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公开(公告)号：US4565599A
公开(公告)日：1986-01-21
申请号：US680237
申请日：1984-12-10
CPC分类号： H01L21/2022 , C30B1/02 , C30B13/00 , C30B13/34 , C30B29/64 , Y10S117/913 , Y10S148/152
摘要： Improvements on the graphoepitaxial process for obtaining epitaxial or preferred orientation films are described wherein a cap of material is formed over the film to be oriented, artificial surface-relief structure may be present in the substrate, the cap, or both, and the film may be heated by irradiation with electromagnetic radiation.
摘要翻译： 描述了用于获得外延或优选取向膜的图案外延工艺的改进，其中在要取向的膜上形成材料盖，人造表面浮雕结构可存在于基板，盖或两者中，并且膜可以 用电磁辐射照射加热。
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公开(公告)号：US5122223A
公开(公告)日：1992-06-16
申请号：US680238
申请日：1984-12-10
CPC分类号： C30B25/18 , C30B1/00 , C30B1/08 , C30B29/06 , Y10S117/904 , Y10S148/003 , Y10S148/09 , Y10S148/131
摘要： Improvements to graphoepitaxy include use of irradiation by electrons, ions or electromagnetic or acoustic radiation to induce or enhance the influence of artificial defects on crystallographic orientation; use of single defects; and use of a relief structure that includes facets at 70.5 and/or 109.5 degrees.
摘要翻译： 改进的方法包括使用电子，离子或电磁或声辐射的辐射来诱导或增强人造缺陷对晶体取向的影响; 使用单一缺陷; 并使用包括70.5和/或109.5度的刻面的浮雕结构。
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公开(公告)号：US4370194A
公开(公告)日：1983-01-25
申请号：US149483
申请日：1980-05-13
IPC分类号： G09F9/00 , B05D1/32 , B05D5/12 , G02F1/13 , G02F1/1335 , G02F1/1337 , G02F1/1343 , C23F1/02 , H01L21/22
CPC分类号： G02F1/13439 , G02F1/133528 , G02F1/13378 , G02F2001/133765 , Y10S428/91 , Y10S428/913 , Y10T428/1059 , Y10T428/2462 , Y10T428/24851 , Y10T428/24868 , Y10T428/24917 , Y10T428/24926 , Y10T428/261
摘要： Ordered liquids, or mesophases, are aligned by forming a structure on a substrate surface using a planar process of formation, the surface structure having a predetermined pattern, and applying a mesophase to the surface to substantially orient the molecules of the mesophase in accordance with the predetermined pattern. A liquid crystal display device can be made in which, in a preferred embodiment, the liquid crystal is confined between two substrates having oppositely disposed surfaces on which selected patterns of surface structures have been formed. The surface structures can be grating structures made of a conductive material, such as metal, which structures act to align the liquid crystal in accordance with the selected patterns, to polarize light passing through the surface structures, and to provide electrical contacts so that an electric signal applied thereto can produce an electric field in the region between the substrate surface structures.
摘要翻译： 通过使用平面形成方法在基底表面上形成结构来对准有序液体或中间相，该表面结构具有预定图案，并且将中间相应用于表面以使中间相的分子基本上定向 预定模式。 可以制造液晶显示装置，其中在优选实施例中，将液晶限制在具有相对设置的表面的两个基板之间，其中已经形成了选定图案的表面结构。 表面结构可以是由诸如金属的导电材料制成的光栅结构，其结构用于根据所选择的图案对准液晶，以使通过表面结构的光偏振，并提供电触点，使得电 施加到其上的信号可以在基板表面结构之间的区域中产生电场。
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公开(公告)号：US4254174A
公开(公告)日：1981-03-03
申请号：US24898
申请日：1979-03-29
CPC分类号： G03F1/22 , Y10T428/24917 , Y10T428/294
摘要： A process for fabricating polyimide membrane x-ray lithography masks is described. Thin membrane of polyimide is formed by spinning polyamic acid on a glass substrate and polymerizing in situ. The glass substrate acts as a holder and efficient heat sink during formation of gold absorber patterns on top of the polyimide. A support ring is then bonded to the polyimide, and the glass etched in dilute HF. Optically smooth polyimide membranes with thickness from 0.5 to 5 .mu.m are readily achieved. The method and resulting product is not limited to the above materials or to masks.
