GRAPHITE CRUCIBLE FOR SINGLE CRYSTAL PULLING APPARATUS AND METHOD OF MANUFACTURING SAME
    1.
    发明申请
    GRAPHITE CRUCIBLE FOR SINGLE CRYSTAL PULLING APPARATUS AND METHOD OF MANUFACTURING SAME 审中-公开
    用于单晶拉丝装置的石墨坩埚及其制造方法

    公开(公告)号:US20130305984A1

    公开(公告)日:2013-11-21

    申请号:US13980995

    申请日:2010-01-30

    IPC分类号: C30B15/10

    摘要: A graphite crucible (2) for retaining a quartz crucible (1) has a graphite crucible substrate (3) as a graphite crucible forming material, and a coating film (4) made of a carbonized phenolic resin and formed over the entire surface of the graphite crucible substrate (3). The phenolic resin is impregnated inside open pores (5) existing in a surface of the graphite crucible substrate (3). The coating film (4) may be formed only within a portion of the graphite crucible in which SiC formation can occur easily, not over the entirety of the surface of the graphite crucible. For example, it is possible to deposit the film only on the entire inner surface of the crucible. It is also possible to deposit the film only on a curved portion (sharply curved portion) of the inner surface, or only on a curved portion and a straight trunk portion.

    摘要翻译: 用于保持石英坩埚(1)的石墨坩埚(2)具有作为石墨坩埚形成材料的石墨坩埚基板(3)和由碳化酚醛树脂制成的涂膜(4),形成在 石墨坩埚基板(3)。 酚醛树脂浸渍在存在于石墨坩埚基板(3)表面的开孔(5)内。 涂膜(4)可以仅在石墨坩埚的一部分内形成,其中可以容易地发生SiC形成,而不在石墨坩埚的整个表面上。 例如,可以将膜仅沉积在坩埚的整个内表面上。 也可以将膜仅沉积在内表面的弯曲部分(锐利弯曲部分)上,或仅在弯曲部分和直线主干部分上。

    CRUCIBLE PROTECTION SHEET AND CRUCIBLE APPARATUS USING THE CRUCIBLE PROTECTION SHEET
    2.
    发明申请
    CRUCIBLE PROTECTION SHEET AND CRUCIBLE APPARATUS USING THE CRUCIBLE PROTECTION SHEET 有权
    使用防腐片保护片和可疑装置

    公开(公告)号:US20090308307A1

    公开(公告)日:2009-12-17

    申请号:US12373182

    申请日:2007-07-09

    IPC分类号: C30B15/12 B32B9/00

    摘要: A crucible protection sheet is provided that can prevent damages to an inner crucible, hinder an outer crucible from silicon-carbidization, and transmit heat from the outer crucible to the inner crucible uniformly.In a crucible having an inner crucible 2 and an outer crucible 3, the crucible protection sheet is arranged between the two crucibles and is made of expanded graphite. The planar thermal conductivity is 120 W/(m·K) or higher, the gas permeability is less than 1.0×10−4 cm2/s, and the compression ratio is 20% or higher when the sheet is compressed in a thickness direction at a pressure of 34.3 MPa. Since the compression ratio is high, the effect of preventing breakage is great when inserting the inner crucible, improving workability and preventing the inner crucible from tilting inside the outer crucible. In addition, even though the compression ratio is high, the thermal conductivity is kept to such a degree that the inner crucible can be heated uniformly, and the gas shielding capability is also ensured. As a result, the outer crucible is prevented from silicon-carbidization and thickness decrease.

    摘要翻译: 提供了可以防止内坩埚损坏的坩埚保护片,阻止外坩埚从硅碳化,并将热量从外坩埚均匀地传递到内坩埚。 在具有内坩埚2和外坩埚3的坩埚中,坩埚保护片布置在两个坩埚之间并且由膨胀石墨制成。 平面导热率为120W /(mK)以上,气体透过率小于1.0×10 -4 cm 2 / s,压缩比为20%以上时,在厚度方向压缩片材的压力为 34.3MPa。 由于压缩比高,所以在插入内坩埚时,防止破损的效果大,提高加工性,防止内坩埚在外坩埚内部倾斜。 此外,即使压缩比高,导热率也保持在内坩埚能均匀加热的程度,并且也保证了气体屏蔽能力。 结果,防止了外坩埚的硅 - 碳化和厚度的减小。

