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    Canister
    1.
    发明授权
    Canister 有权
    罐

    公开(公告)号：US09057125B2

    公开(公告)日：2015-06-16

    申请号：US13710310

    申请日：2012-12-10

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Choel-Min Jang ,  Myung-Soo Huh ,  Suk-Won Jung ,  Sung-Yong Lee ,  Cheol-Rae Jo ,  In-Kyo Kim ,  Sung-Hun Key

    IPC: B01F3/04 ,  C23C16/00 ,  C23C16/448

    CPC classification number: C23C16/00 ,  B01F3/04 ,  C23C16/4481 ,  C23C16/4482

    Abstract: A canister includes an accommodation portion for accommodating a liquid material; an outlet pipe that is connected to the accommodation portion so as to discharge a gas material obtained by vaporizing the liquid material; a blocking cover that is connected to an upper surface of the accommodation portion; and a plurality of baffle plates that are disposed in the accommodation portion and are spaced apart from each other. The canister further includes a restrictor including a main body member that is disposed between the plurality of baffle plates and the blocking cover and is connected to an internal surface of the accommodation portion, an extension member extending from the main body member, and a through portion that is formed through the main body member and the extension member. A deposition procedure using the canister is efficiently performed and characteristics of a deposition layer are easily improved.

    Abstract translation: 罐包括用于容纳液体材料的容纳部分; 出口管，其连接到容纳部分，以排出通过汽化液体材料获得的气体材料; 阻挡盖，其连接到所述容纳部的上表面; 以及设置在容纳部分中并彼此间隔开的多个挡板。 所述罐还包括限制器，所述限制器包括主体部件，所述主体部件设置在所述多个挡板和所述阻挡盖之间，并且连接到所述容纳部的内表面，从所述主体部件延伸的延伸部件， 其通过主体构件和延伸构件形成。 可以有效地进行使用罐的沉积工序，容易地提高沉积层的特性。

    VAPOR DEPOSITION AND VAPOR DEPOSITION METHOD
    2.
    发明申请
    VAPOR DEPOSITION AND VAPOR DEPOSITION METHOD 审中-公开
    蒸气沉积和蒸发沉积方法

    公开(公告)号：US20150144062A1

    公开(公告)日：2015-05-28

    申请号：US14590491

    申请日：2015-01-06

    Applicant: Samsung Display Co., Ltd.

    Inventor： Choel-Min Jang ,  Myung-Soo Huh ,  Jeong-Ho Yi ,  Cheol-Rae Jo ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Jin-Kwang Kim

    IPC: C23C16/46 ,  C23C16/458 ,  C23C16/455

    CPC classification number: C23C16/46 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/4583

    Abstract: A vapor deposition apparatus includes a stage on which a substrate is mounted; a heater unit that is disposed at a side of the stage and includes a first heater and a second heater, wherein the first heater and the second heater are movable so that the first heater and the second heater are spaced apart from each other or are disposed adjacent to each other; and a nozzle unit that is disposed at a side opposite to the side at which the heater unit is disposed about the stage and includes one or more nozzles.

    Abstract translation: 蒸镀装置包括：载置基板的载物台; 加热器单元，其设置在所述台的一侧并且包括第一加热器和第二加热器，其中所述第一加热器和所述第二加热器可移动，使得所述第一加热器和所述第二加热器彼此间隔开或布置 相邻; 以及喷嘴单元，其设置在与所述加热器单元围绕所述台架配置的一侧相对的一侧，并且包括一个或多个喷嘴。

    THIN FILM DEPOSITION DEVICE INCLUDING DEPOSITION-PREVENTING UNIT AND METHOD OF REMOVING DEPOSITS THEREOF
    3.
    发明申请
    THIN FILM DEPOSITION DEVICE INCLUDING DEPOSITION-PREVENTING UNIT AND METHOD OF REMOVING DEPOSITS THEREOF 审中-公开
    薄膜沉积装置，包括沉积单元及其沉积物的方法

    公开(公告)号：US20140227442A1

    公开(公告)日：2014-08-14

    申请号：US13924456

    申请日：2013-06-21

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Myung-Soo Huh ,  Sun-Ho Kim ,  Cheol-Rae Jo ,  Hyun-Woo Joo

    IPC: C23C16/44

    CPC classification number: C23C16/4407 ,  C23C14/564 ,  C23C16/4401

    Abstract: Provided is a thin film deposition device including a deposition-preventing unit and a method of removing deposits thereof. The method includes: separating a deposition-preventing unit including at least one deposition-preventing plate and a deformation unit coupled to an outer surface of the at feast one deposition-preventing plate from a chamber of the thin film deposition device; and removing a film formation layer from the deposition-preventing plate.

