公开(公告)号：US08698315B2

公开(公告)日：2014-04-15

申请号：US13596859

申请日：2012-08-28

申请人： Yoshiyuki Hata ,  Yutaka Nonomura ,  Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yoshiteru Omura

发明人： Yoshiyuki Hata ,  Yutaka Nonomura ,  Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yoshiteru Omura

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： B81C1/00825 ,  B81B2201/0235 ,  B81B2203/033 ,  B81B2203/0392 ,  G01C19/5762 ,  G01C19/5769 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/084

摘要： When forming a trench of a narrow width in a thick semiconductor layer, a trench can be formed without the occurrence of semiconductor residue. In this Specification, a semiconductor device in which a trench is formed in a semiconductor layer is disclosed. In the semiconductor layer of the semiconductor device, a compensation pattern which compensates for sudden changes in the width of the trench is formed at a place at which the width of the trench changes suddenly. In the semiconductor layer of the above-described semiconductor device, since a compensation pattern is formed at a place at which the trench width changes suddenly, in the case where forming the trench using a deep RIE method, the occurrence of steep inclined portions arising from semiconductor residue can be prevented. Consequently, when forming a trench of a narrow width in a thick semiconductor layer, the occurrence of semiconductor residue can be prevented.

摘要翻译： 当在厚半导体层中形成窄宽度的沟槽时，可以形成沟槽而不会发生半导体残渣。 在本说明书中，公开了在半导体层中形成沟槽的半导体器件。 在半导体器件的半导体层中，在沟槽宽度急剧变化的地方形成补偿沟槽宽度突然变化的补偿图案。 在上述半导体器件的半导体层中，由于在沟槽宽度突然变化的地方形成补偿图案，所以在使用深RIE法形成沟槽的情况下，由于 可以防止半导体残渣。 因此，当在厚半导体层中形成窄宽度的沟槽时，可以防止发生半导体残渣。

公开(公告)号：US08816451B2

公开(公告)日：2014-08-26

申请号：US13035186

申请日：2011-02-25

申请人： Hirofumi Funabashi ,  Yutaka Nonomura ,  Yoshiyuki Hata ,  Motohiro Fujiyoshi ,  Teruhisa Akashi ,  Yoshiteru Omura

发明人： Hirofumi Funabashi ,  Yutaka Nonomura ,  Yoshiyuki Hata ,  Motohiro Fujiyoshi ,  Teruhisa Akashi ,  Yoshiteru Omura

IPC分类号： H01L29/84 ,  H01L21/02

CPC分类号： H01L21/02 ,  H01L29/84

摘要： In a MEMS structure, a first trench which penetrates the first layer, the second layer and the third layer is formed, and a second trench which penetrates the fifth layer, the forth layer and the third layer is formed. The first trench forms a first part of an outline of the movable portion in a view along the stacked direction. The second trench forms a second part of the outline of the movable portion in the view along the stacked direction. At least a part of the first trench overlaps with the first extending portion in the view along the stacked direction.

摘要翻译： 在MEMS结构中，形成贯穿第一层，第二层和第三层的第一沟槽，形成贯穿第五层，第四层和第三层的第二沟槽。 第一沟槽沿着堆叠的方向形成可动部分的轮廓的第一部分。 第二沟槽沿着堆叠方向在视图中形成可动部分的轮廓的第二部分。 第一沟槽的至少一部分沿着堆叠方向在视图中与第一延伸部分重叠。

公开(公告)号：US08707784B2

公开(公告)日：2014-04-29

申请号：US13047274

申请日：2011-03-14

申请人： Teruhisa Akashi ,  Yutaka Nonomura ,  Motohiro Fujiyoshi ,  Hirofumi Funabashi ,  Yoshiyuki Hata ,  Yoshiteru Omura

发明人： Teruhisa Akashi ,  Yutaka Nonomura ,  Motohiro Fujiyoshi ,  Hirofumi Funabashi ,  Yoshiyuki Hata ,  Yoshiteru Omura

IPC分类号： G01C19/56

CPC分类号： G01C19/574 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

摘要： A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.

摘要翻译： 具有垂直于基板表面移动的第一可移动部分和平行于基板表面移动的第二可移动部分的结构通过采用用于第一部分和第二部分的嵌套结构的层压结构实现。 层叠结构设置有内部和外部可移动部分。 y弹簧连接到外部，并且外部部分通过y弹簧以与外部基板隔开的高度在y轴方向上支撑。 z弹簧连接到内部，并且内部通过z弹簧以与外基板隔开的高度在z轴方向上支撑。 外部部分和z弹簧与基板处于不同的高度，并且z弹簧在与外部可移动部分分开的高度处超过外部部分。

公开(公告)号：US08368196B2

公开(公告)日：2013-02-05

申请号：US12710571

申请日：2010-02-23

申请人： Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yutaka Nonomura

发明人： Teruhisa Akashi ,  Hirofumi Funabashi ,  Motohiro Fujiyoshi ,  Yutaka Nonomura

IPC分类号： H01L23/02

CPC分类号： B81B3/001 ,  B81B2201/025 ,  G01P15/125 ,  G01P15/18

摘要： The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.

