摘要:
The invention provides a method for making a new semiconductor base material comprising thin layers of amorphous, hydrogenous carbon (a-c:H) with a specific electrical resistance of between 10.sup.1 and 10.sup.8 .OMEGA..cm and a charge carrier concentration (n+p) of between 10.sup.10 and 10.sup.18 cm.sup.-3, respectively at room temperature. The new semiconductor base material can be manufactured in thin layer technology with the application of band processes and exhibits a charge carrier mobility of at least 1 cm.sup.2.v.sup.-1.s.sup.-1.
摘要:
Hard, mechanically and chemically stable protective layers for electroactive passivation layers of semiconductor components, which also act as diffusion barriers against moisture and ions, comprise a thin layer of amorphous, hydrogenated carbon.
摘要:
A capacitive moisture sensor with a dielectric consisting of a moisture sensitive polymer which is mounted between two electrodes fulfills all the requirements of capacitive moisture sensors to a high degree, in particular with regard to a high long-term stability, when the organic polymer is a polybenzoxazole or a polybenzothiazole.
摘要:
An electrophotographic recording material is applied on a plate-shaped or drum-shaped substrate in a layer structure of superposed layers which comprises a photoconductive layer and at least the uppermost layer is fashioned of amorphous, hydrogen-containing carbon. The amorphous, hydrogen-containing carbon layer is deposited from a radio frequency excited low-pressure plasma with gaseous hydrocarbon as a reaction gas and in which a self-bias DC voltage is superimposed on the radio frequency field. The a-c:H material obtained in this manner is semiconducting and has photoconductive properties so that it can be employed for the photoconductive layer of the electrophotographic recording material.
摘要:
A planarizing dielectric, which is particularly suitable for electronic components, fulfills the required properties to a high degree when it comprises a matrix of a high-temperature resistant, organic polymer, into which matrix is intercalated in fine distribution a solid filler material, which is etchable in oxygen plasma, has high thermal conductivity and good dielectric properties.
摘要:
In the case of a photocell based on gallium arsenide or indium phosphide, a layer of amorphous, hydrogenous carbon (a-C:H) having a thickness of .ltoreq.0.1 .mu.m and a specific electrical resistance of .gtoreq.10.sup.6 .OMEGA..cm is placed on a layer of p-doped gallium arsenide (GaAs) or indium phosphide (InP).
摘要:
A Metal Insulator Semiconductor Field-Effect Transistor (MISFET) has an insulating layer arranged between a gate electrode and a semiconductor substrate. The insulating layer is a layer of amorphous, hydrogenated carbon (a-C:H) with a thickness--in the region of the gate electrode--of up to 1 .mu.m, and with a resistivity (.eta.) greater than or equal to 10.sup.6 .OMEGA..multidot.cm at the boundary surface to the semiconductor substrate. The semiconductor substrate consists of a semiconductor material other than silicon.
摘要:
A device for measuring the fill level in a container at least partially filled with a liquid, particularly for determining the liquid level in a fuel tank, in which a measuring resistor, comprising a metallic resistance layer having a great temperature coefficient of the specific resistance is carried by a carrier foil. The portion of the resistance layer disposed in the liquid remains cold, while that portion above the liquid is at a higher temperature, whereby the difference between the present resistance and that of an empty tank is proportional to the fill level within the tank. The change of resistance preferably is measured in connection with that of a comparator resistor which is not heated and compensates for temperature influence etc. An influence on the measurement due to convection in the fuel tank is prevented by means of covering sheets which are spaced a small distance from the resistors by means of suitable spacing strips.
摘要:
Glow polymerisate layers can be generated on a substrate, starting from hydrocarbons and/or fluorocarbons, by means of a high-frequency, low-pressure glow discharge. Glow polymerisates completely saturated with hydrogen or fluorine are obtained when the glow discharge is carried out in the microwave range between 0.5 and 1.000 GHz and if the amplitude E.sub.0 of the effective field strength in the vicinity of the substrate no greater than 850 V/cm.