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    METHOD FOR CREATING GRAY-SCALE FEATURES FOR DUAL TONE DEVELOPMENT PROCESSES
    4.
    发明申请
    METHOD FOR CREATING GRAY-SCALE FEATURES FOR DUAL TONE DEVELOPMENT PROCESSES 有权
    用于创建双色调开发过程的灰度特征的方法

    公开(公告)号：US20100068654A1

    公开(公告)日：2010-03-18

    申请号：US12334852

    申请日：2008-12-15

    申请人： Carlos A. Fonseca ,  Mark Somervell ,  Steven Scheer

    发明人： Carlos A. Fonseca ,  Mark Somervell ,  Steven Scheer

    IPC分类号： G03F7/20 ,  H01L21/027 ,  G06G7/48

    CPC分类号： G03F7/70283 ,  G03F5/16 ,  G03F7/322 ,  G03F7/325

    摘要： A method of patterning a substrate using a dual-tone development process is described. The patterning method comprises forming a layer of radiation-sensitive material on a substrate, wherein the layer of radiation-sensitive material comprises a dual tone resist. Thereafter, the patterning method comprises performing one or more exposures of the layer of radiation-sensitive material to one or more patterns of radiation, wherein at least one of the one or more exposures comprises using a mask having a dual-tone mask pattern region configured for printing dual tone features and a half-tone mask pattern region configured for printing half-tone features. Furthermore, the half-tone mask pattern region is optimized for use with the dual tone resist.

    摘要翻译： 描述使用双音发展过程对衬底进行构图的方法。 图案化方法包括在衬底上形成辐射敏感材料层，其中辐射敏感材料层包括双色调抗蚀剂。 此后，图案化方法包括对辐射敏感材料层进行一次或多次曝光，以一个或多个辐射图案，其中一个或多个曝光中的至少一个曝光包括使用配置有双色调掩模图案区域的掩模 用于打印双色特征和配置用于打印半色调特征的半色调蒙版图案区域。 此外，半色调掩模图案区域被优化用于双色调抗蚀剂。

    Method of making halftone contact screens
    5.
    发明授权
    Method of making halftone contact screens 失效
    制作半色调接触屏幕的方法

    公开(公告)号：US4262070A

    公开(公告)日：1981-04-14

    申请号：US141651

    申请日：1980-04-18

    申请人： Hua-Kuang Liu

    发明人： Hua-Kuang Liu

    IPC分类号： G03C5/08 ,  G03F5/16 ,  G03C5/00 ,  G03F5/00

    CPC分类号： G03C5/08 ,  G03F5/16

    摘要： A method of making a halftone contact screen having a plurality of discrete different optical transmittance levels by making multiple relative translations of light-sensitive material under and in close contact with a ruling mask while exposures to light through the ruling mask are made between the translations. The mask comprises a thin flat plate having an array of parallel periodic equal width opaque straight bars separated by an array of parallel equal width transparent bars. In a first process, translations are normally made perpendicular to the parallel of the bars. Two-dimensional or dot halftone contact screens are made by repeating the process wherein the light-sensitive material is rotated relative to the ruling mask, in its own plane, at an angle greater than zero to the direction of the ruling bars during the first process. Using the single process creates a line halftone contact screen; adding the second process creates a dot halftone contact screen. The effective translation distance between two successive exposures is a non-integral multiple of half of the total width of a single pair of opaque and transparent bars in the ruling mask.

    摘要翻译： 通过在感光材料的多个相对平移与刻线掩模之间进行多个相对平移，同时通过刻线掩模曝光于光之间，形成具有多个离散的不同光透射率水平的半色调接触屏幕的方法。 掩模包括具有由平行的相等宽度的透明条的阵列分开的平行周期性等宽不透明直条的阵列的薄平板。 在第一个过程中，通常使平行垂直于条的平行。 二维或点半色调接触屏幕是通过重复其中感光材料相对于刻线掩模在其自身平面中以与第一过程中的标尺的方向大于零的角度相对旋转的过程制成的 。 使用单个进程创建一个直线半色调联系屏幕; 添加第二个过程创建点半色调联系屏幕。 两次连续曝光之间的有效平移距离是裁定掩模中单对不透明和透明条的总宽度的一半的非整数倍。

    Process for making color separation negatives and positives for use in multi-color printing
    9.
    发明授权
    Process for making color separation negatives and positives for use in multi-color printing 失效
    制作彩色分离阴性和阳性用于多色印刷的方法

    公开(公告)号：US4241153A

    公开(公告)日：1980-12-23

    申请号：US955726

    申请日：1978-10-27

    申请人： Vjatsjeslev Rovnjev

    发明人： Vjatsjeslev Rovnjev

    IPC分类号： G03C5/02 ,  G03F3/04 ,  G03F5/16 ,  G03C5/00 ,  G03F5/00

    CPC分类号： G03F3/04 ,  G03C5/02 ,  G03F5/16

    摘要： Negative and positive films for use in multi-color printing are prepared by a process which utilizes crystals and interstices therebetween in color-separation negatives for multi-color printing without the use of half-tone screens. Exposure through masks of controlled density ranges relative to the color-separation negatives and positives prepared from the color original result in final negatives and positives as well as duplication negatives and positives which can be utilized in the multi-color printing process.

    摘要翻译： 用于多色印刷的负片和正片通过在不使用半色调屏幕的情况下在彩色分离底片中利用晶体和间隙的方法来制备多色印刷。 通过相对于颜色分离阴性的控制密度范围的面罩曝光，并从彩色原稿制成的阳性产生最终的阴性和阳性以及可用于多色印刷过程的重复阴性和阳性。