摘要翻译： 微型装置包括支撑基板和被配置为相对于支撑基板移动的可移动结构。 支撑基板和可移动结构中的至少一个设置有至少一个朝着支撑基板和可移动结构中的另一个突出的突起。 此外，延伸到支撑基板和可移动结构中的一个的基部与所述至少一个突起一体设置。 通过这种构造，突起被基部牢固地保持，并且因此即使在支撑基板和可移动结构经由突起重复碰撞之后也能够防止突起的分离。

公开(公告)号：US08365597B2

公开(公告)日：2013-02-05

申请号：US12723971

申请日：2010-03-15

申请人： Teruhisa Akashi ,  Yutaka Nonomura ,  Motohiro Fujiyoshi ,  Hirofumi Funabashi

发明人： Teruhisa Akashi ,  Yutaka Nonomura ,  Motohiro Fujiyoshi ,  Hirofumi Funabashi

IPC分类号： G01P15/00

CPC分类号： G01C19/5719 ,  G01P2015/082

摘要： An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion.

摘要翻译： 公开了一种具有沿x轴方向和z轴方向移动的第二可移动部分和仅沿着z轴方向移动的第一可动部分的装置。 该装置设置有固定到支撑部分的固定部分，连接到固定部分的多个第一弹簧部分，连接到多个第一弹簧部分的第一可动部分，连接到第一可动部分的第二弹簧部分， 以及与第二弹簧部连接的第二可动部。 多个第一弹簧部分中的每一个在z轴方向上的弹簧常数分别低于多个第一弹簧部分在x轴和y轴方向上的弹簧常数，弹簧常数 x轴方向上的第二弹簧部分分别低于第二弹簧部分在y轴和z轴方向上的弹簧常数。 第一可移动部分被配置为沿着z轴移动但不沿着x轴和y轴移动，也不围绕z轴旋转，并且第二可移动部分构造成沿x轴移动 和z轴相对于支撑部分。

公开(公告)号：US10114212B2

公开(公告)日：2018-10-30

申请号：US13899077

申请日：2013-05-21

申请人： Isao Aoyagi ,  Kanae Murata ,  Takashi Ozaki ,  Norio Fujitsuka ,  Yutaka Nonomura ,  Teruhisa Akashi

发明人： Isao Aoyagi ,  Kanae Murata ,  Takashi Ozaki ,  Norio Fujitsuka ,  Yutaka Nonomura ,  Teruhisa Akashi

IPC分类号： G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  B81B5/00 ,  H04N1/113 ,  G02B7/182 ,  G02B6/35

摘要： The present application discloses a deflector including a substrate portion, a movable portion, a reflective portion, a support portion, and a moving mechanism. The movable portion is supported by a first end of the support portion. A second end of the support portion is supported by the substrate portion. An end of the movable portion is capable of coming into contact with the substrate portion. The reflective portion is formed on the movable portion. The moving mechanism is capable of driving the movable portion so as to bring the movable portion into at least any one of a first state, a second state, a third state, and a fourth state.

公开(公告)号：US07119362B2

公开(公告)日：2006-10-10

申请号：US10326663

申请日：2002-12-23

申请人： Ryuji Kono ,  Makoto Kitano ,  Hideo Miura ,  Hiroyuki Ota ,  Yoshishige Endo ,  Takeshi Harada ,  Masatoshi Kanamaru ,  Teruhisa Akashi ,  Atsushi Hosogane ,  Akihiko Ariga ,  Naoto Ban

发明人： Ryuji Kono ,  Makoto Kitano ,  Hideo Miura ,  Hiroyuki Ota ,  Yoshishige Endo ,  Takeshi Harada ,  Masatoshi Kanamaru ,  Teruhisa Akashi ,  Atsushi Hosogane ,  Akihiko Ariga ,  Naoto Ban

IPC分类号： H01L23/58

CPC分类号： G01R1/07314 ,  G01R1/06744 ,  G01R3/00 ,  G01R31/2863

摘要： In an electric characteristic testing process corresponding to a process of the semiconductor apparatus manufacturing processes, in order to test a large area of the electrode pad of the body to be tested in a lump, an electric characteristic testing is performed by pressing a testing structure provided with electrically independent projections having a number equal to a number of conductor portions to be tested formed on an area to be tested of a body to be tested to the body to be tested.

公开(公告)号：US07905149B2

公开(公告)日：2011-03-15

申请号：US12175347

申请日：2008-07-17

申请人： Kengo Suzuki ,  Takeshi Harada ,  Yasuo Osone ,  Masahide Hayashi ,  Teruhisa Akashi

发明人： Kengo Suzuki ,  Takeshi Harada ,  Yasuo Osone ,  Masahide Hayashi ,  Teruhisa Akashi

IPC分类号： G01B7/16

CPC分类号： G01P15/0802 ,  B81B2207/096 ,  B81C1/00301 ,  G01C19/5719

摘要： There is provided a physical sensor which ensures long-term reliability and can be miniaturized and increased in density, and a method of producing the same. A physical sensor includes a supporting substrate, an element substrate that includes a sensor element and is joined to the supporting substrate through an insulating layer, a glass cap that covers an area of the sensor element and is joined to the element substrate, and a built-in electrode that is electrically connected to the sensor element. The built-in electrode is formed in a through hole passing through the element substrate, the insulating layer and the supporting substrate. A portion of the glass cap that covers an area of the built-in electrode is anodically bonded to the element substrate.

