SULPHONIUM SALT INITIATORS
    1.
    发明申请
    SULPHONIUM SALT INITIATORS 审中-公开
    硫酸钡发射器

    公开(公告)号:US20100297541A1

    公开(公告)日:2010-11-25

    申请号:US12681786

    申请日:2008-09-29

    Abstract: Compounds of the formula (I), wherein X is a single bond, CRaRbO, S, NRc or NCORc; Z is formula (II) or C3-C20heteroaryl; L, L1, L2, L3, L4, L5, L6, L7 and L8 for example independently of one another are hydrogen or an organic substituent; Ra, Rb and Rc independently of one another are hydrogen or an organic substituent; R is for example is C5-C20heteroaryl or C6-C14 aryl; and Y is an inorganic or organic anion; are suitable as photolatent acid generators.

    Abstract translation: 式(I)化合物,其中X为单键,CRaRbO,S,NRc或NCORc; Z是式(II)或C 3 -C 20杂芳基; L,L1,L2,L3,L4,L5,L6,L7和L8例如彼此独立地为氢或有机取代基; R a,R b和R c彼此独立地是氢或有机取代基; R是例如C 5 -C 20杂芳基或C 6 -C 14芳基; Y为无机或有机阴离子; 适合作为光潜酸产生剂。

    Sulphonium salt initiators
    2.
    发明授权
    Sulphonium salt initiators 有权
    锍盐引发剂

    公开(公告)号:US08652752B2

    公开(公告)日:2014-02-18

    申请号:US12681785

    申请日:2008-09-22

    Abstract: Compounds of the Formula (I), wherein L1, L′1, L″1, L2, L′2, L″2, L3, L′3, L″3, L4, L′4 and L″4 for example are hydrogen or COT; R, R′ and R″ for example are hydrogen, C6-C12aryl or C3-C20heteroaryl; X, X′ and X″ for example are O, S, single bond, NRa or NCORa, T is for example hydrogen, C1-C20alkyl, C3-C12cycloalkyl, C2-C20alkenyl, C5-C12cycloalkenyl, C7-C18cycloalkylenaryl, C5-C18cycloalkylenheteroaryl, C6-C14aryl, providedthat at least one of R, R′ or R″ is unsubstituted or substituted C3-C20heteroaryl; and Y is an inorganic or organic anion; are suitable as photolatent acid generators.

    Abstract translation: 式(I)的化合物,其中L 1,L 1,L'1,L 2,L 2,L'2,L3,L'3,L'3, '4例如是氢或COT; R,R'和R“例如是氢,C 6 -C 12芳基或C 3 -C 20杂芳基; 例如,X,X'和X“是O,S,单键,NR a或NCOR a,T是例如氢,C 1 -C 20烷基,C 3 -C 12环烷基,C 2 -C 20链烯基,C 5 -C 12环烯基,C 7 -C 18环烷基芳基, C 18 -C 14芳基,其中R,R'或R“中的至少一个是未取代的或取代的C 3 -C 20杂芳基; Y为无机或有机阴离子; 适合作为光潜酸产生剂。

    SULPHONIUM SALT INITIATORS
    3.
    发明申请
    SULPHONIUM SALT INITIATORS 有权
    硫酸钡发射器

    公开(公告)号:US20100297540A1

    公开(公告)日:2010-11-25

    申请号:US12681785

    申请日:2008-09-22

    Abstract: Compounds of the Formula (I), wherein L1, L′1, L″1, L2, L′2, L″2, L3, L′3, L″3, L4, L′4 and L″4 for example are hydrogen or COT; R, R′ and R″ for example are hydrogen, C6-C12aryl or C3-C20heteroaryl; X, X′ and X″ for example are O, S, single bond, NRa or NCORa, T is for example hydrogen, C1-C20alkyl, C3-C12cycloalkyl, C2-C20alkenyl, C5-C12cycloalkenyl, C7-C18cycloalkylenaryl, C5-C18cycloalkylenheteroaryl, C6-C14aryl, providedthat at least one of R, R′ or R″ is unsubstituted or substituted C3-C20heteroaryl; and Y is an inorganic or organic anion; are suitable as photolatent acid generators.

