RESONATION DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
    4.
    发明申请
    RESONATION DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT 有权
    共振装置,电子装置和移动物体

    公开(公告)号:US20140292422A1

    公开(公告)日:2014-10-02

    申请号:US14220587

    申请日:2014-03-20

    Inventor: Manabu KONDO

    CPC classification number: H03B5/30 H03H9/0552 H03H9/1021

    Abstract: A quartz crystal oscillator as a resonation device includes a substrate, a quartz crystal resonator as a resonator attached with a heating element, terminals adapted to fix the resonator and the substrate to each other, and intermediate members having an electrical insulation property and lower in thermal conductivity than the terminals. The intermediate members intervene between the resonator and the substrate via the terminals, and a gap is disposed between the quartz crystal resonator and the substrate.

    Abstract translation: 作为谐振装置的石英晶体振荡器包括基板,作为附加有加热元件的谐振器的石英晶体谐振器,适于将谐振器和基板固定的端子,以及具有电绝缘性能和热导率低的中间部件 电导率比端子。 中间构件经由端子介入谐振器和基板之间,并且在石英晶体谐振器和基板之间设置间隙。

    METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS
    10.
    发明申请
    METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS 有权
    制造电光器件,电光器件和电子设备的方法

    公开(公告)号:US20160282608A1

    公开(公告)日:2016-09-29

    申请号:US15018086

    申请日:2016-02-08

    Inventor: Manabu KONDO

    Abstract: After a first wafer on which mirrors and terminals are formed and a second wafer for sealing are stacked and bonded together, the first wafer and the second wafer are diced to manufacture electro-optical devices. In doing so, in a second surface of the second wafer, recesses overlapping the mirrors in a plan view are previously formed, and also grooves overlapping the terminals in the plan view are previously formed. For this reason, when the second wafer is diced along the grooves by advancing a dicing blade for second wafer from a third surface of the second wafer, the dicing blade for second wafer can be prevented from coming into contact with the terminal.

    Abstract translation: 在其上形成有反射镜和端子的第一晶片和用于密封的第二晶片被堆叠并结合在一起之后,第一晶片和第二晶片被切割以制造电光器件。 在这样做时,在第二晶片的第二表面中,预先形成与平面图中的反射镜重叠的凹槽,并且预先形成与平面图中的端子重叠的凹槽。 为此,当从第二晶片的第三表面推进用于第二晶片的切割刀片沿着凹槽切割第二晶片时,可以防止用于第二晶片的切割刀片与端子接触。

Patent Agency Ranking