Methods and systems for plasma deposition and treatment

    公开(公告)号:US10861669B2

    公开(公告)日:2020-12-08

    申请号:US16665826

    申请日:2019-10-28

    摘要: An ion beam treatment or implantation system includes an ion source emitting a plurality of parallel ion beams having a given spacing. A first lens magnet having a non-uniform magnetic field receives the plurality of ion beams from the ion source and focuses the plurality of ion beams toward a common point. The system may optionally include a second lens magnet having a non-uniform magnetic field receiving the ion beams focused by the first lens magnet and redirecting the ion beams such that they have a parallel arrangement having a closer spacing than said given spacing in a direction toward a target substrate.

    Methods and systems for desiccant air conditioning
    3.
    发明授权
    Methods and systems for desiccant air conditioning 有权
    干燥剂空调的方法和系统

    公开(公告)号:US09243810B2

    公开(公告)日:2016-01-26

    申请号:US13115745

    申请日:2011-05-25

    摘要: A desiccant air conditioning system treats an air stream entering a building space. The system includes a conditioner having multiple structures arranged in a substantially vertical orientation, each having at least one surface across which a liquid desiccant can flow. The air stream flows through or between the structures such that the liquid desiccant dehumidifies the air stream in a warm weather operation mode and humidifies the air stream in a cold weather operation mode. Each structure further includes a desiccant collector at a lower end of the at least one surface for collecting liquid desiccant that has flowed across the at least one surface of the structure. A regenerator receives liquid desiccant from the desiccant collectors in the conditioner and causes the liquid desiccant to desorb water in the warm weather operation mode and to absorb water in the cold weather operation mode.

    摘要翻译: 干燥剂空调系统处理进入建筑空间的空气流。 该系统包括具有以基本垂直取向布置的多个结构的调节器,每个具有液体干燥剂可以流过的至少一个表面。 空气流流过结构之间或之间,使得液体干燥剂以温暖的天气操作模式对空气流进行除湿,并在寒冷天气运行模式下加湿气流。 每个结构还包括在至少一个表面的下端的用于收集流过结构的至少一个表面的液体干燥剂的干燥剂收集器。 再生器从调理剂中的干燥剂收集器接收液体干燥剂,并且使得液体干燥剂在温暖的天气操作模式下解吸水并且在寒冷天气操作模式下吸收水分。

    Methods and systems for plasma deposition and treatment
    5.
    发明授权
    Methods and systems for plasma deposition and treatment 有权
    用于等离子体沉积和处理的方法和系统

    公开(公告)号:US08800483B2

    公开(公告)日:2014-08-12

    申请号:US12776132

    申请日:2010-05-07

    IPC分类号: C23C16/00 C23F1/00 H01L21/306

    摘要: A plasma deposition apparatus includes a waveguide conduit having a plurality of slots therein. The waveguide conduit is coupled to a microwave source for transmitting microwaves from the microwave source through the plurality of slots. One or more pipes have an outlet end positioned at each of the plurality of slots for transporting material from one or more material sources to the plurality of slots. The apparatus also includes a plasma chamber in communication with the waveguide tube through the plurality of slots. The plasma chamber receives through said plurality of slots microwaves from the waveguide tube and material to be melted or evaporated from the one or more pipes. The plasma chamber includes a plurality of magnets disposed in an outer wall of the plasma chamber for forming a magnetic field in the plasma chamber. The plasma chamber further includes one or more outlet openings for discharging plasma containing material to be deposited on a substrate.

