Method for catalytic growth of nanotubes or nanofibers comprising a nisi alloy diffusion barrier
    3.
    发明申请
    Method for catalytic growth of nanotubes or nanofibers comprising a nisi alloy diffusion barrier 有权
    包含nisi合金扩散阻挡层的纳米管或纳米纤维的催化生长方法

    公开(公告)号:US20050235906A1

    公开(公告)日:2005-10-27

    申请号:US10497079

    申请日:2002-12-03

    摘要: The invention relates to a process for the growth of nanotubes or nanofibers on a substrate comprising at least an upper layer made of a first material, wherein: the formation, on the surface of the upper layer, of a barrier layer made of an alloy of the first material and of a second material, said alloy being stable at a first temperature; the formation of spots of catalyst that are made of the second material, on the surface of the alloy layer; and the growth of nanotubes or nanofibers at a second temperature below said first temperature. The alloy layer allows effective growth of nanotubes/nanofibers from catalyst spots on the surface of said alloy layer. This is because the alloy layer constitutes a diffusion barrier preventing the catalyst from diffusing into the growth substrate, which barrier is stable at the catalytic nanotube/nanofiber growth temperature.

    摘要翻译: 本发明涉及一种用于在基材上生长纳米管或纳米纤维的方法,该方法至少包括由第一材料制成的上层,其中:在上层的表面上形成由合金形成的阻挡层 所述第一材料和第二材料,所述合金在第一温度下是稳定的; 在合金层的表面上形成由第二材料制成的催化剂斑点; 以及在低于所述第一温度的第二温度下纳米管或纳米纤维的生长。 合金层允许纳米管/纳米纤维从所述合金层表面上的催化剂点有效生长。 这是因为合金层构成阻止催化剂扩散到生长衬底中的扩散阻挡层,该阻挡层在催化纳米管/纳米纤维生长温度下是稳定的。

    Method for catalytic growth of nanotubes or nanofibers comprising a NiSi alloy diffusion barrier
    4.
    发明授权
    Method for catalytic growth of nanotubes or nanofibers comprising a NiSi alloy diffusion barrier 有权
    包含NiSi合金扩散阻挡层的纳米管或纳米纤维的催化生长方法

    公开(公告)号:US07491269B2

    公开(公告)日:2009-02-17

    申请号:US10497079

    申请日:2002-12-03

    IPC分类号: C30B29/62

    摘要: The invention relates to a process for the growth of nanotubes or nanofibers on a substrate comprising at least an upper layer made of a first material, wherein: the formation, on the surface of the upper layer, of a barrier layer made of an alloy of the first material and of a second material, said alloy being stable at a first temperature; the formation of spots of catalyst that are made of the second material, on the surface of the alloy layer; and the growth of nanotubes or nanofibers at a second temperature below said first temperature. The alloy layer allows effective growth of nanotubes/nanofibers from catalyst spots on the surface of said alloy layer. This is because the alloy layer constitutes a diffusion barrier preventing the catalyst from diffusing into the growth substrate, which barrier is stable at the catalytic nanotube/nanofiber growth temperature.

    摘要翻译: 本发明涉及一种用于在基材上生长纳米管或纳米纤维的方法,该方法至少包括由第一材料制成的上层,其中:在上层的表面上形成由合金形成的阻挡层 所述第一材料和第二材料,所述合金在第一温度下是稳定的; 在合金层的表面上形成由第二材料制成的催化剂斑点; 以及在低于所述第一温度的第二温度下纳米管或纳米纤维的生长。 合金层允许纳米管/纳米纤维从所述合金层表面上的催化剂点有效生长。 这是因为合金层构成阻止催化剂扩散到生长衬底中的扩散阻挡层,该阻挡层在催化纳米管/纳米纤维生长温度下是稳定的。

    Process for the localized growth of nanotubes and process for fabricating a self-aligned cathode using the nanotube growth process
    5.
    发明授权
    Process for the localized growth of nanotubes and process for fabricating a self-aligned cathode using the nanotube growth process 有权
    纳米管局部生长工艺及使用纳米管生长工艺制造自对准阴极的工艺

    公开(公告)号:US07214553B2

    公开(公告)日:2007-05-08

    申请号:US10490300

    申请日:2002-09-20

    IPC分类号: H01L21/00

    摘要: The invention relates to a process for the controlled growth of nanotubes or nanofibers on a substrate, characterized in that it furthermore comprises the production, on the substrate (11), of a bi-layer structure composed of a layer of catalyst material (71), for catalyzing the growth of nanotubes or nanofibers, and a layer of associated material, said associated material being such that it forms a noncatalytic alloy with the catalyst material at high temperature.The invention also relates to a process for fabricating a field-emission cathode using the above nanotube or nanofiber fabrication process.These processes allow very precise positioning of the catalyst spots from which the nanotubes and nanofibers can be grown and allow the fabrication of cathodes for which the nanotubes or nanofibers are self-aligned with the aperture in the extraction grid.Applications: electron tubes, nanolithography.

