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    Gas recovery unit
    1.
    发明授权
    Gas recovery unit 失效
    气体回收装置

    公开(公告)号：US5958138A

    公开(公告)日：1999-09-28

    申请号：US743188

    申请日：1996-11-05

    申请人： Shinji Tomita ,  Shigeyoshi Nozawa

    发明人： Shinji Tomita ,  Shigeyoshi Nozawa

    IPC分类号： B01D8/00 ,  B01D53/00 ,  C23C16/44 ,  H01L21/205 ,  C23C16/00

    CPC分类号： B01D53/002 ,  B01D8/00 ,  C23C16/44 ,  C23C16/4412 ,  B01D2257/20 ,  Y02C20/30

    摘要： Provided is a gas recovery unit which is more efficient in its recovery and less expensive to run. The gas recovery unit comprises a CVD device, an exhaust gas recovery part and an exhaust gas purification part. The exhaust gas recovery part is constructed so as to have an inert gas reservoir part capable of accommodating liquid nitrogen, to have an exhaust gas supply part for supplying an exhaust gas to said inert gas reservoir part so that it can be brought in gasliquid contact with the liquid nitrogen, and to have a recovered and liquefied gas discharge part for discharging the recovered and liquefied gas which has been liquefied in the inert gas reservoir part. The exhaust gas purification part is constructed so as to have a recovered and liquefied gas reception part, an evaporator and a condenser for carrying out a heat exchange between said liquid nitrogen and the recovered and liquefied gas which has been evaporated, and cleaning gas recovery parts, and to have a cooling inert gas discharge part, wherein the cooling inert gas discharge part is connected to the inert gas supply path.

    摘要翻译： 提供了一种气体回收单元，其在回收中更有效率并且运行更便宜。 气体回收单元包括CVD装置，废气回收部和排气净化部。 排气回收部被构造成具有能够容纳液氮的惰性气体储存部，具有用于将废气供给到所述惰性气体储存部的排气供给部，使得能够与气体液体接触 液氮，并且具有用于排出已在惰性气体储存部中液化的回收和液化气体的回收和液化气体排出部分。 废气净化部被构造为具有回收和液化气体接收部分，蒸发器和冷凝器，用于在所述液氮和已经蒸发的回收和液化气体之间进行热交换，以及清洁气体回收部件 并且具有冷却惰性气体排出部，其中冷却惰性气体排出部连接到惰性气体供给路径。

    Gas recovery unit utilizing dual use of gas
    2.
    发明授权
    Gas recovery unit utilizing dual use of gas 失效
    气体回收装置采用双重使用气体

    公开(公告)号：US06224677B1

    公开(公告)日：2001-05-01

    申请号：US08679234

    申请日：1996-07-12

    申请人： Shigeyoshi Nozawa ,  Shinji Tomita

    发明人： Shigeyoshi Nozawa ,  Shinji Tomita

    IPC分类号： C23C1600

    CPC分类号： C23C16/4412 ,  B01D8/00 ,  B01D53/002 ,  B01D2257/20 ,  Y02C20/30 ,  Y02P70/605

    摘要： A CVD device A is provided which is equipped with a gas introduction part A3 having an inert gas supply part G1 for supplying a diluting inert gas and a cleaning gas supply path G2 for supplying a cleaning gas, each connected therewith, and equipped with an exhaust gas discharge part A4 for releasing an exhaust gas; an exhaust gas circulation part D1 for circulating an exhaust gas from the CVD device, a cooling part D4 for cooling down and liquefying the cleaning gas in the exhaust gas, and a recovery part 4 for recovering the cleaning gas liquefied in said cooling part D4; the diluting inert gas is composed of a gas having a boiling point lower than that of the cleaning gas; a supply part 6 for supplying a cooling inert gas having the same composition as the diluting inert gas in a liquid state, an inert gas circulation part D3 which is cooled down by heat of evaporation of the cooling inert gas, and an inert gas discharge part 7 for discharging the cooling inert gas evaporated in the inert gas circulation part D3 are provided, constituting the cooling part D4; and the inert gas discharge part 7 is connected to the inert gas supply path G1.

