公开(公告)号：US06921467B2

公开(公告)日：2005-07-26

申请号：US09882293

申请日：2001-06-15

申请人： Kyle M. Hanson ,  Steve L. Eudy ,  Thomas L. Ritzdorf ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Randy Harris ,  Curtis A. Weber ,  Tim McGlenn ,  Timothy A. Anderson ,  Daniel P. Bexten

发明人： Kyle M. Hanson ,  Steve L. Eudy ,  Thomas L. Ritzdorf ,  Gregory J. Wilson ,  Daniel J. Woodruff ,  Randy Harris ,  Curtis A. Weber ,  Tim McGlenn ,  Timothy A. Anderson ,  Daniel P. Bexten

IPC分类号： C25D17/00 ,  C25D17/28

CPC分类号： C25D21/12 ,  C23C18/1632 ,  C25D7/123 ,  C25D17/001 ,  C25D17/008 ,  H01L21/67005 ,  H01L21/6723

摘要： Processing tools, components of tools, and methods of making and using such devices for electrochemical processing of microelectronic workpieces. One aspect of the invention is directed toward reaction vessels for electrochemical processing of microelectronic workpieces, processing stations including such reaction vessels, and methods for using these devices. For example, one embodiment of a reaction vessel includes an outer container having an outer wall, a first outlet configured to introduce a primary fluid flow into the outer container, and at least one second outlet configured to introduce a secondary fluid flow into the outer container separate from the primary fluid flow. The reaction vessel can also include at least one electrode, and it can also have a field shaping unit. The field shaping unit, for example, can be a dielectric assembly coupled to the second outlet to receive the secondary flow and configured to contain the secondary flow separate from the primary flow through at least a portion of the outer container. The field shaping unit can also have at least one electrode compartment through which the secondary flow can pass separately from the primary flow. The electrode is positioned in the electrode compartment.

摘要翻译： 加工工具，工具部件，以及制造和使用这些装置用于微电子工件的电化学处理的方法。 本发明的一个方面涉及用于微电子工件的电化学处理的反应容器，包括这种反应容器的处理站，以及使用这些装置的方法。 例如，反应容器的一个实施例包括具有外壁的外容器，构造成将主流体流引入外容器中的第一出口，以及至少一个第二出口，该第二出口构造成将次流体流引入外容器 与主流体流分离。 反应容器还可以包括至少一个电极，并且还可以具有场成形单元。 场整形单元例如可以是耦合到第二出口的电介质组件，用于接收二次流，并且被构造成容纳从初级流分离通过外部容器的至少一部分的二次流。 场成形单元还可以具有至少一个电极室，二次流可以通过该电极室与主流分开地通过。 电极位于电极室中。

公开(公告)号：US06878955B2

公开(公告)日：2005-04-12

申请号：US10756049

申请日：2004-01-12

申请人： Randy Harris ,  Kyle M. Hanson ,  Daniel P. Bexten

发明人： Randy Harris ,  Kyle M. Hanson ,  Daniel P. Bexten

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67772 ,  Y10S414/137 ,  Y10S414/138 ,  Y10S414/14 ,  Y10S414/141

摘要： An apparatus and method for handling microelectronic workpieces initially positioned in a container. The container can be changeable from a first configuration where the microelectronic workpiece is generally inaccessible within the container to a second configuration where the microelectronic workpiece is accessible for removal from the container. The apparatus can include a container access device positionable proximate to an aperture of an enclosure that at least partially encloses a region for handling a microelectronic workpiece. The container access device can be movably positioned proximate to the aperture to change the configuration of the container from the first configuration to the second configuration. A container support can be positioned proximate to the aperture and can be configured to move the container to a fixed, stationary position relative to the aperture when the container is in the second configuration. Accordingly, the microelectronic workpieces within the container can be less likely to be damaged by movement of the container. Instead, a workpiece transfer device can be configured to have a range of travel that allows it to access each of the microelectronic workpieces within the container without requiring that the container itself be moved. A workpiece detector coupled to the container access device can move generally parallel to the microelectronic workpieces to detect a presence, absence, and/or position of the microelectronic workpieces, without moving laterally toward and away from the microelectronic workpieces.

