Vapor phase diffusion of aluminum with or without boron
    3.
    发明授权
    Vapor phase diffusion of aluminum with or without boron 失效
    具有或不具有硼的铝的气相扩散

    公开(公告)号:US4193826A

    公开(公告)日:1980-03-18

    申请号:US931399

    申请日:1978-08-07

    IPC分类号: H01L21/223 H01L21/28

    CPC分类号: H01L21/223

    摘要: A method of fabricating a semiconductor device through selective diffusion of aluminum vapor into a silicon substrate by heating a sealed tube in which the silicon substrate and an aluminum source are disposed. The diffusion is effected with a low concentration of aluminum smaller than about 10.sup.17 atoms/cm.sup.3, thereby making it possible to use a silicon oxide film as a diffusion mask for the selective diffusion of aluminum at predetermined region of the silicon substrate.

    摘要翻译: 一种制造半导体器件的方法,该方法通过加热其中设置有硅衬底和铝源的密封管将铝蒸气选择性地扩散到硅衬底中。 扩散是用小于约1017原子/ cm3的低浓度铝进行的,从而可以使用氧化硅膜作为扩散掩模,用于在硅衬底的预定区域选择性扩散铝。

    Semiconductor photodetector
    4.
    发明授权
    Semiconductor photodetector 失效
    半导体光电探测器

    公开(公告)号:US4079405A

    公开(公告)日:1978-03-14

    申请号:US589675

    申请日:1975-06-24

    IPC分类号: H01L31/00 H01L31/06 H01L29/48

    CPC分类号: H01L31/00 H01L31/06 Y02E10/50

    摘要: A semiconductor photodetector comprising a first semiconductor layer having N-type conductivity; a second semiconductor layer having N-type conductivity, disposed in the vicinity of the first semiconductor layer and having a resistivity higher than that of the first semiconductor layer; a third region having P-type conductivity, disposed in the vicinity of the second semiconductor layer and having a thickness smaller than that of the second semiconductor layer; a first main electrode kept in ohmic contact with the first semiconductor layer; and a second main electrode kept in ohmic contact with a portion of the third region, the surface of the third region serving as a light receiving surface.

    摘要翻译: 一种半导体光电检测器,包括具有N型导电性的第一半导体层; 具有N型导电性的第二半导体层,设置在所述第一半导体层附近并具有比所述第一半导体层的电阻率高的电阻率; 具有P型导电性的第三区域,设置在所述第二半导体层附近,并且具有比所述第二半导体层的厚度小的厚度; 与第一半导体层保持欧姆接触的第一主电极; 以及与第三区域的一部分欧姆接触的第二主电极,第三区域的表面用作光接收表面。

    Field controlled thyristor with dual resistivity field layer
    6.
    发明授权
    Field controlled thyristor with dual resistivity field layer 失效
    具有双电阻率场层的场控晶闸管

    公开(公告)号:US4223328A

    公开(公告)日:1980-09-16

    申请号:US911311

    申请日:1978-06-01

    摘要: A field controlled thyristor is disclosed which comprises a first emitter region exposed to one main surface of a semiconductor substrate and having a first conductivity type, a second emitter region exposed to the other main surface of the substrate and having a second conductivity type, a base region connecting the first and the second emitter region, and a gate region provided in the base region. The gate region consists of a slab-like first portion disposed parallel to both the emitter and a second portion connecting the first slab-like portion with one of the main surfaces of the semiconductor substrate. The impurity concentration of the base region is higher in the portion of the base region nearer to the emitter region having the same conductivity type as that of the base region than in the portion of the base region nearer to the emitter region having the opposite conductivity type to that of the base region. The field controlled thyristor has a high forward blocking voltage gain (anode-cathode voltage/gate bias voltage), a large current rating, and a high switching power capability and its switching time is very short.

