专利检索 ap:("Raymond Hill" OR "Colin Sanford" OR "Lawrence Scipioni" OR "Mark DiManna" OR "Michael Tanguay") AND inv:"Raymond Hill" 第 1 页

1.

发明申请
Dual beam system 有权
标题翻译：双光束系统

公开(公告)号：US20050035291A1

公开(公告)日：2005-02-17

申请号：US10889967

申请日：2004-07-13

申请人： Raymond Hill , Colin Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Colin Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

IPC分类号： H01J37/141 , H01J37/02 , H01J37/08 , H01J37/26 , H01J37/28 , H01J37/30

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。

2.

发明申请
Dual beam system 有权
标题翻译：双光束系统

公开(公告)号：US20080035860A1

公开(公告)日：2008-02-14

申请号：US11641540

申请日：2006-12-18

申请人： Raymond Hill , Colin Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Colin Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

IPC分类号： H01J37/00

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。

3.

发明申请
Dual Beam System 有权
标题翻译：双梁系统

公开(公告)号：US20110309263A1

公开(公告)日：2011-12-22

申请号：US13222536

申请日：2011-08-31

申请人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

IPC分类号： H01J37/30

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。

4.

发明申请
Dual Beam System 有权
标题翻译：双梁系统

公开(公告)号：US20100025578A1

公开(公告)日：2010-02-04

申请号：US12576914

申请日：2009-10-09

申请人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

IPC分类号： G01N23/22 , H01J1/50 , H01J3/20

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。

5.

发明授权
Dual beam system 有权
标题翻译：双光束系统

公开(公告)号：US07161159B2

公开(公告)日：2007-01-09

申请号：US10889967

申请日：2004-07-13

申请人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

IPC分类号： H01J37/244

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。

6.

发明授权
Dual beam system 有权

公开(公告)号：US08399864B2

公开(公告)日：2013-03-19

申请号：US13222536

申请日：2011-08-31

申请人： Raymond Hill , Lawrence Scipioni , Colin August Sanford , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Lawrence Scipioni , Colin August Sanford , Mark DiManna , Michael Tanguay

IPC分类号： H01J37/26 , H01J37/141

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

7.

发明授权
Dual beam system 有权
标题翻译：双光束系统

公开(公告)号：US08013311B2

公开(公告)日：2011-09-06

申请号：US12576914

申请日：2009-10-09

申请人： Raymond Hill , Lawrence Scipioni , Colin August Sanford , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Lawrence Scipioni , Colin August Sanford , Mark DiManna , Michael Tanguay

IPC分类号： H01J37/30 , H01J37/26 , H01J37/10

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。

8.

发明授权
Dual beam system 有权
标题翻译：双光束系统

公开(公告)号：US07601976B2

公开(公告)日：2009-10-13

申请号：US11641540

申请日：2006-12-18

申请人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

发明人： Raymond Hill , Colin August Sanford , Lawrence Scipioni , Mark DiManna , Michael Tanguay

IPC分类号： H01J37/30 , H01L21/266 , H01L21/263

CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749

摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。