an aperture with the window vertically moveable therein. The pad height sensor is positioned above the polishing pad and measures the vertical position of the pad before polishing. The window raising mechanism adjusts the vertical position of the window based on information from the pad height sensor. An endpoint measurement sensor can be disposed beneath the window for in-situ measurement of the polishing process.

    摘要翻译: 该系统包括抛光垫,垫高度传感器; 一个窗口; 和升起机构。 抛光垫具有孔,其中窗可在其中垂直移动。 焊盘高度传感器位于抛光垫的上方,并在抛光之前测量焊盘的垂直位置。 窗口提升机构根据来自垫高度传感器的信息来调整窗口的垂直位置。 端点测量传感器可以设置在窗户下方,用于原位测量抛光过程。

    Electrode covering material, electrode structure and semiconductor device
    4.
    发明授权
    Electrode covering material, electrode structure and semiconductor device 有权
    电极覆盖材料,电极结构和半导体器件

    公开(公告)号:US08895960B2

    公开(公告)日:2014-11-25

    申请号:US12515585

    申请日:2007-11-21

    摘要: A semiconductor device is provided and includes a field effect transistor having a gate electrode, a gate insulating layer, a channel forming region composed of an organic semiconductor material layer and a source/drain electrode made of a metal. A portion of the source/drain electrode in contact with the organic semiconductor material layer comprising the channel forming region is covered with an electrode coating material. Because the electrode coating material is composed of organic molecules having a functional group which can be bound to a metal ion and a functional group that binds to the source/drain electrode composed of the metal, low contact resistance and high mobility can be achieved.

    摘要翻译: 提供一种半导体器件,并且包括具有栅电极,栅极绝缘层,由有机半导体材料层构成的沟道形成区域和由金属制成的源极/漏极电极的场效应晶体管。 与包含沟道形成区域的有机半导体材料层接触的源极/漏极电极的一部分被电极涂覆材料覆盖。 由于电极涂层材料由具有与金属离子结合的官能团的有机分子和与由金属构成的源/漏电极结合的官能团构成,所以可以实现低接触电阻和高迁移率。

    Artificial nipple and nursing container using same
    5.
    发明授权
    Artificial nipple and nursing container using same 有权
    人造乳头和使用相同的护理容器

    公开(公告)号:US08657135B2

    公开(公告)日:2014-02-25

    申请号:US13505155

    申请日:2010-10-29

    IPC分类号: A61J9/04 A61J11/02

    CPC分类号: A61J9/04 A61J11/02 A61J11/04

    摘要: An artificial nipple can include a nipple tip section that can sufficiently reach the sucking fossa and can be appropriately squashed The artificial nipple can have a base section that widens to match an attachment object, an areola section formed contiguously to the base section and that extends while narrowing gradually, and a nipple section that extends from the areola section and that narrows more than the areola section. A flange section can be provided in the base section with a predetermined thickness. A check valve can be formed with a valve body so as to be entirely accommodated within the thickness dimension of the flange, and provided in the base section.

    摘要翻译: 人造乳头可以包括可以充分到达吸吮窝并能够适当地挤压的乳头末端部分。人造乳头可以具有加宽以匹配附着对象的基部部分,与基部部分连续形成并且延伸的乳晕部分 逐渐变细,以及从乳晕部分延伸并且比乳晕部分更窄的乳头部分。 凸缘部分可以以预定厚度设置在基部部分中。 止回阀可以形成有阀体,以便完全容纳在凸缘的厚度尺寸内,并设置在基部中。

    SPECIMEN OBSERVATION METHOD AND DEVICE, AND INSPECTION METHOD AND DEVICE USING THE METHOD AND DEVICE
    8.
    发明申请
    SPECIMEN OBSERVATION METHOD AND DEVICE, AND INSPECTION METHOD AND DEVICE USING THE METHOD AND DEVICE 有权
    标本观察方法和装置,以及使用方法和装置的检查方法和装置

    公开(公告)号:US20110155905A1

    公开(公告)日:2011-06-30

    申请号:US12937145

    申请日:2009-04-10

    IPC分类号: G01N23/225 G01N23/00

    摘要: A technique capable of improving the ability to observe a specimen using an electron beam in an energy region which has not been conventionally given attention is provided. This specimen observation method comprises: irradiating the specimen with an electron beam; detecting electrons to be observed which have been generated and have obtained information on the specimen by the electron beam irradiation; and generating an image of the specimen from the detected electrons to be observed. The electron beam irradiation comprises irradiating the specimen with the electron beam with a landing energy set in a transition region between a secondary emission electron region in which secondary emission electrons are detected and a mirror electron region in which mirror electrons are detected, thereby causing the secondary emission electrons and the mirror electrons to be mixed as the electrons to be observed. The detection of the electrons to be observed comprises performing the detection in a state where the secondary emission electrons and the mirror electrons are mixed. Observation and inspection can be quickly carried out for a fine foreign material and pattern of 100 nm or less.

