公开(公告)号：US10395967B2

公开(公告)日：2019-08-27

申请号：US15628537

申请日：2017-06-20

Applicant: Renesas Electronics Corporation

Inventor： Takamitsu Yoshihara ,  Takahiro Kainuma ,  Hiroi Oka

IPC: H01L21/68 ,  H01L21/683 ,  H01L21/304 ,  H01L21/78 ,  H01L23/00 ,  H01L23/495

Abstract: Provided is a method of manufacturing a semiconductor device with improved manufacturing efficiency for the semiconductor device. The method of manufacturing a semiconductor device includes the steps of: (a) forming a circuit at a front surface side of a wafer (semiconductor wafer) having the front surface and a back surface opposite to the front surface; (b) grinding the back surface of the wafer that has a center part (first part) and a peripheral edge part (second part) surrounding a periphery of the center part in such a manner that the center part is thinner than the peripheral edge part; (c) attaching an upper surface (bonding surface) of a holding tape to the front surface of the wafer; and (d) separating the center part from the peripheral edge part by cutting a part of the center part with a blade (rotary blade) while the wafer is held by the first tape.

公开(公告)号：US10262927B2

公开(公告)日：2019-04-16

申请号：US15558977

申请日：2015-07-23

Applicant: Renesas Electronics Corporation

Inventor： Kazunori Hasegawa ,  Hiroi Oka

IPC: H01L23/00 ,  H01L23/495 ,  H01L21/52 ,  H01L21/48 ,  H01L23/31

Abstract: Reliability of a semiconductor device is improved. For this, embodied is a basic idea that a semiconductor chip (CHP1) mounted on an Ag layer (AGL) is fixed by using a temporarily fixing material (TA) having tackiness without forming the temporarily fixing material (TA) on a surface of the Ag layer (AGL) having a porous structure as much as possible, is realized. More specifically, the temporarily fixing material (TA) is supplied so as to have a portion made in contact with a chip mounting part (TAB), and the semiconductor chip (CHP1) is also mounted on the Ag layer (AGL) so that one portion of a rear surface of the semiconductor chip (CHP1) is made in contact with the temporarily fixing material (TA).

公开(公告)号：US09716027B2

公开(公告)日：2017-07-25

申请号：US15007275

申请日：2016-01-27

Applicant: Renesas Electronics Corporation

Inventor： Takamitsu Yoshihara ,  Takahiro Kainuma ,  Hiroi Oka

IPC: H01L21/68 ,  H01L21/683 ,  H01L21/304 ,  H01L21/78 ,  H01L23/00 ,  H01L23/495

CPC classification number: H01L21/6836 ,  H01L21/304 ,  H01L21/3043 ,  H01L21/78 ,  H01L23/49524 ,  H01L23/49562 ,  H01L23/49582 ,  H01L24/34 ,  H01L24/37 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2221/68386 ,  H01L2224/37147 ,  H01L2224/37599 ,  H01L2224/83801 ,  H01L2224/8385 ,  H01L2224/84801 ,  H01L2224/8485 ,  H01L2924/00014

Abstract: Provided is a method of manufacturing a semiconductor device with improved manufacturing efficiency for the semiconductor device. The method of manufacturing a semiconductor device includes the steps of: (a) forming a circuit at a front surface side of a wafer (semiconductor wafer) having the front surface and a back surface opposite to the front surface; (b) grinding the back surface of the wafer that has a center part (first part) and a peripheral edge part (second part) surrounding a periphery of the center part in such a manner that the center part is thinner than the peripheral edge part; (c) attaching an upper surface (bonding surface) of a holding tape to the front surface of the wafer; and (d) separating the center part from the peripheral edge part by cutting a part of the center part with a blade (rotary blade) while the wafer is held by the first tape.

