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1.发明授权Direct vapor delivery of enabling chemical for enhanced HF etch process performance 失效直接蒸汽输送使化学品增强HF蚀刻工艺性能公开(公告)号：US06299724B1
公开(公告)日：2001-10-09
申请号：US09535761
申请日：2000-03-28
IPC分类号： H01L21302
CPC分类号： H01L21/02049 , H01L21/30604 , H01L21/31116
摘要： Apparatus and method for direct delivery of enabling chemical gas from a liquid source and of HF gas in a hydrogen fluoride/enabling chemical based cleaning or etching process, such as a silicon dioxide film etching process. The liquid enabling chemical is temperature controlled to generate a vapor pressure which is sufficient to operate a mass flow controller at a desired processing pressure without a carrier gas. Prior to entering the process chamber, the enabling chemical gas is pre-mixed with HF and optionally, a carrier gas, all of which are supplied at flow rates independent of each other. By controlling the vapor pressure of the solvent in this way, solvent/HF/carrier mixtures which are not physically possible with carrier gas systems are attainable allowing access to a larger process space.
摘要翻译： 用于直接输送来自液体源和HF气体的化学气体在氟化氢/使得基于化学的清洁或蚀刻工艺（例如二氧化硅膜蚀刻工艺）中的装置和方法。 液体使能化学品受温度控制，以产生足以在没有载气的情况下以所需加工压力操作质量流量控制器的蒸气压。 在进入处理室之前，使能化学气体与HF和任选的载气一起预混合，所有载气都以彼此独立的流速供应。 通过以这种方式控制溶剂的蒸汽压力，可以实现在载体气体系统上物理不可能的溶剂/ HF /载体混合物，从而允许进入更大的工艺空间。
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2.发明授权Apparatus and method for power management of a system of indicator light devices 有权指示灯装置系统的电源管理装置和方法公开(公告)号：US09286804B2
公开(公告)日：2016-03-15
申请号：US13100230
申请日：2011-05-03
CPC分类号： G08G1/142 , G06F1/3206 , G08G1/146
摘要： Indicator light devices are useful in many applications for indicating properties of physical spaces respectively associated therewith and in physical proximity thereto. The indicator light devices are network-enabled and self-powered, and capable of participating in coordinated power-managed operation to provide a sufficient service life and lower installation and replacement costs. The indicator light devices may be used with or without associated sensors. The various embodiments described herein use various power management techniques singly or in combination to greatly increase the service life of self-power indicator light devices without diminishing their effectiveness in the application. These techniques include operating only the indicator light devices associated with the physical spaces having properties of interest, operating the indicator light devices with synchronized flashing, operating the indicator light devices in accordance with the detection of specific conditions, relevant time operation, in-vicinity activation, and ambient light responsiveness.
摘要翻译： 指示灯装置在许多应用中可用于指示分别与其相关联的物理空间的物理空间以及物理空间的物理空间。 指示灯设备是网络启用和自供电的，能够参与协调的电力管理操作，以提供足够的使用寿命并降低安装和更换成本。 指示灯设备可以与或不与相关联的传感器一起使用。 本文描述的各种实施例单独地或组合地使用各种功率管理技术来大大增加自身指示灯设备的使用寿命，而不会降低其在应用中的有效性。 这些技术包括仅操作与具有感兴趣性质的物理空间相关联的指示灯装置，以同步闪烁操作指示灯装置，根据特定条件的检测，相关时间操作，附近激活来操作指示灯装置 ，以及环境光响应性。
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3.发明申请Apparatus and Method for Power Management of a System of Indicator Light Devices 有权指示灯装置系统的电源管理装置和方法公开(公告)号：US20120280793A1
公开(公告)日：2012-11-08
申请号：US13100230
申请日：2011-05-03
IPC分类号： G08B25/00
CPC分类号： G08G1/142 , G06F1/3206 , G08G1/146
摘要： Indicator light devices are useful in many applications for indicating properties of physical spaces respectively associated therewith and in physical proximity thereto. The indicator light devices are network-enabled and self-powered, and capable of participating in coordinated power-managed operation to provide a sufficient service life and lower installation and replacement costs. The indicator light devices may be used with or without associated sensors. The various embodiments described herein use various power management techniques singly or in combination to greatly increase the service life of self-power indicator light devices without diminishing their effectiveness in the application. These techniques include operating only the indicator light devices associated with the physical spaces having properties of interest, operating the indicator light devices with synchronized flashing, operating the indicator light devices in accordance with the detection of specific conditions, relevant time operation, in-vicinity activation, and ambient light responsiveness.