    摘要翻译： 提供了一种CVD装置A，其配备有气体导入部A3，气体导入部A3具有用于供给稀释惰性气体的惰性气体供给部G1和用于供给与各自连接的清洗气体的清洗气体供给路径G2， 用于排出废气的气体排出部A4; 用于使来自CVD装置的废气循环的废气循环部分D1，用于冷却和液化废气中的清洁气体的冷却部分D4和用于回收在所述冷却部分D4中液化的清洁气体的回收部分4; 稀释的惰性气体由沸点低于清洗气体的气体组成; 用于供给具有与液态的稀释惰性气体相同组成的冷却惰性气体的供给部6，通过冷却惰性气体的蒸发冷却而冷却的惰性气体循环部D3和惰性气体排出部 设置用于排出在惰性气体循环部分D3中蒸发的冷却惰性气体的排气管7，构成冷却部分D4; 惰性气体排出部7与惰性气体供给路G1连接。

    Process and installation for producing high-pressure nitrogen
    3.
    发明授权
    Process and installation for producing high-pressure nitrogen 有权
    生产高压氮气的工艺和安装

    公开(公告)号：US08991209B2

    公开(公告)日：2015-03-31

    申请号：US12965958

    申请日：2010-12-13

    申请人： Shinji Tomita ,  Kouhei Nakamura ,  Kenji Hirose ,  Jerome Beauvisage ,  Bao Ha

    发明人： Shinji Tomita ,  Kouhei Nakamura ,  Kenji Hirose ,  Jerome Beauvisage ,  Bao Ha

    IPC分类号： F25J3/00 ,  F25J3/04

    CPC分类号： F25J3/04412 ,  F25J3/04048 ,  F25J3/0406 ,  F25J3/04212 ,  F25J3/04309 ,  F25J3/04315 ,  F25J3/04321 ,  F25J3/04333 ,  F25J3/04393 ,  F25J3/0486 ,  F25J2200/40 ,  F25J2200/54 ,  F25J2230/08 ,  F25J2235/42 ,  F25J2245/02 ,  F25J2245/42

    摘要： A method and apparatus for producing high pressure nitrogen is provided. This system includes a first compressor for compressing air and cooling air to substantially the dew-point, a high pressure column, a medium pressure column, a conduit for introducing at least a portion of the compressed air at a base of the high pressure column; a conduit for removing a oxygen enriched liquid from the base of the high pressure column; a first valve for reducing the pressure of the oxygen enriched liquid to a medium pressure, where the medium pressure is between the high pressure and atmospheric pressure, a conduit for introducing the oxygen enriched liquid at an intermediate place of the medium pressure column; a second expander for reducing the pressure of at least a part of the liquid removed from the base of the medium pressure distillation column, to a low pressure to cool a top condenser of the medium pressure column and to form a waste vapor stream; a cold compressor for compressing a vapor stream removed form the medium pressure column, cooling the compressed vapor stream, and introducing it into the base of the high pressure column; a heat exchanger for heating the waste vapor stream, a first expander for expanding the heated stream to produce power; a conduit for withdrawing liquid from the top of the medium pressure column, pump for pumping the withdrawn liquid to high pressure and injecting it at the top of the high pressure column; and conduit for withdrawing product nitrogen from the top of the high pressure column.

    摘要翻译： 提供了一种生产高压氮的方法和装置。 该系统包括用于将空气和冷却空气压缩至基本露点的第一压缩机，高压塔，中压塔，用于在压力塔的底部引入至少一部分压缩空气的导管; 用于从高压塔的底部除去富氧液体的管道; 第一阀，用于将富氧液体的压力降低到介质压力介于高压和大气压之间的介质压力，用于将富氧液体引入中压塔的中间位置的导管; 第二膨胀机，用于将从中压蒸馏塔底部排出的至少一部分液体的压力降低到低压以冷却中压塔的顶部冷凝器并形成废蒸气流; 用于压缩从中压塔除去的蒸气流的冷压缩机，冷却压缩的蒸气流，并将其引入高压塔的底部; 用于加热废蒸汽流的热交换器，用于膨胀加热的流以产生动力的第一膨胀器; 用于从中压塔的顶部抽出液体的管道，用于将排出的液体泵送到高压并将其注入高压塔顶部的泵; 以及用于从高压塔的顶部排出产品氮的管道。

