摘要:
At least either of the light entering plane or the light exiting plane is parallel to the (111) crystal face of the CaF2 crystal and the laser beam entering from the entering plane passes through the plane located between the [111] axis and the first azimuth axis in the locus of rotation of the [001] axis around the [111] axis and including the [111] axis and the first azimuth axis, the plane located between the [111] axis and the second azimuth axis in the locus of rotation of the [010] axis around the [111] axis and including the [111] axis and the second azimuth axis or the plane located between the [111] axis and the third azimuth axis in the locus of rotation of the [100] axis around the [111] axis and including the [111] axis and the third azimuth axis and exits from the exiting plane.
摘要:
At least either of the light entering plane or the light exiting plane is parallel to the (111) crystal face of the CaF2 crystal and the laser beam entering from the entering plane passes through the plane located between the [111] axis and the first azimuth axis in the locus of rotation of the [001] axis around the [111] axis and including the [111] axis and the first azimuth axis, the plane located between the [111] axis and the second azimuth axis in the locus of rotation of the [010] axis around the [111] axis and including the [111] axis and the second azimuth axis or the plane located between the [111] axis and the third azimuth axis in the locus of rotation of the [100] axis around the [111] axis and including the [111] axis and the third azimuth axis and exits from the exiting plane.
摘要:
The present invention relates to a long pulse gas laser apparatus for lithography further improved in the laser oscillation efficiency and stability increased by addition of xenon gas. A gas laser apparatus for lithography has a pair of discharge electrodes 2 provided in a laser chamber 1 and emits laser beam having a laser pulse width (Tis) of not less than 40 ns by exciting a laser gas sealed in the laser chamber 1 by electric discharge between the pair of discharge electrodes 2, the laser gas containing xenon in an amount not less than 2 ppm and not more than 100 ppm in partial pressure ratio. The laser gas has been heated at least when the laser beam is emitted.
摘要:
A master oscillator system may include a grating configured to function as one resonator mirror in an optical resonator, a spectral bandwidth tuning unit configured to tune the spectral bandwidth of a laser beam transmitted within the optical resonator, a storage unit configured to store a control value of the spectral bandwidth tuning unit corresponding to a desired spectral bandwidth and a controller configured to control the spectral bandwidth tuning unit based on the control value stored in the storage unit.
摘要:
This disclosure is directed to widen an adjustable range of the spectral linewidth of laser light output from a laser apparatus. This laser apparatus may include: (1) an excitation source configured to excite a laser medium in a laser gain space, (2) an optical resonator including an output coupler arranged on one side of an optical path through the laser gain space and a wavelength dispersion element arranged on the other side of the optical path through the laser gain space, and (3) a switching mechanism configured to switch a beam-width magnification or reduction factor by placing or removing at least one beam-width change optical system for expanding or reducing a beam width in or from an optical path between the laser gain space and the wavelength dispersion element or by inverting orientation of the at least one beam-width change optical system in the optical path.
摘要:
In the invention, a first processor that controls operation of a predetermined controlled unit and a second processor are operated in a first mode, a second mode, and a third mode, in the first mode the first processor and second processor are operable respectively, in the second mode respective amounts of power supplied to the first and second processors are lower than that in the first mode, in the third mode respective amounts of power supplied to the first and second processors are an amount between that in the first mode and that in the second mode and at least the predetermined controlled unit is operable, and in the second mode, the first processor puts a process related to the first processor before a process related to the second processor until the second mode is transited to the third mode.
摘要:
To provide an illumination device in which there is no variation in light intensity distribution of the illumination device, and in which illumination spots, particularly light intensity spots, are not prone to occur in a read image in an image reading device, by maintaining a constant gap between a light source and an end face of a light guide. The illumination device includes: a light guide having an end face for taking in light, a diffuse reflecting surface for diffusely reflecting the light taken in from the end face, and a light exit surface for emitting the light that is diffusely reflected at the diffuse reflecting surface towards an irradiation surface. The illumination device further include a reflector having a diffuse reflecting surface that reflects light from the light source toward the one end face of the light guide. The light guide has, at the one end, a flange portion that abuts the reflector, the light source is mounted to a circuit board, and the reflector is held between the flange portion of the light guide and circuit board so as to maintain a predetermined gap between the light source and light guide.
摘要:
An electronic endoscopic apparatus includes an endoscopic scope and an image processing processor. The endoscopic scope includes a solid-state imaging device, an imaging-side multiplying unit, and an imaging synchronization signal generating unit. The image processing processor includes a display clock generating unit, a monitor synchronization signal generating unit, a master imaging clock generating unit, a processor-side multiplying/dividing unit, a phase-comparison oscillation control unit, and a display timing adjustment unit.
摘要:
A gear transmission comprises a crankshaft that eccentrically rotates one of an internal gear and an external gear. A first gear is attached to one end of the crankshaft. A ring gear having internal teeth meshes with the first gear. An intermediate gear meshes with external teeth of the ring gear. A second gear is attached to one end of an output shaft of a motor and meshes with the intermediate gear. The motor and the crankshaft are positioned, relative to the intermediate gear, on the same side in the axial direction of the gear transmission.
摘要:
A mail receiver includes: a mail receiving unit that receives a mail to which an attached file and a reference time limit of the attached file are appended; a monitoring unit that monitors whether the attached file was referred to by a user; and a warning unit that warns the user of one which the reference time limit is approaching among a non-referenced attached file.Therefore it can manage time limits regarding a received mail more certainly.