    CARBON CRUCIBLE
    3.
    发明申请
    CARBON CRUCIBLE 审中-公开
    碳可溶性

    公开(公告)号:US20130160703A1

    公开(公告)日:2013-06-27

    申请号:US13820796

    申请日:2011-08-26

    IPC分类号: C30B15/10

    摘要: A carbon crucible prevents leakage of SiO gas from a boundary portion between a straight trunk portion and a tray portion and prevents SiC formation from quickly developing. A carbon crucible (5) for retaining a quartz crucible (4) used in a metal single crystal pulling apparatus for silicon or the like has a straight trunk portion (9) and a tray portion (10) that are divided from each other. A graphite sheet (11) is disposed between the quartz crucible (4) and the carbon crucible (5) so as to cover at least a boundary portion (A) of an inner surface of the carbon crucible (5) between the straight trunk portion (9) and the tray portion (10). The graphite sheet (11) is an expanded graphite sheet.

    摘要翻译: 碳坩埚防止了从直线主体部分和托盘部分之间的边界部分漏出的一氧化硅气体,并且防止了SiC形成的快速发展。 用于保持用于硅等的金属单晶拉制装置中的石英坩埚(4)的碳坩埚(5)具有彼此分开的直的主干部(9)和托盘部(10)。 石英片(11)设置在石英坩埚(4)和碳坩埚(5)之间,以至少覆盖碳坩埚(5)的内表面的至少一边界部分(A) (9)和托盘部分(10)。 石墨片(11)是膨胀石墨片。

    SINGLE CRYSTAL PULLING APPARATUS AND LOW HEAT CONDUCTIVE MEMBER USED FOR SINGLE CRYSTAL PULLING APPARATUS
    6.
    发明申请
    SINGLE CRYSTAL PULLING APPARATUS AND LOW HEAT CONDUCTIVE MEMBER USED FOR SINGLE CRYSTAL PULLING APPARATUS 有权
    单晶拉丝装置和低温导热部件用于单晶拉丝装置

    公开(公告)号:US20130233241A1

    公开(公告)日:2013-09-12

    申请号:US13881074

    申请日:2011-11-21

    IPC分类号: C30B15/14 C30B15/30 C30B15/10

    摘要: A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).

    摘要翻译: 单晶拉制装置(1)具有用于容纳硅熔体(3)的石英坩埚(2),用于保持石英坩埚(2)的石墨坩埚(4),用于固定和保持石墨坩埚的托盘(5) (4),以及用于从下方支撑托盘(5)并用于在旋转托盘(5)和坩埚(2),(4)时升降的坩埚旋转轴(6)。 低导热构件(10)插入在托盘(5)和坩埚旋转轴(6)之间的接合表面上。 低导热构件(10)形成为大致筒状,并且以坩埚旋转轴(6)的突出部穿过低导热构件(10)的中心孔插入的方式插入, 。 由此,在托盘(5)的底部下方形成有间隙部(11)。

    Data management apparatus
    9.
    发明授权
    Data management apparatus 有权
    数据管理装置

    公开(公告)号:US07882362B2

    公开(公告)日:2011-02-01

    申请号:US11583075

    申请日:2006-10-19

    IPC分类号: G06F21/00

    摘要: In a data management apparatus (1) including a recording device (12) for recording contents data and a data processing section for processing the contents data, first management data for managing the contents data according to a first reference is recorded in the recording device (12), and the data processing section reproduces the contents data based on the first management data, and transfers the contents data to an external device (2) based on second management data which is used for management of the contents data by the external device according to a second reference different from the first reference. As a result, the protection of the contents data can be made while complying with related laws, and the contents data with optional functions added thereto can be backed up.

    摘要翻译: 在包括用于记录内容数据的记录装置(12)和用于处理内容数据的数据处理部分的数据管理装置(1)中,用于根据第一参考来管理内容数据的第一管理数据被记录在记录装置 12),并且数据处理部分基于第一管理数据再现内容数据,并且基于用于由外部设备管理内容数据的第二管理数据将内容数据传送到外部设备(2),根据 到不同于第一参考的第二参考。 因此,可以在遵守相关法律的情况下保护内容数据,并且可以备份附加有可选功能的内容数据。