公开(公告)号：US10388597B2

公开(公告)日：2019-08-20

申请号：US15985957

申请日：2018-05-22

Applicant: RENESAS ELECTRONICS CORPORATION

Inventor： Masatoshi Sugiura ,  Hiroi Oka

IPC: H01L23/495 ,  H01L23/00 ,  H01L21/48

Abstract: A die bonding process for assembling a semiconductor device includes the steps of applying a sintered-silver-use paste to each of a plurality of first regions on an upper surface of a chip mounting part, drying the sintered-silver-use paste and applying a silver paste to a second region located between/among the respective first regions. Further, the process includes the step of mounting a semiconductor chip onto the chip mounting part in such a manner that a rear surface of the semiconductor chip faces an upper surface of the chip mounting part with the sintered-silver-use paste and the silver paste being interposed. After mounting the chip, part of each of first, second, third and fourth corners of a principal surface of the semiconductor chip is located in each of the first regions.

公开(公告)号：US10347567B2

公开(公告)日：2019-07-09

申请号：US16020353

申请日：2018-06-27

Applicant: RENESAS ELECTRONICS CORPORATION

Inventor： Atsushi Nishikizawa ,  Yuichi Yato ,  Hiroi Oka ,  Tadatoshi Danno ,  Hiroyuki Nakamura

IPC: H01L23/495 ,  H01L23/00 ,  H01L21/48 ,  H01L21/56 ,  H01L23/31

Abstract: In a resin sealing type semiconductor device, a semiconductor chip CP2 is mounted over a die pad DP having conductivity via a bonding member BD2 having insulation property, and a semiconductor chip CP1 is mounted over the die pad DP via a bonding member BD1 having conductivity. A first length of a portion, in a first side formed by an intersection of a first side surface and a second side surface of the semiconductor chip CP2, covered with the bonding member BD2 is larger than a second length of a portion, in a second side formed by an intersection of a third side surface and a fourth side surface of the semiconductor chip CP1, covered with the bonding member BD1.

公开(公告)号：US09922905B2

公开(公告)日：2018-03-20

申请号：US15444773

申请日：2017-02-28

Applicant: Renesas Electronics Corporation

Inventor： Yuichi Yato ,  Hiroi Oka ,  Noriko Okunishi ,  Keita Takada

IPC: H01L23/00 ,  H01L23/495 ,  H01L23/13 ,  H01L23/31 ,  H01L23/24

CPC classification number: H01L23/49513 ,  H01L21/565 ,  H01L23/13 ,  H01L23/16 ,  H01L23/24 ,  H01L23/3121 ,  H01L23/3142 ,  H01L23/4952 ,  H01L23/49524 ,  H01L23/49541 ,  H01L23/49548 ,  H01L23/49562 ,  H01L23/49582 ,  H01L23/49805 ,  H01L23/49844 ,  H01L23/562 ,  H01L24/05 ,  H01L24/06 ,  H01L24/29 ,  H01L24/32 ,  H01L24/37 ,  H01L24/40 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L24/743 ,  H01L24/77 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/0603 ,  H01L2224/2929 ,  H01L2224/29339 ,  H01L2224/32245 ,  H01L2224/37147 ,  H01L2224/40091 ,  H01L2224/40095 ,  H01L2224/40245 ,  H01L2224/40247 ,  H01L2224/45014 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/48247 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/73221 ,  H01L2224/73263 ,  H01L2224/73265 ,  H01L2224/743 ,  H01L2224/83192 ,  H01L2224/83439 ,  H01L2224/8385 ,  H01L2224/83862 ,  H01L2224/84205 ,  H01L2224/84439 ,  H01L2224/8501 ,  H01L2224/85181 ,  H01L2224/85205 ,  H01L2224/85439 ,  H01L2224/92157 ,  H01L2224/92247 ,  H01L2924/00014 ,  H01L2924/1301 ,  H01L2924/13091 ,  H01L2924/15747 ,  H01L2924/181 ,  H01L2924/18301 ,  H01L2924/351 ,  H01L2924/00 ,  H01L2924/0665 ,  H01L2924/00012 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A semiconductor device according to an embodiment is a semiconductor device in which a semiconductor chip mounted on a chip mounting part is sealed by resin and a first member is fixed to a chip mounting surface side between a peripheral portion of the semiconductor chip and a peripheral portion of the chip mounting part. Also, the first member is sealed by the resin. Also, a length of the first part of the chip mounting part in the first direction is larger than a length of the semiconductor chip in the first direction, in a plan view.

