公开(公告)号：US20240266440A1

公开(公告)日：2024-08-08

申请号：US18638530

申请日：2024-04-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sang-Joon Seo ,  Hoon-kee Min ,  Dong-Un Jin ,  Sung-Guk An

IPC: H01L29/786 ,  C23C16/34 ,  C23C16/40 ,  G02F1/1333 ,  H01L29/66

CPC classification number: H01L29/786 ,  C23C16/345 ,  C23C16/401 ,  H01L29/6675 ,  G02F1/133305 ,  G02F2201/501 ,  Y10T428/26

Abstract: A substrate for a flexible display is disclosed. The substrate has a film stress range that does not affect an electronic device such as a thin film transistor, and includes a barrier layer having excellent oxygen and moisture blocking characteristics, and a method of manufacturing the substrate. The substrate includes: a plastic substrate having a glass transition temperature from about 350° C. to about 500° C.; and a barrier layer disposed on the plastic substrate, having a multi-layer structure, wherein at least one silicon oxide layer and at least one silicon nitride layer are alternately stacked on each other, and having a film stress from about −200 MPa to about 200 MPa due to the at least one silicon oxide layer and the at least one silicon nitride layer.

公开(公告)号：US11978803B2

公开(公告)日：2024-05-07

申请号：US17329306

申请日：2021-05-25

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sang-Joon Seo ,  Hoon-Kee Min ,  Dong-Un Jin ,  Sung-Guk An

IPC: H01L29/786 ,  C23C16/34 ,  C23C16/40 ,  G02F1/1333 ,  H01L29/66

CPC classification number: H01L29/786 ,  C23C16/345 ,  C23C16/401 ,  H01L29/6675 ,  G02F1/133305 ,  G02F2201/501 ,  Y10T428/26

Abstract: A substrate for a flexible display is disclosed. The substrate has a film stress range that does not affect an electronic device such as a thin film transistor, and includes a barrier layer having excellent oxygen and moisture blocking characteristics, and a method of manufacturing the substrate. The substrate includes; a plastic substrate having a glass transition temperature from about 350° C. to about 500° C.; and a barrier layer disposed on the plastic substrate, having a inti layer structure, wherein at least one silicon oxide layer and at least one silicon nitride layer are alternately stacked on each other, and having a film stress from about −200 MPa to about 200 MPa due to the at least one silicon oxide layer and the at least one silicon nitride layer.

公开(公告)号：US20190048469A1

公开(公告)日：2019-02-14

申请号：US16155478

申请日：2018-10-09

Applicant: Samsung Display Co., Ltd. ,  Industry-University Cooperation Foundation Hanyang University ERICA Campus

Inventor： Sang-Joon Seo ,  Jae-Eung Oh

IPC: C23C16/50 ,  C23C16/455 ,  H01J37/32 ,  C23C16/04 ,  C23C16/44 ,  C23C16/458

Abstract: A vapor deposition apparatus efficiently performs a deposition process to form a thin film with improved characteristics on a substrate, and a method manufactures an organic light-emitting display apparatus by using such vapor deposition apparatus. The vapor deposition apparatus includes a body including an upper member and a lateral member coupled to the upper member; a receiving portion disposed to face one side of the lateral member; a stage disposed in the receiving portion and supporting the substrate; a plurality of first injection portions disposed in the lateral member and injecting at least one gas into a space between the lateral member and the upper member; a second injection portion disposed in the upper member and injecting at least one gas into the space between the lateral member and the upper member;and a plasma generating portion including a coil and a power source connected to the coil.

公开(公告)号：US09932672B2

公开(公告)日：2018-04-03

申请号：US14590491

申请日：2015-01-06

Applicant: Samsung Display Co., Ltd.

Inventor： Choel-Min Jang ,  Myung-Soo Huh ,  Jeong-Ho Yi ,  Cheol-Rae Jo ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Jin-Kwang Kim

IPC: C23C16/455 ,  C23C16/458 ,  C23C16/46

CPC classification number: C23C16/46 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/4583

Abstract: A vapor deposition apparatus includes a stage on which a substrate is mounted; a heater unit that is disposed at a side of the stage and includes a first heater and a second heater, wherein the first heater and the second heater are movable so that the first heater and the second heater are spaced apart from each other or are disposed adjacent to each other; and a nozzle unit that is disposed at a side opposite to the side at which the heater unit is disposed about the stage and includes one or more nozzles.