    Abstract translation: 例如式(I)的化合物,其中L1,L 1,L“1,L2,L'2,L”2,L3,L'3,L“3,L4,L'4和L”4 是氢或COT; R,R'和R“例如是氢,C 6 -C 12芳基或C 3 -C 20杂芳基; X,X'和X“例如是O,S,单键,NR a或NCOR a,T是例如氢,C 1 -C 20烷基,C 3 -C 12环烷基,C 2 -C 20烯基,C 5 -C 12环烯基,C 7 -C 18环烷基芳基,C 5 -C 18环烷基杂芳基 C 6 -C 14芳基,条件是R,R'或R“中的至少一个为未取代或取代的C 3 -C 20杂芳基; Y为无机或有机阴离子; 适合作为光潜酸产生剂。

    Unsaturated oxime derivatives and the use thereof as latent acids
    4.
    发明授权
    Unsaturated oxime derivatives and the use thereof as latent acids 有权
    不饱和肟衍生物及其作为潜伏酸的用途

    公开(公告)号:US06703182B1

    公开(公告)日:2004-03-09

    申请号:US09763016

    申请日:2001-02-15

    Abstract: Compounds of formulae I, II or III wherein m is zero or 1; n is 1, 2 or 3; R1 inter alia is unsubstituted or substituted phenyl, or naphthyl, anthracyl, phenanthryl, a heteroaryl radical, or C2-C12alkenyl; R′1 inter alia is vinylene, phenylene, naphthylene, diphenylene or oxydiphenylene; R2 inter alia is CN, C1-C4haloalkyl, C2-C6alkoxycarbonyl, phenoxycarbonyl, or benzoyl; R3 inter alia is C1-C18alkylsulfonyl, phenyl-C1-C3alkylsulfonyl, camphorylsulfonyl, or phenylsulfonyl; R′3 inter alia is C2-C12alkylenedisulfonyl, phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl; R4 and R5 inter alia are hydrogen, halogen, C1-C8alkyl, C1-C6alkoxy, C1-C4haloalkyl, CN, NO2, C2-C6alkanoyl, benzoyl, phenyl, —S-phenyl, OR6, SR9, NR7R8, C2-C6alkoxycarbonyl or phenoxycarbonyl; R6 inter alia is hydrogen, phenyl or C1-C12alkyl; R7 and R8 inter alia are hydrogen or C1-C12alkyl; R9 inter alia is C1-C12 alkyl; R10, R11 and R12 inter alia are C1-C6alkyl or phenyl; upon irradiation react as acid generating compounds and thus are suitable in photoresist applications.

    Abstract translation: 其中m为式I,II或III的化合物为0或1; n为1,2或3; R 1特别是未取代或取代的苯基,或萘基,蒽基,菲基,杂芳基或C 2 -C 12烯基; 尤其是亚乙烯基,亚苯基,亚萘基,二亚苯基或氧联二苯基; R2特别是CN,C 1 -C 4卤代烷基,C 2 -C 6烷氧基羰基,苯氧基羰基或苯甲酰基; R3特别是C 1 -C 18烷基磺酰基,苯基-C 1 -C 3烷基磺酰基,樟脑磺酰基或苯基磺酰基; R'3特别是C 2 -C 12亚烷基二磺酰基,亚苯基二磺酰基,萘基二磺酰基,二苯基二磺酰基或氧基二苯基二磺酰基; R4和R5特别是氢,卤素,C1-C8烷基,C1-C6烷氧基,C1-C4卤代烷基,CN,NO2,C2-C6烷酰基,苯甲酰基,苯基,-S-苯基,OR6,SR9,NR7R8,C2-C6烷氧基羰基或苯氧基羰基 ; R6尤其是氢,苯基或C 1 -C 12烷基; R 7和R 8尤其是氢或C 1 -C 12烷基; R9尤其是C1-C12烷基; R 10,R 11和R 12特别是C 1 -C 6烷基或苯基; 在照射时作为产生酸的化合物反应,因此适用于光刻胶应用。

