公开(公告)号：US10256113B2

公开(公告)日：2019-04-09

申请号：US14354134

申请日：2012-11-08

Applicant: Tanaka Kikinzoku Kogyo K.K.

Inventor： Toshinori Ogashiwa ,  Masaaki Kurita ,  Takashi Nishimori ,  Yukio Kanehira

IPC: H01L21/48 ,  H01L23/00 ,  H01L21/71 ,  B23K35/30 ,  B22F7/08 ,  B23K35/32 ,  B23K35/02 ,  B23K35/00 ,  B32B15/01 ,  C25D7/00 ,  C22C5/02 ,  C22C5/04 ,  C23C18/16 ,  B23K101/40

Abstract: A transfer substrate for transferring a metal wiring material to a transfer target including a substrate, at least one metal wiring material formed on the substrate, at least one coating layer formed on a surface of the metal wiring material, and an underlying metal film formed between the substrate and the metal wiring material, in which the metal wiring material is a compact formed by sintering metal powder such as gold powder having a purity of 99.9 wt % or more and an average particle size of 0.01 μm to 1.0 μm, and the coating layer is a predetermined metal such as gold or an alloy having a different composition from that of the metal wiring material and has a total thickness of 1 μm or less, and the metal underlying film is made of a predetermined metal such as gold or an alloy. The transfer substrate can lower heating temperature on the transfer target side.

公开(公告)号：US20140262003A1

公开(公告)日：2014-09-18

申请号：US14354134

申请日：2012-11-08

Applicant: Tanaka Kikinzoku Kogyo K.K.

Inventor： Toshinori Ogashiwa ,  Masaaki Kurita ,  Takashi Nishimori ,  Yukio Kanehira

IPC: H01L21/48 ,  H01L21/71

CPC classification number: H01L21/4814 ,  B22F7/08 ,  B23K35/007 ,  B23K35/0244 ,  B23K35/025 ,  B23K35/3006 ,  B23K35/3013 ,  B23K35/322 ,  B23K2035/008 ,  B23K2101/40 ,  B32B15/018 ,  C22C5/02 ,  C22C5/04 ,  C23C18/165 ,  C25D7/00 ,  H01L21/71 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/94 ,  H01L2224/03003 ,  H01L2224/031 ,  H01L2224/0312 ,  H01L2224/03334 ,  H01L2224/0401 ,  H01L2224/0508 ,  H01L2224/05082 ,  H01L2224/05083 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05166 ,  H01L2224/05169 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05664 ,  H01L2224/05666 ,  H01L2224/05669 ,  H01L2224/0567 ,  H01L2224/05671 ,  H01L2224/05673 ,  H01L2224/05676 ,  H01L2224/05678 ,  H01L2224/05681 ,  H01L2224/05684 ,  H01L2224/11003 ,  H01L2224/111 ,  H01L2224/1112 ,  H01L2224/11334 ,  H01L2224/11505 ,  H01L2224/13082 ,  H01L2224/13083 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13164 ,  H01L2224/13166 ,  H01L2224/13169 ,  H01L2224/1317 ,  H01L2224/13171 ,  H01L2224/13173 ,  H01L2224/13176 ,  H01L2224/13178 ,  H01L2224/13181 ,  H01L2224/13184 ,  H01L2224/94 ,  H01L2924/01006 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01044 ,  H01L2924/01045 ,  H01L2924/01047 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/181 ,  Y10T428/12056 ,  H01L2224/11 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/01046 ,  H01L2924/00012

Abstract: A transfer substrate for transferring a metal wiring material to a transfer target including a substrate, at least one metal wiring material formed on the substrate, at least one coating layer formed on a surface of the metal wiring material, and an underlying metal film formed between the substrate and the metal wiring material, in which the metal wiring material is a compact formed by sintering metal powder such as gold powder having a purity of 99.9 wt % or more and an average particle size of 0.01 μm to 1.0 μm, and the coating layer is a predetermined metal such as gold or an alloy having a different composition from that of the metal wiring material and has a total thickness of 1 μm or less, and the metal underlying film is made of a predetermined metal such as gold or an alloy. The transfer substrate can lower heating temperature on the transfer target side.

Abstract translation: 一种用于将金属布线材料转印到包括基底的转印靶上的转印衬底，形成在基底上的至少一种金属布线材料，形成在金属布线材料的表面上的至少一层涂层， 基板和金属布线材料，其中金属布线材料是通过烧结纯度为99.9重量％以上和平均粒径为0.01μm至1.0μm的金粉末等金属粉末形成的压块，以及涂层 层是具有与金属布线材料的组成不同的金或合金的预定金属，其总厚度为1μm以下，金属底膜由金或合金等规定金属构成 。 转印基板可以降低转印目标侧的加热温度。