摘要翻译： 描述了制造聚酰亚胺膜x射线光刻掩模的方法。 聚酰亚胺薄膜通过在玻璃基板上旋转聚酰胺酸并在原位聚合而形成。 在聚酰亚胺顶部形成金吸收体图案时，玻璃基板用作保持器和有效的散热器。 然后将支撑环结合到聚酰亚胺，并将玻璃在稀HF中蚀刻。 光滑的聚酰亚胺膜厚度可以容纳0.5至5微米。 该方法和所得产品不限于上述材料或掩模。
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公开(公告)号：US4360586A
公开(公告)日：1982-11-23
申请号：US140150
申请日：1980-04-14
申请人： Dale C. Flanders , Henry I. Smith
发明人： Dale C. Flanders , Henry I. Smith
CPC分类号： G03F7/70325 , G02B5/1857 , G03F7/2039
摘要： Soft carbon-K X-rays (38) expose a PMMA photoresist (31) on an oxide layer (32) of a silicon substrate (33) through a parent mask (30) separated a distance S from the resist by a spacer (34) with the parent mask slits (12, 17) defining a spatial period p to establish an intensity pattern of period p/n at the photomask with S=p.sup.2 /n.lambda., where .lambda. is the wavelength of the incident radiation and .lambda.
摘要翻译： 软碳-K X射线（38）通过母屏蔽（30）在硅衬底（33）的氧化物层（32）上暴露PMMA光致抗蚀剂（31），所述母掩模（30）通过间隔物（34）与光刻胶隔开距离S ），其中母掩模狭缝（12,17）限定空间周期p以在S = p2 /nλ的光掩模处建立周期p / n的强度图案，其中λ是入射辐射的波长，λ
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公开(公告)号：US4200395A
公开(公告)日：1980-04-29
申请号：US793259
申请日：1977-05-03
CPC分类号： G03F9/7049
摘要： First and second plates are formed with like periodic patterns. A laser beam illuminates the second plate through the alignment marks of the first plate to provide a pair of diffracted beams that are detected with alignment being indicated when the beams are of the same intensity.
摘要翻译： 第一和第二板形成有类似的周期性图案。 激光束通过第一板的对准标记照亮第二板，以提供当光束具有相同强度时指示的对准检测的一对衍射光束。
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公开(公告)号：US4170512A
公开(公告)日：1979-10-09
申请号：US800759
申请日：1977-05-26
CPC分类号： G03F1/22
摘要： A process for fabricating polyimide membrane x-ray lithography masks is described. Thin membrane of polyimide is formed by spinning polyamic acid on a glass substrate and polymerizing in situ. The glass substrate acts as a holder and efficient heat sink during formation of gold absorber patterns on top of the polyimide. A support ring is then bonded to the polyimide, and the glass etched in dilute HF. Optically smooth polyimide membranes with thicknesses from 0.5 to 5 .mu.m are readily achieved. The method and resulting product is not limited to the above materials or to masks.