    摘要翻译: 公开了一种场控晶闸管,其包括暴露于半导体衬底的一个主表面并具有第一导电类型的第一发射极区域,暴露于衬底的另一个主表面并具有第二导电类型的第二发射极区域, 连接第一和第二发射极区域的区域,以及设置在基极区域中的栅极区域。 栅极区域由平行于发射极的板状第一部分和将第一板状部分与半导体衬底的主表面中的一个连接的第二部分组成。 基极区域的杂质浓度比基极区域具有与基极区域相同的导电类型的发射极区域的部分比在具有相反导电类型的发射极区域更靠近的部分的基极区域更高 到基地区。 场控晶闸管具有高正向阻断电压增益(阳极 - 阴极电压/栅极偏置电压),大额定电流和高开关功率能力,其开关时间非常短。

    Bidirectional photothyristor device
    8.
    发明授权
    Bidirectional photothyristor device 失效
    双向光闸晶体管

    公开(公告)号:US4016593A

    公开(公告)日:1977-04-05

    申请号:US583406

    申请日:1975-06-03

    CPC分类号: H01L31/0203 H01L31/1113

    摘要: A bidirectional photothyristor device comprises a semiconductive substrate including an NPNPN quintuple layer in which projections of both the outer layers Ns in the stacking direction are not overlapped so as to define two quadruple layer regions each having either one of the outer layers Ns as an end layer, a pair of main electrodes connecting the two quadruple layer regions in parallel relationship, a recess formed between the two quadruple layer regions within the semiconductive substrate and to which two intermediate P-N junctions are exposed, and means for applying a light trigger signal to the recess.

    摘要翻译: 双向光闸晶体管装置包括一个包括NPNPN五元组的半导体衬底,其中层叠方向上的两个外层Ns的突起不重叠,以便限定两个四层层,每层具有外层Ns中的任一层作为端层 一对主电极并联连接两个四重层区域,形成在半导体衬底内的两个四重层区域之间并且两个中间PN结露出的凹部和用于将光触发信号施加到凹部的装置 。

    Method of selectively diffusing aluminium into a silicon semiconductor
substrate
    10.
    发明授权
    Method of selectively diffusing aluminium into a silicon semiconductor substrate 失效
    将铝选择性地扩散到硅半导体衬底中的方法

    公开(公告)号:US4290830A

    公开(公告)日:1981-09-22

    申请号:US85234

    申请日:1979-10-16

    IPC分类号: C30B31/02 H01L21/225

    摘要: A method of diffusing selectively aluminium into a single crystal silicon semiconductor substrate for fabricating a semiconductor device comprises the steps of forming a diffusion source layer of aluminium having a predetermined thickness on at least one of the major surfaces of the substrate in a predetermined pattern, forming an oxide film of a predetermined thickness through oxidation over the surface of the diffusion source layer and the exposed surface of the substrate, and heating the substrate inclusive of the exposed surface thereof and the diffusion source layer thereby to diffuse aluminium into the substrate. The thickness of the oxide film is so selected as to suppress vaporization of the aluminium and at the same time to be used as a diffusion mask without giving rise to crystallization into a cristobalite structure. The method allows the pattern of boundary between the diffused regions and non-diffused regions as well as concentration profile of the diffused region to be controlled in a desired manner with a high accuracy.

    摘要翻译: 选择性地将铝扩散到用于制造半导体器件的单晶硅半导体衬底中的方法包括以下步骤:以预定图案在衬底的至少一个主表面上形成具有预定厚度的铝的扩散源层,形成 通过在扩散源层的表面和基板的暴露表面上的氧化形成预定厚度的氧化膜,并且加热包括其暴露表面的基板和扩散源层,从而将铝扩散到基板中。 氧化膜的厚度被选择为抑制铝的蒸发,同时用作扩散掩模,而不会导致结晶成方英石结构。 该方法允许扩散区域和非扩散区域之间的边界图案以及扩散区域的浓度分布以期望的方式以高精度被控制。