SUBSTRATE, IN PARTICULAR MADE OF SILICON CARBIDE, COATED WITH A THIN STOICHIOMETRIC FILM OF SILICON NITRIDE, FOR MAKING ELECTRONIC COMPONENTS, AND METHOD FOR OBTAINING SUCH A FILM
    3.
    发明申请
    SUBSTRATE, IN PARTICULAR MADE OF SILICON CARBIDE, COATED WITH A THIN STOICHIOMETRIC FILM OF SILICON NITRIDE, FOR MAKING ELECTRONIC COMPONENTS, AND METHOD FOR OBTAINING SUCH A FILM 审中-公开
    用于制备电子元件的硅氮化硅薄膜包覆硅碳化物的衬底以及用于获得这种薄膜的方法

    公开(公告)号:US20100012949A1

    公开(公告)日:2010-01-21

    申请号:US11988284

    申请日:2006-07-04

    IPC分类号: H01L29/24 H01L21/31

    摘要: Substrate, in particular in silicon carbide, covered by a thin film of stoichiometric silicon nitride, for the manufacture of electronic components and method for obtaining said film.To obtain the film on the substrate (1) in the presence of at least one nitrogen gas, the substrate is covered with a film (2) of a material that is permeable to said gas and the film of silicon nitride is capable of forming at the interface between the substrate and the film of the material. The invention applies for example to microelectronics.

    摘要翻译: 基板,特别是碳化硅,由化学计量的氮化硅薄膜覆盖,用于制造电子部件和获得所述膜的方法。 为了在存在至少一种氮气的情况下在基板(1)上获得薄膜,用可渗透所述气体的材料的膜(2)覆盖基板,并且氮化硅膜能够形成在 衬底和材料膜之间的界面。 本发明例如适用于微电子学。

    Nitridation of silicon and other semiconductors using alkali metal
catalysts
    5.
    发明授权
    Nitridation of silicon and other semiconductors using alkali metal catalysts 失效
    使用碱金属催化剂对硅和其他半导体进行氮化

    公开(公告)号:US4735921A

    公开(公告)日:1988-04-05

    申请号:US55738

    申请日:1987-05-29

    IPC分类号: H01L21/318 H01L21/363

    摘要: Nitride layers are formed on semiconductor substrates utilizing alkali metals as catalysts. The surface of the semiconductor substrate first has a thin layer of an alkali metal deposited thereon and then is exposed to nitrogen from a nitrogen source at temperatures and pressures sufficient to grow a nitride layer, which will generally occur at lower temperatures than required for nitride formation by conventional processes. The surface is then annealed and the catalyst removed by heating at moderate temperatures, desorbing the catalyst and leaving a nitride layer on the surface of the substrate which is uncontaminated by the alkali metal catalyst. The process is particularly suited to the formation of nitride layers on silicon utilizing essentially a monolayer of the alkali metal such as sodium. After formation of the nitride, heating of the substrate drives off essentially all of the catalyst at temperatures sufficiently low that the silicon substrate is not impaired for further processing steps, such as the formation of microelectronic devices.

    摘要翻译: 使用碱金属作为催化剂在半导体基板上形成氮化物层。 半导体衬底的表面首先具有沉积在其上的碱金属薄层,然后在足以生长氮化物层的温度和压力下从氮源暴露于氮气,氮化物层通常发生在低于氮化物形成所需的温度 通过常规方法。 然后将表面退火,并通过在中等温度下加热除去催化剂,解吸催化剂并在碱性金属催化剂未被污染的基材表面上留下氮化物层。 该方法特别适用于在硅上形成氮化物层,其基本上使用碱金属如钠的单层。 在形成氮化物之后,在足够低的温度下,基板的加热基本上驱除了所有催化剂,使得硅衬底不受损用于诸如形成微电子器件的进一步的处理步骤。

    Anti-Reflecting Coatings for Solar Batteries and Method for the Production Thereof
    6.
    发明申请
    Anti-Reflecting Coatings for Solar Batteries and Method for the Production Thereof 审中-公开
    太阳能电池防反射涂料及其制造方法

    公开(公告)号:US20080193635A1

    公开(公告)日:2008-08-14

    申请号:US11628471

    申请日:2005-06-01

    IPC分类号: B05D5/12 G02B5/20

    摘要: The invention relates to an anti-reflecting coating (20) comprising a combined inner coating (21), made of anti-reflecting silicon, and outer coating (22) made of carbon in the form of an amorphous diamond which is essentially non-porous and essentially devoid of foreign species. The invention also relates to a method for the production of an anti-reflecting coating and to the use thereof as a coating for a solar batter (10). The coating is less likely to deteriorate with time and can improve the spectral domain of efficient conversion of radiation.

    摘要翻译: 本发明涉及一种防反射涂层(20),其包括由抗反射硅制成的组合内涂层(21)和由非晶金刚石形式的碳制成的外涂层(22),其基本上是无孔的 基本上没有外来物种。 本发明还涉及制备抗反射涂层的方法及其作为太阳能糊料(10)的涂层的用途。 涂层不太可能随时间劣化,并且可以改善辐射的有效转化的光谱域。

    Photon-emission scanning tunneling microscopy
    8.
    发明授权
    Photon-emission scanning tunneling microscopy 失效
    光子发射扫描隧道显微镜

    公开(公告)号:US08006315B2

    公开(公告)日:2011-08-23

    申请号:US12087103

    申请日:2006-12-20

    IPC分类号: G01N13/00 G12B1/00

    CPC分类号: G01Q60/12

    摘要: The present invention relates to an indirect-gap semiconductor substrate, the gap being greater than that of silicon and preferably greater than 1.5 eV, to its use for imaging a specimen by photon-emission scanning tunnel microscopy, and to a photon-emission scanning tunnel imaging method using such an indirect-gap semiconductor substrate. Advantageously, the indirect-gap semiconductor substrate is made of silicon carbide. The present invention also relates to devices for implementing the imaging method according to the invention.

    摘要翻译: 本发明涉及一种间接间隙半导体衬底,其间隙大于硅的间隙,优选大于1.5eV,用于通过光子发射扫描隧道显微镜对样品进行成像,以及光子发射扫描隧道 使用这种间接间隙半导体衬底的成像方法。 有利地,间接间隙半导体衬底由碳化硅制成。 本发明还涉及用于实现根据本发明的成像方法的装置。

    Photon-Emission Scanning Tunneling Microscopy
    9.
    发明申请
    Photon-Emission Scanning Tunneling Microscopy 失效
    光子发射扫描隧道显微镜

    公开(公告)号:US20090300805A1

    公开(公告)日:2009-12-03

    申请号:US12087103

    申请日:2006-12-20

    IPC分类号: G12B21/04 H01L29/15

    CPC分类号: G01Q60/12

    摘要: The present invention relates to an indirect-gap semiconductor substrate, the gap being greater than that of silicon and preferably greater than 1.5 eV, to its use for imaging a specimen by photon-emission scanning tunnel microscopy, and to a photon-emission scanning tunnel imaging method using such an indirect-gap semiconductor substrate. Advantageously, the indirect-gap semiconductor substrate is made of silicon carbide. The present invention also relates to devices for implementing the imaging method according to the invention.

    摘要翻译: 本发明涉及一种间接间隙半导体衬底,其间隙大于硅的间隙,优选大于1.5eV,用于通过光子发射扫描隧道显微镜对样品进行成像,以及光子发射扫描隧道 使用这种间接间隙半导体衬底的成像方法。 有利地,间接间隙半导体衬底由碳化硅制成。 本发明还涉及用于实现根据本发明的成像方法的装置。