利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

35 条记录 (耗时 0.03 秒)

    Dummy wafer
    1.
    发明授权
    Dummy wafer 失效
    虚拟晶圆

    公开(公告)号：US6150023A

    公开(公告)日：2000-11-21

    申请号：US637496

    申请日：1996-04-25

    申请人： Tatsuhiro Yasaka ,  Takashi Nishizawa ,  Kazuo Muramatsu ,  Tsutomu Watanabe

    发明人： Tatsuhiro Yasaka ,  Takashi Nishizawa ,  Kazuo Muramatsu ,  Tsutomu Watanabe

    IPC分类号： C04B35/52 ,  C01B31/02 ,  H01L21/02 ,  H01L21/66 ,  H01L23/544 ,  B32B9/00

    CPC分类号： H01L22/34 ,  Y10T428/24942 ,  Y10T428/30

    摘要： The present invention provides a test dummy wafer used in the process for manufacturing a semiconductor device, which has more excellent etching resistance than a silicon wafer, and excellent mirror surface properties and evenness required for a substrate, and which causes no contamination source in the manufacturing process. The dummy wafer is composed of glassy carbon, and at least one side thereof is preferably polished to a mirror surface having a surface roughness Ra of not more than 0.005 .mu.m. The dummy wafer of the present invention has excellent characteristics as a dummy wafer for monitoring the thickness of a CVD film. The dummy wafer having specific electric resistance of not more than 0.1 .OMEGA..multidot.cm exhibits excellent characteristics as a dummy wafer for monitoring the thickness of a film formed by sputtering and confirming cleanliness.

    摘要翻译： 本发明提供了一种用于制造半导体器件的方法的测试虚拟晶片，其具有比硅晶片更好的耐蚀刻性，以及基板所需的优异的镜面性质和均匀性，并且在制造中不产生污染源 处理。 伪晶片由玻璃碳组成，其至少一侧优选抛光至表面粗糙度Ra不大于0.005μm的镜面。 本发明的虚设晶片作为用于监测CVD膜的厚度的虚设晶片具有优异的特性。 具有不大于0.1欧姆·厘米的比电阻的伪晶片作为用于监测由溅射形成的膜的厚度并确认清洁度的虚拟晶片表现出优异的特性。

    Regeneration method and apparatus of wafer and substrate
    2.
    发明授权
    Regeneration method and apparatus of wafer and substrate 失效
    晶圆和基片再生方法及装置

    公开(公告)号：US5981301A

    公开(公告)日：1999-11-09

    申请号：US804732

    申请日：1997-02-21

    申请人： Kazuo Muramatsu ,  Akihiro Kawai ,  Tsutomu Watanabe ,  Satoshi Shimamoto

    发明人： Kazuo Muramatsu ,  Akihiro Kawai ,  Tsutomu Watanabe ,  Satoshi Shimamoto

    IPC分类号： B24B51/00 ,  B24B53/00 ,  H01L21/02 ,  H01L21/304 ,  H01L21/306 ,  H01L21/66 ,  H01L23/544 ,  H01L21/00

    CPC分类号： H01L22/34 ,  B24B37/042 ,  H01L21/02032 ,  H01L2924/0002 ,  Y10S438/906 ,  Y10S438/959

    摘要： A method for regenerating a used wafer or substrate by removing a functional coating film formed on the used wafer or substrate, comprising the steps of:(a) a step for sorting the used wafer or substrate according to the quality, structure or thickness of the functional coating film;(b) a step for removing the functional coating film, while in a state of holding the used wafer or substrate, (i) by lapping the objective face of the used wafer or substrate with a hard metal-bonded whetstone while applying an electrochemical in-process dressing, (ii) by polishing the objective face while dropping a fine-particle polishing slurry between a polishing plate provided with a pad and the functional coating film, or (iii) by electrolyzing the functional coating film on the objective face placed opposite to an electrode face in an electrolyte solution at a predetermined voltage;(c) a step for mechanically removing the functional coating film adhered to the end face at an adequate stage; and(d) a step for washing and drying the used wafer or substrate after removal of the functional coating film.