摘要翻译： 指示灯装置在许多应用中可用于指示分别与其相关联的物理空间的物理空间以及物理空间的物理空间。 指示灯设备是网络启用和自供电的，能够参与协调的电力管理操作，以提供足够的使用寿命并降低安装和更换成本。 指示灯设备可以与或不与相关联的传感器一起使用。 本文描述的各种实施例单独地或组合地使用各种功率管理技术来大大增加自身指示灯设备的使用寿命，而不会降低其在应用中的有效性。 这些技术包括仅操作与具有感兴趣性质的物理空间相关联的指示灯装置，以同步闪烁操作指示灯装置，根据特定条件的检测，相关时间操作，附近激活来操作指示灯装置 ，以及环境光响应性。
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公开(公告)号：US06713195B2
公开(公告)日：2004-03-30
申请号：US10041910
申请日：2002-01-07
IPC分类号： G11B566
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , G11B5/3909 , G11B2005/3996 , H01F10/3231 , H01L43/10 , Y10T428/1121 , Y10T428/12861 , Y10T428/12931 , Y10T428/26 , Y10T428/261
摘要： A ferromagnetic thin-film based magnetoresistive device with a first ferromagnetic material based film having electrically conductive, ferromagnetic material nanogranules embedded in an intergranular material of a smaller electrical conductivity first nonmagnetic. The device may have an intermediate layer adjacent the first ferromagnetic material based film and a second film is on the other side of the intermediate layer of a substantially ferromagnetic material. The first film is less than 1.0 &mgr;m thick.
摘要翻译： 一种基于铁磁薄膜的磁阻器件，其具有第一基于铁磁材料的膜，该膜具有导电的铁磁性材料纳米颗粒，该纳米粒子嵌入在较小导电性的非晶格材料中。 该装置可以具有与第一基于铁磁材料的膜相邻的中间层，并且第二膜位于基本上铁磁材料的中间层的另一侧上。 第一个胶片厚度小于1.0毫米。
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5.发明申请公开(公告)号：US20090207770A1
公开(公告)日：2009-08-20
申请号：US12378436
申请日：2009-02-13
IPC分类号： G08C17/02
CPC分类号： H04Q9/00 , G08C2201/10 , H04Q2209/40 , H04Q2209/823 , H04Q2209/886 , H04W52/0219
摘要： A wireless sensor and actuator network includes a number of wireless nodes, each of which may be connected to any one or combination of analog sensors, digital sensors, and actuators, and is powered by an autonomous power supply such as a battery or solar panel. Since autonomous power sources may not have sufficient voltage for powering many types of analog sensors, digital sensors, and actuators, power management techniques are used in the node and in the autonomous power supply as needed to enable effective and long life operation of the node and connected devices. These power management techniques include the use of a low impedance energy reservoir and a variable voltage boost converter whose output voltage magnitude, duration, and operating times are software configurable and controllable. The power management techniques are particularly useful for operating a wide range of different types of sensors and actuators.
摘要翻译： 无线传感器和致动器网络包括多个无线节点，每个无线节点可以连接到模拟传感器，数字传感器和致动器中的任何一个或组合，并且由诸如电池或太阳能电池板的自主电源供电。 由于自主电源可能没有足够的电压来供电许多类型的模拟传感器，数字传感器和执行器，所以在节点和自主电源中使用功率管理技术，以实现节点的有效和长寿命运行， 连接的设备。 这些电源管理技术包括使用低阻能量储能器和可变电压升压转换器，其输出电压幅度，持续时间和操作时间是软件可配置和可控的。 功率管理技术对于操作各种不同类型的传感器和致动器特别有用。
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公开(公告)号：US07107666B2
公开(公告)日：2006-09-19
申请号：US10077180
申请日：2002-02-15
CPC分类号： H01L23/645 , H01F17/0006 , H01F17/0033 , H01F41/046 , H01F41/34 , H01L2924/0002 , H01L2924/09701 , Y10T29/4902 , Y10T29/49062 , Y10T29/49064 , Y10T29/49073 , Y10T29/49156 , Y10T29/49165 , H01L2924/00
摘要： An ultra-miniature magnetic device generally comprises a conductive winding and a magnetic core. The conductive winding includes an upper conductor and a lower conductor. The magnetic core is of an elongate rectangular or oval shape having two elongate sections and two short sections. The lower conductor is preferably positioned below the elongate sections of the magnetic core while the upper conductor is preferably positioned above the elongate sections of the magnetic core. The lower and upper conductors are electrically connected by conducting via structures that are formed in sequential steps using semiconductor processing technology. The result is a coil winding around the elongate sections, with the short sections being preferably free of windings. The process provides an advantage of avoiding shorting between the via structures and the magnetic core caused by overetching when etching the via holes.
