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    Wear-Resistant Conformal Coating for Micro-Channel Structure
    4.
    发明申请
    Wear-Resistant Conformal Coating for Micro-Channel Structure 审中-公开
    用于微通道结构的耐磨保形涂层

    公开(公告)号：US20110303404A1

    公开(公告)日：2011-12-15

    申请号：US13155986

    申请日：2011-06-08

    申请人： Nim Tea

    发明人： Nim Tea

    IPC分类号： F28F21/08 ,  B23P25/00

    CPC分类号： F28F19/02 ,  C23C16/45555 ,  F28F2260/02 ,  H01L23/473 ,  H01L2924/0002 ,  Y10T29/49885 ,  H01L2924/00

    摘要： A conformal, multilayer micro-channel structure having a wear-resistant interior micro-channel surface coating of an ALD deposited conformal alumina (Al2O3) ceramic of about 1000 Å in thickness and a titanium nitride (TiN) of about 300 Å to about 1000 Å in thickness. The Al2O3/TiN multilayer structure is resistant to erosion and to electro-chemical corrosion as is found in prior art micro-channel coolers and structures.

    摘要翻译： 具有耐磨内部微通道表面涂层的保形多层微通道结构，其具有厚度约为1000埃的ALD沉积的保形氧化铝（Al 2 O 3）陶瓷和约300至约1000埃的氮化钛（TiN） 厚度。 如现有技术的微通道冷却器和结构中所述，Al2O3 / TiN多层结构耐腐蚀和电化学腐蚀。

    PROBE FOR TESTING SEMICONDUCTOR DEVICES
    5.
    发明申请
    PROBE FOR TESTING SEMICONDUCTOR DEVICES 有权
    用于测试半导体器件的探针

    公开(公告)号：US20080252328A1

    公开(公告)日：2008-10-16

    申请号：US12042295

    申请日：2008-03-04

    申请人： Zhiyong An ,  Melvin Khoo ,  Nim Tea ,  Ting Hu

    发明人： Zhiyong An ,  Melvin Khoo ,  Nim Tea ,  Ting Hu

    IPC分类号： G01R1/067

    CPC分类号： G01R1/06733 ,  G01R1/06727

    摘要： A novel probe design is presented that increases a probe tolerance to stress fractures. Specifically, what is disclosed are three features increase stress tolerance. These features include a various union angle interface edge shapes, pivot cutouts and buffers.

    摘要翻译： 提出了一种新的探针设计，增加了对应力骨折的探针耐受性。 具体来说，公开的是增加压力容忍度的三个特征。 这些特征包括各种联合角度界面边缘形状，枢轴切口和缓冲区。

    Probe card assembly
    6.
    发明申请
    Probe card assembly 有权
    探头卡组合

    公开(公告)号：US20070145988A1

    公开(公告)日：2007-06-28

    申请号：US11317408

    申请日：2005-12-22

    申请人： Raffi Garabedian ,  Nim Tea ,  Steven Wang ,  Heather Karklin

    发明人： Raffi Garabedian ,  Nim Tea ,  Steven Wang ,  Heather Karklin

    IPC分类号： G01R31/02

    CPC分类号： G01R3/00 ,  G01R1/07378 ,  Y10T29/53243

    摘要： A probe card assembly has a probe contractor substrate having a plurality of probe contractor tips thereon and a probe card wiring board with an interposer disposed between the two. Support posts contacting the probe contractor substrate are vertically adjustable until secured by a locking mechanism which is coupled to the probe card wiring board. When the posts are secured in a fixed position, the position is one in which the plane of the plurality of probe contractor substrates is substantially parallel to a predetermined reference plane.

    摘要翻译： 探针卡组件具有在其上具有多个探针承载器尖端的探针承载器基板和设置在两者之间的插入器的探针卡布线板。 与探针承载器基板接触的支撑柱是可垂直调节的，直到通过耦合到探针卡布线板的锁定机构固定。 当柱固定在固定位置时，位置是多个探头承载器基板的平面基本上平行于预定参考平面的位置。

    Probe card with balanced lateral force
    7.
    发明授权
    Probe card with balanced lateral force 有权
    探头卡平衡横向力

    公开(公告)号：US07538567B2

    公开(公告)日：2009-05-26

    申请号：US11457132

    申请日：2006-07-12

    申请人： Shaoning Lu ,  Melvin Khoo ,  Nim Tea

    发明人： Shaoning Lu ,  Melvin Khoo ,  Nim Tea

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891 ,  G01R1/07342

    摘要： A novel method and structure for counter-balancing a lateral force exerted by a probe card onto a device under test (“DUT”) is disclosed. Many DUTs (particularly memory devices) are tested in parallel (i.e., many die at a time) and have unequal numbers of contact pads on top vs. bottom and/or right vs. left sides of the die. The probe card used to test the DUT would necessarily have an uneven distribution of probes that match the contact pads and, as a consequence, may exert a net lateral force on the DUT. By manipulating the individual characteristics of the individual probes, a probe card may be constructed that zeroes the lateral force. Characteristics such as the direction and stiffness of the individual probes can be varied to zero the net lateral force.