摘要翻译： 用于处理最初位于容器中的微电子工件的装置和方法。 容器可以从第一种构型改变，其中微电子工件在容器内通常是不可接近的，其中微电子工件能够从容器移除。 该装置可以包括可靠近壳体的孔定位的容器进入装置，其至少部分地包围用于处理微电子工件的区域。 容器进入装置可以可移动地定位在孔附近，以将容器的构型从第一构型改变到第二构型。 容器支撑件可以靠近孔定位，并且可以构造成当容器处于第二构造时相对于孔将容器移动到固定的静止位置。 因此，容器内的微电子工件不太可能被容器的移动所损坏。 相反，工件传送装置可以被配置成具有允许其访问容器内的每个微电子工件的行程范围，而不要求容器本身移动。 耦合到容器进入装置的工件检测器可以大致平行于微电子工件移动，以检测微电子工件的存在，不存在和/或位置，而不向横向和远离微电子工件横向移动。

公开(公告)号：US06717171B2

公开(公告)日：2004-04-06

申请号：US09875439

申请日：2001-06-05

申请人： Randy Harris ,  Kyle M. Hanson ,  Daniel P. Bexten

发明人： Randy Harris ,  Kyle M. Hanson ,  Daniel P. Bexten

IPC分类号： B65G4907

CPC分类号： H01L21/67772 ,  Y10S414/137 ,  Y10S414/138 ,  Y10S414/14 ,  Y10S414/141

摘要： An apparatus and method for handling microelectronic workpieces initially positioned in a container. The container can be changeable from a first configuration where the microelectronic workpiece is generally inaccessible within the container to a second configuration where the microelectronic workpiece is accessible for removal from the container. The apparatus can include a container access device positionable proximate to an aperture of an enclosure that at least partially encloses a region for handling a microelectronic workpiece. The container access device can be movably positioned proximate to the aperture to change the configuration of the container from the first configuration to the second configuration. A container support can be positioned proximate to the aperture and can be configured to move the container to a fixed, stationary position relative to the aperture when the container is in the second configuration. Accordingly, the microelectronic workpieces within the container can be less likely to be damaged by movement of the container. Instead, a workpiece transfer device can be configured to have a range of travel that allows it to access each of the microelectronic workpieces within the container without requiring that the container itself be moved. A workpiece detector coupled to the container access device can move generally parallel to the microelectronic workpieces to detect a presence, absence, and/or position of the microelectronic workpieces, without moving laterally toward and away from the microelectronic workpieces.

摘要翻译： 用于处理最初位于容器中的微电子工件的装置和方法。 容器可以从第一种构型改变，其中微电子工件在容器内通常是不可接近的，其中微电子工件能够从容器移除。 该装置可以包括可靠近壳体的孔定位的容器进入装置，其至少部分地包围用于处理微电子工件的区域。 容器进入装置可以可移动地定位在孔附近，以将容器的构型从第一构型改变到第二构型。 容器支撑件可以靠近孔定位，并且可以构造成当容器处于第二构造时相对于孔将容器移动到固定的静止位置。 因此，容器内的微电子工件不太可能被容器的移动所损坏。 相反，工件传送装置可以被配置成具有允许其访问容器内的每个微电子工件的行程范围，而不要求容器本身移动。 耦合到容器进入装置的工件检测器可以大致平行于微电子工件移动，以检测微电子工件的存在，不存在和/或位置，而不向横向和远离微电子工件横向移动。

公开(公告)号：US06916412B2

公开(公告)日：2005-07-12

申请号：US09875365

申请日：2001-06-05

申请人： Daniel J. Woodruff ,  Kyle M. Hanson ,  Steve L. Eudy ,  Curtis A. Weber ,  Randy Harris

发明人： Daniel J. Woodruff ,  Kyle M. Hanson ,  Steve L. Eudy ,  Curtis A. Weber ,  Randy Harris

IPC分类号： B23H7/26 ,  C25D3/00 ,  C25D5/00 ,  C25D7/12 ,  C25D17/00 ,  C25D21/00

CPC分类号： H01L21/6723 ,  C25D7/123 ,  C25D17/001 ,  C25D17/10 ,  H01L21/6719 ,  H01L21/67751

摘要： An electrochemical processing chamber which can be modified for treating different workpieces and methods for so modifying electrochemical processing chambers. In one particular embodiment, an electrochemical processing chamber 200 includes a plurality of walls 510 defining a plurality of electrode compartments 520, each electrode compartment having at least one electrode 600 therein, and a virtual electrode unit 530 defining a plurality of flow conduits, with at least one of the flow conduits being in fluid communication with each of the electrode compartments. This first virtual electrode unit 530 may be exchanged for a second virtual electrode unit 540, without modification of any of the electrodes 600, to adapt the processing chamber 200 for treating a different workpiece.

