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公开(公告)号：US07635850B2
公开(公告)日：2009-12-22
申请号：US11870333
申请日：2007-10-10
IPC分类号： H01J37/317 , H01J37/147 , H01J3/14
CPC分类号： H01J37/3171 , H01J37/05 , H01J2237/047 , H01J2237/055 , H01J2237/12 , H01J2237/15
摘要： An analyzing electromagnet constituting an ion implanter has a first inner coil, a second inner coil, three first outer coils, three second outer coils, and a yoke. The inner coils are saddle-shaped coils cooperating with each other to generate a main magnetic field which bends an ion beam in the X direction. Each of the outer coils is a saddle-shaped coil which generates a sub-magnetic field correcting the main magnetic field. Each of the coils has a configuration where a notched portion is disposed in a fan-shaped cylindrical stacked coil configured by: winding a laminations of an insulation sheet and a conductor sheet in multiple turn on an outer peripheral face of a laminated insulator; and forming a laminated insulator on an outer peripheral face.
摘要翻译： 构成离子注入机的分析电磁铁具有第一内线圈，第二内线圈，三个第一外线圈，三个第二外线圈和轭。 内部线圈是彼此协作的鞍形线圈，以产生在X方向上使离子束弯曲的主磁场。 每个外部线圈是产生校正主磁场的子磁场的鞍形线圈。 每个线圈具有其中凹口部分设置在扇形圆柱形堆叠线圈中的构造，该扇形圆柱形堆叠线圈通过以下方式构成：在层压绝缘体的外周面上多层卷绕绝缘片和导体片的叠层; 以及在外周面上形成层压绝缘体。
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公开(公告)号：US20080135777A1
公开(公告)日：2008-06-12
申请号：US11870333
申请日：2007-10-10
IPC分类号： H01J3/14
CPC分类号： H01J37/3171 , H01J37/05 , H01J2237/047 , H01J2237/055 , H01J2237/12 , H01J2237/15
摘要： The projection distances of connecting portions of a coil are reduced, thereby enabling the size and power consumption of an analyzing electromagnet to be reduced, and therefore the size and power consumption of an ion implanting apparatus are enabled to be reduced.[Means for Resolution] An analyzing electromagnet 200 constituting an ion implanting apparatus has a first inner coil 206, a second inner coil 212, three first outer coils 218, three second outer coils 224, and a yoke 230. The inner coils 206, 212 are saddle-shaped coils cooperating with each other to generate a main magnetic field which bends an ion beam in the X direction. Each of the outer coils 218, 224 is a saddle-shaped coil which generates a sub-magnetic field correcting the main magnetic field. Each of the coils has a configuration where a notched portion is disposed in a fan-shaped cylindrical stacked coil configured by: winding a laminations of an insulation sheet and a conductor sheet in multiple turn on an outer peripheral face of a laminated insulator; and forming a laminated insulator on an outer peripheral face,
摘要翻译： 线圈的连接部分的投影距离减小，从而能够降低分析电磁铁的尺寸和功率消耗，从而能够减小离子注入装置的尺寸和功耗。 [分辨装置]构成离子注入装置的分析电磁体200具有第一内线圈206，第二内线圈212，三个第一外线圈218，三个第二外线圈224和轭230。 内部线圈206,212是彼此协作的鞍形线圈，以产生在X方向上弯曲离子束的主磁场。 外部线圈218,224中的每一个是产生校正主磁场的子磁场的鞍形线圈。 每个线圈具有其中凹口部分设置在扇形圆柱形堆叠线圈中的构造，该扇形圆柱形堆叠线圈通过以下方式构成：在层压绝缘体的外周面上多层卷绕绝缘片和导体片的叠层; 并在外周面上形成层压绝缘体，
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公开(公告)号：US20110297843A1
公开(公告)日：2011-12-08
申请号：US13128893
申请日：2009-08-31
IPC分类号： H01J3/14
CPC分类号： H01J37/3171 , H01J37/147 , H01J2237/24528
摘要： An ion implanting apparatus includes: an electrostatic accelerating tube for causing an ion beam extracted from an ion source to have a desirable energy, and deflecting the ion beam to be incident on a target, the electrostatic accelerating tube including deflecting electrodes provided to interpose the ion beam therebetween. The deflecting electrodes include a first deflecting electrode and a second deflecting electrode to which different electric potentials from each other are set. The second deflecting electrode is provided on a side where the ion beam is to be deflected and includes an upstream electrode provided on an upstream side of the ion beam and a downstream electrode provided apart from the upstream electrode toward a downstream side. An electric potential of the upstream electrode and an electric potential of the downstream electrode are independently set from each other.