    摘要翻译： 一种用于通过去除在所使用的晶片或衬底上形成的功能性涂层来再生所使用的晶片或衬底的方法，包括以下步骤：（a）根据质量，结构或厚度对所使用的晶片或衬底进行分选的步骤 功能性涂膜; （b）在保持所使用的晶片或基板的状态下，（i）通过用硬质金属结合的砂轮研磨所使用的晶片或基板的物镜，同时施加电化学 （ii）通过抛光目标面，同时在设置有衬垫的抛光板和功能性涂膜之间滴下细粒抛光浆料，或（iii）通过电解相对放置的物镜面上的功能性涂膜 以预定电压在电解质溶液中的电极面; （c）在足够的阶段机械去除附着在端面上的功能性涂膜的步骤; 以及（d）除去功能性涂膜后，对使用过的晶片或基板进行清洗干燥的工序。

    OPTICAL FIBER ARRAY
    4.
    发明申请
    OPTICAL FIBER ARRAY 审中-公开
    光纤阵列

    公开(公告)号：US20060233510A1

    公开(公告)日：2006-10-19

    申请号：US11422544

    申请日：2006-06-06

    申请人： Toshiki Kumagai ,  Osamu Suzuki ,  Junichi Kaneko ,  Yukinari Abe ,  Kazuo Muramatsu

    发明人： Toshiki Kumagai ,  Osamu Suzuki ,  Junichi Kaneko ,  Yukinari Abe ,  Kazuo Muramatsu

    IPC分类号： G02B6/00

    CPC分类号： G02B6/3636 ,  G02B6/3652 ,  G02B6/3839 ,  G02B6/3861 ,  G02B6/3885

    摘要： In an optical fiber array (1) which has a V-groove substrate (2) formed in its surface (2a) with V-grooves (3) for arranging optical fibers, a plurality of optical fiber cores (61) fixedly bonded in each individual V-groove (3) of the V-groove substrate (2), and a pressure plate (4) fixedly bonded to surfaces of the optical fiber cores (61), an adhesive comprising a resin composition (component A) having an OH group after curing and a filler (component B) is used to fixedly bond the V-groove substrate (2), the optical fiber cores (61), and the pressure plate (4). This adhesive has a glass transition temperature that is somewhat lower than the ambient test temperature and possesses somewhat higher elasticity. Therefore, large internal stress does not occur in the adhesive even under conditions of high temperature and high humidity. Consequently, no peeling occurs as a result of moisture penetration since gaps cannot form between the pressure plate (4) and the adhesive.

    摘要翻译： 在具有在其表面（2a）上形成有用于布置光纤的V形槽（3）的V形槽衬底（2）的光纤阵列（1）中，多个光纤芯（61）固定地接合在 V槽基板（2）的各个V形槽（3）和与光纤芯（61）的表面固定接合的压板（4），粘合剂包括具有 固化后的OH基和填料（B成分）固定在V槽基板（2），光纤芯（61）和压板（4）上。 该粘合剂的玻璃化转变温度略低于环境试验温度，并具有稍高的弹性。 因此即使在高温高湿的条件下也不会发生大的内应力。 因此，由于在压板（4）和粘合剂之间不能形成间隙，所以不会由于水分渗透而发生剥离。

    Planetary gear reduction device with torque limiter function
    5.
    发明授权
    Planetary gear reduction device with torque limiter function 有权

    公开(公告)号：US06824490B2

    公开(公告)日：2004-11-30

    申请号：US10669218

    申请日：2003-09-24

    申请人： Yuzuru Suzuki ,  Kunitake Matsushita ,  Kazuo Muramatsu

    发明人： Yuzuru Suzuki ,  Kunitake Matsushita ,  Kazuo Muramatsu

    IPC分类号： F16H374

    CPC分类号： F16D7/028 ,  F16D7/044 ,  F16H1/28 ,  F16H2001/2881

    摘要： A planetary gear reduction device with a torque limiter function includes a housing, an input shaft rotatably supported by one end of the housing and connected to a power source so as to input a torque from the power source, an output shaft rotatably supported by the other end of the housing so as to output the torque from the power source, a reduction gear train provided between the input shaft and the output shaft and constituted of a plurality of gears meshing with one another, and a torque limiting mechanism mounted in the reduction gear train. In this device, when an excessive torque is generated in the output shaft, torque transmission from the input shaft to the output shaft is disconnected by the action of the torque limiting mechanism.