摘要翻译： 超微型磁性装置通常包括导电绕组和磁芯。 导电绕组包括上导体和下导体。 磁芯是细长的矩形或椭圆形，具有两个细长部分和两个短的部分。 下导体优选地定位在磁芯的细长部分的下方，而上导体优选地定位在磁芯的细长部分的上方。 下导体和上导体通过使用半导体处理技术以顺序步骤形成的导电通孔结构电连接。 结果是围绕细长部分的线圈缠绕，其中短部分优选地没有绕组。 该方法提供了在蚀刻通孔时避免由过蚀刻引起的通孔结构和磁芯之间短路的优点。
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7.发明授权Magnetic digital signal coupler having selected/reversal directions of magnetization 有权具有选择/反转磁化方向的磁数字信号耦合器公开(公告)号：US06300617B1
公开(公告)日：2001-10-09
申请号：US09261899
申请日：1999-03-03
IPC分类号： H01L3100
CPC分类号： G01R15/205 , H01L2224/48137 , H01L2924/0102 , H01L2924/01025 , H01L2924/01077 , H01L2924/01078 , H01L2924/13091 , H01L2924/14 , H01L2924/19041 , H01L2924/30107 , H01L2924/3011 , H01L2924/3025 , H04B5/00 , H04B5/0043 , H04B5/005
摘要： A current determiner having an output at which representations of input currents are provided comprising an input conductor for the input current and a current sensor supported on a substrate electrically isolated from one another but with the sensor positioned in the magnetic fields arising about the input conductor due to any input currents. The sensor extends along the substrate in a direction at an angle to the extent of the input conductor and is formed of at least a pair of thin-film ferromagnetic layers separated by a nonmagnetic layer with one of these two ferromagnetic thin-film layers having a magnetization that is substantially maintained in a selected direction despite the magnetic fields arising from the input currents causing reversals of direction of magnetization of that remaining one of these two ferromagnetic thin-film layers. This first current sensor is spaced apart from the input conductor at least in part by a polymeric electrical insulating material, and the input conductor can be provided on a mechanically stiff base supported on such material and provided with an electric field interrupter supporting such material between the first current sensor and the input conductor. The sensor can be electrically connected to a electronic circuitry formed in the substrate as a monolithic integrated circuit sharing a common reference, and two such monolithic integrated chips in a housing can provide duplex information signal transmission.
摘要翻译： 具有输出的电流确定器包括输入电流的表示，其包括用于输入电流的输入导体和支撑在彼此电隔离的基板上的电流传感器，但是传感器位于围绕输入导体的磁场中 到任何输入电流。 传感器沿着与输入导体的程度成一定角度的方向沿着衬底延伸，并且由至少一对由非磁性层分离的薄膜铁磁层形成，其中这两个铁磁性薄膜层中的一个具有 尽管从输入电流产生的磁场导致这两个铁磁性薄膜层中的剩余的一个的磁化方向的反转，但是基本保持在所选方向上的磁化。 该第一电流传感器至少部分地由聚合物电绝缘材料与输入导体间隔开，并且输入导体可以设置在支撑在这种材料上的机械刚性基底上，并且设置有电场断续器， 第一电流传感器和输入导体。 传感器可以电连接到形成在衬底中的电子电路，作为共享共同参考的单片集成电路，并且外壳中的两个这样的单片集成芯片可以提供双工信息信号传输。
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公开(公告)号：US5954884A
公开(公告)日：1999-09-21
申请号：US818890
申请日：1997-03-17
IPC分类号： C23F4/00 , H01L21/302 , H01L21/304 , H01L21/306 , H01L21/3213 , B08B3/12
CPC分类号： H01L21/02046 , H01L21/32136
摘要： A chlorine based dry-cleaning system appropriate for removing metal contaminants from the surface of substrate is described in which the metal contaminant is chlorinated and reduced to a volatile metal chloride by UV irradiation. The process parameters of chlorine gas partial pressure, temperature, ultraviolet bandwidth, and/or the sequence of exposure of the substrate to the chlorine containing gas and to the ultraviolet radiation are selected so as to effect substantial removal of the metal without excessive substrate roughening.