    Photoinitiators having chain transfer groups polymerized to obtain macrophotoinitiators useful to give block copolymers
    5.
    发明授权
    Photoinitiators having chain transfer groups polymerized to obtain macrophotoinitiators useful to give block copolymers 失效
    具有链转移基团的光引发剂被聚合以获得可用于产生嵌段共聚物的大分子引发剂

    公开(公告)号:US06458864B1

    公开(公告)日:2002-10-01

    申请号:US09701457

    申请日:2000-11-27

    Abstract: Compounds with chain transfer groups of the formula I, II, III and IV wherein a is 1 or 2; Ar and Ar1 inter alia are phenyl; Ar2 inter alia is phenylene, these groups being unsubstituted or substituted; X is a direct bond, —O—, —S— or —N(R6)—; Y inter alia is hydrogen or C1-C12alkyl; M1 is —NR3R4 or —OH, or M1 is Ar when R1 and R2 are alkoxy, or aryloxy; R1 and R2 independently of one another e.g. are C1-C8alkyl; R3 and R4 for example are C1-C12alkyl, or together are C3-C7alkylene; R5 inter alia is C1-C6alkylene or a direct bond; R6 is for example hydrogen; and Z is a divalent radical, provided that at least one of the radicals Ar, Ar1, Ar2, R1, R2, R3, R4, R5 or Y is substituted by SH groups; are suitable for the thermal preparation of macrophotoinitiators which are polymerized photochemically to give block-copolymers.

    Abstract translation: 具有式I,II,III和IV的链转移基团的化合物是1或2; Ar和Ar1特别是苯基; Ar2特别是亚苯基,这些基团是未取代的或取代的; X是直接键,-O - , - S-或-N(R6) - ; Y尤其是氢或C 1 -C 12烷基; 当R1和R2为烷氧基时,M1为-NR3R4或-OH,或M1为Ar,或为芳氧基; R1和R2彼此独立地例如。 是C 1 -C 8烷基; R 3和R 4例如是C 1 -C 12烷基,或一起是C 3 -C 7亚烷基; R5尤其是C1-C6亚烷基或直接键; R6是例如氢; 并且Z是二价基团,条件是基团Ar,Ar 1,Ar 2,R 1,R 2,R 3,R 4,R 5或Y中的至少一个被SH基取代;适用于光化学聚合的高分子引发剂的热制备 得到嵌段共聚物。

    Oxime sulfonates and the use thereof as latent sulfonic acids
    6.
    发明授权
    Oxime sulfonates and the use thereof as latent sulfonic acids 失效
    肟磺酸盐及其作为潜在磺酸的用途

    公开(公告)号:US6004724A

    公开(公告)日:1999-12-21

    申请号:US104676

    申请日:1998-06-25

    Abstract: New oximsulfonate compounds of the formulae I or II, ##STR1## wherein m is 0 or 1; x is 1 or 2; R.sub.1 is, for example phenyl, which is unsubstituted or substituted or R.sub.1 is a heteroaryl radical that is unsubstituted or substituted, or, if m is 0, R.sub.1 additionally is C.sub.2 -C.sub.6 alkoxycarbonyl, phenoxycarbonyl or CN; R'.sub.1 is for example C.sub.2 -C.sub.12 alkylene, phenylene; R.sub.2 has for example one of the meanings of R.sub.1 ; n is 1 or 2; R.sub.3 is for example C.sub.1 -C.sub.18 alkyl, R'.sub.3 when x is 1, has one of the meanings given for R.sub.3, or R'.sub.3 in the formula IV and when x is 2 in the formula 1, is for example C.sub.2 -C.sub.12 alkylene, phenylene; R.sub.4 and R.sub.5 are independently of each other for example hydrogen, halogen, C.sub.1 -C.sub.6 alkyl; R.sub.6 is for example hydrogen, phenyl; R.sub.7 and R.sub.8 are independently of each other for example hydrogen or C.sub.1 -C.sub.12 -alkyl; R.sub.9 is for example C.sub.1 -C.sub.12 alkyl; A is S, O, NR.sub.6, or a group of formula A1, A2, A3 or A4 ##STR2## R.sub.10 and R.sub.11 independently of each other have one of the meanings given for R.sub.4 ; R.sub.12, R.sub.13, R.sub.14 and R.sub.15 independently of one another are for example hydrogen, C.sub.1 -C.sub.4 alkyl; Z is CR.sub.11 or N; Z.sub.1 is --CH.sub.2 --, S, O or NR.sub.6, are useful as latent sulfonic acids, especially in photoresist applications.