摘要翻译： 离子注入装置包括：静电加速管，用于使从离子源提取的离子束具有期望的能量，并使离子束偏转以入射到靶上，所述静电加速管包括设置成插入离子的偏转电极 梁之间。 偏转电极包括设置彼此不同电位的第一偏转电极和第二偏转电极。 第二偏转电极设置在离子束被偏转的一侧，并且包括设置在离子束的上游侧的上游电极和从上游电极向下游侧设置的下游电极。 上游电极的电位和下游电极的电位彼此独立地设定。
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公开(公告)号：US20090302214A1
公开(公告)日：2009-12-10
申请号：US12476836
申请日：2009-06-02
CPC分类号： H01J37/3171 , H01J37/1471 , H01J2237/055 , H01J2237/08 , H01J2237/1501 , H01J2237/2446 , H01J2237/24528 , H01J2237/304
摘要： An extraction electrode of an ion source is dividedly configured by a first extraction electrode and a second extraction electrode. DC power supplies which form a potential difference between the electrodes, a camera which takes an image of the ion beam to output image data of the ion beam, and a rear-stage beam instrument which measures the beam current of the ion beam that has passed through the analysis slit are disposed. A step of adjusting an analysis electromagnet current so that the beam current measured by the rear-stage beam instrument is maximum, that of processing the image data from the camera to obtain the deviation angle of the ion beam entering the analysis slit from the design beam orbit, and that of, if the deviation angle is not within an allowable range, adjusting the potential difference between the electrodes so that the ion beam is bent to a direction where the deviation angle becomes small, by the potential difference are performed one or more times until the deviation angle is within the allowable range.
摘要翻译： 离子源的提取电极由第一引出电极和第二引出电极分开地构成。 形成电极之间的电位差的直流电源，拍摄离子束的图像以输出离子束的图像数据的照相机，以及测量已经通过的离子束的束电流的后级光束仪器 通过分析缝设置。 调整分析电磁体电流使得由后级光束仪测得的光束电流最大的步骤是从相机处理图像数据以获得进入分析狭缝的离子束与设计光束的偏离角度的步骤 并且如果偏离角不在允许范围内，则调整电极之间的电位差使得离子束弯曲到偏移角变小的方向，通过电位差进行一个或多个 次，直到偏离角度在允许范围内。
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公开(公告)号：US08389964B2
公开(公告)日：2013-03-05
申请号：US13128893
申请日：2009-08-31
IPC分类号： H01J37/00 , H01L21/265
CPC分类号： H01J37/3171 , H01J37/147 , H01J2237/24528
摘要： An ion implanting apparatus includes: an electrostatic accelerating tube for causing an ion beam extracted from an ion source to have a desirable energy, and deflecting the ion beam to be incident on a target, the electrostatic accelerating tube including deflecting electrodes provided to interpose the ion beam therebetween. The deflecting electrodes include a first deflecting electrode and a second deflecting electrode to which different electric potentials from each other are set. The second deflecting electrode is provided on a side where the ion beam is to be deflected and includes an upstream electrode provided on an upstream side of the ion beam and a downstream electrode provided apart from the upstream electrode toward a downstream side. An electric potential of the upstream electrode and an electric potential of the downstream electrode are independently set from each other.
摘要翻译： 离子注入装置包括：静电加速管，用于使从离子源提取的离子束具有期望的能量，并使离子束偏转以入射到靶上，所述静电加速管包括设置成插入离子的偏转电极 梁之间。 偏转电极包括设置彼此不同电位的第一偏转电极和第二偏转电极。 第二偏转电极设置在离子束被偏转的一侧，并且包括设置在离子束的上游侧的上游电极和从上游电极向下游侧设置的下游电极。 上游电极的电位和下游电极的电位彼此独立地设定。
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公开(公告)号：US07791041B2
公开(公告)日：2010-09-07
申请号：US12233151
申请日：2008-09-18
CPC分类号： H01J27/14 , H01J37/08 , H01J37/3171 , H01J2237/061 , H01J2237/082 , H01J2237/083 , H01J2237/24542 , H01J2237/304 , H01J2237/30472 , H01J2237/31708 , H01J2237/3171
摘要： This ion source generates a ribbon-like ion beam whose dimension in the Y direction is larger than the dimension in the X direction. This ion source includes a plasma generating vessel having an ion extraction port extending in the Y direction, a plurality of cathodes arranged in a plurality of stages along the Y direction on one side in the X direction in the plasma generating vessel, a reflecting electrode arranged on the other side in the X direction in the plasma generating vessel opposite to the cathodes, and electromagnets for generating magnetic fields along the X direction in regions including the plurality of cathodes in the plasma generating vessel.
