Organic-inorganic hybrid multilayer gate dielectrics for thin-film transistors
    4.
    发明授权
    Organic-inorganic hybrid multilayer gate dielectrics for thin-film transistors 有权
    用于薄膜晶体管的有机 - 无机混合多层栅极电介质

    公开(公告)号:US09276226B2

    公开(公告)日:2016-03-01

    申请号:US13111699

    申请日:2011-05-19

    IPC分类号: H01L51/05

    摘要: Disclosed are organic-inorganic hybrid self-assembled multilayers that can be used as electrically insulating (or dielectric) materials. These multilayers generally include an inorganic primer layer and one or more bilayers deposited thereon. Each bilayer includes a chromophore or “π-polarizable” layer and an inorganic capping layer composed of zirconia. Because of the regularity of the bilayer structure and the aligned orientation of the chromophore resulting from the self-assembly process, the present multilayers have applications in electronic devices such as thin film transistors, as well as in nonlinear optics and nonvolatile memories.

    摘要翻译: 公开了可用作电绝缘(或电介质)材料的有机 - 无机混合自组装多层膜。 这些多层通常包括无机底漆层和沉积在其上的一个或多个双层。 每个双层包括发色团或“&pgr可极化”层和由氧化锆组成的无机覆盖层。 由于双层结构的规则性和由自组装过程产生的发色团的排列取向,所以本发明的多层膜可用于诸如薄膜晶体管的电子器件,以及非线性光学和非易失性存储器中。