公开(公告)号：US07333223B2

公开(公告)日：2008-02-19

申请号：US10003411

申请日：2001-12-06

申请人： Junious Gupton ,  Todd Beck ,  Varun Tandon ,  Glen Young ,  Jeff Gainer ,  Scott Hamilton ,  Randy Harris

发明人： Junious Gupton ,  Todd Beck ,  Varun Tandon ,  Glen Young ,  Jeff Gainer ,  Scott Hamilton ,  Randy Harris

IPC分类号： H04N1/00 ,  H04M11/00 ,  G06F3/00

CPC分类号： G06Q10/10 ,  H04L51/00 ,  H04L51/30 ,  H04N1/00127 ,  H04N1/00209 ,  H04N1/32496 ,  H04N2201/007

摘要： A system and method are provided for reliable and customer-friendly delivery of documents. One method of the present invention include the steps of: producing document data for printing documents; accepting requests to print selected documents; determining whether a selected document is accepted for electronic delivery or for non-electronic delivery; printing documents accepted for non-electronic delivery; and electronically delivering documents accepted for electronic delivery.

摘要翻译： 提供了可靠和客户友好的文件传送的系统和方法。 本发明的一种方法包括以下步骤：产生用于打印文档的文档数据; 接受打印所选文件的请求; 确定所选文件是否被接受用于电子传送或非电子传送; 接受非电子发送的印刷文件; 并以电子方式提供接受电子传送的文件。

公开(公告)号：US20060234595A1

公开(公告)日：2006-10-19

申请号：US11106954

申请日：2005-04-15

申请人： Jim Bell ,  Randy Harris

发明人： Jim Bell ,  Randy Harris

IPC分类号： A63H33/00

CPC分类号： A63H37/00

摘要： A piñata-like device is formed from cardboard panels and sub-panels. The structure is formed and held together by masking tape which is partially cut, across the seams of the panels and sub-panels. The container has an access opening to facilitate placement of goodies into the cavity. Each panel and sub-panel is provided with a ribbon. By pulling on the ribbons, the panels are frangibly detachable from one another. The strength of the attachment of the ribbons to the panels and sub-panels exceeds the strength of the masking tape holding the panels and sub-panels into a container form. When the ribbons are pulled, preferably substantially simultaneously, the panels substantially detach from one another, and any contents disposed within the cavity are made available, usually in a somewhat explosive manner. An end of each ribbon is passed through one or more slits in each panel and securely attached to a surface of the panel.

摘要翻译： 由纸板和子板形成一个类似的装置。 该结构由穿过面板和子面板的接缝部分切割的遮蔽胶带形成并保持在一起。 容器具有进入口以便于将食品放入空腔中。 每个面板和子面板都有一个色带。 通过拉扯丝带，面板彼此易碎地拆卸。 带子连接到面板和子面板上的强度超过将面板和子面板保持为容器形式的遮蔽带的强度。 当带子被拉动时，优选基本上同时地，所述面板基本上彼此分离，并且通常以有点爆炸的方式，设置在空腔内的任何内容物可用。 每个带的端部穿过每个面板中的一个或多个狭缝并牢固地附接到面板的表面。

公开(公告)号：US20050050767A1

公开(公告)日：2005-03-10

申请号：US10859748

申请日：2004-06-03

申请人： Kyle Hanson ,  Kert Dolechek ,  Paul McHugh ,  Gregory Wilson ,  Jeffry Davis ,  Randy Harris

发明人： Kyle Hanson ,  Kert Dolechek ,  Paul McHugh ,  Gregory Wilson ,  Jeffry Davis ,  Randy Harris

IPC分类号： B65G49/07 ,  C12N15/31 ,  C25D5/08 ,  C25D7/12 ,  C25D17/00 ,  C25D17/06 ,  F26B5/04 ,  H01L20060101

CPC分类号： C25D17/00 ,  C25D5/08 ,  C25D7/12 ,  C25D17/001 ,  C25D17/004 ,  C25D17/008 ,  C25D17/06 ,  H01L21/6704 ,  H01L21/67173 ,  H01L21/67196

摘要： A wet chemical processing chamber comprising a fixed unit, a detachable unit releasably coupled to the fixed unit, a seal contacting the fixed unit and the detachable unit, and a processing component disposed in the fixed unit and/or the detachable unit. The fixed unit can have a first flow system configured to direct a processing fluid through the fixed unit and a mounting fixture for fixedly attaching the fixed unit to a platform or deck of an integrated processing tool. The detachable unit can include a second flow system configured to direct the processing fluid to and/or from the first flow system of the fixed unit. The seal has an orifice through which processing fluid can flow between the first and second flow systems, and the processing component can impart a property to the processing fluid for processing a surface on a microfeature workpiece having submicron microfeatures.

