公开(公告)号：US20180143063A1

公开(公告)日：2018-05-24

申请号：US15801662

申请日：2017-11-02

申请人： Seiko Epson Corporation

发明人： Tetsuya ISSHIKI ,  Takayuki YONEMURA

IPC分类号： G01F23/296 ,  B41J2/175

CPC分类号： G01F23/2968 ,  B41J2/17513 ,  B41J2/17523 ,  B41J2/17553 ,  B41J2/17566 ,  B41J2002/17583 ,  G01F23/2966

摘要： A liquid detecting apparatus includes an ultrasonic sensor that transmits and receives an ultrasonic wave, and includes a piezoelectric layer which is formed of a thin film and an ultrasonic element which is provided with a first electrode and a second electrode to interpose the piezoelectric layer between the first electrode and the second electrode, on a diaphragm which is disposed on a substrate having a cavity, and a flow path that forms the same liquid level as a liquid level of a liquid which is stored in a container, in which an acoustic matching layer and a detection surface of a surface of a lens, which are disposed on a side of the ultrasonic sensor that transmits and receives the ultrasonic wave, are disposed to be in contact with the liquid within the flow path.

公开(公告)号：US20170313625A1

公开(公告)日：2017-11-02

申请号：US15520771

申请日：2014-12-26

申请人： Seiko Epson Corporation

发明人： Koji SUMI ,  Kazuya KITADA ,  Tomohiro SAKAI ,  Yasuaki HAMADA ,  Tetsuya ISSHIKI ,  Satoshi KIMURA ,  Akio ITO ,  Tsuneo HANDA

IPC分类号： C04B35/468 ,  H01L41/187 ,  C04B35/453 ,  C04B35/475

CPC分类号： C04B35/468 ,  C04B35/00 ,  C04B35/453 ,  C04B35/475 ,  C04B2235/32 ,  C04B2235/3236 ,  H01L41/187 ,  H01L41/1871 ,  H01L41/1878 ,  H01L41/39

摘要： A piezoelectric material contains: a first component which is a rhombohedral crystal in a single composition, has a Curie temperature Tc1, and is a lead-free-system composite oxide having a perovskite-type structure; a second component which is a crystal other than the rhombohedral crystal in a single composition, has a Curie temperature Tc2

公开(公告)号：US20180277742A1

公开(公告)日：2018-09-27

申请号：US15920829

申请日：2018-03-14

申请人： Seiko Epson Corporation

发明人： Takayuki YONEMURA ,  Chikara KOJIMA ,  Xiaoxing WANG ,  Tetsuya ISSHIKI ,  Yasuhiro ITAYAMA

IPC分类号： H01L41/187 ,  H01L41/04 ,  H01L41/047 ,  H01L41/09 ,  C01G25/00 ,  A61B8/00 ,  A61B8/14 ,  B41J2/14 ,  B41J2/16 ,  G01N29/24

CPC分类号： H01L41/1876 ,  A61B8/14 ,  A61B8/4427 ,  A61B8/4444 ,  A61B8/4483 ,  A61B8/461 ,  B06B1/0666 ,  B06B1/0692 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14258 ,  B41J2202/03 ,  C01G25/006 ,  C01P2002/34 ,  C01P2006/40 ,  G01N29/245 ,  H01L41/042 ,  H01L41/0475 ,  H01L41/0973

摘要： A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO3, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.

公开(公告)号：US20170309810A1

公开(公告)日：2017-10-26

申请号：US15520762

申请日：2014-12-26

申请人： Seiko Epson Corporation

发明人： Koji SUMI ,  Kazuya KITADA ,  Tomohiro SAKAI ,  Yasuaki HAMADA ,  Tetsuya ISSHIKI ,  Satoshi KIMURA ,  Akio ITO ,  Tsuneo HANDA

IPC分类号： H01L41/187 ,  H01L41/39 ,  H01L41/047

CPC分类号： H01L41/187 ,  C04B35/462 ,  C04B35/4682 ,  C04B35/475 ,  C04B35/495 ,  C04B35/62218 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3232 ,  C04B2235/3234 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3255 ,  C04B2235/3262 ,  C04B2235/3268 ,  C04B2235/3272 ,  C04B2235/3274 ,  C04B2235/3293 ,  C04B2235/3298 ,  C04B2235/44 ,  C04B2235/449 ,  C04B2235/76 ,  C04B2235/768 ,  H01L41/0474 ,  H01L41/39

摘要： A piezoelectric material contains: a first component which is a rhombohedral crystal in a single composition, has a Curie temperature Tc1, and is a lead-free-system composite oxide having a perovskite-type structure; a second component which is a crystal other than a rhombohedral crystal in a single composition, has a Curie temperature Tc2 higher than Tc1, and is a lead-free-system composite oxide having a perovskite-type structure; and a third component which is a rhombohedral crystal in a single composition, has a Curie temperature Tc3 equal to or higher than Tc2, and is a lead-free-system composite oxide that has a perovskite-type structure and is different from the first component. When a molar ratio of the third component to the sum of the first component and the third component is α and α×Tc3+(1−α)×Tc1 is Tc4, |Tc4−Tc2| is 50° C. or lower.