    摘要翻译: 提供了一种技术,其能够提高在未经常被注意的能量区域中使用电子束观察样本的能力。 该样本观察方法包括:用电子束照射样本; 检测已经产生的待观察的电子,并通过电子束照射获得关于样品的信息; 以及从所检测的电子产生待观察的样本的图像。 电子束照射包括用电子束照射样本,其中在其中检测到二次发射电子的二次发射电子区域和其中检测到反射镜电子的镜电子区域之间的过渡区域中设置的着陆能量,从而使次级 发射电子和镜电子作为待观察的电子进行混合。 要观察的电子的检测包括在二次发射电子和镜电子混合的状态下进行检测。 对于100nm以下的细小异物和图案,可以快速进行观察和检查。

    Shield case and MEMS microphone having it
    9.
    发明授权
    Shield case and MEMS microphone having it 有权
    屏蔽盒和MEMS麦克风

    公开(公告)号:US07904123B2

    公开(公告)日:2011-03-08

    申请号:US12160663

    申请日:2007-09-13

    IPC分类号: H04M1/00 H04R9/08

    摘要: To provide a shield case and an MEMS microphone having the shield case which can secure on a top plate the minimum distance for adhering with a gasket in a view point of airtightness.The shield case according to the invention is a shield case for shielding an MEMS chip mounted on a board from the outside, which includes a top plate and a plurality of side plates and the thickness of each of the plurality of side plates is larger than that of the top plate. According to this configuration, the area of the top plate can be made larger as compared with a conventional shield case having a uniform thickness. Thus, the area for adhering the gasket to the top plate can be secured without changing the position, size and range etc. of the chucking area from those of the conventional shield case.

    摘要翻译: 为了提供一种屏蔽壳和具有屏蔽壳的MEMS麦克风,该屏蔽壳可以在气密的视点中固定在顶板上具有用垫片粘附的最小距离。 根据本发明的屏蔽盒是用于屏蔽从外部安装在板上的MEMS芯片的屏蔽盒,其包括顶板和多个侧板,并且多个侧板中的每一个的厚度大于 的顶板。 根据这种构造,与具有均匀厚度的常规屏蔽壳相比,可以使顶板的面积更大。 因此,可以在不改变卡盘区域的位置,尺寸和范围等与常规屏蔽壳体的位置,尺寸和范围等的情况下确保将垫圈粘附到顶板的区域。

    Automatic document feeder, image reading device including the same, and image forming apparatus including the same
    10.
    发明授权
    Automatic document feeder, image reading device including the same, and image forming apparatus including the same 有权
    自动送稿器,包括该图像读取装置的图像读取装置以及包括该自动送纸器的图像形成装置

    公开(公告)号:US07869755B2

    公开(公告)日:2011-01-11

    申请号:US11790887

    申请日:2007-04-27

    IPC分类号: G03G15/00 B65H85/00

    CPC分类号: G03G15/602

    摘要: An automatic document feeder, for transferring a document through a scanning position three times, includes: a first transfer mechanism to reverse a given document via a reversing path, and transfer the same to a scanning position; a second transfer mechanism to transfer the given document from the scanning position to one of a switchback path and a document discharging part; a switchback mechanism to transfer the given document to a lay-by on the switchback path, and then transfer the given document towards the reversing path via a re-entry path; and a control unit to control the mechanisms so that a second original document passes through the scanning position a first time before a first original document passes through the scanning position a third time, and to pause travel of the second original document at the lay-by as the first original document is passed through the scanning position a third time.

    摘要翻译: 一种用于通过扫描位置传送文件三次的自动文件馈送器包括:第一传送机构,用于经由反转路径反转给定文档,并将其传送到扫描位置; 第二传送机构,用于将给定文档从扫描位置传送到转向路径和文档排放部分之一; 转发机构,用于将给定文档传送到转回路径上的停靠位,然后经由重新进入路径将给定文档转发到反转路径; 以及控制单元,用于控制机构,使得第二原稿在第一次原稿通过扫描位置之前第一次经过扫描位置,并且暂停第二原稿在平铺处的行进 因为第一个原始文档第三次通过扫描位置。