    Process for producing monosilane from dichlorosilane
    4.
    发明授权
    Process for producing monosilane from dichlorosilane 有权
    二氯硅烷生产甲硅烷的方法

    公开(公告)号：US08871168B2

    公开(公告)日：2014-10-28

    申请号：US13820450

    申请日：2011-08-29

    申请人： Isao Abe ,  Jérôme Beauvisage ,  Shinji Tomita

    发明人： Isao Abe ,  Jérôme Beauvisage ,  Shinji Tomita

    IPC分类号： C01B33/04 ,  B01J31/02

    CPC分类号： C01B33/043 ,  B01J31/0237 ,  B01J31/0239 ,  Y02P20/127

    摘要： A process for continuously producing monosilane by means of an apparatus comprising a reaction column, at least two upper condensers each with a reflux feed pipe, a bottom reboiler and an evaporation tank connected to a bottom portion of the reaction column; the process comprising: a) supplying dichlorosilane or a mixture of chlorosilanes to an upper stage of the reaction column via an upper feed injection point b) supplying a catalyst to said upper stage of the reaction column via a lower injection point c) introducing the resultant mixture from the top portion of the reaction column to the plurality of upper condensers d) separating monosilane from condensates in the upper condensers e) recycling the condensates through the reflux feed pipes to the upper stage of the reaction column f) bringing the condensates into contact with the catalyst in the reaction column.

    摘要翻译： 一种连续生产甲硅烷的方法，该装置包括反应塔，至少两个上部冷凝器，每个上部冷凝器均具有连接到反应塔底部的回流进料管，底部再沸器和蒸发罐; 该方法包括：a）通过上部进料注入点将二氯硅烷或氯硅烷的混合物供应到反应塔的上段; b）经由下部注入点向反应塔的上段供应催化剂; c）将所得物 混合物从反应塔的顶部到多个上部冷凝器d）从上部冷凝器中的冷凝物中分离出甲硅烷e）将冷凝物通过回流进料管再循环到反应塔的上段f）使冷凝物接触 与反应塔中的催化剂。

    Argon purification process
    7.
    发明授权
    Argon purification process 失效
    氩气净化过程

    公开(公告)号：US5783162A

    公开(公告)日：1998-07-21

    申请号：US705696

    申请日：1996-08-30

    申请人： Shinji Tomita ,  Takashi Nagamura ,  Takao Yamamoto

    发明人： Shinji Tomita ,  Takashi Nagamura ,  Takao Yamamoto

    IPC分类号： F25J3/04 ,  C01B23/00 ,  C30B15/00 ,  F25J3/02 ,  F25J3/08 ,  C01B13/00 ,  C01B33/02

    CPC分类号： C30B15/00 ,  C01B23/0094 ,  F25J3/0285 ,  F25J3/08 ,  C01B2210/0006 ,  C01B2210/0014 ,  C01B2210/0045 ,  C01B2210/005 ,  F25J2200/02 ,  F25J2200/30 ,  F25J2205/40 ,  F25J2205/60 ,  F25J2205/82 ,  F25J2205/84 ,  F25J2210/42 ,  F25J2215/58 ,  F25J2270/60 ,  F25J2270/904

    摘要： An argon recovery and purification process in which the consumption of energy is small because of simple steps, is provided. This process comprises: a first step of reacting impure argon gas with hydrogen gas (H2) so that oxygen (O2) contained in the impure argon gas is converted to water (H2O), thereby substantially removing oxygen (O2) from the impure argon gas; a second step of introducing the impure argon gas into an adsorption unit for adsorbing water (H2O) and carbon dioxide (CO2) contained in the impure argon gas, thereby substantially removing the water (H2O) and carbon dioxide (CO2) from the impure argon gas; and a third step of subjecting the impure argon gas to a low temperature liquefaction and introducing the liquefied argon into a rectification unit for removing low boiling point impurity components and high boiling point impurity components contained in the impure argon gas by purification and separation, thereby obtaining substantially pure argon gas.

