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公开(公告)号：US20080232939A1
公开(公告)日：2008-09-25
申请号：US10589097
申请日：2006-04-19
IPC分类号： H01L21/67
CPC分类号： G02F1/1309 , G01R31/2808 , G01R31/305 , G01R31/312
摘要： A flat panel display substrate (FPDS) testing system configured such that prior to testing, the FPDS is loaded into a pallet to prevent breakage, and to provide electrical connections to test pads on the FPDS. The system achieves high throughput by testing FPDSs using one or more charged particle beams simultaneously with the following operations: unloading of already-tested substrates, loading of substrates ready for testing, assembly of pallets, and alignment of electrical contactors to a large number of FPDS test pads. The system design eliminates a prior art X-Y stage, and all moving electrical connections to the FPDS during testing, reducing costs and improving reliability. In one embodiment, the FPDS testing system has three subsystems: a process chamber, loadlock assembly, and pallet elevator; in another embodiment, the functions of loadlock and pallet elevator are combined to reduce system footprint.
摘要翻译： 平板显示器基板（FPDS）测试系统被配置为使得在测试之前，将FPDS加载到托盘中以防止断裂，并提供与FPDS上的测试焊盘的电连接。 该系统通过以下操作同时测试使用一个或多个带电粒子束的FPDS来实现高吞吐量：已经测试的基板的卸载，准备进行测试的基板的装载，托盘的组装以及电接触器对大量FPDS的对准 测试垫。 该系统设计消除了现有技术的X-Y平台，以及在测试过程中与FPDS的所有移动电气连接，降低了成本并提高了可靠性。 在一个实施例中，FPDS测试系统具有三个子系统：处理室，负载锁组件和托盘电梯; 在另一个实施例中，组合负载锁和托盘升降机的功能以减少系统占用空间。
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公开(公告)号：US06738506B2
公开(公告)日：2004-05-18
申请号：US10125054
申请日：2002-04-17
IPC分类号： G06K900
CPC分类号： G06T7/001 , G06T2207/30148
摘要： An image processing system for use in semiconductor wafer inspection comprises a multiplicity of self-contained image processors for independently performing image cross-correlation and defect detection. The system may also comprise an image normalization engine for performing image brightness and contrast normalization. The self-contained image processors and image normalization engine access image data from a memory array; the array is fed data from a multiplicity of imaging modules operating in parallel. The memory array is configured to allow simultaneous access for data input, normalization, and cross-correlation and defect detection. Multiple image processing systems can be configured in parallel as a single image processing computer, all sending defect data to a common display module.
摘要翻译： 用于半导体晶片检查的图像处理系统包括用于独立执行图像互相关和缺陷检测的多个自包含图像处理器。 该系统还可以包括用于执行图像亮度和对比度归一化的图像归一化引擎。 独立的图像处理器和图像归一化引擎从存储器阵列访问图像数据; 该阵列从并行操作的多个成像模块馈送数据。 存储器阵列被配置为允许同时访问数据输入，归一化和互相关和缺陷检测。 多个图像处理系统可以并行配置为单个图像处理计算机，全部将缺陷数据发送到公共显示模块。
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公开(公告)号：US06734428B2
公开(公告)日：2004-05-11
申请号：US10222759
申请日：2002-08-15
IPC分类号： G01N2300
CPC分类号： G21K1/087 , G21K5/10 , H01J37/04 , H01J37/28 , H01J2237/04924 , H01J2237/2817
摘要： An electron optics assembly for a multi-column electron beam inspection tool comprises a single accelerator structure and a single focus electrode mounting plate for all columns; the other electron optical components are one per column and are independently alignable. The accelerator structure comprises first and final accelerator electrodes with a set of accelerator plates in between; the first and final accelerator plates have an aperture for each column and the accelerator plates have a single aperture such that the electron optical axes for all columns pass through the single aperture. Independently alignable focus electrodes are attached to the focus electrode mounting plate, allowing each electrode to be aligned to the electron optical axis of its corresponding column. There is one electron gun per column, mounted on the top of the single accelerator structure. In other embodiments, the electron guns are mounted to a single gun mounting plate positioned above the accelerator structure.
