公开(公告)号：US07092206B2

公开(公告)日：2006-08-15

申请号：US10606427

申请日：2003-06-25

申请人： Wen-Chien D. Hsiao ,  Hin P. E. Lee ,  Jyh-Shuey Lo ,  Yansheng Luo ,  Samuel W. Yuan

发明人： Wen-Chien D. Hsiao ,  Hin P. E. Lee ,  Jyh-Shuey Lo ,  Yansheng Luo ,  Samuel W. Yuan

IPC分类号： G11B5/31 ,  G11B5/187 ,  G11B5/39

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/23 ,  G11B5/232 ,  G11B5/245 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3153 ,  G11B5/3163 ,  G11B5/3909 ,  G11B5/3967 ,  Y10T29/49032

摘要： A magnetic head includes a magnetic write structure having a first magnetic layer having a first pole, a second magnetic layer having a second pole spaced apart from the first pole, and a third magnetic layer having a third pole contacting the second pole. The third pole has a third-pole width greater than a second-pole width. An inductive coil positioned adjacent to the third magnetic layer controllably magnetizes the third magnetic layer. The third magnetic layer is nonuniformly thick such that a thickness of the third pole is less than a thickness of the third magnetic layer at locations in registry with the inductive coil. The magnetic write structure is conveniently fabricated by depositing the magnetic layers and the inductive coil, masking the third magnetic layer other than the third pole, and removing a portion of the thickness of the third pole.

摘要翻译： 磁头包括具有第一磁极层的磁写入结构，第一磁性层具有第一极点，第二磁性层具有与第一极点间隔开的第二极点，第三磁性层具有与第二极极接触的第三极点。 第三极具有大于第二极宽度的第三极宽度。 位于与第三磁性层相邻的感应线圈可控制地磁化第三磁性层。 第三磁性层不均匀地厚，使得第三极的厚度小于与感应线圈对应的位置处的第三磁性层的厚度。 通过沉积磁性层和感应线圈，掩蔽除第三极之外的第三磁性层，以及去除第三极的厚度的一部分，方便地制造磁性写入结构。

公开(公告)号：US07675709B2

公开(公告)日：2010-03-09

申请号：US11525789

申请日：2006-09-21

申请人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

发明人： Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Jyh-Shuey Lo ,  Aron Pentek

IPC分类号： G11B5/31 ,  G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.

摘要翻译： 磁写头结构，使写入场强度最大化，同时最小化杂散场。 写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度，并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。 写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。 该配置最大化可以传送到极尖的通量，同时也避免杂散场。 磁极还可以配置有翼形延伸部，其从极尖区域横向延伸，但是从ABS凹入所需量。 可以通过形成具有凸起部分的磁极来制造磁性写入头结构，在磁极上沉积写入间隙材料，然后在磁极和写入间隙上形成磁性基座，该基座具有明显小于 磁极的凸起部分的宽度，然后可以执行第一离子磨机来切割和修整磁极。 然后可以沉积诸如氧化铝的非磁性层，并且执行第二离子磨，以形成阶梯形缺口构型。 可以在离子研磨之前形成氧化铝凸块，以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

公开(公告)号：US20070058293A1

公开(公告)日：2007-03-15

申请号：US11228783

申请日：2005-09-15

申请人： Daniel Bedell ,  Hieu Lam ,  Kim Lee ,  Jyh-Shuey Lo

发明人： Daniel Bedell ,  Hieu Lam ,  Kim Lee ,  Jyh-Shuey Lo

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.

摘要翻译： 一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。 写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P 2）。 写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。

公开(公告)号：US20070020386A1

公开(公告)日：2007-01-25

申请号：US11186166

申请日：2005-07-20

申请人： Daniel Bedell ,  John Lam ,  Matthew Last ,  Kim Lee ,  Jyh-Shuey Lo ,  Dennis McKean ,  Chun-Ming (Albert) Wang ,  Yi Zheng

发明人： Daniel Bedell ,  John Lam ,  Matthew Last ,  Kim Lee ,  Jyh-Shuey Lo ,  Dennis McKean ,  Chun-Ming (Albert) Wang ,  Yi Zheng

IPC分类号： B05D5/12 ,  B05D5/00 ,  B05D1/36 ,  B05C11/02

CPC分类号： G03F7/40 ,  C25D5/022 ,  C25D7/12 ,  G03F7/2024

摘要： Systems and methods for encapsulation of chemically amplified resist template for low pH electroplating are disclosed. In a first method embodiment, a resist template structure is formed on a wafer. Substantially all surfaces of the resist template structure are encapsulated to form an encapsulated structure. Magnetic materials are plated onto the encapsulated structure.

