公开(公告)号：US06211535B1

公开(公告)日：2001-04-03

申请号：US09426947

申请日：1999-10-26

申请人： Yoshitaka Yamamoto ,  Hideomi Suzawa ,  Katunobu Awane ,  Fumiaki Funada ,  Shunpei Yamazaki

发明人： Yoshitaka Yamamoto ,  Hideomi Suzawa ,  Katunobu Awane ,  Fumiaki Funada ,  Shunpei Yamazaki

IPC分类号： H01L2348

CPC分类号： H01L29/66757 ,  H01L29/78621 ,  H01L29/78675

摘要： Method of forming an active layer for TFTs without plasma-damaging the side surfaces of the active layer. The method is started with forming a crystalline silicon film on a glass substrate. A resist mask is placed on the silicon film. The silicon film is etched with an etchant gas consisting mainly of a halogen fluoride gas, thus forming the active layer. During this process, the etchant gas is not changed into a plasma to prevent the side surfaces of the active layer from being plasma-damaged. ClF3 can be used as the halogen fluoride gas.

摘要翻译： 形成TFT的有源层的方法，不会对有源层的侧表面造成等离子体损害。 该方法开始于在玻璃基板上形成结晶硅膜。 将抗蚀剂掩模放置在硅膜上。 用主要由卤素氟化物气体组成的蚀刻剂气体蚀刻硅膜，从而形成活性层。 在该过程中，蚀刻剂气体不会变成等离子体，以防止有源层的侧表面被等离子体损坏。 ClF3可用作卤素氟化物气体。

公开(公告)号：US5815226A

公开(公告)日：1998-09-29

申请号：US808453

申请日：1997-02-28

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Naoaki Yamaguchi ,  Katunobu Awane ,  Fumiaki Funada ,  Yoshitaka Yamamoto

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Naoaki Yamaguchi ,  Katunobu Awane ,  Fumiaki Funada ,  Yoshitaka Yamamoto

IPC分类号： G02F1/1362 ,  H01L21/336 ,  H01L21/77 ,  H01L21/84 ,  H01L27/12 ,  H01L29/786 ,  G02F1/1333 ,  G02F1/1343

CPC分类号： G02F1/136209 ,  G02F1/136213 ,  H01L27/1255 ,  H01L29/66757 ,  H01L29/78621

摘要： An active matrix liquid crystal display having a high aperture ratio is provided. Retaining capacitors are created between a black matrix and pixel electrodes via a dielectric layer made from an organic resinous material or inorganic material. Those regions of the black matrix which cover TFTs are fully utilized. Therefore, wider area can be used to display an image than heretofore. In the present invention, the difference in relative dielectric constant between different dielectric layers is employed. Therefore, retaining capacitors can be created without the need to take account of parasitic capacitance.

公开(公告)号：US06118506A

公开(公告)日：2000-09-12

申请号：US161161

申请日：1998-09-25

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Naoaki Yamaguchi ,  Katunobu Awane ,  Funiaki Funada ,  Yoshitaka Yamamoto

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Naoaki Yamaguchi ,  Katunobu Awane ,  Funiaki Funada ,  Yoshitaka Yamamoto

IPC分类号： G02F1/1362 ,  H01L21/336 ,  H01L21/77 ,  H01L21/84 ,  H01L27/12 ,  H01L29/786 ,  G02F1/1333 ,  G02F1/1343

CPC分类号： G02F1/136209 ,  G02F1/136213 ,  H01L27/1255 ,  H01L29/66757 ,  H01L29/78621

摘要： An active matrix liquid crystal display having a high aperture ratio is provided. Retaining capacitors are created between a black matrix and pixel electrodes via a dielectric layer made from an organic resinous material or inorganic material. Those regions of the black matrix which cover TFTs are fully utilized. Therefore, wider area can be used to display an image than heretofore. In the present invention, the difference in relative dielectric constant between different dielectric layers is employed. Therefore, retaining capacitors can be created without the need to take account of parasitic capacitance.

摘要翻译： 提供了具有高开口率的有源矩阵液晶显示器。 通过由有机树脂材料或无机材料制成的电介质层，在黑矩阵和像素电极之间产生保持电容。 覆盖TFT的黑矩阵的那些区域被充分利用。 因此，可以使用更宽的面积来显示比迄今为止的图像。 在本发明中，采用不同介电层之间的相对介电常数差。 因此，可以创建保持电容器，而不需要考虑寄生电容。

公开(公告)号：US5926735A

公开(公告)日：1999-07-20

申请号：US802685

申请日：1997-02-19

申请人： Shunpei Yamazaki ,  Naoaki Yamaguchi ,  Yuugo Goto ,  Satoshi Teramoto ,  Katunobu Awane ,  Yoshitaka Yamamoto ,  Toshimasa Hamada

发明人： Shunpei Yamazaki ,  Naoaki Yamaguchi ,  Yuugo Goto ,  Satoshi Teramoto ,  Katunobu Awane ,  Yoshitaka Yamamoto ,  Toshimasa Hamada