摘要翻译： 用于多列电子束检查工具的电子光学组件包括用于所有柱的单个加速器结构和单个聚焦电极安装板; 其他电子光学元件是每列一个，并且可独立对准。 加速器结构包括在其间具有一组加速器板的第一和最终加速器电极; 第一和最终的加速器板具有用于每一列的孔，并且加速板具有单个孔，使得所有列的电子光轴通过单个孔。 独立地对准的聚焦电极附着到聚焦电极安装板上，允许每个电极与其相应列的电子光轴对准。 每列有一个电子枪，安装在单个加速器结构的顶部。 在其他实施例中，电子枪安装到位于加速器结构上方的单个枪安装板。
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公开(公告)号：US07456402B2
公开(公告)日：2008-11-25
申请号：US11355256
申请日：2006-02-14
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J9/42 , H01J37/256 , H01J37/28 , H01J2237/24495 , H01J2237/24592 , H01J2237/2485 , H01J2237/2817
摘要： A detector optics system for collecting secondary electrons (SEs) and/or backscattered electrons (BSEs) in a multiple charged particle beam test system is disclosed. Aspects of the detector optics system include: the ability to image and/or electrically test a number of locations simultaneously across the full width of a large substrate with high throughput and uniform collection efficiency while avoiding crosstalk between signals generated by neighboring beams. In one embodiment, a linear array of N electron beams causes SEs to be emitted from the substrate, which are then collected by one or more linear arrays of ≧2N detectors. Each linear array is connected to a signal combiner circuit which dynamically determines which detectors are collecting SEs generated by each electron beam as it scans across the substrate surface and then combines the signals from these detectors to form N simultaneous output signals (one per charged particle beam) for each detector array.
摘要翻译： 公开了一种用于在多重带电粒子束测试系统中收集二次电子（SE）和/或反向散射电子（BSE）的检测器光学系统。 检测器光学系统的方面包括：在具有高吞吐量和均匀采集效率的同时在大型衬底的整个宽度上同时跨多个位置进行成像和/或电测试的能力，同时避免由相邻光束产生的信号之间的串扰。 在一个实施例中，N个电子束的线性阵列导致从衬底发射SE，然后由一个或多个≥2N个检测器的线性阵列收集。 每个线性阵列连接到信号组合器电路，其在动态地确定哪些检测器正在收集由每个电子束产生的SE，因为它扫描基板表面，然后组合来自这些检测器的信号以形成N个同时输出信号（每个带电粒子束一个 ）。
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公开(公告)号：US06872958B2
公开(公告)日：2005-03-29
申请号：US10059048
申请日：2002-01-28
IPC分类号： F16D3/56 , G01Q10/00 , G01Q20/00 , G01Q30/16 , G03F7/20 , H01J37/20 , H01L21/00 , H01L21/027 , H01L21/68 , F16B1/00
CPC分类号： G03F7/70716 , G03F7/70841 , G03F7/709 , H01J37/20 , H01L21/67259 , H01L21/682 , Y10T403/45
摘要： A system for precisely positioning and moving a platform relative to a support structure is disclosed herein. The platform is particularly suitable for carrying wafers. Charged particle optics can be attached to the support structure. The platform positioning system comprises a stage, comprising a base, a platform and stage actuators, the stage actuators being coupled to the platform and the platform being coupled to the base; a frame attached to the base; a support structure mechanically coupled to the frame; stage sensors attached to the support structure, for sensing the position of the platform relative to the support structure; and a current control system coupled to the stage sensors and the stage actuators. The current control system may include a predictor for generating an ouptut signal anticipating the actual position of the platform relative to the support structure in real time.
