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公开(公告)号:US20240414907A1
公开(公告)日:2024-12-12
申请号:US18489365
申请日:2023-10-18
Inventor: Ping-Wei Wang , Jui-Lin Chen , Yu-Bey Wu
IPC: H10B10/00
Abstract: A memory cell includes first and second active regions and first and second gate structures. The first gate structure engages the first and second active regions in forming a first pull-down transistor and a first pull-up transistor, respectively, and the second gate structure engages the first and second active regions in forming a second pull-down transistor and a second pull-up transistor, respectively. A first frontside source/drain contact is disposed above and electrically couples to a first common source/drain region of the first and second pull-down transistors. A first backside via is disposed under and electrically couples to the first common source/drain region. A first backside metal line is disposed under and electrically couples to the first backside via.
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公开(公告)号:US20240064950A1
公开(公告)日:2024-02-22
申请号:US17890762
申请日:2022-08-18
Inventor: Jui-Lin Chen , Kian-Long Lim , Feng-Ming Chang , Yi-Feng Ting , Hsin-Wen Su , Lien-Jung Hung , Ping-Wei Wang
IPC: H01L27/11
CPC classification number: H01L27/1104
Abstract: A semiconductor device includes a first source/drain feature on a front side of a substrate. The device includes a first backside metal line under the first source/drain feature and extending lengthwise along a first direction. The device includes a first backside via disposed between the first source/drain feature and the first backside metal line. The first backside metal line is a first bit line of a first static random access memory (SRAM) cell and is connected to the first source/drain feature through the first backside via. The first backside metal line includes a first portion and a second portion each extending widthwise along a second direction perpendicular to the first direction, the first portion is wider than the second portion, and the first portion partially lands on the first backside via. The first and the second portions are substantially aligned on one side along the first direction.
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公开(公告)号:US08908409B2
公开(公告)日:2014-12-09
申请号:US14285410
申请日:2014-05-22
Inventor: Huai-Ying Huang , Yu-Kuan Lin , Sheng Chiang Hung , Feng-Ming Chang , Jui-Lin Chen , Ping-Wei Wang
IPC: G11C15/00 , G11C11/412
CPC classification number: G11C11/412 , G11C11/419
Abstract: SRAM cells and SRAM cell arrays are described. In one embodiment, an SRAM cell includes a first inverter and a second inverter cross-coupled with the first inverter to form a first data storage node and a complimentary second data storage node for latching a value. The SRAM cell further includes a first pass-gate transistor and a switch transistor. A first source/drain of the first pass-gate transistor is coupled to the first data storage node, and a second source/drain of the first pass-gate transistor is coupled to a first bit line. The first source/drain of the switch transistor is coupled to the gate of the first pass-gate transistor.
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公开(公告)号:US20140254248A1
公开(公告)日:2014-09-11
申请号:US14285410
申请日:2014-05-22
Inventor: Huai-Ying Huang , Yu-Kuan Lin , Sheng Chiang Hung , Feng-Ming Chang , Jui-Lin Chen , Ping-Wei Wang
IPC: G11C11/412
CPC classification number: G11C11/412 , G11C11/419
Abstract: SRAM cells and SRAM cell arrays are described. In one embodiment, an SRAM cell includes a first inverter and a second inverter cross-coupled with the first inverter to form a first data storage node and a complimentary second data storage node for latching a value. The SRAM cell further includes a first pass-gate transistor and a switch transistor. A first source/drain of the first pass-gate transistor is coupled to the first data storage node, and a second source/drain of the first pass-gate transistor is coupled to a first bit line. The first source/drain of the switch transistor is coupled to the gate of the first pass-gate transistor.
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公开(公告)号:US20240395665A1
公开(公告)日:2024-11-28
申请号:US18469801
申请日:2023-09-19
Inventor: Jui-Lin Chen , Chao-Yuan Chang , Feng-Ming Chang , Yung-Ting Chang , Ping-Wei Wang , Yi-Feng Ting
IPC: H01L23/48 , H01L21/8238 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/66 , H01L29/775 , H01L29/786
Abstract: A semiconductor structure is provided. The semiconductor structure includes a functional cell region including an n-type functional transistor and a p-type functional transistor. The semiconductor structure also includes a first power transmission cell region including a first cutting feature and a first contact rail in the first cutting feature. The semiconductor structure also includes a first power rail electrically connected to a source terminal of the p-type functional transistor and the first contact rail of the first power transmission cell region. The semiconductor structure also includes a second power transmission cell region adjacent to the first power transmission cell and including a second cutting feature and second contact rail in the second cutting feature. The semiconductor structure also includes an insulating strip extending from the first cutting feature to the second cutting feature in a first direction.
