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17 条记录 (耗时 0.014 秒)

    RETICLE TRANSMITTANCE MEASUREMENT METHOD, PROJECTION EXPOSURE DEVICE, AND PROJECTION EXPOSURE METHOD
    2.
    发明申请
    RETICLE TRANSMITTANCE MEASUREMENT METHOD, PROJECTION EXPOSURE DEVICE, AND PROJECTION EXPOSURE METHOD 有权
    反馈传输测量方法，投影曝光装置和投影曝光方法

    公开(公告)号：US20160091391A1

    公开(公告)日：2016-03-31

    申请号：US14859781

    申请日：2015-09-21

    申请人： SEIKO INSTRUMENTS INC.

    发明人： Michihiro MURATA ,  Yutaka GOMI

    IPC分类号： G01M11/02 ,  G03F7/20 ,  G01N21/59

    CPC分类号： G03F7/20 ,  G01M11/0285 ,  G01N21/956 ,  G01N2021/5919 ,  G01N2021/95676 ,  G03F7/70666 ,  G03F7/70941

    摘要： When a reticle is used first, the reticle is actually loaded in a projection exposure device and measured by one of oblique measurement and random measurement, thereby avoiding the fear of uneven sampling and determining the reticle transmittance of the entire reticle as the parent population, without increasing the, sampling count. The same effect can be obtained by making the measurement spot size, which is fixed in general, variable and by changing the angle of incidence in relation to the measurement spot size.

    摘要翻译： 当首先使用掩模版时，将掩模版实际装载在投影曝光装置中，并通过倾斜测量和随机测量之一进行测量，从而避免对采样不均匀的担心，并确定作为母体的整个掩模版的掩模版透射率，没有 增加抽样计数。 通过使测量点尺寸通常变化并且通过改变与测量点尺寸相关的入射角，可以获得相同的效果。

    Optical tomography of small objects using parallel ray illumination and post-specimen optical magnification
    6.
    发明申请
    Optical tomography of small objects using parallel ray illumination and post-specimen optical magnification 有权
    使用平行射线照明和样本后光学放大的小物体的光学层析成像

    公开(公告)号：US20040001618A1

    公开(公告)日：2004-01-01

    申请号：US10308309

    申请日：2002-12-03

    发明人： Roger H. Johnson ,  Alan C. Nelson

    IPC分类号： G06K009/00

    CPC分类号： G01N21/4795 ,  G01N15/14 ,  G01N15/147 ,  G01N21/0303 ,  G01N21/05 ,  G01N21/6428 ,  G01N21/6456 ,  G01N23/046 ,  G01N2021/0307 ,  G01N2021/0392 ,  G01N2021/052 ,  G01N2021/1772 ,  G01N2021/1787 ,  G01N2021/5919 ,  G01N2021/5923 ,  G01N2021/5957 ,  G01N2201/0696 ,  G01N2223/419 ,  G06T11/006

    摘要： A parallel-beam optical tomography system for imaging an object of interest includes a parallel ray beam radiation source that illuminates the object of interest with a plurality of parallel radiation beams. After passing through the object of interest the pattern of transmitted or emitted radiation intensities is magnified by a post specimen optical element or elements. An object containing tube is located within an outer tube, wherein the object of interest is held within or flows through the object containing tube. A motor may be coupled to rotate and/or translate the object containing tube to present differing views of the object of interest. One or more detector arrays are located to receive the emerging radiation from the post specimen magnifying optic. Two- or three-dimensional images may be reconstructed from the magnified parallel projection data.

    摘要翻译： 用于对感兴趣对象进行成像的平行光束光学层析成像系统包括用多个平行辐射束照亮感兴趣对象的平行射线束辐射源。 在通过感兴趣的对象之后，透射或发射的辐射强度的图案被后检体光学元件放大。 物体容纳管位于外管内，其中感兴趣的物体保持在物体容纳管内或流过物体容纳管。 马达可以联接以旋转和/或平移物体容纳管，以呈现感兴趣物体的不同视图。 定位一个或多个检测器阵列以接收来自后检体放大镜的新出射的辐射。 可以从放大的平行投影数据重构二维或三维图像。

    Video densitometer with determination of color composition
    7.
    发明授权
    Video densitometer with determination of color composition 失效
    视频密度计与色彩组成确定