    摘要翻译: 等离子体沉积设备包括其中具有多个狭槽的波导管道。 波导管道耦合到微波源,用于从微波源通过多个狭槽传送微波。 一个或多个管道具有位于多个狭槽中的每一个的出口端,用于将材料从一个或多个材料源输送到多个狭槽。 该装置还包括通过多个狭槽与波导管连通的等离子体室。 等离子体腔室通过所述多个槽从波导管接收微波,并且从一个或多个管道熔化或蒸发的材料。 等离子体室包括设置在等离子体室的外壁中的多个磁体,用于在等离子体室中形成磁场。 等离子体室还包括一个或多个出口开口,用于排放待沉积在衬底上的等离子体材料。

    SOLAR ENERGY SYSTEMS
    9.
    发明申请
    SOLAR ENERGY SYSTEMS 有权
    太阳能系统

    公开(公告)号:US20110005580A1

    公开(公告)日:2011-01-13

    申请号:US12775982

    申请日:2010-05-07

    IPC分类号: H01L31/048 F24J2/42

    摘要: A solar energy module includes a photovoltaic unit including a layer of one or more solar cells. The layer has a front side exposed to incident radiation and an opposite back side. The solar energy module also includes a thermal unit thermally coupled to the back side of the layer of one or more solar cells. The thermal unit includes one or more channels through which a thermal transfer fluid flows, wherein a portion of the incident radiation is converted into electricity by the layer of one or more solar cells and a portion of the incident radiation is simultaneously converted to heat for increasing the temperature of the thermal transfer fluid. The solar energy module also includes a heating system to further increase the temperature of the thermal transfer fluid. The heating system is powered by electricity generated by the one or more solar cells. The solar energy module further includes a controller for controlling the relative amounts of heat and electricity output by the solar energy module by controlling the amount of electricity produced by the one or more solar cells that is diverted to the heating system for increasing the temperature of the thermal transfer fluid.

    摘要翻译: 太阳能模块包括包括一个或多个太阳能电池层的光伏单元。 该层具有暴露于入射辐射的正面和相反的背面。 太阳能模块还包括热耦合到一个或多个太阳能电池层的背侧的热单元。 热单元包括热传导流体流过的一个或多个通道,其中一部分入射辐射由一个或多个太阳能电池的层转换成电,并且一部分入射辐射同时转换成热量以增加 传热流体的温度。 太阳能模块还包括加热系统,以进一步提高热转印流体的温度。 加热系统由一个或多个太阳能电池产生的电力供电。 太阳能模块还包括控制器,用于通过控制由转向加热系统的一个或多个太阳能电池产生的电量来控制由太阳能模块输出的热量和电力的相对量,以增加太阳能模块的温度 传热流体。

    METHODS AND SYSTEMS FOR PLASMA DEPOSITION AND TREATMENT
    10.
    发明申请
    METHODS AND SYSTEMS FOR PLASMA DEPOSITION AND TREATMENT 有权
    等离子体沉积和处理的方法和系统

    公开(公告)号:US20110005461A1

    公开(公告)日:2011-01-13

    申请号:US12776132

    申请日:2010-05-07

    IPC分类号: C23C16/511 B01D59/44 H05H1/46

    摘要: A plasma deposition apparatus includes a waveguide conduit having a plurality of slots therein. The waveguide conduit is coupled to a microwave source for transmitting microwaves from the microwave source through the plurality of slots. One or more pipes have an outlet end positioned at each of the plurality of slots for transporting material from one or more material sources to the plurality of slots. The apparatus also includes a plasma chamber in communication with the waveguide tube through the plurality of slots. The plasma chamber receives through said plurality of slots microwaves from the waveguide tube and material to be melted or evaporated from the one or more pipes. The plasma chamber includes a plurality of magnets disposed in an outer wall of the plasma chamber for forming a magnetic field in the plasma chamber. The plasma chamber further includes one or more outlet openings for discharging plasma containing material to be deposited on a substrate.

    摘要翻译: 等离子体沉积设备包括其中具有多个狭槽的波导管道。 波导管道耦合到微波源,用于从微波源通过多个狭槽传送微波。 一个或多个管道具有位于多个狭槽中的每一个的出口端,用于将材料从一个或多个材料源输送到多个狭槽。 该装置还包括通过多个狭槽与波导管连通的等离子体室。 等离子体腔室通过所述多个槽从波导管接收微波,并且从一个或多个管道熔化或蒸发的材料。 等离子体室包括设置在等离子体室的外壁中的多个磁体,用于在等离子体室中形成磁场。 等离子体室还包括一个或多个出口开口,用于排放待沉积在衬底上的等离子体材料。