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54 条记录 (耗时 0.023 秒)

    Supported membrane composite structure and its method of manufacture
    1.
    发明授权
    Supported membrane composite structure and its method of manufacture 失效
    支撑膜复合结构及其制造方法

    公开(公告)号：US4254174A

    公开(公告)日：1981-03-03

    申请号：US24898

    申请日：1979-03-29

    申请人： Dale C. Flanders ,  Henry I. Smith ,  Muriel A. DaLomba

    发明人： Dale C. Flanders ,  Henry I. Smith ,  Muriel A. DaLomba

    IPC分类号： G03F1/22 ,  B32B15/08 ,  B32B27/00

    CPC分类号： G03F1/22 ,  Y10T428/24917 ,  Y10T428/294

    摘要： A process for fabricating polyimide membrane x-ray lithography masks is described. Thin membrane of polyimide is formed by spinning polyamic acid on a glass substrate and polymerizing in situ. The glass substrate acts as a holder and efficient heat sink during formation of gold absorber patterns on top of the polyimide. A support ring is then bonded to the polyimide, and the glass etched in dilute HF. Optically smooth polyimide membranes with thickness from 0.5 to 5 .mu.m are readily achieved. The method and resulting product is not limited to the above materials or to masks.

    摘要翻译： 描述了制造聚酰亚胺膜x射线光刻掩模的方法。 聚酰亚胺薄膜通过在玻璃基板上旋转聚酰胺酸并在原位聚合而形成。 在聚酰亚胺顶部形成金吸收体图案时，玻璃基板用作保持器和有效的散热器。 然后将支撑环结合到聚酰亚胺，并将玻璃在稀HF中蚀刻。 光滑的聚酰亚胺膜厚度可以容纳0.5至5微米。 该方法和所得产品不限于上述材料或掩模。

    Method of manufacture of a soft-X-ray mask
    2.
    发明授权
    Method of manufacture of a soft-X-ray mask 失效
    软X射线掩模的制造方法

    公开(公告)号：US4170512A

    公开(公告)日：1979-10-09

    申请号：US800759

    申请日：1977-05-26

    申请人： Dale C. Flanders ,  Henry I. Smith ,  Muriel A. Dalomba

    发明人： Dale C. Flanders ,  Henry I. Smith ,  Muriel A. Dalomba

    IPC分类号： G03F1/22 ,  G21F5/04

    CPC分类号： G03F1/22

    摘要： A process for fabricating polyimide membrane x-ray lithography masks is described. Thin membrane of polyimide is formed by spinning polyamic acid on a glass substrate and polymerizing in situ. The glass substrate acts as a holder and efficient heat sink during formation of gold absorber patterns on top of the polyimide. A support ring is then bonded to the polyimide, and the glass etched in dilute HF. Optically smooth polyimide membranes with thicknesses from 0.5 to 5 .mu.m are readily achieved. The method and resulting product is not limited to the above materials or to masks.

    摘要翻译： 描述了制造聚酰亚胺膜x射线光刻掩模的方法。 聚酰亚胺薄膜通过在玻璃基板上旋转聚酰胺酸并在原位聚合而形成。 在聚酰亚胺顶部形成金吸收体图案时，玻璃基板用作保持器和有效的散热器。 然后将支撑环结合到聚酰亚胺，并将玻璃在稀HF中蚀刻。 容易实现厚度为0.5至5微米的光学平滑聚酰亚胺膜。 该方法和所得产品不限于上述材料或掩模。

    Spatial period division exposing
    3.
    发明授权
    Spatial period division exposing 失效
    空间分裂暴露

    公开(公告)号：US4360586A

    公开(公告)日：1982-11-23

    申请号：US140150

    申请日：1980-04-14

    申请人： Dale C. Flanders ,  Henry I. Smith

    发明人： Dale C. Flanders ,  Henry I. Smith

    IPC分类号： G02B5/18 ,  G03F7/20 ,  B05D3/06 ,  G03F9/00

    CPC分类号： G03F7/70325 ,  G02B5/1857 ,  G03F7/2039

    摘要： Soft carbon-K X-rays (38) expose a PMMA photoresist (31) on an oxide layer (32) of a silicon substrate (33) through a parent mask (30) separated a distance S from the resist by a spacer (34) with the parent mask slits (12, 17) defining a spatial period p to establish an intensity pattern of period p/n at the photomask with S=p.sup.2 /n.lambda., where .lambda. is the wavelength of the incident radiation and .lambda.

