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公开(公告)号:US20250040121A1
公开(公告)日:2025-01-30
申请号:US18777208
申请日:2024-07-18
Applicant: Micron Technology, Inc.
Inventor: Yuanzhi Ma , Scott E. Sills , Si-Woo Lee , David K. Hwang , Yoshitaka Nakamura , Yuichi Yokoyama , Pavani Vamsi Krishna Nittala , Glen H. Walters , Gautham Muthusamy , Haitao Liu , Kamal Karda
Abstract: Methods, systems, and devices for multi-layer capacitors for three-dimensional memory systems are described. Memory cells of a memory system may include capacitors having dielectric material between multiple interfaces (e.g., concentric interfaces) of a bottom electrode and a top electrode. A bottom electrode may include a first portion wrapping around a portion of a semiconductor material that is contiguous with a channel of a transistor, and a top electrode may include a first portion wrapping around the first portion of the bottom electrode. The bottom electrode may also include a second portion wrapping around the first portion of the top electrode, and the top electrode may also include a second portion wrapping around the second portion of the bottom electrode. The dielectric material may include respective portions between each interface of the bottom electrode and top electrode which, in some examples, may be a contiguous implementation of the dielectric material.
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公开(公告)号:US20230397428A1
公开(公告)日:2023-12-07
申请号:US18203886
申请日:2023-05-31
Applicant: Micron Technology, Inc.
Inventor: Giorgio Servalli , Marcello Mariani , Kamal Karda
IPC: H10B51/30
CPC classification number: H10B51/30
Abstract: Methods, systems, and devices for ferroelectric memory arrays with low permittivity dielectric barriers are described. In some cases, a manufacturing process to manufacture a memory array may include depositing a dielectric barrier between respective bottom electrodes of a pair of adjacent memory cells of the array. For example, the manufacturing process may include depositing a film of dielectric material over rows of bottom electrodes formed on a set of dielectric walls to at least partially fill space between adjacent bottom electrodes. Alternatively, the manufacturing process may include depositing a film of dielectric material into a set of cavities of the memory array, each cavity having a set of bottom electrodes formed on sidewalls of the cavity. Subsequently, a portion of the dielectric material may be removed to expose surfaces of the bottom electrodes, leaving behind a set of dielectric barriers between adjacent bottom electrodes.
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3.
公开(公告)号:US20150140781A1
公开(公告)日:2015-05-21
申请号:US14605100
申请日:2015-01-26
Applicant: MICRON TECHNOLOGY, INC.
Inventor: Kamal Karda , Chandra Mouli
IPC: H01L21/762 , H01L27/108
CPC classification number: H01L21/76224 , H01L21/76232 , H01L27/10823 , H01L27/10844 , H01L27/10885 , H01L27/10891 , H01L29/66666
Abstract: A method of formation of an isolation structure for vertical semiconductor devices, the resulting isolation structure, and a memory device to prevent leakage among adjacent vertical semiconductor devices are described.
Abstract translation: 描述了形成用于垂直半导体器件的隔离结构的方法,所得到的隔离结构以及用于防止相邻垂直半导体器件之间泄漏的存储器件。
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公开(公告)号:US20230371264A1
公开(公告)日:2023-11-16
申请号:US17662982
申请日:2022-05-11
Applicant: Micron Technology, Inc.
Inventor: Albert Fayrushin , Kamal Karda , Gianpietro Carnevale , Aurelio Giancarlo Mauri
IPC: H01L27/11597 , H01L27/1159
CPC classification number: H01L27/11597 , H01L27/1159
Abstract: Methods, systems, and devices for NAND structures with polarized materials are described. A memory device may include a polarized dielectric material located relatively near to a channel, which may reduce interference between cells. The polarized dielectric material may include a dielectric material with a fixed polarity and having a first surface with a negative polarity oriented towards the channel. The negative polarity of the polarized dielectric material may affect an electron distribution of the channel by shifting the electron distribution closer to an associated charge trapping material. The shifted electron distribution may reduce an effect of an electric field of any aggressor cells of the memory device on one or more victim cells, by creating a more uniform channel electron distribution and increasing gate control relative to a channel without the effects of the polarized dielectric material.
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5.
公开(公告)号:US08962445B2
公开(公告)日:2015-02-24
申请号:US14104575
申请日:2013-12-12
Applicant: Micron Technology, Inc.
Inventor: Kamal Karda , Chandra Mouli
IPC: H01L21/76 , H01L21/762 , H01L27/108 , H01L29/66
CPC classification number: H01L21/76224 , H01L21/76232 , H01L27/10823 , H01L27/10844 , H01L27/10885 , H01L27/10891 , H01L29/66666
Abstract: A method of formation of an isolation structure for vertical semiconductor devices, the resulting isolation structure, and a memory device to prevent leakage among adjacent vertical semiconductor devices are described.