摘要翻译： 公开了用于封装用于低pH电镀的化学放大抗蚀剂模板的系统和方法。 在第一方法实施例中，在晶片上形成抗蚀剂模板结构。 基本上将抗蚀剂模板结构的所有表面封装形成封装结构。 将磁性材料电镀在封装结构上。

公开(公告)号：US20100107402A1

公开(公告)日：2010-05-06

申请号：US12685455

申请日：2010-01-11

申请人： Christian Rene Bonhote ,  Jila Tabib ,  Dennis Richard Mckean ,  Daniel Wayne Bedell ,  Jyh-Shuey Lo ,  Hieu Lam ,  Kim Y. Lee

发明人： Christian Rene Bonhote ,  Jila Tabib ,  Dennis Richard Mckean ,  Daniel Wayne Bedell ,  Jyh-Shuey Lo ,  Hieu Lam ,  Kim Y. Lee

IPC分类号： G11B5/127 ,  B05D3/02

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49048 ,  Y10T29/49052

摘要： One preferred method for use in making a device structure with use of the resist channel shrinking solution includes the steps of forming a first pedestal portion within a channel of a patterned resist; applying a resist channel shrinking solution comprising a resist channel shrinking film and corrosion inhibitors within the channel of the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel of the patterned resist; removing the resist channel shrinking solution; and forming a second pedestal portion within the reduced-width channel of the patterned resist. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pedestal during the act of baking the resist channel shrinking solution.

摘要翻译： 用于制造使用抗蚀剂通道收缩溶液的器件结构的一种优选方法包括在图案化抗蚀剂的通道内形成第一基座部分的步骤; 在图案化的抗蚀剂的通道内施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液，从而减小图案化抗蚀剂的通道的宽度; 去除抗蚀剂通道收缩溶液; 以及在所述图案化抗蚀剂的所述减小宽度的通道内形成第二基座部分。 有利地，抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用下降低了基座中的腐蚀。

公开(公告)号：US07652855B2

公开(公告)日：2010-01-26

申请号：US11595186

申请日：2006-11-09

申请人： James Mac Freitag ,  David Eugene Heim ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Tsann Lin ,  Jyh-Shuey Lo ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang

发明人： James Mac Freitag ,  David Eugene Heim ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Tsann Lin ,  Jyh-Shuey Lo ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang

IPC分类号： G11B5/39

CPC分类号： G11B5/3932 ,  B82Y10/00 ,  B82Y25/00 ,  G11B2005/3996

摘要： A lead overlay design of a magnetic sensor is described with sensor and free layer dimensions such that the free layer is stabilized by the large demagnetization field due to the shape anisotropy. In one embodiment the giant magnetoresistive (GMR) effect under the leads is destroyed by removing the antiferromagnetic (AFM) and pinned layers above the free layer. The overlaid lead pads are deposited on the exposed spacer layer at the sides of the mask that defines the active region. In other embodiment a layer of electrically insulating material is deposited over the sensor to encapsulate it and thereby insulate it from contact with the hardbias structures. Various embodiments with self-aligned leads are also described. In a variation of the encapsulation embodiment, the insulating material is also deposited under the lead pads so the electrical current is channeled through the active region of the sensor and sidewall deposited lead pads.