摘要翻译： 描述了适用于从基材表面去除金属污染物的氯基干洗系统，其中金属污染物被氯化并通过UV照射还原成挥发性金属氯化物。 选择氯气分压，温度，紫外线带宽和/或基板暴露于含氯气体和紫外线的过程参数，以便实质上除去金属而不会过多的基板粗糙化。
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公开(公告)号：US07025831B1
公开(公告)日：2006-04-11
申请号：US09443663
申请日：1999-11-19
申请人： Jeffery W. Butterbaugh , David C. Gray , Robert T. Fayfield , Kevin Siefering , John Heitzinger , Fred C. Hiatt
发明人： Jeffery W. Butterbaugh , David C. Gray , Robert T. Fayfield , Kevin Siefering , John Heitzinger , Fred C. Hiatt
IPC分类号： C23C16/48 , C23F1/00 , H01L21/306
CPC分类号： H01L21/31116 , C03C15/00 , C03C23/0075 , C23F1/00 , C23F1/12 , C23G5/00 , H01L21/02046 , H01L21/67115
摘要： Apparatus and process for conditioning a generally planar substrate, contained in a chamber isolatable from the ambient environment and fed with a conditioning gas which includes reactive gas. The apparatus includes a support for supporting the substrate in the chamber, the substrate being in a lower pressure reaction region of the chamber. A gas inlet is provided for feeding conditioning gas into a gas inlet region of the chamber which is at a higher pressure than the lower pressure reaction region so that the pressure differential causes the conditioning gas to flow toward the surface of the substrate wherein the conditioning gas component will chemically react with and condition the substrate surface, both said higher and lower pressure regions operating in a viscous flow regime. The substrate is supported such that a pressure bias is created across the surface of this substrate so that the gas, after it has chemically reacted with the substrate surface, flows outward from where it has reacted, off the substrate toward the periphery of the chamber and out a peripheral or central underside exhaust outlet. Gas feed may be provided to one or both sides the substrate and light activation of the substrate or conditioning gas may be provided on one or both sides.
摘要翻译： 用于调理大体上平面的基底的装置和方法，包含在可与周围环境隔离的室中并供给包括反应气体的调节气体。 该装置包括用于在腔室中支撑衬底的支撑件，衬底处于室的较低压力反应区域中。 提供了一个气体入口，用于将调节气体输送到腔室的气体入口区域中，该气体入口区域处于比低压反应区域更高的压力，使得压力差导致调节气体朝向衬底的表面流动，其中调节气体 所述组分将在粘性流动状态下操作的所述较高压力区域和较低压力区域将与底物表面发生化学反应和调节。 支撑衬底，使得在该衬底的表面上形成压力偏压，使得气体在其与衬底表面发生化学反应之后从其已经反应的位置向外流动，离开衬底朝向腔室的周边，并且 外围或中央下侧排气口。 可以将气体进料提供给基材的一侧或两侧，并且可以在一侧或两侧设置基材或调理气体的光活化。
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公开(公告)号：US07005850B2
公开(公告)日：2006-02-28
申请号：US10370790
申请日：2003-02-20
IPC分类号： G01R33/00
CPC分类号： G01V3/08
摘要： A magnetic sensor system and a method for installing magnetic sensors for detecting metal objects that allows ease of manipulation, control and access. A carrier conduit is used to position a magnetic sensor in an outer conduit. The outer conduit may be disposed beneath a surface where objects to be detected may be positioned. Alternatively, a conduit having multiple channels may be placed in a pathway. Magnetic sensors may be placed in the channels and a top placed over the conduit. Multiple embodiments for orienting the magnetic sensor systems are provided.
摘要翻译： 磁传感器系统和用于安装用于检测金属物体的磁传感器的方法，其允许易于操纵，控制和访问。 使用载体导管将磁性传感器定位在外部导管中。 外部管道可以设置在可以定位被检测物体的表面下方。 或者，具有多个通道的导管可以放置在通路中。 磁传感器可以放置在通道中，顶部放置在导管上方。 提供了用于定向磁传感器系统的多个实施例。
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