    摘要翻译: 本发明涉及一种在衬底上控制纳米管或纳米纤维生长的方法,其特征在于,还包括在基底(11)上生产由催化剂材料层(71)构成的双层结构, ,用于催化纳米管或纳米纤维的生长以及相关材料层,所述相关材料使得其在高温下与催化剂材料形成非催化合金。 本发明还涉及使用上述纳米管或纳米纤维制造工艺制造场致发射阴极的方法。 这些方法允许催化剂斑点的非常精确的定位,从该纳米管和纳米纤维可以生长催化剂斑点,并允许制造其中纳米管或纳米纤维与提取网格中的孔自对准的阴极。 应用:电子管,纳米光刻。

    Method for the growing of heteroepitaxial layers within a confinement
space
    6.
    发明授权
    Method for the growing of heteroepitaxial layers within a confinement space 失效
    在限制空间内生长异质外延层的方法

    公开(公告)号:US5262348A

    公开(公告)日:1993-11-16

    申请号:US769243

    申请日:1991-10-01

    摘要: Disclosed is a method for the growing of heteroepitaxial layers of monocrystalline semiconductor materials. To this end, on a substrate made of a material of a first type, there is made a seed of a second type of material. This seed is between a face of the substrate and a confinement layer which defines a confinement space with the face of the substrate. A vapor phase epitaxy of a material of the second type is then effected in the confinement space. This material of the second type grows from the seed in the confinement space. The method can be applied to the manufacture of heterogeneous semiconductor structures and to the three-dimensional integration of semiconductor components.

    摘要翻译: 公开了用于生长单晶半导体材料的异质外延层的方法。 为此,在由第一种材料制成的基片上,制成第二类材料的种子。 该种子位于衬底的面和限定层之间,该限制层限定了与衬底的表面的限制空间。 然后在约束空间中实现第二类材料的气相外延。 第二种类型的材料从限制空间中的种子生长。 该方法可以应用于非均匀半导体结构的制造和半导体部件的三维集成。

    Micropoint cathode electron source with a focusing electrode
    7.
    发明授权
    Micropoint cathode electron source with a focusing electrode 失效
    具有聚焦电极的微点阴极电子源

    公开(公告)号:US5581146A

    公开(公告)日:1996-12-03

    申请号:US458821

    申请日:1995-06-02

    CPC分类号: H01J9/025 H01J3/022

    摘要: Electron source made notably in the form of a micropoint cathode electrode in which a microcathode is located in a cavity (CA) of a dielectric (3). A first gate electrode (VG1) surrounds the cavity (CA) and a second gate electrode (VG2) surrounds the first gate electrode (VG1). The different electrodes are carried to potentials such that the first gate electrode (VG1) acts as an extraction electrode and the second gate electrode acts as a focusing electrode.

    摘要翻译: 特别是以微点阴极电极的形式形成的电子源,其中微电极位于电介质(3)的空腔(CA)中。 第一栅电极(VG1)包围空腔(CA),第二栅电极(VG2)围绕第一栅电极(VG1)。 不同的电极被携带到电位,使得第一栅电极(VG1)用作引出电极,第二栅电极用作聚焦电极。

    Field emission device
    8.
    发明授权
    Field emission device 失效
    场发射装置

    公开(公告)号:US06476408B1

    公开(公告)日:2002-11-05

    申请号:US09486693

    申请日:2000-03-02

    IPC分类号: H01L2912

    CPC分类号: H01J1/3042

    摘要: A field-emission device includes at least one plane cathode made of conductive material with a low electron affinity located on a face of a substrate carrying a layer of a dielectric material, which layer has at least one cavity in which the cathode is located. A gate made of conductive material is located on the dielectric layer and has an aperture centered with respect to the cavity. The conductive material with a low electron affinity is a material deposited in amorphous form. Such a device may find particular application to electron guns or display devices.

    摘要翻译: 场致发射器件包括至少一个由具有低电子亲和力的导电材料构成的平面阴极,该平面阴极位于承载电介质材料层的衬底的表面上,该层具有至少一个阴极所在的空腔。 由导电材料制成的栅极位于电介质层上,并且具有相对于空腔中心的孔。 具有低电子亲和力的导电材料是以非晶形式沉积的材料。 这样的装置可以发现特别适用于电子枪或显示装置。

    Screen control with cathodes having low electronic affinity
    9.
    发明授权
    Screen control with cathodes having low electronic affinity 失效
    具有低电子亲和力的阴极的屏幕控制

    公开(公告)号:US06356028B1

    公开(公告)日:2002-03-12

    申请号:US09485719

    申请日:2000-03-02

    IPC分类号: G09G322

    CPC分类号: G09G3/22 G09G2300/0842

    摘要: A drive system which makes it possible to drive a matrix of picture elements, each including a cathode made of a material with low electron affinity. Each of crossover-point circuits include a switching device associated with a cathode of a picture element and makes it possible, with the aid of memory circuits, to connect the cathode to a current source during a time necessary for the driving of all the rows of the matrix and to regulate the current conduction of the corresponding picture element. Such a drive system may find particular application to electron guns and display screens.

    摘要翻译: 驱动系统,其可以驱动像素矩阵,每个图像元素包括由具有低电子亲和力的材料制成的阴极。 交叉点电路中的每一个包括与图像元件的阴极相关联的开关器件,并且借助于存储器电路使得可以在驱动所有行的所需时间期间将阴极连接到电流源 矩阵并调节相应图像元素的电流传导。 这样的驱动系统可以发现电子枪和显示屏的特定应用。