摘要:
A graphite crucible (2) for retaining a quartz crucible (1) has a graphite crucible substrate (3) as a graphite crucible forming material, and a coating film (4) made of a carbonized phenolic resin and formed over the entire surface of the graphite crucible substrate (3). The phenolic resin is impregnated inside open pores (5) existing in a surface of the graphite crucible substrate (3). The coating film (4) may be formed only within a portion of the graphite crucible in which SiC formation can occur easily, not over the entirety of the surface of the graphite crucible. For example, it is possible to deposit the film only on the entire inner surface of the crucible. It is also possible to deposit the film only on a curved portion (sharply curved portion) of the inner surface, or only on a curved portion and a straight trunk portion.
摘要:
A crucible protection sheet is provided that can prevent damages to an inner crucible, hinder an outer crucible from silicon-carbidization, and transmit heat from the outer crucible to the inner crucible uniformly.In a crucible having an inner crucible 2 and an outer crucible 3, the crucible protection sheet is arranged between the two crucibles and is made of expanded graphite. The planar thermal conductivity is 120 W/(m·K) or higher, the gas permeability is less than 1.0×10−4 cm2/s, and the compression ratio is 20% or higher when the sheet is compressed in a thickness direction at a pressure of 34.3 MPa. Since the compression ratio is high, the effect of preventing breakage is great when inserting the inner crucible, improving workability and preventing the inner crucible from tilting inside the outer crucible. In addition, even though the compression ratio is high, the thermal conductivity is kept to such a degree that the inner crucible can be heated uniformly, and the gas shielding capability is also ensured. As a result, the outer crucible is prevented from silicon-carbidization and thickness decrease.
摘要:
A carbon crucible prevents leakage of SiO gas from a boundary portion between a straight trunk portion and a tray portion and prevents SiC formation from quickly developing. A carbon crucible (5) for retaining a quartz crucible (4) used in a metal single crystal pulling apparatus for silicon or the like has a straight trunk portion (9) and a tray portion (10) that are divided from each other. A graphite sheet (11) is disposed between the quartz crucible (4) and the carbon crucible (5) so as to cover at least a boundary portion (A) of an inner surface of the carbon crucible (5) between the straight trunk portion (9) and the tray portion (10). The graphite sheet (11) is an expanded graphite sheet.
摘要:
The present invention relates to a reformed gas production apparatus that includes a reaction chamber containing a reforming catalyst, a supply route to the reaction chamber, a reformed gas conduction route from the reaction chamber, and a reaction chamber temperature control means that controls a temperature of the reaction chamber. The supply route supplies a fluid that includes a fuel containing a hydrocarbon having at least two carbon atoms, at least one of steam and a carbon dioxide-containing gas, and an oxygen-containing gas. The fuel can be a mixed fuel that includes a plurality of types of hydrocarbons that each have at least two carbon atoms. The reaction chamber temperature control means relates to the thermal decomposition index temperature of the fuel, which defines an upper limit temperature of the reforming reaction region.
摘要:
A semiconductor device includes a semiconductor substrate on which a structure portion is provided except a peripheral portion thereof, and has a laminated structure including low dielectric films and wiring lines, the low dielectric films having a relative dielectric constant of 3.0 or lower and a glass transition temperature of 400° C. or higher. An insulating film is formed on the structure portion. A connection pad portion is arranged on the insulating film and connected to an uppermost wiring line of the laminated structure portion. A bump electrode is provided on the connection pad portion. A sealing film made of an organic resin is provided on a part of the insulating film which surrounds the pump electrode. Side surfaces of the laminated structure portion are covered with the insulating film and/or the sealing film.
摘要:
A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).
摘要:
The present invention relates to a reformed gas production apparatus that includes a reaction chamber containing a reforming catalyst, a supply route to the reaction chamber, a reformed gas conduction route from the reaction chamber, and a reaction chamber temperature control means that controls a temperature of the reaction chamber. The supply route supplies a fluid that includes a fuel containing a hydrocarbon having at least two carbon atoms, at least one of steam and a carbon dioxide-containing gas, and an oxygen-containing gas. The fuel can be a mixed fuel that includes a plurality of types of hydrocarbons that each have at least two carbon atoms. The reaction chamber temperature control means relates to the thermal decomposition index temperature of the fuel, which defines an upper limit temperature of the reforming reaction region.
摘要:
A CO2-facilitated transport membrane of excellent carbon dioxide permeability and CO2/H2 selectivity, which can be applied to a CO2 permeable membrane reactor, is stably provided. The CO2-facilitated transport membrane is formed such that a gel layer 1 obtained by adding cesium carbonate to a polyvinyl alcohol-polyacrylic acid copolymer gel membrane is supported by a hydrophilic porous membrane 2. More preferably, a gel layer supported by a hydrophilic porous membrane 2 is coated with hydrophilic porous membranes 3 and 4.
摘要:
In a data management apparatus (1) including a recording device (12) for recording contents data and a data processing section for processing the contents data, first management data for managing the contents data according to a first reference is recorded in the recording device (12), and the data processing section reproduces the contents data based on the first management data, and transfers the contents data to an external device (2) based on second management data which is used for management of the contents data by the external device according to a second reference different from the first reference. As a result, the protection of the contents data can be made while complying with related laws, and the contents data with optional functions added thereto can be backed up.
摘要:
A semiconductor device includes a semiconductor substrate and low dielectric film wiring line laminated structure portions which are provided in regions on the semiconductor substrate except a peripheral portion thereof. Each of the laminated structure portions has a laminated structure of low dielectric films and a plurality of wiring lines. An insulating film is provided on an upper side of the laminated structure portion. Connection pad portions for electrodes are arranged on the insulating film to be electrically connected to the connection pad portions of uppermost wiring lines of the laminated structure portion. Bump electrodes for external connection are provided on the connection pad portions for the electrodes. A sealing film is provided on the insulating film and on the peripheral portion of the semiconductor substrate. Side surfaces of the laminated structure portions are covered with the insulating film or the sealing film.