    摘要翻译： 提供了由于简单的步骤而消耗能量的氩回收和净化过程。 该方法包括：使不纯的氩气与氢气（H 2）反应使​​得不纯的氩气中包含的氧（O 2）转化为水（H 2 O），从而从不纯的氩气中大量除去氧（O 2） ; 将不纯的氩气引入用于吸附不纯的氩气中所含的水（H 2 O）和二氧化碳（CO 2）的吸附单元的第二步骤，从而从不纯的氩气中基本上除去水（H 2 O）和二氧化碳（CO 2） 加油站; 以及第三步骤，对不纯的氩气进行低温液化，并将液化的氩气引入精馏单元中，以通过净化和分离除去不纯的氩气中所含的低沸点杂质组分和高沸点杂质成分，从而获得 基本上纯的氩气。

    Ultra high purity nitrogen and oxygen generator unit
    8.
    发明授权
    Ultra high purity nitrogen and oxygen generator unit 失效
    超高纯度氮气和氧气发生器

    公开(公告)号：US5743112A

    公开(公告)日：1998-04-28

    申请号：US743095

    申请日：1996-11-04

    申请人： Takao Yamamoto ,  Shinji Tomita ,  Ryo Den

    发明人： Takao Yamamoto ,  Shinji Tomita ,  Ryo Den

    IPC分类号： F25J3/04 ,  F25J1/00

    CPC分类号： F25J3/04254 ,  F25J3/04163 ,  F25J3/04169 ,  F25J3/04284 ,  F25J3/0443 ,  F25J3/04793 ,  F25J3/04872 ,  F25J2200/94 ,  F25J2205/82 ,  F25J2210/42 ,  F25J2215/44 ,  F25J2215/56 ,  F25J2220/42 ,  F25J2220/50 ,  F25J2220/52 ,  F25J2245/02 ,  F25J2250/20

    摘要： A unit capable of simultaneously producing liquid nitrogen of ultra high purity and liquid oxygen of ultra high purity, is provided. The inside of a first rectification column 6 is demarcated to an upper rectifying part 12, a middle rectifying part 13 and a lower rectifying part 14. To the upper part 11 above the upper rectifying part 12 is connected a nitrogen condenser 8. A second rectification column 7 has a reboiler 24 provided under its rectifying part 22. Ultra high purity liquid nitrogen is recovered from between the upper rectifying part 12 and middle rectifying part 22 of the second rectification column 7, where it is brought in countercurrent contact with gas evaporated by the reboiler 24 provided below the rectifying part 22 so that lower boiling point components are separated therefrom. Thus, ultra high purity liquid oxygen is recovered from below the rectifying part 22 of the second rectification column 7.

    摘要翻译： 提供了能够同时生产超高纯度液氮和超高纯液氮的单元。 第一精馏塔6的内部被划分为上部整流部12，中间整流部13和下部整流部14.在上部整流部12的上部11与氮冷凝器8连接。第二整流 塔7具有设置在其整流部22的下方的再沸器24.从第二精馏塔7的上部精馏部12和中间精馏部22之间回收超高纯度液氮，与第二精馏塔7的中间精馏部22反应， 再沸器24设置在整流部22的下方，使得低沸点成分与其分离。 因此，从第二精馏塔7的整流部22的下方回收超高纯度的液氧。

    Lock assembly
    9.
    发明申请
    Lock assembly 失效
    锁组件

    公开(公告)号：US20070105416A1

    公开(公告)日：2007-05-10

    申请号：US10563245

    申请日：2004-06-30

    申请人： Shinji Tomita ,  Noboru Tuchiya ,  Norihiro Suzuki

    发明人： Shinji Tomita ,  Noboru Tuchiya ,  Norihiro Suzuki

    IPC分类号： H01R13/44

    CPC分类号： H01R13/6397 ,  H01R24/64

    摘要： Disclosed is a lock assembly 10 adapted to be detachably attached to a LAN-cable connector 106 which is integrally fixed to a LAN cable 100 and adapted to be removably inserted into a socket 102 of a computer 102 and latched at an inserted position thereof. The lock assembly is operable, when attached to the LAN-cable connector, to allow the LAN-cable connector 106 after being inserted into the socket 104 to be locked at the inserted position, and, when detached from the LAN-cable connector 106, to allow the LAN-cable connector 106 to be removed from the socket 102. The lock assembly of the present invention can substantially preclude a PC from being moved out so as to obtain an antitheft effect in a simplified structure.