摘要翻译： 该离子源产生其Y方向的尺寸大于X方向的尺寸的带状离子束。 该离子源包括具有沿Y方向延伸的离子提取口的等离子体发生容器，在等离子体发生容器中沿着X方向的一侧沿着Y方向排列成多个的多个阴极，反射电极配置 在与阴极相反的等离子体发生容器中的X方向的另一侧，以及用于在等离子体发生容器中包括多个阴极的区域沿着X方向产生磁场的电磁体。
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公开(公告)号：US08702920B2
公开(公告)日：2014-04-22
申请号：US12877170
申请日：2010-09-08
IPC分类号： C23C14/00
CPC分类号： H01J27/022
摘要： A repeller structure is provided in a plasma generating chamber of an ion source facing a cathode that emits electrons for ionizing a source gas in the plasma generating chamber to generate a plasma. The repeller structure reflects the ions toward the cathode. The repeller structure includes a sputtering target that is sputtered by the plasma to emit predetermined ions, the sputtering target including a through hole that connects a sputtering surface and a back surface of the sputtering target; and an electrode body that is inserted in the through hole, the electrode body including a repeller surface that is exposed to the sputtering surface side through the through hole.
摘要翻译： 在面向阴极的离子源的等离子体发生室中设置了排斥结构，该阴极发射用于电离等离子体发生室中的源气体的电子以产生等离子体。 排斥结构将离子反射向阴极。 反射器结构包括由等离子体溅射以发射预定离子的溅射靶，溅射靶包括连接溅射表面和溅射靶的后表面的通孔; 以及电极体，其插入在所述通孔中，所述电极体包括通过所述通孔暴露于所述溅射表面侧的反射器表面。
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公开(公告)号：US08253114B2
公开(公告)日：2012-08-28
申请号：US12547176
申请日：2009-08-25
IPC分类号： H01J27/02
CPC分类号： H01J27/14
摘要： An ion source includes a plasma generating chamber into which an ionization gas containing fluorine is introduced, a hot cathode provided on one side in the plasma generating chamber, an opposing reflecting electrode which is provided on other side in the plasma generating chamber and reflects electrons when a negative voltage is applied from a bias power supply to the opposing reflecting electrode, and a magnet for generating a magnetic field along a line, which connects the hot cathode and the opposing reflecting electrode, in the plasma generating chamber. The opposing reflecting electrode is formed of an aluminum containing material.
摘要翻译： 离子源包括等离子体产生室，其中引入含氟的电离气体，设置在等离子体发生室一侧的热阴极，设置在等离子体发生室的另一侧的相反的反射电极， 从偏置电源施加负电压到相对的反射电极，以及用于在等离子体产生室中沿着连接热阴极和相对的反射电极的线产生磁场的磁体。 相对的反射电极由含铝材料形成。
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公开(公告)号：US20100051825A1
公开(公告)日：2010-03-04
申请号：US12547176
申请日：2009-08-25
IPC分类号： H01J27/02
CPC分类号： H01J27/14
摘要： An ion source includes a plasma generating chamber into which an ionization gas containing fluorine is introduced, a hot cathode provided on one side in the plasma generating chamber, an opposing reflecting electrode which is provided on other side in the plasma generating chamber and reflects electrons when a negative voltage is applied from a bias power supply to the opposing reflecting electrode, and a magnet for generating a magnetic field along a line, which connects the hot cathode and the opposing reflecting electrode, in the plasma generating chamber. The opposing reflecting electrode is formed of an aluminum containing material.
摘要翻译： 离子源包括等离子体产生室，其中引入含氟的电离气体，设置在等离子体发生室一侧的热阴极，设置在等离子体发生室的另一侧的相反的反射电极， 从偏置电源施加负电压到相对的反射电极，以及用于在等离子体产生室中沿着连接热阴极和相对的反射电极的线产生磁场的磁体。 相对的反射电极由含铝材料形成。
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公开(公告)号：US20090212232A1
公开(公告)日：2009-08-27
申请号：US12391919
申请日：2009-02-24
IPC分类号： H01J27/00
CPC分类号： H01J27/022 , H01J37/08 , H01J37/3171 , H01J2237/082 , H01J2237/24507 , H01J2237/24521 , H01J2237/24535 , H01J2237/24542 , H01J2237/30472 , H01J2237/31703
摘要： An ion source is to extract a ribbon-shaped ion beam longer in the Y direction in the Z direction and provided with a plasma generating chamber, a plasma electrode which is disposed near the end of the plasma generating chamber in the Z direction and has an ion extracting port extending in the Y direction, a plurality of cathodes for emitting electrons into the plasma generating chamber to generate a plasma and arranged in a plurality of stages along the Y direction, and a magnetic coil which generates magnetic fields along the Z direction in a domain containing the plurality of cathodes inside the plasma generating chamber.
摘要翻译： 离子源是在Z方向上在Y方向上提取长度较长的带状离子束，并设置有等离子体发生室，等离子体电极，其设置在等离子体产生室的Z方向的端部附近，具有 在Y方向上延伸的离子提取口，多个用于将电子发射到等离子体发生室中的阴极，以产生等离子体并且沿着Y方向分布在多个级中;以及磁线圈，沿着Z方向产生磁场 包含等离子体发生室内部的多个阴极的畴。
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