    公开(公告)号：US5420628A

    公开(公告)日：1995-05-30

    申请号：US255534

    申请日：1994-06-03

    申请人： Lawrence L. Poulsen ,  Daniel M. Ziegler

    发明人： Lawrence L. Poulsen ,  Daniel M. Ziegler

    IPC分类号： G01N21/59 ,  G01N27/447 ,  G01N30/90 ,  G01N30/95 ,  G06T7/40 ,  H04N7/18

    CPC分类号： G01N30/95 ,  G01N21/5911 ,  G01N27/44721 ,  G01N2021/177 ,  G01N2021/5919 ,  G01N30/90

    摘要： The measurement of gray scale or color composition integrated densities of irregularly shaped areas of a subject specimen is accomplished by using a video camera to derive an analog video image signal representative of the optical intensity of light associated with the specimen. A modified low cost high speed video digitizer converts the video image signal into a digital format which an interactive computer program converts into digital optical density values that are used to determine the net integrated density of each irregularly shaped area within the specimen.

    摘要翻译： 通过使用摄像机来导出代表与样本相关联的光的光强度的模拟视频信号来实现对象样本的不规则形状区域的灰度或颜色组合积分密度的测量。 经修改的低成本高速视频数字转换器将视频图像信号转换为数字格式，交互式计算机程序转换成用于确定样本内每个不规则形状区域的净集成密度的数字光密度值。

    Reflectometry system with compensation for specimen holder topography and with lock-rejection of system noise
    10.
    发明授权
    Reflectometry system with compensation for specimen holder topography and with lock-rejection of system noise 失效
    反射系统补偿样品架地形和系统噪声的锁定

    公开(公告)号：US06584217B1

    公开(公告)日：2003-06-24

    申请号：US09610667

    申请日：2000-07-05

    申请人： John L. Lawless ,  Albert E. Chu

    发明人： John L. Lawless ,  Albert E. Chu

    IPC分类号： G06K900

    CPC分类号： G01N21/8483 ,  G01N2021/177 ,  G01N2021/5919 ,  G01N2021/5923 ,  G01N2021/593 ,  G01N2021/5934 ,  G01N2021/8488 ,  G06T7/90 ,  G06T2207/30004 ,  Y10S128/922

    摘要： A self-contained system uses light reflectivity to examine intensity of a dyed spot on a device membrane surrounded by background area to discern information about the specimen that produced the spot. In a preferred embodiment, a master clock alternatively drives one LED focussed upon the spot center, and then drives two LEDS focused on the background area. Light reflected from the spot and background is detected by preferably two photodetectors (“PDs”) spaced-apart a multiple of 90° azimuthal, a configuration discovered to minimize the effects of uneven membrane topography upon light intensity measurements. The PD outputs are average-summed together and are input to a phase lock-in amplifier system that enhances detected signal/noise by measuring signal voltage without producing noise. The lock-in system simultaneously positively and negatively amplifies the average-summed PD outputs, which amplified signal is then switched in synchronism with the LED drive signals. Only in-phase signals occurring during the active LED drive signal portion are sampled, and signal components present in the average-summed together PD output are essentially doubled in effective amplitude, thereby enhancing signal to noise ratios. The output of the switch is lowpass filtered to recover a noise-free DC level proportional to detected light intensity. A readout of the DC level provides an accurate measurement of the spot intensity.

    摘要翻译： 独立系统使用光反射率来检查背景区域包围的设备膜上染色斑点的强度，以辨别产生斑点的样品的信息。 在优选实施例中，主时钟交替地驱动聚焦在光点中心的一个LED，然后驱动聚焦在背景区域上的两个LED。 从点和背景反射的光通过优选地两个间隔开90°方位角的多个的光电探测器（“PD”）被检测到，发现这样一种结构使得不均匀的膜形貌对光强度测量的影响最小化。 PD输出被一起求和并输入到锁相放大器系统，通过测量信号电压而不产生噪声来增强检测到的信号/噪声。 锁定系统同时对平均相加的PD输出进行正负放大，然后将放大的信号与LED驱动信号同步切换。 仅在有源LED驱动信号部分期间发生的同相信号被采样，并且存在于平均相加在一起的PD输出中的信号分量在有效幅度上基本上加倍，从而增强了信噪比。 开关的输出被低通滤波，以恢复与检测到的光强度成比例的无噪声直流电平。 直流电平的读数提供了光斑强度的精确测量。