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公开(公告)号:US20180122635A1
公开(公告)日:2018-05-03
申请号:US15859493
申请日:2017-12-30
Inventor: Wen-yu LIN , Shengchang CHEN , Zhibai ZHONG , Chen-ke HSU
IPC: H01L21/02 , H01L33/12 , H01L33/32 , H01L33/00 , C23C14/06 , C23C16/34 , C23C14/58 , C23C16/02 , C23C28/04
CPC classification number: H01L33/007 , C23C14/0641 , C23C14/34 , C23C14/5813 , C23C14/5873 , C23C16/0263 , C23C16/0272 , C23C16/303 , C23C28/04 , H01L21/0242 , H01L21/02458 , H01L21/02494 , H01L21/02502 , H01L21/0254 , H01L21/02658 , H01L33/12 , H01L33/32
Abstract: A nitride underlayer structure includes a sputtered AlN buffer layer with open band-shaped holes, thus providing a stress release path before the nitride film is grown over the buffer layer. A light-emitting diode with such nitride underlayer structure has improved lattice quality of the nitride underlayer structure and the problem of surface cracks is resolved. A fabrication method of the nitride underlayer includes providing a substrate and forming a band-shaped material layer over the substrate; sputtering an AlN material layer over the band-shaped material layer and the substrate to form a flat film; scanning back and forth from the substrate end with a laser beam to decompose the band-shaped material layer to form a sputtered AlN buffer layer with flat surface and band-shaped holes inside; and forming an AlxIn1-x-yGayN layer (0≤x≤1, 0≤y≤1) over the sputtered AlN buffer layer.
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公开(公告)号:US20170133557A1
公开(公告)日:2017-05-11
申请号:US15417227
申请日:2017-01-27
Inventor: Zhibai ZHONG , Wen-yu LIN , Yen-chih CHIANG , Jianming LIU , Chia-en LEE , Su-hui LIN , Chen-ke HSU
CPC classification number: H01L33/385 , H01L33/0075 , H01L33/38 , H01L33/486 , H01L33/62 , H01L33/641 , H01L2933/0016 , H01L2933/0033 , H01L2933/0066 , H01L2933/0075
Abstract: A flip-chip light emitting device includes: a light-emitting epitaxial laminated layer with two opposite surfaces, in which, the first surface is a light-emitting surface; a first electrode and a second electrode that are separated from each other on the second surface of the light-emitting epitaxial laminated layer; a non-conductive substrate with two opposite surfaces and two side walls connecting those two surfaces, in which, the first surface is connected to the light-emitting epitaxial laminated layer through the first and the second electrodes; a first external electrode and a second external electrode on the second surface of the non-conductive substrate, which extend to the side walls of the non-conductive substrate till and at least cover parts of the side walls of the first and the second electrodes to form electrical connection.
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