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132 条记录 (耗时 0.028 秒)

    Semiconductor device and method for fabricating the same
    2.
    发明授权
    Semiconductor device and method for fabricating the same 失效
    半导体装置及其制造方法

    公开(公告)号：US06399993B1

    公开(公告)日：2002-06-04

    申请号：US09786551

    申请日：2001-03-07

    申请人： Teruhito Ohnishi ,  Akira Asai ,  Takeshi Takagi ,  Tohru Saitoh ,  Yo Ichikawa ,  Yoshihiro Hara ,  Koichiro Yuki ,  Katsuya Nozawa ,  Koji Katayama ,  Yoshihiko Kanzawa

    发明人： Teruhito Ohnishi ,  Akira Asai ,  Takeshi Takagi ,  Tohru Saitoh ,  Yo Ichikawa ,  Yoshihiro Hara ,  Koichiro Yuki ,  Katsuya Nozawa ,  Koji Katayama ,  Yoshihiko Kanzawa

    IPC分类号： H01L2972

    CPC分类号： H01L21/76237 ,  H01L21/8249

    摘要： In a bipolar transistor block, a base layer (20a) of SiGe single crystals and an emitter layer (26) of almost 100% of Si single crystals are stacked in this order over a collector diffused layer (9). Over both edges of the base layer (20a), a base undercoat insulating film (5a) and base extended electrodes (22) made of polysilicon are provided. The base layer (20a) has a peripheral portion with a thickness equal to that of the base undercoat insulating film (5a) and a center portion thicker than the peripheral portion. The base undercoat insulating film (5a) and gate insulating films (5b and 5c) for a CMOS block are made of the same oxide film. A stress resulting from a difference in thermal expansion coefficient between the SiGe layer as the base layer and the base undercoat insulating film 5a can be reduced, and a highly reliable BiCMOS device is realized.

    摘要翻译： 在双极晶体管块中，SiGe单晶的基极层（20a）和几乎100％的Si单晶的发射极层（26）依次层叠在集电极扩散层（9）上。 在基底层（20a）的两个边缘上设置有由多晶硅制成的基底底涂层绝缘膜（5a）和基底延伸电极（22）。 基底层（20a）具有与基底底涂层绝缘膜（5a）的厚度相等的周边部分和比周边部分厚的中心部分。 用于CMOS块的基底涂层绝缘膜（5a）和栅极绝缘膜（5b和5c）由相同的氧化物膜制成。 由于作为基底层的SiGe层与基底底涂层绝缘膜5a之间的热膨胀系数的差异导致的应力可以降低，并且实现了高可靠性的BiCMOS器件。

    Field-effect transistor, its manufacturing method, and complementary field-effect transistor
    3.
    发明申请
    Field-effect transistor, its manufacturing method, and complementary field-effect transistor 审中-公开
    场效应晶体管，其制造方法和互补场效应晶体管

    公开(公告)号：US20060145245A1

    公开(公告)日：2006-07-06

    申请号：US10544486

    申请日：2004-02-09

    申请人： Yoshihiro Hara ,  Takeshi Takagi

    发明人： Yoshihiro Hara ,  Takeshi Takagi

    IPC分类号： H01L29/76

    CPC分类号： H01L29/783 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823828 ,  H01L27/092

    摘要： A field effect transistor comprises: a semiconductor substrate; a semiconductor layer provided on the semiconductor substrate, the semiconductor layer including a body region which contains an impurity of a first conductivity type; a gate dielectric film provided on the semiconductor layer; a gate electrode provided on the gate dielectric film; and a source region and a drain region provided in the semiconductor layer at positions below the sides of the gate electrode, the source region and the drain region containing an impurity of a second conductivity type. The gate electrode and the body region are electrically short-circuited. In the semiconductor layer except for the source region and the drain region, at least part of a junction portion bordering on the source region or the drain region contains the impurity of the first conductivity type with a higher concentration than in the body region except for junction portions bordering on the source region and the drain region.