    摘要翻译： 公开了一种用于将探针卡施加到被测设备（“DUT”）上的横向力平衡的新颖方法和结构。 许多DUT（特别是存储器件）被并行测试（即，一次许多裸片），并且在芯片的顶部与底部和/或右侧或左侧具有不相等数量的接触焊盘。 用于测试DUT的探针卡必然具有与接触垫匹配的探头不均匀分布，因此可能在DUT上施加净侧向力。 通过操纵各个探针的各个特性，构造可以使横向力为零的探针卡。 诸如各个探针的方向和刚度的特征可以变化为零的净侧向力。

    HYBRID PROBE FOR TESTING SEMICONDUCTOR DEVICES
    8.
    发明申请
    HYBRID PROBE FOR TESTING SEMICONDUCTOR DEVICES 有权
    用于测试半导体器件的混合探针

    公开(公告)号：US20080252310A1

    公开(公告)日：2008-10-16

    申请号：US11734434

    申请日：2007-04-12

    申请人： Nim Tea ,  Zhiyong An ,  Melvin Khoo

    发明人： Nim Tea ,  Zhiyong An ,  Melvin Khoo

    IPC分类号： G01R1/067

    CPC分类号： G01R1/06733 ,  G01R1/06727 ,  G01R3/00

    摘要： A novel hybrid probe design is presented that comprises a torsion element and a bending element. These elements allow the probe to store the displacement energy as torsion or as bending. The novel hybrid probe comprises a probe base, a torsion element, a bending element, and a probe tip. The probe elastically deforms to absorb the displacement energy as the probe tip contacts the DUT contact pad. The bending element absorbs some of the displacement energy through bending. Because the torsion element and the bending element join at an angle, a portion of the displacement energy is transferred to the torsion element causing it to twist (torque). The torsion element can also bend to accommodate the storage of energy through torsion and bending. Also, adjusting the position of a pivot can be manipulated to alter the energy absorption characteristics of the probe. One or more additional angular elements may be added to change the energy absorption characteristics of the probe. And, the moment of inertia for the torsion and/or bending elements can by manipulated to achieve the desired probe characteristics.

    摘要翻译： 提出了一种新颖的混合探针设计，其包括扭转元件和弯曲元件。 这些元件允许探头将位移能量存储为扭转或弯曲。 该新型混合探针包括探针基座，扭转元件，弯曲元件和探针尖端。 当探针尖端接触DUT接触垫时，探头弹性变形以吸收位移能量。 弯曲元件通过弯曲吸收一些位移能量。 由于扭转元件和弯曲元件以一定角度接合，所以位移能量的一部分被传递到扭转元件，使其扭转（扭矩）。 扭转元件还可以弯曲以适应通过扭转和弯曲的能量存储。 此外，可以调节枢轴的位置以改变探头的能量吸收特性。 可以添加一个或多个附加角元件以改变探针的能量吸收特性。 并且，通过操纵扭转和/或弯曲元件的惯性矩可以实现所需的探针特性。

    Probe Card with Balanced Lateral Force
    9.
    发明申请
    Probe Card with Balanced Lateral Force 有权
    具有平衡侧向力的探针卡

    公开(公告)号：US20080012594A1

    公开(公告)日：2008-01-17

    申请号：US11457132

    申请日：2006-07-12

    申请人： Shaoning Lu ,  Melvin Khoo ,  Nim Tea

    发明人： Shaoning Lu ,  Melvin Khoo ,  Nim Tea

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891 ,  G01R1/07342

    摘要： A novel method and structure for counter-balancing a lateral force exerted by a probe card onto a device under test (“DUT”) is disclosed. Many DUTs (particularly memory devices) are tested in parallel (i.e., many die at a time) and have unequal numbers of contact pads on top vs. bottom and/or right vs. left sides of the die. The probe card used to test the DUT would necessarily have an uneven distribution of probes that match the contact pads and, as a consequence, may exert a net lateral force on the DUT. By manipulating the individual characteristics of the individual probes, a probe card may be constructed that zeroes the lateral force. Characteristics such as the direction and stiffness of the individual probes can be varied to zero the net lateral force.

    摘要翻译： 公开了一种用于将探针卡施加到被测设备（“DUT”）上的横向力平衡的新颖方法和结构。 许多DUT（特别是存储器件）被并行测试（即，一次许多裸片），并且在芯片的顶部与底部和/或右侧或左侧具有不相等数量的接触焊盘。 用于测试DUT的探针卡必然具有与接触垫匹配的探头不均匀分布，因此可能在DUT上施加净侧向力。 通过操纵各个探针的各个特性，构造可以使横向力为零的探针卡。 诸如各个探针的方向和刚度的特征可以变化为零的净侧向力。