公开(公告)号：US10037932B2

公开(公告)日：2018-07-31

申请号：US15515297

申请日：2015-03-30

Applicant: RENESAS ELECTRONICS CORPORATION

Inventor： Atsushi Nishikizawa ,  Yuichi Yato ,  Hiroi Oka ,  Tadatoshi Danno ,  Hiroyuki Nakamura

IPC: H01L23/48 ,  H01L23/495 ,  H01L23/31 ,  H01L21/48 ,  H01L21/56

CPC classification number: H01L23/49513 ,  H01L21/4825 ,  H01L21/565 ,  H01L23/3107 ,  H01L23/3114 ,  H01L23/4952 ,  H01L23/49562 ,  H01L23/49568 ,  H01L23/49575 ,  H01L24/06 ,  H01L2224/05554 ,  H01L2224/32245 ,  H01L2224/45144 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L2224/83192 ,  H01L2224/92247 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00

Abstract: In a resin sealing type semiconductor device, a semiconductor chip CP2 is mounted over a die pad DP having conductivity via a bonding member BD2 having insulation property, and a semiconductor chip CP1 is mounted over the die pad DP via a bonding member BD1 having conductivity. A first length of a portion, in a first side formed by an intersection of a first side surface and a second side surface of the semiconductor chip CP2, covered with the bonding member BD2 is larger than a second length of a portion, in a second side formed by an intersection of a third side surface and a fourth side surface of the semiconductor chip CP1, covered with the bonding member BD1.

公开(公告)号：US09607940B2

公开(公告)日：2017-03-28

申请号：US14901424

申请日：2013-07-05

Applicant: Renesas Electronics Corporation

Inventor： Yuichi Yato ,  Hiroi Oka ,  Noriko Okunishi ,  Keita Takada

IPC: H01L23/00 ,  H01L23/498 ,  H01L23/13 ,  H01L23/31

CPC classification number: H01L23/49513 ,  H01L21/565 ,  H01L23/13 ,  H01L23/16 ,  H01L23/24 ,  H01L23/3121 ,  H01L23/3142 ,  H01L23/4952 ,  H01L23/49524 ,  H01L23/49541 ,  H01L23/49548 ,  H01L23/49562 ,  H01L23/49582 ,  H01L23/49805 ,  H01L23/49844 ,  H01L23/562 ,  H01L24/05 ,  H01L24/06 ,  H01L24/29 ,  H01L24/32 ,  H01L24/37 ,  H01L24/40 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L24/743 ,  H01L24/77 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/0603 ,  H01L2224/2929 ,  H01L2224/29339 ,  H01L2224/32245 ,  H01L2224/37147 ,  H01L2224/40091 ,  H01L2224/40095 ,  H01L2224/40245 ,  H01L2224/40247 ,  H01L2224/45014 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/48247 ,  H01L2224/48624 ,  H01L2224/48644 ,  H01L2224/73221 ,  H01L2224/73263 ,  H01L2224/73265 ,  H01L2224/743 ,  H01L2224/83192 ,  H01L2224/83439 ,  H01L2224/8385 ,  H01L2224/83862 ,  H01L2224/84205 ,  H01L2224/84439 ,  H01L2224/8501 ,  H01L2224/85181 ,  H01L2224/85205 ,  H01L2224/85439 ,  H01L2224/92157 ,  H01L2224/92247 ,  H01L2924/00014 ,  H01L2924/1301 ,  H01L2924/13091 ,  H01L2924/15747 ,  H01L2924/181 ,  H01L2924/18301 ,  H01L2924/351 ,  H01L2924/00 ,  H01L2924/0665 ,  H01L2924/00012 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A semiconductor device according to an embodiment is a semiconductor device in which a semiconductor chip mounted on a chip mounting part is sealed by resin and a first member is fixed to a chip mounting surface side between a peripheral portion of the semiconductor chip and a peripheral portion of the chip mounting part. Also, the first member is sealed by the resin. Also, a length of the first part of the chip mounting part in the first direction is larger than a length of the semiconductor chip in the first direction, in a plan view.