利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

17 条记录 (耗时 0.021 秒)

    Dry etching method
    1.
    发明授权
    Dry etching method 失效
    干蚀刻法

    公开(公告)号：US5254215A

    公开(公告)日：1993-10-19

    申请号：US792221

    申请日：1991-11-12

    申请人： Shingo Terakado ,  Osamu Kitamura

    发明人： Shingo Terakado ,  Osamu Kitamura

    IPC分类号： H01L21/3065 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/00

    CPC分类号： H01J37/32339 ,  H01L21/3065 ,  H01L21/31116 ,  H01L21/32136 ,  H01L21/32137

    摘要： A dry etching method capable of performing fine patterning. A sample substrate is fixedly disposed on a table in a reactant chamber. Gas plasma produced by a gas plasma generator is introduced into the reactant chamber, and excitation light, that is, light capable of exciting inner shell electrons of constituent atoms of the substrate, is irradiated onto the substrate from above the substrate. In the optical path of the excitation light is disposed a mask. The substrate is irradiated with the light in response to a pattern designated by the mask. The excitation light has an energy for exciting electrons of constituent atoms of the substrate. Upon arrival of the light in etched regions, the electrons of the substrate are excited. As a result, etching is effected by the contact of the excited electrons with the gas plasma, and the rate of this etching is greatly enhanced. Since the electrons of the substrate in masked areas are not excited, the masked areas become hardly subjected to etching by the contact of the gas plasma, whereby the pattern of the mask is transferred to the substrate with high accuracy, whereby fine patterns are formed.

    摘要翻译： 能够进行精细图案化的干蚀刻方法。 样品基板固定地设置在反应物室中的工作台上。 由气体等离子体发生器产生的气体等离子体被引入到反应物室中，激发光（即，能够激发衬底的组成原子的内壳电子的光）从衬底上方照射到衬底上。 在激发光的光路中设置掩模。 响应于由掩模指定的图案，用光照射基板。 激发光具有用于激发基板的组成原子的电子的能量。 当光在蚀刻区域到达时，衬底的电子被激发。 结果，通过激发的电子与气体等离子体的接触来实现蚀刻，并且该蚀刻的速率被大大增强。 由于掩模区域中的基板的电子不被激发，所以掩模区域难以通过气体等离子体的接触进行蚀刻，由此掩模的图案以高精度传递到基板，从而形成精细的图案。

    Throttle valve control system for internal combustion engine
    2.
    发明授权
    Throttle valve control system for internal combustion engine 失效
    内燃机节流阀控制系统

    公开(公告)号：US07725245B2

    公开(公告)日：2010-05-25

    申请号：US12289189

    申请日：2008-10-22

    申请人： Kazunori Kawamura ,  Futoshi Nishioka ,  Osamu Kitamura

    发明人： Kazunori Kawamura ,  Futoshi Nishioka ,  Osamu Kitamura

    IPC分类号： F02D11/10

    CPC分类号： F02D41/0002 ,  F02D41/061 ,  F02D2200/0404 ,  Y02T10/42

    摘要： A throttle valve control system for an internal combustion engine which controls an opening of a throttle valve of the engine so that the opening coincides with a target opening. A regulation value of a change amount of the throttle valve opening is set according to at least a temperature parameter indicative of a temperature of the engine. The target opening is set within a range defined by the regulation value. An upper limit value and a lower limit value of the regulation value is set according to the temperature parameter, and a transition control is performed wherein the regulation value is set according to an elapsed time period after start of the engine so as to change from the lower limit value to the upper limit value.

    摘要翻译： 一种用于内燃机的节流阀控制系统，其控制发动机的节流阀的开度，使得开度与目标开度重合。 至少根据表示发动机的温度的温度参数来设定节气门开度的变化量的调节值。 目标开度设定在由调节值限定的范围内。 根据温度参数设定调节值的上限值和下限值，并且进行转变控制，其中调节值根据发动机起动后的经过时间设定，从而从 下限值为上限值。

    Process for continuous casting of a slightly deoxidized steel slab
    3.
    发明授权
    Process for continuous casting of a slightly deoxidized steel slab 失效
    连续铸造轻度脱氧钢板的工艺

    公开(公告)号：US4298050A

    公开(公告)日：1981-11-03

    申请号：US091813

    申请日：1979-11-06

    申请人： Tetsro Ohashi ,  Osamu Kitamura ,  Hiromu Fujii ,  Seizo Mineyuki ,  Eiichi Takeuchi

    发明人： Tetsro Ohashi ,  Osamu Kitamura ,  Hiromu Fujii ,  Seizo Mineyuki ,  Eiichi Takeuchi