    摘要翻译： 公开了一种锁定组件10，其适于可拆卸地附接到LAN电缆连接器106，其一体地固定到LAN电缆100并且适于可移除地插入到计算机102的插座102中并且锁定在其插入位置。 当连接到LAN电缆连接器时，锁定组件可操作以允许LAN电缆连接器106在被插入到插座104中以被锁定在插入位置之后，并且当从LAN电缆连接器106分离时， 以允许LAN电缆连接器106从插座102移除。本发明的锁定组件可以基本上排除PC被移出以便以简化的结构获得防盗效果。

    High purity nitrogen generator unit and method
    10.
    发明授权
    High purity nitrogen generator unit and method 失效
    高纯氮发生器单元及方法

    公开(公告)号：US5806340A

    公开(公告)日：1998-09-15

    申请号：US856003

    申请日：1997-05-14

    申请人： Shinji Tomita

    发明人： Shinji Tomita

    IPC分类号： F25J3/04

    CPC分类号： F25J3/04333 ,  F25J3/04048 ,  F25J3/04066 ,  F25J3/04084 ,  F25J3/04103 ,  F25J3/04206 ,  F25J3/04321 ,  F25J3/04363 ,  F25J3/0443 ,  F25J2200/94 ,  F25J2205/02 ,  F25J2210/04 ,  F25J2215/44 ,  F25J2220/42 ,  F25J2230/52 ,  F25J2245/02 ,  F25J2250/02 ,  F25J2250/20 ,  F25J2250/30 ,  F25J2250/40 ,  F25J2250/42 ,  F25J2250/50

    摘要： A high purity nitrogen generator unit which is excellent in the energy efficiency and the recovery of high purity nitrogen gas, is provided. In a rectification column 1, feed air is separated to oxygen-rich liquid air and nitrogen gas. The oxygen-rich liquid air in its bottom is reduced in pressure by a first expansion valve 21 and sent to a composition regulation column 3. The nitrogen gas in its top is condensed in a nitrogen condenser 2, the resulting liquid nitrogen is returned as a reflux liquid to the rectification column 1 and non-condensed gas is released. After oxygen-rich waste gas in the lower part of the composition regulation column 3 is reduced in pressure by an expansion turbine 6, it is released by way of a first heat exchanger 4. Mixed gas in the top of the composition regulation column 3 is introduced for re-circulation into a first compressor 5. Another portion of the mixed gas is returned to the composition regulation column 3 by way of a second compressor 7, second heat exchanger 8 and second expansion valve 22. The second compressor 7 is driven by means of the expansion turbine 6. High purity liquid nitrogen taken out of the vicinity of the top of the rectification column 1 is evaporated for recovery in the second heat exchanger 8.

    摘要翻译： 提供了能量效率优异和高纯度氮气回收的高纯度氮气发生器单元。 在精馏塔1中，将进料空气分离成富氧液体空气和氮气。 其底部的富氧液体空气通过第一膨胀阀21减压，并送到组成调节塔3.其顶部的氮气在氮冷凝器2中冷凝，得到的液氮作为 回流液到精馏塔1，非冷凝气体被释放。 在组成调节塔3的下部的富氧废气通过膨胀涡轮6减压后，通过第一热交换器4释放。组成调节塔3顶部的混合气体为 引入再循环到第一压缩机5中。另一部分混合气体通过第二压缩机7，第二热交换器8和第二膨胀阀22返回到组成调节塔3中。第二压缩机7由 膨胀涡轮机6的装置。从精馏塔1顶部附近取出的高纯度液氮在第二热交换器8中蒸发回收。