IPC分类号： H01L21/28 ,  H01L21/336 ,  H01L21/768 ,  H01L21/77 ,  H01L21/84 ,  H01L21/4763

CPC分类号： H01L29/66757 ,  H01L21/28079 ,  H01L21/76802 ,  H01L27/124

摘要： There is disclosed a manufacturing method of highly integrated circuits with thin-film transistors (TFTs) for use as peripheral driver circuitry in active-matrix liquid crystal display (LCD) panel with a pixel array each having a charge transfer control TFT, capable of facilitating formation of contact holes otherwise being difficult in cases where an anode oxide film is formed on gate electrodes of TFTs and lead wires both of which are made of anodizable metal, such as aluminum. The method includes execution of anodization while causing a resist mask to be disposed on part of the lead wire and electrode made of aluminum, thereby partly eliminating formation of the anode oxide film on the lead wire and electrode. At a later step of fabrication, each contact is formed by use of such portion that has no anode oxide film formed thereon. This may allow aluminum to be employed as lead wires while enabling easy fabrication of contacts therefor.

摘要翻译： 公开了一种具有薄膜晶体管（TFT）的高度集成电路的制造方法，用作有源矩阵液晶显示器（LCD）面板中的外围驱动电路，每个像素阵列均具有电荷转移控制TFT，能够促进 在由诸如铝的阳极氧化金属制成的TFT和引线的栅电极上形成阳极氧化膜的情况下，形成接触孔是困难的。 该方法包括执行阳极氧化，同时使抗蚀剂掩模设置在由铝制成的引线和电极的一部分上，从而部分地消除在引线和电极上形成阳极氧化膜。 在后面的制造步骤中，通过使用其上没有形成阳极氧化膜的部分形成每个接触。 这可以允许使用铝作为引线，同时能够容易地制造用于其的触点。

公开(公告)号：US06201591B1

公开(公告)日：2001-03-13

申请号：US09425117

申请日：1999-10-20

申请人： Katunobu Awane ,  Shunpei Yamazaki

发明人： Katunobu Awane ,  Shunpei Yamazaki

IPC分类号： G02F11345

CPC分类号： G02F1/13454 ,  G02F1/133351

摘要： In forming four liquid crystal panels on a glass substrate, layout is so made that peripheral driving circuit areas of the respective panels are opposed to each other. With this layout, the peripheral driving circuit areas, which are prone to be affected by particles, are prevented from existing in regions close to the perimeter of the glass substrate. This allows liquid crystal panels to be produced at a high yield, as well as enables efficient use of the glass substrate.

摘要翻译： 在玻璃基板上形成四个液晶面板时，使得各个面板的外围驱动电路区域彼此相对的布局。 利用该布局，防止容易受到颗粒影响的外围驱动电路区域存在于靠近玻璃基板的周边的区域中。 这允许以高产率制造液晶面板，并且能够有效地使用玻璃基板。

公开(公告)号：US06327015B2

公开(公告)日：2001-12-04

申请号：US09774815

申请日：2001-01-30

申请人： Katunobu Awane ,  Shunpei Yamazaki

发明人： Katunobu Awane ,  Shunpei Yamazaki

IPC分类号： G02F11333

CPC分类号： G02F1/13454 ,  G02F1/133351

摘要： In forming four liquid crystal panels on a glass substrate, layout is so made that peripheral driving circuit areas of the respective panels are opposed to each other. With this layout, the peripheral driving circuit areas, which are prone to be affected by particles, are prevented from existing in regions close to the perimeter of the glass substrate. This allows liquid crystal panels to be produced at a high yield, as well as enables efficient use of the glass substrate.

摘要翻译： 在玻璃基板上形成四个液晶面板时，使得各个面板的外围驱动电路区域彼此相对的布局。 利用该布局，防止容易受到颗粒影响的外围驱动电路区域存在于靠近玻璃基板的周边的区域中。 这允许以高产率制造液晶面板，并且能够有效地使用玻璃基板。

公开(公告)号：US5982469A

公开(公告)日：1999-11-09

申请号：US604548

申请日：1996-02-21

申请人： Katunobu Awane ,  Shunpei Yamazaki

发明人： Katunobu Awane ,  Shunpei Yamazaki

IPC分类号： G02F1/136 ,  G02F1/13 ,  G02F1/1333 ,  G02F1/1362 ,  G02F1/1368 ,  H01L29/786 ,  G02F1/1345

CPC分类号： G02F1/13454 ,  G02F1/133351

摘要： In forming four liquid crystal panels on a glass substrate, layout is so made that peripheral driving circuit areas of the respective panels are opposed to each other. With this layout, the peripheral driving circuit areas, which are prone to be affected by particles, are prevented from existing in regions close to the perimeter of the glass substrate. This allows liquid crystal panels to be produced at a high yield, as well as enables efficient use of the glass substrate.

