Electrostatic chuck device
    2.
    发明授权
    Electrostatic chuck device 有权
    静电吸盘装置

    公开(公告)号:US09466518B2

    公开(公告)日:2016-10-11

    申请号:US14286898

    申请日:2014-05-23

    Abstract: An electrostatic chuck device is provided in which there is no concern that a plate-shaped sample may be deformed when adsorbing the plate-shaped sample or when detaching the plate-shaped sample, the temperature of the plate-shaped sample is uniformized, and particles are not easily produced.In an electrostatic chuck device 1 provided with an electrostatic chuck section 2 which has a placement plate 11, an upper surface 11a of which is a placement surface on which a plate-shaped sample W such as a semiconductor wafer is placed, a support plate 12 integrated with the placement plate 11, and an internal electrode for electrostatic adsorption 13 and an insulating material layer 14 which are provided between the placement plate 11 and the support plate 12, an annular projection portion 21 is provided at a peripheral border portion on the upper surface 11a, a plurality of projection portions 22 having the same height as the height of the annular projection portion 21 are provided in an area surrounded by the annular projection portion 21 of the upper surface 11a, and an upper end portion of the annular projection portion 21 and an upper end portion of each of the plurality of projection portions 22 are located on a concave surface 23 with a central portion of the upper surface 11a as a basal plane.

    Abstract translation: 在设置有具有放置板11的静电卡盘部2的静电卡盘装置1中,其上表面11a是放置有诸如半导体晶片的板状样品W的放置表面,支撑板12 与放置板11和设置在放置板11和支撑板12之间的静电吸附用内部电极13和绝缘材料层14一体化的环状突起部21设置在上部的周边边界部 表面11a,在由上表面11a的环形突出部分21围绕的区域中设置有与环形突出部分21的高度相同高度的多个突出部分22,并且环形突起部分的上端部分 21,并且多个突出部22中的每一个的上端部位于凹面23上,上表面的中心部分 11a作为基础飞机。

    OPTICAL SEMICONDUCTOR LIGHT EMITTING DEVICE, LIGHTING APPARATUS, AND DISPLAY DEVICE
    4.
    发明申请
    OPTICAL SEMICONDUCTOR LIGHT EMITTING DEVICE, LIGHTING APPARATUS, AND DISPLAY DEVICE 审中-公开
    光学半导体发光装置,照明装置和显示装置

    公开(公告)号:US20150221836A1

    公开(公告)日:2015-08-06

    申请号:US14424957

    申请日:2013-08-26

    CPC classification number: H01L33/507 H01L33/501 H01L33/58 H01L2933/0091

    Abstract: An optical semiconductor light emitting device which emits white light, includes: an optical semiconductor light emitting element; and an optical conversion layer containing phosphor particles, in which a specific light scattering composition is contained in the optical conversion layer or a light scattering layer containing a specific light scattering composition is provided on the optical conversion layer. An illumination apparatus and a display apparatus including the same are also provided.

    Abstract translation: 发射白光的光半导体发光器件包括:光半导体发光元件; 并且在光转换层上设置有光转换层中含有特定光散射组合物的光转换层或含有特定光散射组合物的光散射层。 还提供了一种照明装置和包括该照明装置的显示装置。

    ELECTROSTATIC CHUCK DEVICE
    10.
    发明申请
    ELECTROSTATIC CHUCK DEVICE 有权
    静电切割装置

    公开(公告)号:US20140355169A1

    公开(公告)日:2014-12-04

    申请号:US14286898

    申请日:2014-05-23

    Abstract: An electrostatic chuck device is provided in which there is no concern that a plate-shaped sample may be deformed when adsorbing the plate-shaped sample or when detaching the plate-shaped sample, the temperature of the plate-shaped sample is uniformized, and particles are not easily produced.In an electrostatic chuck device 1 provided with an electrostatic chuck section 2 which has a placement plate 11, an upper surface 11a of which is a placement surface on which a plate-shaped sample W such as a semiconductor wafer is placed, a support plate 12 integrated with the placement plate 11, and an internal electrode for electrostatic adsorption 13 and an insulating material layer 14 which are provided between the placement plate 11 and the support plate 12, an annular projection portion 21 is provided at a peripheral border portion on the upper surface 11a, a plurality of projection portions 22 having the same height as the height of the annular projection portion 21 are provided in an area surrounded by the annular projection portion 21 of the upper surface 11a, and an upper end portion of the annular projection portion 21 and an upper end portion of each of the plurality of projection portions 22 are located on a concave surface 23 with a central portion of the upper surface 11a as a basal plane.

    Abstract translation: 提供了一种静电卡盘装置,其中不考虑板状样品在吸附板状样品时可能变形,或者当分离板状样品时,板状样品的温度均匀化,颗粒的颗粒 不容易生产。 在设置有具有放置板11的静电卡盘部2的静电卡盘装置1中,其上表面11a是放置有诸如半导体晶片的板状样品W的放置表面,支撑板12 与放置板11和设置在放置板11和支撑板12之间的静电吸附用内部电极13和绝缘材料层14一体化的环状突起部21设置在上部的周边边界部 表面11a,在由上表面11a的环形突出部分21围绕的区域中设置有与环形突出部分21的高度相同高度的多个突出部分22,并且环形突起部分的上端部分 21,并且多个突出部22中的每一个的上端部位于凹面23上,上表面的中心部分 11a作为基础飞机。

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