公开(公告)号：US20150144930A1

公开(公告)日：2015-05-28

申请号：US14608798

申请日：2015-01-29

Applicant: Samsung Display Co., Ltd.

Inventor： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Seongmin Wang

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5256 ,  H01L21/02365 ,  H01L21/0271 ,  H01L21/033 ,  H01L21/0332 ,  H01L21/471 ,  H01L23/3192 ,  H01L27/3246 ,  H01L51/0533 ,  H01L51/50 ,  H01L51/5064 ,  H01L51/508 ,  H01L51/5253

Abstract: An organic light emitting diode (OLED) display includes: a substrate; an organic light emitting diode formed on the substrate; a metal oxide layer formed on the substrate and covering the organic light emitting diode; a first inorganic layer formed on the metal oxide layer and covering a relatively larger area than the metal oxide layer; a first organic layer formed on the first inorganic layer and covering a relatively smaller area than the first inorganic layer; and a second inorganic layer formed on the first organic layer, covering a relatively larger area than the first organic layer, and contacting the first inorganic layer at an edge of the second inorganic layer.

Abstract translation: 有机发光二极管（OLED）显示器包括：基板; 形成在所述基板上的有机发光二极管; 形成在所述基板上并覆盖所述有机发光二极管的金属氧化物层; 形成在所述金属氧化物层上并覆盖比所述金属氧化物层相对较大面积的第一无机层; 形成在所述第一无机层上并覆盖比所述第一无机层相对较小的区域的第一有机层; 以及形成在所述第一有机层上的第二无机层，其覆盖比所述第一有机层相对更大的面积，并且在所述第二无机层的边缘处与所述第一无机层接触。

公开(公告)号：US11335889B2

公开(公告)日：2022-05-17

申请号：US17080760

申请日：2020-10-26

Applicant: Samsung Display Co., Ltd.

Inventor： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Seongmin Wang

IPC: H01L51/52 ,  H01L51/05 ,  H01L23/31 ,  H01L21/033 ,  H01L51/50 ,  H01L21/027 ,  H01L21/471 ,  H01L21/02 ,  H01L27/32

Abstract: An organic light emitting diode (OLED) display including: a substrate; an organic light emitting diode formed on the substrate; a metal oxide layer formed on the substrate and covering the organic light emitting diode; a first inorganic layer formed on the substrate and covering the organic light emitting diode; a second inorganic layer formed on the first inorganic layer and contacting the first inorganic layer at an edge of the second inorganic layer; an organic layer formed on the second inorganic layer and covering a relatively smaller area than the second inorganic layer; and a third inorganic layer formed on the organic layer, covering a relatively larger area than the organic layer, and contacting the first inorganic layer and the second inorganic layer at an edge of the third inorganic layer.

公开(公告)号：US10396312B2

公开(公告)日：2019-08-27

申请号：US15841204

申请日：2017-12-13

Applicant: Samsung Display Co., Ltd.

Inventor： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Seongmin Wang

IPC: H01L51/52 ,  H01L51/05 ,  H01L23/31 ,  H01L21/033 ,  H01L51/50 ,  H01L21/027 ,  H01L21/471 ,  H01L21/02 ,  H01L27/32

Abstract: An organic light emitting diode (OLED) display including: a substrate; an organic light emitting diode formed on the substrate; a metal oxide layer formed on the substrate and covering the organic light emitting diode; a first inorganic layer formed on the substrate and covering the organic light emitting diode; a second inorganic layer formed on the first inorganic layer and contacting the first inorganic layer at an edge of the second inorganic layer; an organic layer formed on the second inorganic layer and covering a relatively smaller area than the second inorganic layer; and a third inorganic layer formed on the organic layer, covering a relatively larger area than the organic layer, and contacting the first inorganic layer and the second inorganic layer at an edge of the third inorganic layer.

公开(公告)号：US20130341629A1

公开(公告)日：2013-12-26

申请号：US13975054

申请日：2013-08-23

Applicant: Samsung Display Co., Ltd.

