ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    9.
    发明申请
    ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
    照明光学系统,曝光装置和装置制造方法

    公开(公告)号:US20120013877A1

    公开(公告)日:2012-01-19

    申请号:US13166316

    申请日:2011-06-22

    IPC分类号: G03B27/54

    摘要: According to one embodiment, an illumination optical system comprises an optical integrator which forms a secondary light source on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a first transmission filter arranged in an optical path of the exposure light emitted from a first surface illuminant of the secondary light source and having a transmittance characteristic varying according to angles of incidence of the exposure light; a second transmission filter arranged in an optical path of the exposure light emitted from a second surface illuminant of the secondary light source and having a transmittance characteristic varying according to the angles of incidence of the exposure light; and a rotation mechanism which rotates the first and second transmission filters so as to vary an angle of inclination thereof relative to the optical axis of the illumination optical system.

    摘要翻译: 根据一个实施例,照明光学系统包括光学积分器,其在照明光学系统的照明光路中的照明光瞳平面上形成二次光源,其中光源装置的曝光光入射到照明光学系统中; 第一透射滤光器,其布置在从所述次级光源的第一表面光源发射的曝光光的光路中,并且具有根据所述曝光光的入射角度而变化的透射特性; 第二透射滤光器,其布置在从所述次级光源的第二表面光源发射的曝光光的光路中,并且具有根据所述曝光光的入射角度而变化的透射特性; 以及旋转机构,其使第一和第二透射滤光片旋转以改变其相对于照明光学系统的光轴的倾斜角。

    Battery module and positioning structure therefor

    公开(公告)号:US06636018B2

    公开(公告)日:2003-10-21

    申请号:US10033762

    申请日:2001-12-28

    申请人: Hiroyuki Hirota

    发明人: Hiroyuki Hirota

    IPC分类号: H02J700

    摘要: A battery module is provided by coating selected sides of a battery cell having a rectangular shape with a prescribed resin material. The resin material is selected from among polyamide resin, polyurethane resin. Module side surfaces are provided with slopes having the slope angle of 5° or more in the thickness direction. A positioning structure is provided for establishing the prescribed positioning between the battery module and its counterpart unit such as a cellular phone having a hollow space. A plurality of slopes are formed along side walls of the hollow space to provide complementary shapes to the sloped module side surfaces. When the battery module is installed in the hollow space, the module side surfaces slide along and come in close contact with the slopes of the side walls of the hollow space.