Abstract translation: 描述了形成用于垂直半导体器件的隔离结构的方法,所得到的隔离结构以及用于防止相邻垂直半导体器件之间泄漏的存储器件。
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公开(公告)号:US12279434B2
公开(公告)日:2025-04-15
申请号:US17662982
申请日:2022-05-11
Applicant: Micron Technology, Inc.
Inventor: Albert Fayrushin , Kamal Karda , Gianpietro Carnevale , Aurelio Giancarlo Mauri
Abstract: Methods, systems, and devices for NAND structures with polarized materials are described. A memory device may include a polarized dielectric material located relatively near to a channel, which may reduce interference between cells. The polarized dielectric material may include a dielectric material with a fixed polarity and having a first surface with a negative polarity oriented towards the channel. The negative polarity of the polarized dielectric material may affect an electron distribution of the channel by shifting the electron distribution closer to an associated charge trapping material. The shifted electron distribution may reduce an effect of an electric field of any aggressor cells of the memory device on one or more victim cells, by creating a more uniform channel electron distribution and increasing gate control relative to a channel without the effects of the polarized dielectric material.
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公开(公告)号:US20250040130A1
公开(公告)日:2025-01-30
申请号:US18773001
申请日:2024-07-15
Applicant: Micron Technology, Inc.
Inventor: Kamal Karda , Haitao Liu , Scott E. Sills , Si-Woo Lee
IPC: H10B12/00
Abstract: Methods, systems, and devices for doping of memory cell selection transistors are described. Cell selection transistors of an array of memory cells may each include a semiconductor channel that is doped at a middle portion of the channel, which may support a deselection voltage for relatively high channel resistance that is relatively closer to or equal to a ground voltage than other transistor configurations. The semiconductor channels may include a p-type doping (e.g., using a configured concentration of boron) at a middle portion of the channels that is between end portions that are doped with an n-type doping (e.g., using phosphorous, arsenic, or a combination thereof, among other examples of n-type doping). In some implementations, undoped regions may be included between the n-type doped portions and the p-type doped portions. Such techniques may be implemented in horizontal cell selection transistors formed over a substrate, including for three-dimensional memory arrays.
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公开(公告)号:US20250029659A1
公开(公告)日:2025-01-23
申请号:US18741633
申请日:2024-06-12
Applicant: Micron Technology, Inc.
Inventor: Kamal Karda , Hernan Castro
Abstract: Systems, methods, and apparatus related to memory devices that perform multiplication using memory cells. In one approach, a memory cell array has memory cells stacked vertically above a semiconductor substrate. Each memory cell stores a weight. Local digit lines connect to terminals of the memory cells. The local digit lines extend vertically above the substrate. Select transistors connect to the local digit lines. Select lines control the select transistors, and are used to encode an input pattern to multiply by the stored weights. Accumulation circuitry sums output currents from the memory cells. In one example, each memory cell is formed using a transistor that includes a semiconductor layer to provide a horizontal channel. A gate layer (e.g., a gate stack layer) wraps around a circumference of the semiconductor layer. Wordlines apply gate voltages to the transistors. Each wordline has a respective portion that wraps around a circumference of the gate layer of each transistor.
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公开(公告)号:US20240164113A1
公开(公告)日:2024-05-16
申请号:US18510464
申请日:2023-11-15
Applicant: Micron Technology, Inc.
Inventor: Alessandro Calderoni , Kamal Karda , Durai Vishak Nirmal Ramaswamy
IPC: H10B53/20 , G11C5/06 , H01L21/28 , H01L29/51 , H01L29/66 , H01L29/78 , H10B51/10 , H10B51/20 , H10B53/10
CPC classification number: H10B53/20 , G11C5/063 , H01L29/40111 , H01L29/516 , H01L29/6684 , H01L29/78391 , H10B51/10 , H10B51/20 , H10B53/10
Abstract: Methods, systems, and devices for memory structures with voids are described. A memory architecture may include voids between adjacent columns of memory cells. For example, a memory array may be manufactured by forming one or more sacrificial structures, as well as a liner material on sidewalls of the sacrificial structures, extending in the column direction. Memory cells may be formed on the sacrificial structures by patterning a conductive material to form bottom electrodes, forming a ferroelectric material adjacent to the bottom electrodes, and forming a set of plate lines over the ferroelectric material. The sacrificial structures may then be removed to form voids between at least some adjacent columns of memory cells.
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