    Planetary gear reduction device with torque limiter function
    6.
    发明授权
    Planetary gear reduction device with torque limiter function 失效
    具有扭矩限制功能的行星减速装置

    公开(公告)号：US06682454B2

    公开(公告)日：2004-01-27

    申请号：US09997793

    申请日：2001-11-29

    申请人： Yuzuru Suzuki ,  Kunitake Matsushita ,  Kazuo Muramatsu

    发明人： Yuzuru Suzuki ,  Kunitake Matsushita ,  Kazuo Muramatsu

    IPC分类号： F16H374

    CPC分类号： F16D7/028 ,  F16D7/044 ,  F16H1/28 ,  F16H2001/2881

    摘要： A planetary gear reduction device with a torque limiter function includes a housing, an input shaft rotatably supported by one end of the housing and connected to a power source so as to input a torque from the power source, an output shaft rotatably supported by the other end of the housing so as to output the torque from the power source, a reduction gear train provided between the input shaft and the output shaft and constituted of a plurality of gears meshing with one another, and a torque limiting mechanism mounted in the reduction gear train. In this device, when an excessive torque is generated in the output shaft, torque transmission from the input shaft to the output shaft is disconnected by the action of the torque limiting mechanism.

    摘要翻译： 具有扭矩限制功能的行星齿轮减速装置包括壳体，由壳体的一端可旋转地支撑并连接到动力源以便输入来自动力源的转矩的输入轴，由另一个可旋转地支撑的输出轴 端部，以输出来自电源的扭矩;减速齿轮系，设置在输入轴和输出轴之间，并且由彼此啮合的多个齿轮构成;以及转矩限制机构，其安装在减速齿轮中 培养。 在该装置中，当在输出轴中产生过大的转矩时，通过转矩限制机构的动作将从输入轴向输出轴的转矩传递断开。

    Carbon material and process for production thereof
    7.
    发明授权
    Carbon material and process for production thereof 失效
    碳材料及其生产方法

    公开(公告)号：US5045298A

    公开(公告)日：1991-09-03

    申请号：US401250

    申请日：1989-08-31

    申请人： Kazuo Muramatsu ,  Kazuo Inoue ,  Yoshihiko Sakashita

    发明人： Kazuo Muramatsu ,  Kazuo Inoue ,  Yoshihiko Sakashita

    IPC分类号： C01B31/02 ,  C04B35/524 ,  C04B35/536

    CPC分类号： C01B31/02 ,  C04B35/524 ,  C04B35/536

    摘要： A carbon material is provided which comprises spherical crystal amorphous carbon having a void diameter in the crystallite of 30 .ANG. or below, and there is also provided a process of the production of a carbon material, in which a thermosetting resin that will be converted to amorphous carbon after using for the carbonization is molded, the molded thermosetting resin is preliminarily heated at a temperature of 1,000.degree. to 1,900.degree. C., and an isostatic pressure of 1,000 atmospheres or over is applied to the preliminarily heated body at a temperature of 2,050.degree. C. or over.

    摘要翻译： 提供了一种碳材料，其包括具有30nm或更小的微晶空隙直径的球形晶体无定形碳，并且还提供了一种生产碳材料的方法，其中将被转化为无定形的热固性树脂 在碳化后使用碳后，将成型的热固性树脂在1000℃〜1900℃的温度下预先加热，在预热体上，在2050℃的温度下施加1000大气压以上的等压静压。 C.或以上