    摘要翻译： 软碳-K X射线（38）通过母屏蔽（30）在硅衬底（33）的氧化物层（32）上暴露PMMA光致抗蚀剂（31），所述母掩模（30）通过间隔物（34）与光刻胶隔开距离S ），其中母掩模狭缝（12,17）限定空间周期p以在S = p2 /nλ的光掩模处建立周期p / n的强度图案，其中λ是入射辐射的波长，λ

    Orientation of ordered liquids and their use in devices
    4.
    发明授权
    Orientation of ordered liquids and their use in devices 失效
    有序液体的取向及其在设备中的应用

    公开(公告)号：US4370194A

    公开(公告)日：1983-01-25

    申请号：US149483

    申请日：1980-05-13

    申请人： David C. Shaver ,  Henry I. Smith ,  Dale C. Flanders

    发明人： David C. Shaver ,  Henry I. Smith ,  Dale C. Flanders

    IPC分类号： G09F9/00 ,  B05D1/32 ,  B05D5/12 ,  G02F1/13 ,  G02F1/1335 ,  G02F1/1337 ,  G02F1/1343 ,  C23F1/02 ,  H01L21/22

    CPC分类号： G02F1/13439 ,  G02F1/133528 ,  G02F1/13378 ,  G02F2001/133765 ,  Y10S428/91 ,  Y10S428/913 ,  Y10T428/1059 ,  Y10T428/2462 ,  Y10T428/24851 ,  Y10T428/24868 ,  Y10T428/24917 ,  Y10T428/24926 ,  Y10T428/261

    摘要： Ordered liquids, or mesophases, are aligned by forming a structure on a substrate surface using a planar process of formation, the surface structure having a predetermined pattern, and applying a mesophase to the surface to substantially orient the molecules of the mesophase in accordance with the predetermined pattern. A liquid crystal display device can be made in which, in a preferred embodiment, the liquid crystal is confined between two substrates having oppositely disposed surfaces on which selected patterns of surface structures have been formed. The surface structures can be grating structures made of a conductive material, such as metal, which structures act to align the liquid crystal in accordance with the selected patterns, to polarize light passing through the surface structures, and to provide electrical contacts so that an electric signal applied thereto can produce an electric field in the region between the substrate surface structures.

    摘要翻译： 通过使用平面形成方法在基底表面上形成结构来对准有序液体或中间相，该表面结构具有预定图案，并且将中间相应用于表面以使中间相的分子基本上定向 预定模式。 可以制造液晶显示装置，其中在优选实施例中，将液晶限制在具有相对设置的表面的两个基板之间，其中已经形成了选定图案的表面结构。 表面结构可以是由诸如金属的导电材料制成的光栅结构，其结构用于根据所选择的图案对准液晶，以使通过表面结构的光偏振，并提供电触点，使得电 施加到其上的信号可以在基板表面结构之间的区域中产生电场。

    Orientation of ordered liquids and their use in devices
    7.
    发明授权
    Orientation of ordered liquids and their use in devices 失效
    有序液体的取向及其在设备中的应用

    公开(公告)号：US4256787A

    公开(公告)日：1981-03-17

    申请号：US902332

    申请日：1978-05-03

    申请人： David C. Shaver ,  Henry I. Smith ,  Dale C. Flanders

    发明人： David C. Shaver ,  Henry I. Smith ,  Dale C. Flanders

    IPC分类号： G09F9/00 ,  B05D1/32 ,  B05D5/12 ,  G02F1/13 ,  G02F1/1335 ,  G02F1/1337 ,  G02F1/1343

    CPC分类号： G02F1/13439 ,  G02F1/133528 ,  G02F1/13378 ,  G02F2001/133765 ,  Y10S428/91 ,  Y10S428/913 ,  Y10T428/1059 ,  Y10T428/2462 ,  Y10T428/24851 ,  Y10T428/24868 ,  Y10T428/24917 ,  Y10T428/24926 ,  Y10T428/261

    摘要： Ordered liquids, or mesophases, are aligned by forming a structure on a substrate surface using a planar process of formation, the surface structure having a predetermined pattern, and applying a mesophase to the surface to substantially orient the molecules of the mesophase in accordance with the predetermined pattern. A liquid crystal display device can be made in which, in a preferred embodiment, the liquid crystal is confined between two substrates having oppositely disposed surfaces on which selected patterns of surface structures have been formed. The surface structures can be grating structures made of a conductive material, such as metal, which structures act to align the liquid crystal in accordance with the selected patterns, to polarize light passing through the surface structures, and to provide electrical contacts so that an electrical signal applied thereto can produce an electric field in the region between the substrate surface structures.

    摘要翻译： 通过使用平面形成方法在基底表面上形成结构来对准有序液体或中间相，该表面结构具有预定图案，并且将中间相应用于表面以使中间相的分子基本上定向 预定模式。 可以制造液晶显示装置，其中在优选实施例中，将液晶限制在具有相对设置的表面的两个基板之间，其中已经形成了选定图案的表面结构。 表面结构可以是由诸如金属的导电材料制成的光栅结构，该结构用于根据所选择的图案对准液晶，以使通过表面结构的光偏振，并提供电触点，使得电气 施加到其上的信号可以在基板表面结构之间的区域中产生电场。