摘要翻译： 本文公开了一种用于相对于支撑结构精确地定位和移动平台的系统。 该平台特别适用于承载晶圆。 带电粒子光学元件可以附着在支撑结构上。 该平台定位系统包括一个台，包括基座，平台和平台致动器，平台致动器联接到平台并且平台联接到基座; 一个连接到基座的框架; 机架地连接到所述框架的支撑结构; 附接到支撑结构的级传感器，用于感测平台相对于支撑结构的位置; 以及耦合到载物台传感器和载物台致动器的电流控制系统。 当前控制系统可以包括用于生成预测平台相对于支撑结构的实际位置的实时发射信号的预测器。
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公开(公告)号：US07941237B2
公开(公告)日：2011-05-10
申请号：US10589097
申请日：2006-04-19
IPC分类号： G06F19/00
CPC分类号： G02F1/1309 , G01R31/2808 , G01R31/305 , G01R31/312
摘要： A flat panel display substrate (FPDS) testing system configured such that prior to testing, the FPDS is loaded into a pallet to prevent breakage, and to provide electrical connections to test pads on the FPDS. The system achieves high throughput by testing FPDSs using one or more charged particle beams simultaneously with the following operations: unloading of already-tested substrates, loading of substrates ready for testing, assembly of pallets, and alignment of electrical contactors to a large number of FPDS test pads. The system design eliminates a prior art X-Y stage, and all moving electrical connections to the FPDS during testing, reducing costs and improving reliability. In one embodiment, the FPDS testing system has three subsystems: a process chamber, loadlock assembly, and pallet elevator; in another embodiment, the functions of loadlock and pallet elevator are combined to reduce system footprint.
摘要翻译： 平板显示器基板（FPDS）测试系统被配置为使得在测试之前，将FPDS加载到托盘中以防止断裂，并提供与FPDS上的测试焊盘的电连接。 该系统通过以下操作同时测试使用一个或多个带电粒子束的FPDS来实现高吞吐量：已经测试的基板的卸载，准备进行测试的基板的装载，托盘的组装以及电接触器对大量FPDS的对准 测试垫。 该系统设计消除了现有技术的X-Y平台，以及在测试过程中与FPDS的所有移动电气连接，降低了成本并提高了可靠性。 在一个实施例中，FPDS测试系统具有三个子系统：处理室，负载锁组件和托盘电梯; 在另一个实施例中，组合负载锁和托盘升降机的功能以减少系统占用空间。
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公开(公告)号：US06943351B2
公开(公告)日：2005-09-13
申请号：US10842849
申请日：2004-05-10
IPC分类号： G01N23/00 , G01Q20/02 , G01Q30/02 , G21K5/10 , G21K7/00 , H01J37/065 , H01J37/08 , H01J37/30
CPC分类号： H01J37/065 , H01J37/32862 , H01J2237/0635 , H01J2237/1501 , H01J2237/2817
摘要： A multi-column charged particle optics assembly comprises: a first optical component which is continuous through all columns of the charged particle optics assembly; and a multiplicity of independently alignable second optical components coupled to the first optical component, such that there is one second component for each column in the charged particles optics assembly. The first component provides mechanical integrity to the charged particle optics assembly and each second optical component is independently alignable to the optic axis of its corresponding column. In a further embodiment, the charged particle optics assembly comprises: first and second continuous optical components; and a multiplicity of independently alignable electrodes coupled to the second optical component, such that there is a corresponding independently alignable electrode for each column.