摘要翻译： 在玻璃基板上形成四个液晶面板时，使得各个面板的外围驱动电路区域彼此相对的布局。 利用该布局，防止容易受到颗粒影响的外围驱动电路区域存在于靠近玻璃基板的周边的区域中。 这允许以高产率制造液晶面板，并且能够有效地使用玻璃基板。

公开(公告)号：US08735889B2

公开(公告)日：2014-05-27

申请号：US13286280

申请日：2011-11-01

申请人： Shunpei Yamazaki ,  Hideomi Suzawa ,  Yoshihiro Kusuyama ,  Koji Ono ,  Jun Koyama

发明人： Shunpei Yamazaki ,  Hideomi Suzawa ,  Yoshihiro Kusuyama ,  Koji Ono ,  Jun Koyama

IPC分类号： H01L29/04

CPC分类号： H01L21/4846 ,  G02F1/13454 ,  G02F1/13458 ,  G02F1/136286 ,  G02F2001/13629 ,  G02F2001/136295 ,  H01L21/02367 ,  H01L27/12 ,  H01L27/124 ,  H01L27/1277 ,  H01L29/42384 ,  H01L29/4908 ,  H01L29/78621 ,  H01L29/78627

摘要： There are provided a structure of a semiconductor device in which low power consumption is realized even in a case where a size of a display region is increased to be a large size screen and a manufacturing method thereof. A gate electrode in a pixel portion is formed as a three layered structure of a material film containing mainly W, a material film containing mainly Al, and a material film containing mainly Ti to reduce a wiring resistance. A wiring is etched using an IPC etching apparatus. The gate electrode has a taper shape and the width of a region which becomes the taper shape is set to be 1 μm or more.

摘要翻译： 提供了即使在将显示区域的尺寸增加到大尺寸屏幕的情况下也实现低功耗的半导体器件的结构及其制造方法。 像素部分中的栅电极形成为主要包含W的材料膜，主要包含Al的材料膜和主要包含Ti的材料膜以降低布线电阻的三层结构。 使用IPC蚀刻装置蚀刻布线。 栅电极为锥形，成为锥形的区域的宽度为1μm以上。

公开(公告)号：US08461596B2

公开(公告)日：2013-06-11

申请号：US13288300

申请日：2011-11-03

申请人： Hideomi Suzawa ,  Yoshihiro Kusuyama ,  Shunpei Yamazaki

发明人： Hideomi Suzawa ,  Yoshihiro Kusuyama ,  Shunpei Yamazaki

IPC分类号： H01L27/14 ,  H01L21/00

CPC分类号： H01L29/78621 ,  G02F1/1368 ,  H01L27/124 ,  H01L27/1244 ,  H01L27/1288 ,  H01L29/06 ,  H01L29/66765 ,  H01L29/78669

摘要： The present invention has an object to provide an active-matrix liquid crystal display device that realizes the improvement in productivity as well as in yield. In the present invention, a laminate film comprising the conductive film comprising metallic material and the second amorphous semiconductor film containing an impurity element of one conductivity type and the amorphous semiconductor film is selectively etched with the same etching gas to form a side edge of the first amorphous semiconductor film 1001 into a taper shape. Thereby, a coverage problem of a pixel electrode 1003 can be solved and an inverse stagger type TFT can be completed with three photomask.

摘要翻译： 本发明的目的是提供一种实现生产率和产量提高的有源矩阵液晶显示装置。 在本发明中，使用相同的蚀刻气体选择性地蚀刻包括含有金属材料的导电膜和含有一种导电类型的杂质元素的第二非晶半导体膜和非晶半导体膜的层叠膜，以形成第一 非晶半导体膜1001成锥形。 由此，可以解决像素电极1003的覆盖问题，并且可以用三个光掩模来完成反交错型TFT。

公开(公告)号：US20120326143A1

公开(公告)日：2012-12-27

申请号：US13530392

申请日：2012-06-22

申请人： Takuya Tsurume ,  Hideomi Suzawa ,  Shunpei Yamazaki

发明人： Takuya Tsurume ,  Hideomi Suzawa ,  Shunpei Yamazaki

IPC分类号： H01L33/40 ,  H01L29/12

CPC分类号： H01L27/3246 ,  H01L27/1225 ,  H01L27/3262 ,  H01L51/5237 ,  H01L51/5259

摘要： A light-emitting device in which reduction in performance due to moisture is suppressed is provided. The light-emitting device has a structure in which a partition having a porous structure surrounds each of light-emitting elements. The partition having a porous structure physically adsorbs moisture; therefore, in the light-emitting device, the partition functions as a hygroscopic film at a portion extremely close to the light-emitting element, so that moisture or water vapor remaining in the light-emitting device or entering from the outside can be effectively adsorbed. Thus, reduction in performance of the light-emitting device due to moisture or water vapor can be effectively suppressed.

摘要翻译： 提供抑制湿气性能下降的发光装置。 发光装置具有其中具有多孔结构的分隔件围绕每个发光元件的结构。 具有多孔结构的分隔物物理吸附水分; 因此，在发光装置中，隔板在与发光元件非常接近的部分处起吸湿性的作用，从而能够有效地吸附残留在发光元件中或从外部进入的水分或水蒸汽 。 因此，可以有效地抑制由于水分或水蒸气导致的发光装置的性能的降低。