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    Piezoelectric filter, duplexer, composite piezoelectric resonator, communication device and method for adjusting frequency of piezoelectric filter
    1.
    发明授权
    Piezoelectric filter, duplexer, composite piezoelectric resonator, communication device and method for adjusting frequency of piezoelectric filter 有权
    压电滤波器，双工器，复合压电谐振器，通信装置和调节压电滤波器频率的方法

    公开(公告)号：US07019604B2

    公开(公告)日：2006-03-28

    申请号：US10623856

    申请日：2003-07-18

    申请人： Yoshihiko Gotoh ,  Hajime Yamada ,  Tadashi Nomura ,  Masaki Takeuchi

    发明人： Yoshihiko Gotoh ,  Hajime Yamada ,  Tadashi Nomura ,  Masaki Takeuchi

    IPC分类号： H03H9/17

    CPC分类号： H03H3/04 ,  H03H9/564 ,  H03H2003/0428 ,  H03H2003/0471

    摘要： A piezoelectric filter and other electronic components are constructed such that the accuracy of frequency adjustment can be increased and an improvement in efficiency of the adjustment operation can be achieved. The piezoelectric filter includes a plurality of piezoelectric resonators including a substrate and a vibration portion provided on the substrate, the vibration portion having a structure in which the top and bottom surfaces of a thin film portion including at least one piezoelectric thin film are sandwiched between at least a pair of an upper electrode and a lower electrode facing each other, wherein the upper electrode of a predetermined piezoelectric resonator is made of a material having susceptibility to etching that is different from that of the upper electrode of the other piezoelectric resonator.

    摘要翻译： 构造压电滤波器和其他电子部件，使得可以提高频率调整的精度，并且可以实现调节操作的效率的提高。 压电滤波器包括多个压电谐振器，包括基板和设置在基板上的振动部分，振动部分具有这样的结构，其中包括至少一个压电薄膜的薄膜部分的顶表面和底表面夹在 至少一对上电极和下电极彼此面对，其中预定压电谐振器的上电极由对另一个压电谐振器的上电极不同的蚀刻敏感性的材料制成。

    Piezoelectric resonator, filter, and electronic communication device
    7.
    发明授权
    Piezoelectric resonator, filter, and electronic communication device 失效
    压电谐振器，滤波器和电子通信装置

    公开(公告)号：US06888424B2

    公开(公告)日：2005-05-03

    申请号：US10785284

    申请日：2004-02-24

    申请人： Masaki Takeuchi ,  Hajime Yamada ,  Yoshihiko Goto ,  Tadashi Nomura ,  Yukio Yoshino

    发明人： Masaki Takeuchi ,  Hajime Yamada ,  Yoshihiko Goto ,  Tadashi Nomura ,  Yukio Yoshino

    IPC分类号： H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H03H3/02 ,  H03H3/04 ,  H03H9/02 ,  H03H9/17 ,  H03H9/00

    CPC分类号： H03H9/174 ,  H03H3/04 ,  H03H9/0207 ,  H03H9/173 ,  H03H2003/0407

    摘要： A piezoelectric resonator includes a substrate, a vibration unit disposed on the substrate and having a structure in which at least one pair of an upper electrode and a lower electrode opposed to each other, the upper and lower electrodes sandwiching the upper and lower surfaces of an internal thin-film portion including at least one layer of a piezoelectric thin-film, and an external thin-film portion provided under the lower electrode and including at least one layer of a piezoelectric thin-film or a dielectric thin-film, the vibration unit being vibrated in an n-th harmonic (n is an integer of 2 or more), the upper electrode and the lower electrode being provided substantially in the positions of the loops of the n-th harmonic.

    摘要翻译： 压电谐振器包括基板，设置在基板上的振动单元，具有这样的结构，其中至少一对上电极和下电极彼此相对，上电极和下电极夹着上表面和下表面 包括至少一层压电薄膜的内部薄膜部分和设置在所述下部电极下方并且包括至少一层压电薄膜或电介质薄膜的外部薄膜部分，所述振动 单元以n次谐波（n为2以上的整数）振动，上部电极和下部电极基本上设置在n次谐波的环路的位置。

    Piezoelectric resonator, piezoelectric filter, and communication apparatus
    9.
    发明授权
    Piezoelectric resonator, piezoelectric filter, and communication apparatus 有权
    压电谐振器，压电滤波器和通信装置

    公开(公告)号：US07161447B2

    公开(公告)日：2007-01-09

    申请号：US10656246

    申请日：2003-09-08

    申请人： Tadashi Nomura ,  Hajime Yamada ,  Ryuichi Kubo

    发明人： Tadashi Nomura ,  Hajime Yamada ,  Ryuichi Kubo

    IPC分类号： H03H9/09 ,  H03H9/54

    CPC分类号： H03H9/173 ,  H03H9/02102 ,  H03H9/02157 ,  H03H9/174 ,  H03H9/564 ,  H03H9/568

    摘要： A piezoelectric resonator includes a supporting substrate having an opening or a concavity, a vibrating section in which at least one pair of an upper electrode and a lower electrode oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film, the vibrating portion being formed over the opening or the concavity, and a heat dissipating film disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.

    摘要翻译： 压电谐振器包括具有开口或凹部的支撑基板，振动部分，其中至少一对上电极和下电极彼此相对以将至少一层的上表面和下表面夹在中间 压电薄膜，所述振动部分形成在所述开口或所述凹部上，以及散热薄膜，设置在所述上​​部电极和所述压电薄膜中的至少一个上，以便不覆盖所述振动部分。