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公开(公告)号:US20240306359A1
公开(公告)日:2024-09-12
申请号:US18364842
申请日:2023-08-03
Inventor: Ping-Wei Wang , Feng-Ming Chang , Jui-Lin Chen
IPC: H10B10/00
CPC classification number: H10B10/125
Abstract: A memory cell includes a device layer including a plurality of transistors and an interconnect structure disposed over the device layer. Each of the transistors includes a gate structure extending lengthwise in a first direction. The interconnect structure includes a bottommost metal line layer electrically coupled to the transistors in the device layer. The bottommost metal line layer includes metal lines arranged in first, second, third, fourth, fifth, and sixth metal tracks in order from first to sixth along the first direction. A distance between any adjacent two of the first, second, third, fourth, fifth, and six metal tracks measured along the first direction is uniform. The first metal track includes a metal line electrically coupled to an electric ground of the memory cell. The sixth metal track includes a metal line electrically coupled to a power supply of the memory cell.
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公开(公告)号:US20240306358A1
公开(公告)日:2024-09-12
申请号:US18364716
申请日:2023-08-03
Inventor: Ping-Wei Wang , Feng-Ming Chang , Jui-Lin Chen
IPC: H10B10/00 , G11C11/412 , G11C11/419 , H01L21/8238 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/66 , H01L29/775 , H01L29/786
CPC classification number: H10B10/12 , G11C11/412 , G11C11/419 , H01L21/823807 , H01L27/092 , H01L29/0673 , H01L29/42392 , H01L29/66439 , H01L29/66545 , H01L29/775 , H01L29/78696
Abstract: A memory cell includes a first active region providing a plurality of first nano-structures for a write-port pass-gate transistor, a second active region providing a plurality of second nano-structures for a write-port pull-up transistor, and a third active region providing a plurality of third nano-structures for a read-port pull-down transistor. The first active region has a first width, the second active region has a second width, and the third active region having a third width. The third width is larger than the first width, and the first width is larger than the second width.
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公开(公告)号:US12022664B2
公开(公告)日:2024-06-25
申请号:US17408145
申请日:2021-08-20
Inventor: Jui-Lin Chen , Chenchen Jacob Wang , Hsin-Wen Su , Ping-Wei Wang , Yuan-Hao Chang , Po-Sheng Lu , Shih-Hao Lin
Abstract: A magnetic device structure is provided. In some embodiments, the structure includes one or more first transistors, a magnetic device disposed over the one or more first transistors, a plurality of magnetic columns surrounding sides of the one or more first transistors and the magnetic device, a first magnetic layer disposed over the magnetic device and in contact with the plurality of magnetic columns, and a second magnetic layer disposed below the one or more first transistors and in contact with the plurality of magnetic columns.
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公开(公告)号:US20230165160A1
公开(公告)日:2023-05-25
申请号:US17832601
申请日:2022-06-04
Inventor: Hsin-Wen Su , Jui-Lin Chen , Shih-Hao Lin , Chih-Chuan Yang , Ming-Yen Chuang , Chenchen Jacob Wang , Ping-Wei Wang
CPC classification number: H01L43/02 , H01L27/228 , H01L43/12
Abstract: Some embodiments relate to a memory device. The memory device includes a transistor having a first source/drain (S/D) region and a second S/D region, a first S/D contact disposed over the first S/D region, the first S/D contact extending lengthwise in a first direction, a second S/D contact disposed over the second S/D region, a first via landing on the first S/D contact, the first via extending lengthwise in a second direction different from the first direction, a second via landing on the second S/D contact, the first via having a length measured in the second direction that is larger than the second via, a first conductive line coupled to the first via, a second conductive line coupled to the second via, and a memory structure disposed above the transistor and coupled to the second conductive line.
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公开(公告)号:US20220352180A1
公开(公告)日:2022-11-03
申请号:US17464245
申请日:2021-09-01
Inventor: Shih-Hao Lin , Chih-Hsiang Huang , Shang-Rong Li , Chih-Chuan Yang , Jui-Lin Chen , Ming-Shuan Li
IPC: H01L27/11 , H01L29/06 , H01L29/423 , H01L29/49 , H01L29/786 , H01L21/02 , H01L21/28 , H01L21/8238 , H01L29/66
Abstract: A method comprises forming a first fin including alternating first channel layers and first sacrificial layers and a second fin including alternating second channel layers and second sacrificial layers, forming a capping layer over the first and the second fin, forming a dummy gate stack over the capping layer, forming source/drain (S/D) features in the first and the second fin, removing the dummy gate stack to form a gate trench, removing the first sacrificial layers and the capping layer over the first fin to form first gaps, removing the capping layer over the second fin and portions of the second sacrificial layers to from second gaps, where remaining portions of the second sacrificial layers and the capping layers form a threshold voltage (Vt) modulation layer, and forming a metal gate stack in the gate trench, the first gaps, and the second gaps.
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