公开(公告)号：US20130088549A1

公开(公告)日：2013-04-11

申请号：US13644138

申请日：2012-10-03

申请人： SEIKO EPSON CORPORATION

发明人： Tetsuya ISSHIKI

IPC分类号： B41J2/045 ,  H01L41/18

CPC分类号： H01L41/1878 ,  B41J2/14233 ,  H01L41/0973 ,  H01L41/318

摘要： A liquid ejecting head includes a piezoelectric element having a first electrode, a piezoelectric body layer, and a second electrode, in which the piezoelectric body layer is formed of complex oxide of a pevroskite structure including at least bismuth, barium, iron, and titanium, and the mole ratio of titanium to barium (Ti/Ba) is 1.17 or more, and 1.45 or less.

摘要翻译： 液体喷射头包括具有第一电极，压电体层和第二电极的压电元件，其中压电体层由至少包括铋，钡，铁和钛的二氧化ite石结构的复合氧化物形成， 钛与钡（Ti / Ba）的摩尔比为1.17以上，1.45以下。

公开(公告)号：US20150002585A1

公开(公告)日：2015-01-01

申请号：US14226086

申请日：2014-03-26

申请人： SEIKO EPSON CORPORATION

发明人： Koji SUMI ,  Kazuya KITADA ,  Tomohiro SAKAI ,  Yasuaki HAMADA ,  Tetsuya ISSHIKI ,  Satoshi KIMURA ,  Akio ITO ,  Tsuneo HANDA

IPC分类号： H01L41/18 ,  B06B1/06 ,  H02N2/18 ,  B41J2/045 ,  H01L41/187 ,  H02N2/00

CPC分类号： H01L41/183 ,  B06B1/06 ,  B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  C04B35/462 ,  C04B35/4682 ,  C04B35/475 ,  C04B2235/3201 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3234 ,  C04B2235/3236 ,  C04B2235/3255 ,  C04B2235/3298 ,  C04B2235/441 ,  C04B2235/76 ,  C04B2235/765 ,  C04B2235/768 ,  H01L41/187 ,  H01L41/1871 ,  H01L41/1873 ,  H01L41/1878 ,  H02N2/001 ,  H02N2/181

摘要： A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature Tc1, a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature Tc2, and a third component that is configured to have a complex oxide with the perovskite structure in which the component is formed as the same crystal system as the second component and Curie temperature Tc3, in which Tc1 is higher than Tc2, and Tc3 is equal to or higher than Tc1.

摘要翻译： 压电材料包含第一组分，其是菱形结晶，其被配置为具有钙钛矿结构的复合氧化物和居里温度Tc1，第二组分是除了菱形晶体之外的晶体，其被配置为具有复合氧化物 钙钛矿结构和居里温度Tc2，以及第三成分，其被配置为具有其中形成组分的钙钛矿结构的复合氧化物与第二组分相同的晶体系和居里温度Tc3，其中Tc1高于 Tc2和Tc3等于或高于Tc1。

公开(公告)号：US20150002584A1

公开(公告)日：2015-01-01

申请号：US14225869

申请日：2014-03-26

申请人： Seiko Epson Corporation

发明人： Koji SUMI ,  Kazuya KITADA ,  Tomohiro SAKAI ,  Yasuaki HAMADA ,  Tetsuya ISSHIKI ,  Satoshi KIMURA ,  Akio ITO ,  Tsuneo HANDA

IPC分类号： H01L41/16 ,  H01L41/08 ,  H02N2/18 ,  G10K9/122 ,  H02N2/00 ,  H01L41/047 ,  B41J2/045

CPC分类号： H01L41/16 ,  B41J2/045 ,  B41J2/14233 ,  C04B35/475 ,  C04B35/495 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3224 ,  C04B2235/3227 ,  C04B2235/3232 ,  C04B2235/3234 ,  C04B2235/3251 ,  C04B2235/3255 ,  C04B2235/3298 ,  C04B2235/76 ,  C04B2235/765 ,  C04B2235/768 ,  G10K9/122 ,  H01L41/047 ,  H01L41/08 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/1873 ,  H01L41/1878 ,  H02N2/001 ,  H02N2/181

摘要： A piezoelectric material contains a first component that is a rhombohedral crystal that is configured to have a complex oxide with a perovskite structure and Curie temperature Tc1 and a second component that is a crystal other than a rhombohedral crystal that is configured to have a complex oxide with the perovskite structure and Curie temperature Tc2, in which |Tc1−Tc2| is equal to or less than 50° C.