    IPC分类号： B01F13/08 ,  B22D11/10 ,  B22D11/11 ,  B22D11/115 ,  B22D27/02 ,  B22D11/00

    CPC分类号： B22D11/11 ,  B22D11/115

    摘要： In the continuous casting of steel, it has been possible to produce killed steel industrially, but semikilled and rimmed steel have not been successfully produced due to rimming action occurring in the oscillating mold. The present invention involves a concept of suppressing the nuclei of bubbles which will later grow into CO bubbles. In order to suppress the nuclei of bubbles and to form a non-defective solidification layer of a continuously cast strand, the present invention provides a combination of: a free oxygen concentration of from 50 to 200 ppm in the molten steel; a concave shape at the short sides of the mold; a propulsion forces of the molten steel directed along the long sides of the mold in directions opposite to one another; subjecting a solidification interface to an electromagnetic flow having a speed of from 0.1 to 1.0 m/sec, and; solidifying the molten steel at the solidification interface under the influence of the electromagnetic flow, until a non-defective solidification layer without blow holes is obtained.

    摘要翻译： 在钢的连续铸造中，可以在工业上生产杀死的钢，但是由于在振荡模具中发生皱缩作用，半成品和边缘钢没有成功地生产。 本发明涉及一种抑制气泡核的概念，后者将会生长成CO气泡。 为了抑制气泡的核并形成连续铸造线的无缺陷凝固层，本发明提供了在钢水中游离氧浓度为50〜200ppm的组合， 在模具的短边处形成凹形; 沿着模具的长边方向相反的方向引导的钢水的推进力; 使凝固界面经受0.1〜1.0m /秒的速度的电磁流动， 在电磁流动的影响下在固化界面处固化钢水，直到获得无气孔的无缺陷凝固层。

    Throttle valve control system for internal combustion engine
    4.
    发明申请
    Throttle valve control system for internal combustion engine 失效
    内燃机节流阀控制系统

    公开(公告)号：US20090112448A1

    公开(公告)日：2009-04-30

    申请号：US12289189

    申请日：2008-10-22

    申请人： Kazunori Kawamura ,  Futoshi Nishioka ,  Osamu Kitamura

    发明人： Kazunori Kawamura ,  Futoshi Nishioka ,  Osamu Kitamura

    IPC分类号： F02D9/00

    CPC分类号： F02D41/0002 ,  F02D41/061 ,  F02D2200/0404 ,  Y02T10/42

    摘要： A throttle valve control system for an internal combustion engine which controls an opening of a throttle valve of the engine so that the opening coincides with a target opening. A regulation value of a change amount of the throttle valve opening is set according to at least a temperature parameter indicative of a temperature of the engine. The target opening is set within a range defined by the regulation value. An upper limit value and a lower limit value of the regulation value is set according to the temperature parameter, and a transition control is performed wherein the regulation value is set according to an elapsed time period after start of the engine so as to change from the lower limit value to the upper limit value.

    摘要翻译： 一种用于内燃机的节流阀控制系统，其控制发动机的节流阀的开度，使得开度与目标开度重合。 至少根据表示发动机的温度的温度参数来设定节气门开度的变化量的调节值。 目标开度设定在由调节值限定的范围内。 根据温度参数设定调节值的上限值和下限值，并且进行转变控制，其中调节值根据发动机起动后的经过时间设定，从而从 下限值为上限值。

    Method of producing fine metal spheres of uniform size
    8.
    发明授权
    Method of producing fine metal spheres of uniform size 失效
    生产尺寸均匀的细金属球的方法

    公开(公告)号：US5761779A

    公开(公告)日：1998-06-09

    申请号：US596694

    申请日：1996-02-05

    申请人： Tadakatsu Maruyama ,  Osamu Kitamura ,  Yasuhide Ohno ,  Tosiharu Kikuchi ,  Yasuhiro Suzuki ,  Hisao Kuribayashi ,  Tomohiro Uno

    发明人： Tadakatsu Maruyama ,  Osamu Kitamura ,  Yasuhide Ohno ,  Tosiharu Kikuchi ,  Yasuhiro Suzuki ,  Hisao Kuribayashi ,  Tomohiro Uno

    IPC分类号： B22F1/00 ,  B23D23/00 ,  H05K3/34 ,  B23K35/02

    CPC分类号： B23D23/00 ,  B22F1/0048 ,  B22F2009/046 ,  H05K3/3478 ,  Y10T29/49712

    摘要： A method of producing soft fine metal spheres for semiconductor packaging from a material selected from soft metals and soft alloys. A plurality of fine wires made of the material are arranged in parallel on a flat base plate. Each of the wires has a diameter of not more than 100 .mu.m. The fine wires are cut into wire chips having an equal mass relative to each other and a chip length/chip diameter ratio between 5 and 100 by utilizing a cutting jig having cutting edges which are arranged at a constant pitch. The resulting wire chips are arranged so that the chips are spaced apart a minimum distance sufficient to prevent the chips from merging when melted. The resulting spaced-apart wire chips are heated to a temperature up to but not exceeding 100.degree. C. above the melting point thereof, thereby forming the chips into molten spheres. The resulting molten spheres are cooled, thereby forming solid spheres having a diameter within about 5% of a desired diameter.

