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    Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe
    1.
    发明授权
    Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe 失效
    用于检测或照射光的光学探针和具有这种探针的近场光学显微镜及其制造方法

    公开(公告)号：US06215114B1

    公开(公告)日：2001-04-10

    申请号：US09158494

    申请日：1998-09-23

    申请人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

    发明人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

    IPC分类号： H01L2100

    CPC分类号： G01Q60/22 ,  Y10S977/862

    摘要： An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.

    摘要翻译： 用于检测或照射ev逝光的光学证明是通过在基片上形成具有调节膜厚的膜，然后从基片的后表面形成一个凹槽，并从该凹部的一侧形成一个通孔 通过蚀刻。 获得的光学探针在通孔的尖端处具有微孔，并且通常在单个衬底上形成各自具有均匀轮廓的微孔的多个光学探针。 在凹部中，可以设置光接收或光照射装置。

    Female mold substrate having a heat flowable layer, method to make the same, and method to make a microprobe tip using the female substrate
    3.
    发明授权
    Female mold substrate having a heat flowable layer, method to make the same, and method to make a microprobe tip using the female substrate 失效
    具有热可流动层的母模基板，其制造方法以及使用该母基板制作微探针头的方法

    公开(公告)号：US06227519B1

    公开(公告)日：2001-05-08

    申请号：US09069290

    申请日：1998-04-29

    申请人： Takayuki Yagi ,  Tsutomu Ikeda ,  Yasuhiro Shimada

    发明人： Takayuki Yagi ,  Tsutomu Ikeda ,  Yasuhiro Shimada

    IPC分类号： B29C3338

    CPC分类号： G01Q70/16 ,  Y10S977/875

    摘要： A female mold substrate used for the production of a microprobe tip or probe detecting a tunneling current or weak force includes a substrate provided with a recess section and a heat-flowable layer having flowability by heat treatment formed on the substrate and covering the recess. The female mold substrate is made by forming a recess section on the top surface of a substrate and forming a heat-flowable layer on the top surface of the substrate including the recess section. A microprobe tip detecting a tunneling current or weak force is made by forming a tip material layer on the female mold substrate and transferring the tip of material layer onto another substrate.

    摘要翻译： 用于生产探测隧道电流或弱力的微探针头或探针的阴模基底包括设置有凹部的基底和通过热处理形成在基底上并覆盖凹部的流动性的热可流动层。 通过在基板的顶面上形成凹部而在包括该凹部的基板的上表面上形成热交换层而制成阴模基板。 通过在母模衬底上形成尖端材料层并将材料层的顶端转移到另一衬底上，来形成检测隧穿电流或弱力的微探针尖端。

    Optical deflector and method of producing same
    9.
    发明授权
    Optical deflector and method of producing same 失效
    光偏转器及其制作方法

    公开(公告)号：US07038834B2

    公开(公告)日：2006-05-02

    申请号：US11101515

    申请日：2005-04-08

    申请人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    发明人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    IPC分类号： G02B26/08

    CPC分类号： G02B26/085 ,  G02B26/105 ,  H04N5/7441

    摘要： There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

    摘要翻译： 提供了能够以低电压高速驱动的小型光学偏转器，提供大的偏转角度，即使在高速运转中也具有低的变形，并且具有反射表面的高静态平坦度， 制造光学偏转器。 光学偏转器相对于支撑基板驱动可移动板以使入射在反射表面上的光偏转，并且具有在其上未形成反射表面的可动板的表面中形成至少两个凹部的构造，以及 在凹部中设置磁性材料。