摘要翻译： 一种湿化学处理室，包括固定单元，可释放地联接到固定单元的可拆卸单元，接触固定单元和可拆卸单元的密封件，以及设置在固定单元和/或可拆卸单元中的处理部件。 固定单元可以具有构造成引导处理流体通过固定单元的第一流动系统和用于将固定单元固定地附接到集成处理工具的平台或甲板的安装夹具。 可拆卸单元可以包括构造成将处理流体引导到和/或从固定单元的第一流动系统引导的第二流动系统。 密封件具有孔口，处理流体可以通过该孔口在第一和第二流动系统之间流动，并且处理部件可以赋予处理流体以处理具有亚微米特征的微特征工件上的表面的性质。

公开(公告)号：US20070125404A1

公开(公告)日：2007-06-07

申请号：US11294921

申请日：2005-12-05

申请人： Jeffry Davis ,  Randy Harris

发明人： Jeffry Davis ,  Randy Harris

IPC分类号： B08B7/00 ,  B08B3/00

CPC分类号： B08B9/0826 ,  H01L21/67028 ,  H01L21/67379 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/68707 ,  Y10S414/137 ,  Y10S414/14

摘要： The invention provides an apparatus for cleaning and drying a container for semiconductor workpieces. The apparatus comprises a load port with a fixture that receives a dirty container and delivers it to a deck assembly with a carrier that removably receives the container for further handling. While the container is received by the carrier, a robot with a first end effector removes the container door and places it on a portion of the carrier. The robot includes a second end effector that engages the carrier and elevates the carrier and container for insertion into a process chamber. The process chamber includes a rotor with at least one receptacle wherein the rotor is rotated to create both high pressure and low pressure regions. Once the container and carrier are loaded into the rotor, the rotor is rotated and means for cleaning injects a processing fluid onto the container and carrier. After a rinse stage and while the rotor is rotating, the means for drying delivers air across the container and carrier. Upon completion of the drying stage, the robot removes both the container and the carrier from the process chamber and reassembles the door to the container such that container can be returned to use.

摘要翻译： 本发明提供一种用于清洁和干燥半导体工件的容器的装置。 该装置包括具有固定装置的装载端口，该装置接收脏污的容器并将其传送到具有可移除地容纳容器以进一步处理的载体的甲板组件。 当容器被承载件容纳时，具有第一端部执行器的机器人移除容器门并将其放置在承载件的一部分上。 机器人包括第二端部执行器，其接合载体并提升载体和容器以插入处理室。 处理室包括具有至少一个容器的转子，其中转子旋转以产生高压和低压区域。 一旦容器和载体被装载到转子中，则转子旋转，并且用于清洁的装置将处理流体注入到容器和载体上。 在冲洗阶段之后，当转子旋转时，干燥装置将空气穿过容器和载体。 干燥阶段完成后，机器人从处理室中移除容器和载体，并将门重新组装到容器上，使得容器可以返回使用。

公开(公告)号：US20070104559A1

公开(公告)日：2007-05-10

申请号：US11635848

申请日：2006-12-08

申请人： Daniel Woodruff ,  Thomas Oberlitner ,  Randy Harris ,  James Erickson ,  Douglas Carr

发明人： Daniel Woodruff ,  Thomas Oberlitner ,  Randy Harris ,  James Erickson ,  Douglas Carr

IPC分类号： B65H1/00

CPC分类号： H01L21/67259 ,  H01L21/68707 ,  Y10S294/907

摘要： End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.

公开(公告)号：US20070014656A1

公开(公告)日：2007-01-18

申请号：US11480313

申请日：2006-06-29

申请人： Randy Harris ,  Daniel Woodruff ,  Paul Wirth ,  David Mattson ,  James Erickson

发明人： Randy Harris ,  Daniel Woodruff ,  Paul Wirth ,  David Mattson ,  James Erickson

IPC分类号： B66C23/00

CPC分类号： H01L21/67742 ,  H01L21/68707

摘要： End-effectors and associated control and guidance systems and methods are disclosed. A transfer device in one embodiment includes a base unit, an arm carried by the base unit and movable relative to the base unit, and an end-effector carried by the arm and rotatable relative to the arm. The end-effector includes two grippers, at least one being movable toward and away from the other between a grip position and a release position. A transmission is coupled between a motor and the movable gripper to receive an input force from the motor and apply an output force to the gripper that increases as the gripper moves to the grip position.

摘要翻译： 公开了终端效应器和相关的控制和引导系统和方法。 在一个实施例中的传送装置包括基座单元，由基座单元承载并可相对于基座单元运动的臂，以及由臂承载并可相对于臂旋转的端部执行器。 末端执行器包括两个夹持器，至少一个可在夹持位置和释放位置之间朝向和远离另一个移动。 传动装置联接在电动机和可动夹具之间以接收来自电动机的输入力，并且向夹具施加输出力，该夹持器随着夹持器移动到把手位置而增加。