    摘要翻译： 从软质金属和软质合金中选择的材料生产用于半导体封装的软质金属球的方法。 由该材料制成的多根细线平行布置在平坦的基板上。 每条线的直径不超过100米。 通过使用具有以恒定间距排列的切削刃的切割夹具，将细线切成相对于彼此质量相等的切屑长度/切屑直径比在5和100之间的切屑。 所得到的线芯片被布置成使得芯片间隔开足够的最小距离，以防止芯片在熔化时融合。 将所产生的间隔开的线芯片加热至高于其熔点以上但不超过100℃的温度，从而将芯片形成熔融球体。 将所得熔融球体冷却，从而形成直径在所需直径的约5％内的固体球体。

    Electronic control unit for controlling ignition timing during reduction of NOx occluded by lean NOx catalyst
    10.
    发明授权
    Electronic control unit for controlling ignition timing during reduction of NOx occluded by lean NOx catalyst 失效
    电子控制单元，用于在通过贫NOx催化剂吸留的NOx还原期间控制点火正时

    公开(公告)号：US06574954B2

    公开(公告)日：2003-06-10

    申请号：US09963795

    申请日：2001-09-27

    申请人： Masayuki Wakui ,  Junichi Suzuki ,  Masayuki Ueno ,  Osamu Kitamura

    发明人： Masayuki Wakui ,  Junichi Suzuki ,  Masayuki Ueno ,  Osamu Kitamura

    IPC分类号： F01N300

    CPC分类号： F01N3/0842 ,  F02D37/02 ,  F02D41/0275 ,  F02D41/1441 ,  F02D41/1454 ,  F02D41/1456 ,  F02D2200/0406 ,  F02D2250/21 ,  F02P5/1504 ,  Y02T10/46

    摘要： The invention provides an electronic control unit for controlling an air/fuel ratio of an engine having a lean NOx catalyst in its exhaust system in order to prevent the decrease of the fuel efficiency without deterioration of the drivability due to a rich operation for reducing the NOx catalyst. The electronic control unit includes: an air/fuel ratio control system for changing the air/fuel ratio to a rich side when the amount of NOx occluded by the lean NOx catalyst exceeds a predetermined value and changing said air/fuel ratio back to a lean side when a first predetermined period has elapsed; a lagging system for lagging ignition timing in synchronization with the air/fuel ratio changing to the rich side by said air/fuel ratio control system; and decrementing system for decreasing the amount of the ignition timing lagged by the lagging system by a predetermined amount when a second predetermined period shorter than said first predetermined period has elapsed after the air/fuel ratio changing to the rich side. According to the invention, it is possible to prevent the decrease of the fuel efficiency without the deterioration of the drivability due to the rich operation to reduce the NOx catalyst because the ignition timing is lagged in synchronization with the air/fuel ratio changing to the rich side and the lagged amount is decremented after a predetermined period has elapsed. In one embodiment, the decrementing system gradually decrements said lagging amount up to a hold value.

    摘要翻译： 本发明提供了一种用于控制其排气系统中具有贫NOx催化剂的发动机的空燃比的电子控制单元，以便防止燃料效率的降低，而不会由于用于还原NOx的丰富操作而导致的驾驶性能的劣化 催化剂。 电子控制单元包括：空气/燃料比控制系统，用于当由稀薄NOx催化剂吸留的NOx的量超过预定值并将所述空气/燃料比改变为稀薄时，将空气/燃料比改变为浓侧 当经过第一预定时段时; 用于通过所述空燃比控制系统与空燃比同步变为富侧的滞后点火正时滞后系统; 以及在空燃比变为富侧之后经过了比第一规定期间短的第二规定期间时，将滞后系统滞后的点火正时量减少预定量的减量系统。 根据本发明，可以防止燃料效率的降低，而不会由于丰富的操作而导致的驱动能力的劣化，以减少NOx催化剂，因为点火正时与空燃比同步变为富 并且经过预定时间后滞后量减少。 在一个实施例中，递减系统将所述滞后量逐渐减小到保持值。