    摘要翻译： 场效应晶体管包括：半导体衬底; 设置在所述半导体衬底上的半导体层，所述半导体层包括含有第一导电类型杂质的体区; 设置在半导体层上的栅介质膜; 设置在栅极电介质膜上的栅电极; 以及源极区域和漏极区域，设置在半导体层中位于栅电极的侧面下方的位置处，源极区域和漏极区域包含第二导电类型的杂质。 栅电极和体区电气短路。 在除了源极区域和漏极区域之外的半导体层中，与源极区域或漏极区域接合的至少一部分接合部分含有比除了接合部分以外的体区域中的浓度高的第一导电型杂质 在源极区域和漏极区域上接合的部分。

    Semiconductor device
    4.
    发明授权
    Semiconductor device 失效
    半导体器件

    公开(公告)号：US06917075B2

    公开(公告)日：2005-07-12

    申请号：US10752409

    申请日：2004-01-07

    申请人： Akira Inoue ,  Akira Asai ,  Teruhito Ohnishi ,  Haruyuki Sorada ,  Yoshihiro Hara ,  Takeshi Takagi

    发明人： Akira Inoue ,  Akira Asai ,  Teruhito Ohnishi ,  Haruyuki Sorada ,  Yoshihiro Hara ,  Takeshi Takagi

    IPC分类号： H01L21/336 ,  H01L21/768 ,  H01L29/78 ,  H01L29/786 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

    CPC分类号： H01L29/66772 ,  H01L21/76895 ,  H01L29/783 ,  H01L29/78615 ,  H01L29/78621

    摘要： A semiconductor device and a method of fabricating the same according to this invention are such that: a gate insulator is formed over a predetermined region of a semiconductor substrate; a gate electrode is formed on the gate insulator; source and drain regions respectively formed in portions of the predetermined region that are situated on both sides of the gate electrode in plan view; a body region formed by a region of the predetermined region exclusive of the source and drain regions; and a contact electrically interconnecting the gate electrode and the body region, wherein a portion of the contact which is connected to the gate electrode is formed to intersect the gate electrode in plan view.

    摘要翻译： 根据本发明的半导体器件及其制造方法是：在半导体衬底的预定区域上形成栅极绝缘体; 栅电极形成在栅极绝缘体上; 源极和漏极区域分别形成在预定区域的位于栅极电极的两侧的部分中; 由不同于所述源极和漏极区域的所述预定区域的区域形成的体区; 以及使所述栅电极和所述体区域电连接的触点，其中，与所述栅电极连接的所述触点的一部分在平面图中形成为与所述栅电极相交。

    Semiconductor device
    7.
    发明授权
    Semiconductor device 失效
    半导体器件

    公开(公告)号：US06815735B2

    公开(公告)日：2004-11-09

    申请号：US10311267

    申请日：2002-12-13

    申请人： Akira Inoue ,  Takeshi Takagi ,  Yoshihiro Hara ,  Minoru Kubo

    发明人： Akira Inoue ,  Takeshi Takagi ,  Yoshihiro Hara ,  Minoru Kubo

    IPC分类号： H01L310328

    CPC分类号： H01L29/78696 ,  H01L29/1054 ,  H01L29/165 ,  H01L29/783 ,  H01L29/78606 ,  H01L29/78687 ,  H01L29/802

    摘要： A semiconductor layer 30 of a graded SiGe-HDTMOS is constructed of an upper Si film 12, an Si buffer layer 13, an Si1−xGex film 14 and an Si cap layer 15. The region between a source region 20a and drain region 20b of the semiconductor layer 30 includes a high concentration n-type Si body region 22 and an n Si region 23, an Si cap region 25 and an SiGe channel region 24. A Ge composition ratio x of the Si1−xGex film 14 is made to increase from the Si buffer layer 13 to the Si cap layer 15. For the p-type HDTMOS, the electron current component of the substrate current decreases.

    摘要翻译： 梯度SiGe-HDTMOS的半导体层30由上部Si膜12，Si缓冲层13，Si1-xGex膜14和Si覆盖层15构成。源区域20a和漏极区域20b之间的区域 半导体层30包括高浓度n型Si体区域22和n Si区域23，Si帽区域25和SiGe沟道区域24.使Si1-xGex膜14的Ge组成比x增加 从Si缓冲层13到Si覆盖层15.对于p型HDTMOS，衬底电流的电子电流分量降低。

    Semiconductor device and method for fabricating the same
    8.
    发明授权
    Semiconductor device and method for fabricating the same 有权
    半导体装置及其制造方法