摘要翻译： 描述了制造聚酰亚胺膜x射线光刻掩模的方法。 聚酰亚胺薄膜通过在玻璃基板上旋转聚酰胺酸并在原位聚合而形成。 在聚酰亚胺顶部形成金吸收体图案时，玻璃基板用作保持器和有效的散热器。 然后将支撑环结合到聚酰亚胺，并将玻璃在稀HF中蚀刻。 容易实现厚度为0.5至5微米的光学平滑聚酰亚胺膜。 该方法和所得产品不限于上述材料或掩模。
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公开(公告)号：US4340305A
公开(公告)日：1982-07-20
申请号：US106842
申请日：1979-12-26
CPC分类号： G03F9/7049 , G11B15/602 , G11B17/34 , G11B21/10
摘要： First and second plates are formed with like periodic patterns. A laser beam illuminates the second plate through the alignment marks of the first plate to provide a pair of diffracted beams that are detected with alignment being indicated when the beams are of the same intensity.
摘要翻译： 第一和第二板形成有类似的周期性图案。 激光束通过第一板的对准标记照亮第二板，以提供当光束具有相同强度时指示的对准检测的一对衍射光束。
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公开(公告)号：US4256787A
公开(公告)日：1981-03-17
申请号：US902332
申请日：1978-05-03
IPC分类号： G09F9/00 , B05D1/32 , B05D5/12 , G02F1/13 , G02F1/1335 , G02F1/1337 , G02F1/1343
CPC分类号： G02F1/13439 , G02F1/133528 , G02F1/13378 , G02F2001/133765 , Y10S428/91 , Y10S428/913 , Y10T428/1059 , Y10T428/2462 , Y10T428/24851 , Y10T428/24868 , Y10T428/24917 , Y10T428/24926 , Y10T428/261
摘要： Ordered liquids, or mesophases, are aligned by forming a structure on a substrate surface using a planar process of formation, the surface structure having a predetermined pattern, and applying a mesophase to the surface to substantially orient the molecules of the mesophase in accordance with the predetermined pattern. A liquid crystal display device can be made in which, in a preferred embodiment, the liquid crystal is confined between two substrates having oppositely disposed surfaces on which selected patterns of surface structures have been formed. The surface structures can be grating structures made of a conductive material, such as metal, which structures act to align the liquid crystal in accordance with the selected patterns, to polarize light passing through the surface structures, and to provide electrical contacts so that an electrical signal applied thereto can produce an electric field in the region between the substrate surface structures.
摘要翻译： 通过使用平面形成方法在基底表面上形成结构来对准有序液体或中间相，该表面结构具有预定图案，并且将中间相应用于表面以使中间相的分子基本上定向 预定模式。 可以制造液晶显示装置，其中在优选实施例中，将液晶限制在具有相对设置的表面的两个基板之间，其中已经形成了选定图案的表面结构。 表面结构可以是由诸如金属的导电材料制成的光栅结构，该结构用于根据所选择的图案对准液晶，以使通过表面结构的光偏振，并提供电触点，使得电气 施加到其上的信号可以在基板表面结构之间的区域中产生电场。
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公开(公告)号：US10371499B2
公开(公告)日：2019-08-06
申请号：US13976229
申请日：2011-12-27
IPC分类号： A61B5/00 , G01B9/02 , H01S3/11 , H01S5/04 , H01S5/14 , G01N21/47 , H01S3/067 , H01S3/083 , H01S3/094 , H01S3/106 , H01S5/022 , H01S5/026 , H01S5/062 , H01S5/065
摘要： An optical coherence analysis system uses a laser swept source that is constrained to operate in a mode locked condition. This is accomplished by synchronously changing the laser cavity's gain and/or phase based on the round trip travel time of light in the cavity. Many high-speed wavelength swept laser sources emit pulses synchronized with the round trip time of the cavity as part of a nonlinear optical frequency red shifting process. Stable pulsation is associated with smooth tuning and low relative intensity noise. Addition of mode-locking methods to this class of lasers can control and stabilize these lasers to a low clock jitter and RIN state, and in specific cases allow long-to-short wavelength tuning in addition to the usual short-to-long (red shifting). The laser may comprise a SOA (410), a tunable Fabry-Perot-Filter (412) as one reflector and an Output coupler (405) in an optical fiber (406) to adjust the cavity length.
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