    Abstract translation: 式I或II的新的磺酸磺酸酯化合物,其中m为0或1; x为1或2; R1是例如未取代或取代的苯基,或R1是未取代或取代的杂芳基,或者如果m是0,则R1另外是C 2 -C 6烷氧基羰基,苯氧基羰基或CN; R'1例如为C 2 -C 12亚烷基,亚苯基; R2具有例如R1的含义之一; n为1或2; R3为例如C1-C18烷基,当x为1时为R'3,具有R3给出的含义之一,或式Ⅳ中的R'3,当式Ⅺ中x为2时,为例如C 2 -C 12亚烷基, 亚苯基; R4和R5彼此独立,例如氢,卤素,C1-C6烷基; R6是例如氢,苯基; R 7和R 8彼此独立地为氢或C 1 -C 12 - 烷基; R 9为例如C 1 -C 12烷基; A是S,O,NR6或式A1,A2,A3或A4的基团,R10和R11彼此独立地具有对R4给出的含义之一; R 12,R 13,R 14和R 15彼此独立地是例如氢,C 1 -C 4烷基; Z为CR11或N; Z1是-CH2-,S,O或NR6,可用作潜在的磺酸,特别是在光刻胶应用中。

    SULFONIUM DERIVATIVES AND THE USE THEROF AS LATENT ACIDS
    7.
    发明申请
    SULFONIUM DERIVATIVES AND THE USE THEROF AS LATENT ACIDS 审中-公开
    磺胺衍生物及其作为酸性物质的用途

    公开(公告)号:US20110171569A1

    公开(公告)日:2011-07-14

    申请号:US12996795

    申请日:2009-06-02

    CPC classification number: C07D339/08 C07D327/08

    Abstract: Compounds of the formula (I), wherein R1, R2 and R3 for example are hydrogen, halogen, CN, C1-C18alkyl, C1-C10 haloalkyl, (CO)R8, (CO)OR4, or (CO)NR5R6; Y is O, S or CO; D2, D3 and D4 for example are a direct bond, O, S, NR7, CO, O(CO), (CO)O, S(CO), (CO)S, NR7(CO), (CO)NR7, SO, SO2, or OSO2, C1-C18alkylene, C3-C30cycloalkylene, C2-C12alkenylene, C4-C30cycloalkenylene, Ar1; Ar1, Ar2 and Ar3 are for example phenylene, R4, R5, R6, R7 and R8 are for example hydrogen, C3-C30-cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1C3-alkyl; X− is Formulae (IA), (IB) or (IC); R10 is for example C1-C18alkyl, C1-C10haloalkyl, camphoryl, phenyl-C1-C3alkyl, C3-C30cycloalkyl; and R11, R12, R13, R14 and R15 are for example C1-C10haloalkyl; are useful as polymerizable photolatent acids.

    Abstract translation: 式(I)化合物,其中R1,R2和R3例如是氢,卤素,CN,C1-C18烷基,C1-C10卤代烷基,(CO)R8,(CO)OR4或(CO)NR5R6; Y为O,S或CO; D2,D3和D4例如是直接键合,O,S,NR7,CO,O(CO),(CO)O,S(CO),(CO)S,NR7(CO) SO,SO 2或OSO 2,C 1 -C 18亚烷基,C 3 -C 30亚环烷基,C 2 -C 12亚烯基,C 4 -C 30环亚烯基,Ar 1; Ar 1,Ar 2和Ar 3是例如亚苯基,R 4,R 5,R 6,R 7和R 8是例如氢,C 3 -C 30 - 环烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3 - 烷基; X-是式(IA),(IB)或(IC); R 10例如为C 1 -C 18烷基,C 1 -C 10卤代烷基,樟脑基,苯基-C 1 -C 3烷基,C 3 -C 30环烷基; R 11,R 12,R 13,R 14和R 15例如为C 1 -C 10卤代烷基; 可用作可聚合的光潜酸。