    公开(公告)号：US06455364B1

    公开(公告)日：2002-09-24

    申请号：US09526686

    申请日：2000-03-15

    申请人： Akira Asai ,  Teruhito Oonishi ,  Takeshi Takagi ,  Tohru Saitoh ,  Yoshihiro Hara ,  Koichiro Yuki ,  Katsuya Nozawa ,  Yoshihiko Kanzawa ,  Koji Katayama ,  Yo Ichikawa

    发明人： Akira Asai ,  Teruhito Oonishi ,  Takeshi Takagi ,  Tohru Saitoh ,  Yoshihiro Hara ,  Koichiro Yuki ,  Katsuya Nozawa ,  Yoshihiko Kanzawa ,  Koji Katayama ,  Yo Ichikawa

    IPC分类号： H01L218249

    CPC分类号： H01L29/66242 ,  H01L21/763 ,  H01L21/8249 ,  H01L27/0623 ,  H01L29/7378

    摘要： In the method for fabricating a semiconductor device of the present invention, a collector layer of a first conductivity type is formed in a region of a semiconductor substrate sandwiched by device isolation. A collector opening is formed through a first insulating layer deposited on the semiconductor substrate so that the range of the collector opening covers the collector layer and part of the device isolation. A semiconductor layer of a second conductivity type as an external base is formed on a portion of the semiconductor substrate located inside the collector opening, while junction leak prevention layers of the same conductivity type as the external base are formed in the semiconductor substrate. Thus, the active region is narrower than the collector opening reducing the transistor area, while minimizing junction leak.

    摘要翻译： 在本发明的半导体装置的制造方法中，在被器件分离夹持的半导体基板的区域中形成有第一导电型的集电极层。 通过沉积在半导体衬底上的第一绝缘层形成集电极开口，使得集电极开口的范围覆盖集电极层和器件隔离的一部分。 在位于集电体开口内部的半导体基板的一部分上形成作为外部基底的第二导电类型的半导体层，同时在半导体衬底中形成与外部基底相同的导电类型的防漏层。 因此，有源区域比集电极开口窄，减小晶体管面积，同时最小化结漏电。

    Semiconductor device and method for fabricating the same
    10.
    发明授权
    Semiconductor device and method for fabricating the same 有权
    半导体装置及其制造方法

    公开(公告)号：US06713790B2

    公开(公告)日：2004-03-30

    申请号：US10212799

    申请日：2002-08-07

    申请人： Akira Asai ,  Teruhito Oonishi ,  Takeshi Takagi ,  Tohru Saitoh ,  Yoshihiro Hara ,  Koichiro Yuki ,  Katsuya Nozawa ,  Yoshihiko Kanzawa ,  Koji Katayama ,  Yo Ichikawa

    发明人： Akira Asai ,  Teruhito Oonishi ,  Takeshi Takagi ,  Tohru Saitoh ,  Yoshihiro Hara ,  Koichiro Yuki ,  Katsuya Nozawa ,  Yoshihiko Kanzawa ,  Koji Katayama ,  Yo Ichikawa

    IPC分类号： H01L31072

    CPC分类号： H01L29/66242 ,  H01L21/763 ,  H01L21/8249 ,  H01L27/0623 ,  H01L29/7378

    摘要： In the method for fabricating a semiconductor device of the present invention, a collector layer of a first conductivity type is formed in a region of a semiconductor substrate sandwiched by device isolation. A collector opening is formed through a first insulating layer deposited on the semiconductor substrate so that the range of the collector opening covers the collector layer and part of the device isolation. A semiconductor layer of a second conductivity type as an external base is formed on a portion of the semiconductor substrate located inside the collector opening, while junction leak prevention layers of the same conductivity type as the external base are formed in the semiconductor substrate. Thus, the active region is narrower than the collector opening reducing the transistor area, while minimizing junction leak.

    摘要翻译： 在本发明的半导体装置的制造方法中，在被器件分离夹持的半导体基板的区域中形成有第一导电型的集电极层。 通过沉积在半导体衬底上的第一绝缘层形成集电极开口，使得集电极开口的范围覆盖集电极层和器件隔离的一部分。 在位于集电体开口内部的半导体基板的一部分上形成作为外部基底的第二导电类型的半导体层，同时在半导体衬底中形成与外部基底相同的导电类型的防漏层。 因此，有源区域比集电极开口窄，减小晶体管面积，同时最小化结漏电。