SENSOR PACKAGE CAVITIES WITH POLYMER FILMS

    公开(公告)号:US20220199479A1

    公开(公告)日:2022-06-23

    申请号:US17125487

    申请日:2020-12-17

    Abstract: In examples, a sensor package includes a semiconductor die, a sensor on the semiconductor die, and a mold compound covering the semiconductor die. The mold compound includes a sensor cavity over the sensor. The sensor package includes a polymer film member on the sensor and circumscribed by a wall of the mold compound forming the sensor cavity. The polymer film member is exposed to an exterior environment of the sensor package.

    SEMICONDUCTOR FORCE SENSORS
    3.
    发明申请

    公开(公告)号:US20220221353A1

    公开(公告)日:2022-07-14

    申请号:US17538782

    申请日:2021-11-30

    Abstract: A force sensor including a semiconductor die, and a die pad coupled to the semiconductor die, the semiconductor die configured to detect a force in the die pad. In addition, the force sensor includes a mold compound covering the semiconductor die and having an outer perimeter, a first side, and a second side opposite the first side, the outer perimeter extending between the first side and the second side, the die pad exposed out of the mold compound along the first side. Further, the force sensor includes a mounting frame engaged with the die pad along the second side of the mold compound, the mounting frame including multiple mounting pads extended outward in multiple directions from the outer perimeter.

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