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8.发明申请METHODS AND APPARATUS FOR DETECTION AND CLASSIFICATION OF SOLAR CELL DEFECTS USING BRIGHT FIELD AND ELECTROLUMINESCENCE IMAGING 审中-公开使用亮度场和电致像成像检测和分类太阳能电池缺陷的方法和装置公开(公告)号：US20100182421A1
公开(公告)日：2010-07-22
申请号：US12690894
申请日：2010-01-20
CPC分类号： G01N21/9501 , G01N21/66
摘要： Methods and apparatus for integrated, in-line metrology of solar cells involve three distinct inspection and testing operations, prior to string and module assembly. Two of the inspections are performed by image analysis using bright field illumination. The third inspection involves electroluminescence imaging, where luminescence in the solar cell is achieved by inducing a forward bias in the solar cell, and analyzing a resulting grayscale image for defects.
摘要翻译： 用于集成的在线计量的太阳能电池的方法和装置在串和模块组装之前涉及三个不同的检查和测试操作。 通过使用亮场照明的图像分析进行两次检查。 第三次检查涉及电致发光成像，其中太阳能电池中的发光通过在太阳能电池中引发正向偏压来实现，并且分析所得到的灰度图像以用于缺陷。
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公开(公告)号：US20130037084A1
公开(公告)日：2013-02-14
申请号：US13572640
申请日：2012-08-11
IPC分类号： H01L31/055
CPC分类号： H01L31/055 , H01L31/0481 , H01L31/0547 , Y02E10/52 , Y02E10/542
摘要： Crystalline silicon photovoltaic (PV) cell-based and thin film PV material-based PV modules include a light management material configured to absorb solar energy incident on the PV module across a broad frequency spectrum and re-emit at least a portion of the absorbed solar energy in a narrow frequency spectrum at which the PV cells or PV materials are efficient at converting photon energy to electrical energy.
摘要翻译： 基于晶体硅光伏（PV）电池和薄膜基于PV材料的PV模块包括配置成吸收在宽范围频谱上入射到PV模块上的太阳能的光管理材料，并重新发射吸收的太阳能的至少一部分 光子电池或PV材料在将光子能量转换为电能方面是有效的窄频谱中的能量。
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公开(公告)号：US20100319754A1
公开(公告)日：2010-12-23
申请号：US12709350
申请日：2010-02-19
申请人： Basha S. Sajjad , Shmuel Erez , S. Daniel Miller , Mahendran T. Chidambaram , Ravi Vellanki , Gerald Schock
发明人： Basha S. Sajjad , Shmuel Erez , S. Daniel Miller , Mahendran T. Chidambaram , Ravi Vellanki , Gerald Schock
IPC分类号： H01L31/052 , H01L31/048 , H01L31/18
CPC分类号： H01L31/056 , H01L31/048 , H01L31/0547 , Y02E10/52
摘要： Improvements for a photovoltaic module (PVM) include the use of a micro-embossed, reflective optical film located in areas of the PVM not covered by the solar cells. The optical film is configured to reflect light incident upon the PVM onto the solar cells and may be formed from a polymeric material. Further enhancements include the use of a compliant heat conducting polymeric film on back sides of the solar cells and a heat conductive polymeric film deposited on an aluminum foil to form a composite film, which effects heat transfer from the solar cell junctions and improves cell efficiency. A top glass with selective frequency and anti-reflective coatings may also be used. Further, improved interconnects for the solar cells eliminate sharp edges, helping to avoid any potential for encapsulant tearing or tab “push-through” and resultant shorting during lamination.
摘要翻译： 光伏模块（PVM）的改进包括使用位于未被太阳能电池覆盖的PVM的区域中的微压纹的反射型光学膜。 光学膜被配置为将入射到PVM上的光反射到太阳能电池上，并且可以由聚合物材料形成。 进一步的增强包括在太阳能电池的背面上使用柔性导热聚合物膜，以及沉积在铝箔上以形成复合膜的导热聚合物膜，其实现来自太阳能电池接头的热传递并提高电池效率。 也可以使用具有选择性频率和抗反射涂层的顶部玻璃。 此外，用于太阳能电池的改进的互连消除了锋利的边缘，有助于避免在层压期间任何潜在的密封剂撕裂或突片“推入”并导致短路。
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