Master oscillator system and laser apparatus
    1.
    发明授权
    Master oscillator system and laser apparatus 有权
    主振荡器系统和激光设备

    公开(公告)号:US08675697B2

    公开(公告)日:2014-03-18

    申请号:US13597556

    申请日:2012-08-29

    IPC分类号: H01S3/10

    摘要: A master oscillator system may include a grating configured to function as one resonator mirror in an optical resonator, a spectral bandwidth tuning unit configured to tune the spectral bandwidth of a laser beam transmitted within the optical resonator, a storage unit configured to store a control value of the spectral bandwidth tuning unit corresponding to a desired spectral bandwidth and a controller configured to control the spectral bandwidth tuning unit based on the control value stored in the storage unit.

    摘要翻译: 主振荡器系统可以包括被配置为用作光学谐振器中的一个谐振器反射镜的光栅,被配置为调节在光学谐振器内传输的激光束的光谱带宽的光谱带宽调谐单元,被配置为存储控制值 的光谱带宽调谐单元,以及配置为基于存储在存储单元中的控制值来控制光谱带宽调谐单元的控制器。

    MASTER OSCILLATOR SYSTEM AND LASER APPARATUS
    2.
    发明申请
    MASTER OSCILLATOR SYSTEM AND LASER APPARATUS 有权
    主振荡器系统和激光设备

    公开(公告)号:US20130230064A1

    公开(公告)日:2013-09-05

    申请号:US13597556

    申请日:2012-08-29

    IPC分类号: H01S3/10

    摘要: A master oscillator system may include a grating configured to function as one resonator mirror in an optical resonator, a spectral bandwidth tuning unit configured to tune the spectral bandwidth of a laser beam transmitted within the optical resonator, a storage unit configured to store a control value of the spectral bandwidth tuning unit corresponding to a desired spectral bandwidth and a controller configured to control the spectral bandwidth tuning unit based on the control value stored in the storage unit.

    摘要翻译: 主振荡器系统可以包括被配置为用作光学谐振器中的一个谐振器反射镜的光栅,被配置为调节在光学谐振器内传输的激光束的光谱带宽的光谱带宽调谐单元,被配置为存储控制值 的光谱带宽调谐单元,以及配置为基于存储在存储单元中的控制值来控制光谱带宽调谐单元的控制器。

    Laser device for exposure apparatus
    3.
    发明授权
    Laser device for exposure apparatus 有权
    用于曝光设备的激光装置

    公开(公告)号:US09257809B2

    公开(公告)日:2016-02-09

    申请号:US13401734

    申请日:2012-02-21

    摘要: A laser device for an exposure apparatus may include: a MOPA-type or MOPO-type laser device including a seed laser and at least one gas discharge-pumped amplifier stage that receives output light from the seed laser as an input, amplifies the light, and outputs the amplified light; and at least one of a laser gas control device that at least changes the total pressure of a laser gas in said amplifier stage in accordance with requested energy and a laser power source control device that at least changes pump intensity of discharge electrodes in said amplifier stage in accordance with said requested energy, in a case where the energy of laser output light from said laser device is to be changed discontinuously in response to a request from an exposure apparatus.

    摘要翻译: 用于曝光装置的激光装置可以包括:MOPA型或MOPO型激光装置,其包括种子激光器和至少一个气体放电泵浦放大器级,其接收来自种子激光器的输出光作为输入,放大光, 并输出放大的光; 以及激光气体控制装置中的至少一个,所述激光气体控制装置至少根据所要求的能量来改变所述放大器级中的激光气体的总压力,激光电源控制装置至少改变放大器级中的放电电极的泵浦强度 根据所述要求的能量,在来自所述激光装置的激光输出光的能量将根据来自曝光装置的请求而不连续地改变的情况下。

    CO2 recovery device
    5.
    发明授权
    CO2 recovery device 有权
    CO2回收装置

    公开(公告)号:US09399189B2

    公开(公告)日:2016-07-26

    申请号:US14004708

    申请日:2012-04-11

    IPC分类号: B01D53/14

    摘要: A CO2 recovery device includes a cooling tower including a cooling unit for bringing the flue gas, which contains CO2, into contact with water so as to cool flue gas; a CO2-absorbing unit for bringing the flue gas into contact with a CO2 absorbent (lean solution) so as to remove CO2 from flue gas; and a regenerator including an absorbent regenerating unit for releasing CO2 from a rich solution so as to regenerate the CO2 absorbent. The CO2-absorbing unit includes: a cocurrent flow CO2-absorbing unit provided in a cocurrent flow CO2 absorber, for bringing the flue gas into contact with the CO2 absorbent in a cocurrent flow so as to remove CO2 from flue gas and a countercurrent CO2-absorbing unit provided in a CO2 absorber, for bringing the flue gas into contact with the CO2 absorbent in a countercurrent flow so as to remove CO2 from flue gas.