摘要翻译： 用传感器和自由层尺寸描述磁传感器的引线覆盖设计，使得由于形状各向异性，自由层由大的退磁场稳定。 在一个实施例中，引线下的巨磁阻（GMR）效应通过去除自由层上方的反铁磁（AFM）和固定层而被破坏。 覆盖的引线焊盘沉积在限定有源区的掩模侧面上的暴露间隔层上。 在另一个实施例中，电绝缘材料层沉积在传感器上以将其封装并由此使其与硬质合金结构的接触绝缘。 还描述了具有自对准引线的各种实施例。 在封装实施例的变型中，绝缘材料也沉积在引线焊盘下方，使得电流通过传感器的有源区域和侧壁沉积的引线焊盘。

公开(公告)号：US07551397B2

公开(公告)日：2009-06-23

申请号：US11218701

申请日：2005-09-02

申请人： Bin V. Cao ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Jyh-Shuey Lo

发明人： Bin V. Cao ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Jyh-Shuey Lo

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a step notched first pole structure. The step notched structure includes a bottom notched portion that is wider than the second notched portion formed thereover. The upper, or narrower, notched portion has a width that is substantially equal to and self aligned with a second pole structure (P2) formed thereover. The invention may also include first and second wing portions formed in the first pole that are recessed from the ABS and that extend laterally from the first notched portions of the first pole. The formation of the winged portions is assisted by an ion mill resistant bump (alumina bump) formed thereover, which acts as a mask during the ion milling operations that are used to form the first and second notches.

摘要翻译： 一种磁写头及其制造方法，其具有第一极结构，具有阶切口第一极结构。 台阶缺口结构包括比形成在其上的第二切口部分更宽的底部切口部分。 上部或更窄的切口部分具有与形成在其上的第二极结构（P2）基本相等并自对准的宽度。 本发明还可以包括形成在第一极中的从ABS凹入并从第一极的第一切口部横向延伸的第一和第二翼部。 翼形部分的形成由在其上形成的离子磨耐磨凸起（氧化铝凸块）辅助，其在用于形成第一和第二凹口的离子铣削操作期间用作掩模。

公开(公告)号：US20070053102A1

公开(公告)日：2007-03-08

申请号：US11218701

申请日：2005-09-02

申请人： Bin Cao ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Jyh-Shuey Lo

发明人： Bin Cao ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Jyh-Shuey Lo

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a step notched first pole structure. The step notched structure includes a bottom notched portion that is wider than the second notched portion formed thereover. The upper, or narrower, notched portion has a width that is substantially equal to and self aligned with a second pole structure (P2) formed thereover. The invention may also include first and second wing portions formed in the first pole that are recessed from the ABS and that extend laterally from the first notched portions of the first pole. The formation of the winged portions is assisted by an ion mill resistant bump (alumina bump) formed thereover, which acts as a mask during the ion milling operations that are used to form the first and second notches.

摘要翻译： 一种磁写头及其制造方法，其具有第一极结构，具有阶切口第一极结构。 台阶缺口结构包括比形成在其上的第二切口部分更宽的底部切口部分。 上部或更窄的切口部分具有基本上等于并与其上形成的第二极结构（P 2）自对准的宽度。 本发明还可以包括形成在第一极中的从ABS凹入并从第一极的第一切口部横向延伸的第一和第二翼部。 翼形部分的形成由在其上形成的离子磨耐磨凸起（氧化铝凸块）辅助，其在用于形成第一和第二凹口的离子铣削操作期间用作掩模。

公开(公告)号：US20060171069A1

公开(公告)日：2006-08-03

申请号：US11046740

申请日：2005-01-31

申请人： Daniel Bedell ,  Hung-Chin Guthrie ,  Ming Jiang ,  Hieu Lam ,  Jyh-Shuey Lo ,  Edward Lee ,  Aron Pentek

发明人： Daniel Bedell ,  Hung-Chin Guthrie ,  Ming Jiang ,  Hieu Lam ,  Jyh-Shuey Lo ,  Edward Lee ,  Aron Pentek

IPC分类号： G11B5/147

CPC分类号： G11B5/1871 ,  G11B5/3116

摘要： A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.

摘要翻译： 公开了一种包括写头的磁盘驱动器头，该写头包括具有基座部分的P 1层，在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。 还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器，以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

公开(公告)号：US07554764B2

公开(公告)日：2009-06-30

申请号：US11399820

申请日：2006-04-07

申请人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

发明人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043

摘要： A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is left to provide support to the sidewall fencing.

摘要翻译： 公开了一种用于形成磁写头和由此形成的写磁极的写极的剥离方法。 形成在写入极的顶部包括硬掩模的写入极。 一层用于加强写柱的侧壁围栏的材料被沉积。 除去写磁极顶部的材料层的部分，同时留下侧壁围栏处的材料层以向侧壁围栏提供支撑。