摘要翻译： 提供了一种物理传感器，其确保了长期可靠性并且可以小型化和增加密度，以及其制造方法。 物理传感器包括支撑基板，包括传感器元件并通过绝缘层与支撑基板接合的元件基板，覆盖传感器元件的区域并与元件基板接合的玻璃盖，以及内置 电连接到传感器元件。 内置电极形成在穿过元件基板，绝缘层和支撑基板的通孔中。 覆盖内置电极的区域的玻璃帽的一部分阳极接合到元件基板。

公开(公告)号：US20070062282A1

公开(公告)日：2007-03-22

申请号：US11516927

申请日：2006-09-06

申请人： Teruhisa Akashi ,  Ryoji Okada ,  Masahide Hayashi ,  Kengo Suzuki

发明人： Teruhisa Akashi ,  Ryoji Okada ,  Masahide Hayashi ,  Kengo Suzuki

IPC分类号： G01P15/08

CPC分类号： G01P15/0802 ,  G01C19/5719 ,  G01P15/097 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/082

摘要： A sensor structure using vibrating sensor elements which can detect an angular rate and accelerations in two axes at the same time is provided. 2 sets of vibration units which vibrate in out-of-phase mode (tunning-fork vibration) and include four vibrating sensor elements of the approximately same shape supported on a substrate in a vibratile state are provided and the vibrating sensor elements are disposed so that vibration axes of the vibration units cross each other at right angles. Each of the vibrating sensor elements includes a pair of detection units and adjustment units for adjusting a vibration frequency. The vibrating sensor elements constitute a combined sensor having supporting structure for supporting the vibrating sensor elements independently so that the vibrating sensor elements do not interfere with each other.

摘要翻译： 提供了使用能够同时检测两个轴的角速度和加速度的振动传感器元件的传感器结构。 提供了2组以异相模式（调音叉振动）振动的振动单元，并且包括以振动状态支撑在基板上的大致相同形状的四个振动传感器元件，并且将振动传感器元件设置成 振动单元的振动轴线成直角交叉。 每个振动传感器元件包括一对检测单元和用于调节振动频率的调节单元。 振动传感器元件构成具有用于独立地支撑振动传感器元件的支撑结构的组合传感器，使得振动传感器元件彼此不干涉。

公开(公告)号：US07662340B2

公开(公告)日：2010-02-16

申请号：US10500385

申请日：2001-12-28

申请人： Yoshihiro Nagaoka ,  Naruo Watanabe ,  Teruhisa Akashi ,  Yuji Miyahara ,  Kei Takenaka ,  Tomoki Ohashi

发明人： Yoshihiro Nagaoka ,  Naruo Watanabe ,  Teruhisa Akashi ,  Yuji Miyahara ,  Kei Takenaka ,  Tomoki Ohashi

IPC分类号： G01N9/30

CPC分类号： G01N35/025 ,  B01L3/502738 ,  B01L2200/0621 ,  B01L2300/0636 ,  B01L2300/0816 ,  B01L2400/0409 ,  B01L2400/0622 ,  B01L2400/0694 ,  G01N21/07 ,  G01N35/1079 ,  G01N2035/00504 ,  G01N2035/0449 ,  G01N2035/0451 ,  Y10T436/111666

摘要： The invention is achieved by feeding a reagent using centrifugal force, without providing a valve for controlling the flow rate of the reagent in the reagent flow path.A chemical analyzer is used which comprises a structure that is supported so as to be rotatable, said structure comprising a capturing section for capturing specific chemical substances from a specimen, specimen containers and reagent containers including washing solution containers.The washing solution containers and the other reagent containers comprise a liquid outlet port which is provided at the side opposite to the rotation center side, and the capturing section is held in the structure, closer to the outer periphery side than the specimen container and washing solution and the other reagent containers, and a flow path is provided, with a bent flow path portion which returns to the rotation center side, and which at a particular stage prevents the flow of liquid from the washing solution containers to the capturing section, and at another stage, forms the liquid flow due to the centrifugal force from the rotation of the structure.

摘要翻译： 本发明通过使用离心力供给试剂而不设置用于控制试剂流路中的试剂的流量的阀来实现。 使用化学分析器，其包括被支撑为可旋转的结构，所述结构包括用于从样品捕获特定化学物质的捕获部分，样本容器和包括洗涤溶液容器的试剂容器。 洗涤溶液容器和其他试剂容器包括设置在与旋转中心侧相反的一侧的液体出口，并且捕获部分保持在结构中，比检体容器和洗涤液更靠近外周侧 和其他试剂容器以及流路，其具有返回到旋转中心侧的弯曲流路部分，并且在特定阶段防止液体从洗涤溶液容器流向捕获部分，并且在 另一个阶段由于结构旋转的离心力而形成液体流动。