    摘要翻译: CO 2回收装置包括:冷却塔,其包括用于使含有CO 2的烟道气与水接触以冷却烟道气的冷却单元; 用于使烟道气与CO 2吸收剂(贫溶液)接触以便从烟道气中除去CO 2的CO 2吸收单元; 以及再生器,其包括用于从富溶液中释放CO 2以便再生CO 2吸收剂的吸收剂再生单元。 二氧化碳吸收单元包括:并流CO2吸收单元,其设置在并流CO2吸收器中,用于使烟道气与CO 2吸收剂以并流方式接触,以便从烟气中除去CO 2和逆流CO2- 提供在CO 2吸收器中的吸收单元,用于使烟气以逆流流动与CO 2吸收剂接触,以便从烟道气中除去CO 2。

    Transmission system, transmission device, packet loss ratio measurement method, and packet loss ratio measurement program
    7.
    发明授权
    Transmission system, transmission device, packet loss ratio measurement method, and packet loss ratio measurement program 有权
    传输系统,传输设备,丢包率测量方法和丢包率测量程序

    公开(公告)号:US09264332B2

    公开(公告)日:2016-02-16

    申请号:US14129075

    申请日:2012-06-12

    摘要: In a transmission system capable of measuring packet loss ratio between arbitrary devices upon a transmission path without increasing bandwidth of an OAM frame band, a plurality of transmission devices which have been disposed upon a transmission path are provided with a frame analysis unit which receives data frames so as to analyze the type of the data frames, a count processing unit which stores the number of received frames included in the data frames into storage module provided beforehand, an output line end portion which outputs the data frames, and an OAM processing unit which calculates the packet loss ratio in the transmission path using the number of received frames. The frame analysis unit has a function which, if the data frames are OAM frames, copies the data frames and the OAM processing unit has a function which calculates the packet loss ratio using the copied OAM frames.

    摘要翻译: 在能够测量传输路径上的任意设备之间的分组丢失率而不增加OAM帧频带宽的传输系统中,设置在传输路径上的多个传输设备设置有帧分析单元,其接收数据帧 为了分析数据帧的类型,将数据帧中包含的接收帧的数量存储在预先提供的存储模块中的计数处理单元,输出数据帧的输出线路端部分和OAM处理单元, 使用接收帧的数量来计算传输路径中的丢包率。 帧分析单元具有这样的功能:如果数据帧是OAM帧,则复制数据帧,并且OAM处理单元具有使用复制的OAM帧来计算分组丢失率的功能。

    Substrate processing apparatus and substrate processing method
    8.
    发明授权
    Substrate processing apparatus and substrate processing method 有权
    基板加工装置及基板处理方法

    公开(公告)号:US09070549B2

    公开(公告)日:2015-06-30

    申请号:US12680799

    申请日:2008-09-22

    IPC分类号: B08B5/02 H01L21/02 H01L21/67

    CPC分类号: H01L21/02052 H01L21/67028

    摘要: A drying gas is supplied into a drying chamber in a substantially horizontal direction, an obliquely downward direction descendent from the substantially horizontal direction, or a vertically downward direction under a state where a wafer is immersed in a cleaning liquid in a cleaning tank. The wafer is moved from the cleaning tank into the drying chamber, with the drying gas being supplied into the drying chamber. At this time, the supply of the drying gas into the drying chamber is stopped, under a condition where a part of the wafer is immersed in the cleaning liquid stored in the cleaning tank. After the movement of the wafer into the drying chamber has been finished, a drying gas is supplied into the drying chamber in an obliquely upward direction ascendant from the substantially horizontal direction or a vertically upward direction.

    摘要翻译: 在将晶片浸入清洗槽中的清洗液体的状态下,将干燥气体从大致水平方向或垂直向下方向向大致水平方向,倾斜向下方向供给到干燥室。 将晶片从清洁槽移动到干燥室中,其中干燥气体被供应到干燥室中。 此时,在将晶片的一部分浸渍在存储在清洗槽中的清洗液中的状态下,将干燥气体供给到干燥室内停止。 在将晶片移动到干燥室中之后,干燥气体从大致水平方向或垂直向上方向上升的斜上方向供给干燥室。

    Composition containing antisense oligonucleotide to micro RNA
    10.
    发明授权
    Composition containing antisense oligonucleotide to micro RNA 有权
    含有反义寡核苷酸至微RNA的组合物

    公开(公告)号:US08889649B2

    公开(公告)日:2014-11-18

    申请号:US13884436

    申请日:2011-11-10

    摘要: Provided is a composition that contains an antisense oligonucleotide to a micro RNA and is capable of inhibiting the growth of cancer cells. The present invention, as one aspect, relates to a composition for suppressing the growth of human cancer cells, the composition containing an antisense oligonucleotide to a micro RNA, wherein the micro RNA is selected from the group consisting of hsa-miR-133a, hsa-miR-133b, hsa-miR-346 and hsa-miR-361-3p. The present invention, as another aspect, relates to a composition for suppressing the growth of human head/neck cancer cells, the composition containing an antisense oligonucleotide to a micro RNA, wherein the micro RNA is selected from the group consisting of hsa-miR-92a, hsa-miR-133a, hsa-miR-133b, hsa-miR-139-5p, hsa-miR-197, hsa-miR-328, hsa-miR-346, hsa-miR-361-3p, hsa-miR-605, hsa-miR-766, hsa-miR-1228, hsa-miR-1252, hsa-miR-1260 and hsa-miR-1271.

    摘要翻译: 本发明提供了含有对微RNA的反义寡核苷酸并且能够抑制癌细胞生长的组合物。 本发明一方面涉及抑制人癌细胞生长的组合物,该组合物含有对微RNA的反义寡核苷酸,其中所述微RNA选自hsa-miR-133a,hsa -miR-133b,hsa-miR-346和hsa-miR-361-3p。 本发明另一方面涉及抑制人头颈部癌细胞生长的组合物,该组合物含有对微RNA的反义寡核苷酸,其中微RNA选自hsa-miR- 92a,hsa-miR-133a,hsa-miR-133b,hsa-miR-139-5p,hsa-miR-197,hsa-miR-328,hsa-miR-346,hsa-miR-361-3p, miR-605,hsa-miR-766,hsa-miR-1228,hsa-miR-1252,hsa-miR-1260和hsa-miR-1271。