Semiconductor test device and method, and data analysis device

    公开(公告)号:US10191099B2

    公开(公告)日:2019-01-29

    申请号:US15244780

    申请日:2016-08-23

    Abstract: A semiconductor test device includes an actuator holding a radiation source and adjusting a distance between the radiation source and a sample, and a controller controlling an operation of the actuator and calculating a soft error rate (SER) of the sample based on the distance between the radiation source and the sample. The controller calculates a first distance between the radiation source and the sample at which the SER of the sample becomes zero, and calculates a metal-to-dielectric ratio of the sample based on the first distance.

    SEMICONDUCTOR TEST DEVICE AND METHOD, AND DATA ANALYSIS DEVICE

    公开(公告)号:US20170082682A1

    公开(公告)日:2017-03-23

    申请号:US15244780

    申请日:2016-08-23

    CPC classification number: G01R31/002 G01R31/303 G01R31/31816

    Abstract: A semiconductor test device includes an actuator holding a radiation source and adjusting a distance between the radiation source and a sample, and a controller controlling an operation of the actuator and calculating a soft error rate (SER) of the sample based on the distance between the radiation source and the sample. The controller calculates a first distance between the radiation source and the sample at which the SER of the sample becomes zero, and calculates a metal-to-dielectric ratio of the sample based on the first distance.

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