    Abstract translation: 本发明提供一种薄膜沉积装置，其包括防沉积单元及其沉积物的去除方法。 该方法包括：将包括至少一个防沉积板和变形单元的沉积防止单元与薄膜沉积装置的室耦合到一个防沉积板的外表面; 以及从防沉积板去除成膜层。

    CANISTER
    4.
    发明申请
    CANISTER 有权
    罐

    公开(公告)号：US20140041590A1

    公开(公告)日：2014-02-13

    申请号：US13710310

    申请日：2012-12-10

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Choel-Min JANG ,  Myung-Soo HUH ,  Suk-Won JUNG ,  Sung-Yong LEE ,  Cheol-Rae Jo ,  In-Kyo KIM ,  Sung-Hun KEY

    IPC: C23C16/00

    CPC classification number: C23C16/00 ,  B01F3/04 ,  C23C16/4481 ,  C23C16/4482

    Abstract: A canister includes an accommodation portion for accommodating a liquid material; an outlet pipe that is connected to the accommodation portion so as to discharge a gas material obtained by vaporizing the liquid material; a blocking cover that is connected to an upper surface of the accommodation portion; and a plurality of baffle plates that are disposed in the accommodation portion and are spaced apart from each other. The canister further includes a restrictor including a main body member that is disposed between the plurality of baffle plates and the blocking cover and is connected to an internal surface of the accommodation portion, an extension member extending from the main body member, and a through portion that is formed through the main body member and the extension member. A deposition procedure using the canister is efficiently performed and characteristics of a deposition layer are easily improved.

    Abstract translation: 罐包括用于容纳液体材料的容纳部分; 出口管，其连接到容纳部分，以排出通过汽化液体材料获得的气体材料; 阻挡盖，其连接到所述容纳部的上表面; 以及设置在容纳部分中并彼此间隔开的多个挡板。 所述罐还包括限制器，所述限制器包括主体部件，所述主体部件设置在所述多个挡板和所述阻挡盖之间，并且连接到所述容纳部的内表面，从所述主体部件延伸的延伸部件， 其通过主体构件和延伸构件形成。 可以有效地进行使用罐的沉积工序，容易地提高沉积层的特性。

    METHOD OF MANUFACTURING DISPLAY AND DEPOSITION APPARATUS FOR THE SAME
    5.
    发明申请
    METHOD OF MANUFACTURING DISPLAY AND DEPOSITION APPARATUS FOR THE SAME 审中-公开
    制造显示器和沉积装置的方法

    公开(公告)号：US20140302626A1

    公开(公告)日：2014-10-09

    申请号：US13964020

    申请日：2013-08-09

    Applicant: Samsung Display Co., Ltd.

    Inventor： Cheol-Rae Jo ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jeong-Ho Yi

    IPC: H01L51/56

    CPC classification number: H01L51/0011 ,  H01L2251/566

    Abstract: Provided are a method of manufacturing a display that may reduce deposition nonuniformity while concurrently manufacturing a plurality of displays, and a deposition apparatus that may be used in the method, wherein the method includes: preparing a mother substrate having a plurality of regions in a matrix pattern, the mother substrate being for forming a plurality of display units corresponding to the plurality of regions; inserting the mother substrate into a deposition chamber, wherein a deposition source is in the deposition chamber; depositing a material on the mother substrate by using a mask including a plurality of parallel stripe-shaped masking sheets extending in a first direction; and cutting the mother substrate along a periphery of each of the plurality of display units to obtain the plurality of displays.

    Abstract translation: 提供一种制造可以减少沉积不均匀性同时制造多个显示器的显示器的方法，以及可用于该方法的沉积设备，其中该方法包括：制备具有矩阵中多个区域的母基板 所述母体衬底用于形成对应于所述多个区域的多个显示单元; 将母基板插入沉积室，其中沉积源在沉积室中; 通过使用包括沿第一方向延伸的多个平行的条状掩模片的掩模将材料沉积在母体衬底上; 以及沿着所述多个显示单元中的每一个的周边切割所述母体基板以获得所述多个显示器。

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