摘要翻译： 压电材料包含第一组分，其是配置为具有钙钛矿结构的复合氧化物和居里温度Tc1的第一组分和除了菱形晶体之外的晶体的第二组分，其被配置为具有复合氧化物 钙钛矿结构和居里温度Tc2，其中| Tc1-Tc2 | 等于或小于50℃

公开(公告)号：US20130208054A1

公开(公告)日：2013-08-15

申请号：US13763766

申请日：2013-02-11

申请人： Seiko Epson Corporation

发明人： Tetsuya ISSHIKI

IPC分类号： H01L41/18 ,  B41J2/14 ,  G01N3/42 ,  H01L41/047

CPC分类号： H01L41/18 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  G01N3/42 ,  H01L41/0472 ,  H01L41/0805 ,  H01L41/1878 ,  H01L41/318

摘要： A liquid ejecting head includes a piezoelectric element including a piezoelectric layer made of a piezoelectric material and an electrode disposed on the piezoelectric layer. The piezoelectric material is such that when a diamond conical indenter having an angle α of 136° between opposite faces is pressed into the piezoelectric layer at a load of 5 gf for 5 seconds to form cracks extending from an indentation, using a micro Vickers hardness meter, the length of the cracks from four corners of the indentation is 15 μm or less.

摘要翻译： 液体喷射头包括压电元件，压电元件包括​​由压电材料制成的压电层和设置在压电层上的电极。 压电材料使得当在相对面之间具有角度α为136°的金刚石锥形压头在5gf的载荷下压入压电层5秒以形成从压痕延伸的裂纹时，使用微维氏硬度计 压痕四角的裂纹长度为15μm以下。

公开(公告)号：US20180138392A1

公开(公告)日：2018-05-17

申请号：US15801756

申请日：2017-11-02

申请人： Seiko Epson Corporation

发明人： Tetsuya ISSHIKI ,  Koichi MOROZUMI

IPC分类号： H01L41/08 ,  H01L41/18 ,  H01L41/04

CPC分类号： H01L41/0805 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1646 ,  H01L41/042 ,  H01L41/0973 ,  H01L41/18 ,  H01L41/1873 ,  H01L41/318

摘要： A piezoelectric element includes a first electrode; a second electrode; and a piezoelectric layer arranged between the first electrode and the second electrode, in which the piezoelectric layer is a thin film that includes a perovskite-type composite oxide which includes potassium, sodium, and niobium and which is preferentially oriented in the (100) plane, and a crystal structure of the perovskite-type composite oxide includes a basic lattice structure having an oxygen octahedron and a super lattice structure in which the oxygen octahedron is tilted.

公开(公告)号：US20170062697A1

公开(公告)日：2017-03-02

申请号：US15248274

申请日：2016-08-26

申请人： Seiko Epson Corporation

发明人： Tomohiro SAKAI ,  Koji SUMI ,  Tetsuya ISSHIKI ,  Toshiaki TAKAHASHI ,  Tomokazu KOBAYASHI ,  Kazuya KITADA

IPC分类号： H01L41/187 ,  H01L41/047

CPC分类号： H01L41/1873 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/318

摘要： A piezoelectric element includes a first electrode, a piezoelectric layer which is formed on the first electrode by using a solution method, and is formed from compound oxide which has a perovskite structure in which potassium, sodium, and niobium are provided, and a second electrode which is provided on the piezoelectric layer. The piezoelectric layer has a peak derived from a (200) plane and a peak derived from a (002) plane in an X-ray diffraction pattern obtained by θ−2θ measurement.

摘要翻译： 压电元件包括​​第一电极，通过使用溶液法形成在第一电极上的压电层，并且由具有其中提供钾，钠和铌的钙钛矿结构的复合氧化物形成，第二电极 其设置在压电层上。 在通过θ-2θ测量获得的X射线衍射图中，压电层具有来自（200）面的峰和来自（002）面的峰。