Inventor： Sang-Joon Seo ,  Hoon-Kee Min ,  Dong-Un Jin ,  Sung-Guk An

IPC: H01L29/786 ,  H01L29/66

CPC classification number: H01L29/786 ,  C23C16/345 ,  C23C16/401 ,  G02F1/133305 ,  G02F2201/501 ,  H01L29/6675 ,  Y10T428/26

Abstract: A substrate for a flexible display is disclosed. The substrate has a film stress range that does not affect an electronic device such as a thin film transistor, and includes a barrier layer having excellent oxygen and moisture blocking characteristics, and a method of manufacturing the substrate. The substrate includes: a plastic substrate having a glass transition temperature from about 350° C. to about 500° C.; and a barrier layer disposed on the plastic substrate, having a multi-layer structure, wherein at least one silicon oxide layer and at least one silicon nitride layer are alternately stacked on each other, and having a film stress from about −200 MPa to about 200 MPa due to the at least one silicon oxide layer and the at least one silicon nitride layer.

Abstract translation: 公开了一种用于柔性显示器的基板。 基板具有不影响诸如薄膜晶体管的电子器件的膜应力范围，并且包括具有优异的氧气和湿气阻隔特性的阻挡层，以及制造该基板的方法。 衬底包括：玻璃化转变温度为约350℃至约500℃的塑料衬底; 以及设置在所述塑料基板上的阻挡层，具有多层结构，其中至少一个氧化硅层和至少一个氮化硅层彼此交替堆叠，并且膜应力为约-200MPa至约 由于至少一个氧化硅层和至少一个氮化硅层，200MPa。

公开(公告)号：US10125423B2

公开(公告)日：2018-11-13

申请号：US14666125

申请日：2015-03-23

Applicant: Samsung Display Co., Ltd. ,  Industry-University Cooperation Foundation Hanyang University ERICA Campus

Inventor： Sang-Joon Seo ,  Jae-Eung Oh

IPC: C23C16/00 ,  H01L21/306 ,  C23C16/50 ,  H01J37/32 ,  C23C16/44 ,  C23C16/455 ,  C23C16/54 ,  C23C16/04 ,  C23C16/458 ,  H01L51/56

Abstract: A vapor deposition apparatus efficiently performs a deposition process to form a thin film with improved characteristics on a substrate, and a method manufactures an organic light-emitting display apparatus by using such vapor deposition apparatus. The vapor deposition apparatus includes a body including an upper member and a lateral member coupled to the upper member; a receiving portion disposed to face one side of the lateral member; a stage disposed in the receiving portion and supporting the substrate; a plurality of first injection portions disposed in the lateral member and injecting at least one gas into a space between the lateral member and the upper member; a second injection portion disposed in the upper member and injecting at least one gas into the space between the lateral member and the upper member; and a plasma generating portion including a coil and a power source connected to the coil.

公开(公告)号：US09853245B2

公开(公告)日：2017-12-26

申请号：US14608798

申请日：2015-01-29

Applicant: Samsung Display Co., Ltd.

Inventor： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Seongmin Wang

IPC: H01L51/52 ,  H01L51/56 ,  H01L51/05 ,  H01L23/31 ,  H01L21/033 ,  H01L51/50 ,  H01L21/027 ,  H01L21/471 ,  H01L21/02 ,  H01L27/32

CPC classification number: H01L51/5256 ,  H01L21/02365 ,  H01L21/0271 ,  H01L21/033 ,  H01L21/0332 ,  H01L21/471 ,  H01L23/3192 ,  H01L27/3246 ,  H01L51/0533 ,  H01L51/50 ,  H01L51/5064 ,  H01L51/508 ,  H01L51/5253

Abstract: An organic light emitting diode (OLED) display includes: a substrate; an organic light emitting diode formed on the substrate; a metal oxide layer formed on the substrate and covering the organic light emitting diode; a first inorganic layer formed on the metal oxide layer and covering a relatively larger area than the metal oxide layer; a first organic layer formed on the first inorganic layer and covering a relatively smaller area than the first inorganic layer; and a second inorganic layer formed on the first organic layer, covering a relatively larger area than the first organic layer, and contacting the first inorganic layer at an edge of the second inorganic layer.