    Halogenated oxime derivatives and the use therof as latent acids
    8.
    发明申请
    Halogenated oxime derivatives and the use therof as latent acids 有权
    卤代肟衍生物和作为潜伏酸使用

    公开(公告)号:US20090042114A1

    公开(公告)日:2009-02-12

    申请号:US12154333

    申请日:2008-05-22

    Abstract: Compounds of the formula I or II wherein R1 is C1-C10haloalkylsulfonyl, halobenzenesulfonyl, C2-C10haloalkanoyl, halobenzoyl; R2 is halogen or C1-C10haloalkyl; Ar1 is phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl, all of which are optionally substituted; Ar′1 is for example phenylene, naphthylene, diphenylene, heteroarylene, oxydiphenylene, phenylene-D-D1-D-phenylene or —Ar″1-A1-Y1-A1-Ar″1—; wherein these radicals optionally are substituted; Ar″1 is phenylene, naphthylene, anthracylene, phenanthrylene, or heteroarylene, all optionally substituted; A1 is for example a direct bond, —O—, —S—, or —NR6—; Y1 inter alia is C1-C18alkylene; X is halogen; D is for example —O—, —S— or —NR6—; D1 inter alia is C1-C18alkylene; are particularly suitable as photolatent acids in ArF resist technology.

    Abstract translation: 式I或II的化合物,其中R 1是C 1 -C 10卤代烷基磺酰基,卤代苯磺酰基,C 2 -C 10卤代烷酰基,卤代苯甲酰基; R2是卤素或C1-C10卤代烷基; Ar1是苯基,联苯基,芴基,萘基,蒽基,菲基或杂芳基,它们都是任选被取代的; Ar'1例如为亚苯基,亚萘基,亚二苯基,亚杂芳基,氧联二苯基,亚苯基-D-D1-D-phenylene或-Ar''1-A1-Y1-A1-Ar'1,1- 其中这些基团任选被取代; Ar 1是亚苯基,亚萘基,亚蒽基,亚菲基或亚杂芳基,全部被取代; A1是例如直接键,-O - , - S - 或-NR 6 - ; Y1特别是C 1 -C 18亚烷基; X是卤素; D是例如-O - , - S-或-NR 6 - ; D1特别是C 1 -C 18亚烷基; 在ArF抗蚀剂技术中特​​别适合作为光潜酸。

    Photoinitiators and their applications
    10.
    发明授权
    Photoinitiators and their applications 失效
    光引发剂及其应用

    公开(公告)号:US06673850B1

    公开(公告)日:2004-01-06

    申请号:US09959174

    申请日:2001-10-18

    Abstract: Photoinitiators of formula (Ia) or (Ib) having chain transfer groups, wherein n is 1 or 2; PI is for example a group of formula (IIa); PI′ inter alia is a group of formula (IIIa); Ar is for example phenyl; Ar2 is inter alia phenylene; R1 and R2 are for example C1-C8alkyl, or R1 and R2 together C2-C9alkylene; M1 inter alia is —NR3R4 or —OH; M1′ is for example a group (c); R3′ is a direct bond, C1-C12alkylene, or phenylene; R3 is for example hydrogen, or C1-C12alkyl; R4 is e.g. C1-C12alkyl; A1 and A2 are for example a direct bond; CT is a chain transfer group; are useful for the preparation of macrophotoinitiators which can be employed for preparing block copolymers.

    Abstract translation: 具有链转移基团的式(Ia)或(Ib)的光引发剂,其中n为1或2; PI是例如式(IIa)的一组; PI“特别是一组式(IIIa); Ar是例如苯基; Ar2尤其是亚苯基; R 1和R 2例如是C 1 -C 8烷基,或者R 1和R 2一起是C 2 -C 9亚烷基; M1特别是-NR 3 R 4或-OH; M1'例如是一组(c); R3'是直接键,C1-C12亚烷基或亚苯基; R3是例如氢或C1-C12烷基; R4是例如 C 1 -C 12烷基; A1和A2例如是直接键; CT是链转移组; 可用于制备可用于制备嵌段共聚物的大分子引发剂。

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