INTEGRATED PLATING AND PLANARIZATION APPARATUS HAVING A VARIABLE-DIAMETER COUNTERELECTRODE
    2.
    发明申请
    INTEGRATED PLATING AND PLANARIZATION APPARATUS HAVING A VARIABLE-DIAMETER COUNTERELECTRODE 有权
    具有可变直径电机的集成镀层和平面化装置

    公开(公告)号:US20040094403A1

    公开(公告)日:2004-05-20

    申请号:US10294199

    申请日:2002-11-14

    IPC分类号: C25D017/10

    摘要: An apparatus for plating and planarizing metal on a substrate includes a plurality of dispensing segments, each having at least one hole for dispensing electroplating solution onto the substrate. The dispensing segments form a circular counterelectrode and are movable with respect to each other during an electroplating process, so that the counterelectrode has a variable diameter. The electroplating solution is thus dispensed on an annular portion of the substrate having a diameter corresponding to the diameter of the counterelectrode; accordingly, the variable-diameter counterelectrode permits localized delivery of the plating solution to the substrate.

    摘要翻译: 用于在基底上电镀和平面化金属的装置包括多个分配段,每个分配段具有至少一个用于将电镀溶液分配到衬底上的孔。 分配段形成圆形反电极并且可以在电镀过程期间相对于彼此移动,使得反电极具有可变的直径。 因此,电镀溶液被分配在具有对应于反电极的直径的直径的基底的环形部分上; 因此,可变直径对电极允许将电镀液局部输送到基板。

    Cathode current control system for a wafer electroplating apparatus
    3.
    发明申请
    Cathode current control system for a wafer electroplating apparatus 有权
    晶圆电镀设备的阴极电流控制系统

    公开(公告)号:US20040055879A1

    公开(公告)日:2004-03-25

    申请号:US10667814

    申请日:2003-09-22

    摘要: A cathode current control system employing a current thief for use in electroplating a wafer is set forth. The current thief comprises a plurality of conductive segments disposed to substantially surround a peripheral region of the wafer. A first plurality of resistance devices are used, each associated with a respective one of the plurality of conductive segments. The resistance devices are used to regulate current through the respective conductive finger during electroplating of the wafer. Various constructions are used for the current thief and further conductive elements, such as fingers, may also be employed in the system. As with the conductive segments, current through the fingers may also be individually controlled. In accordance with one embodiment of the overall system, selection of the resistance of each respective resistance devices is automatically controlled in accordance with predetermined programming.

    摘要翻译: 阐述了一种使用电流窃电用于电镀晶片的阴极电流控制系统。 当前的小偷包括设置成基本上围绕晶片周边区域的多个导电段。 使用第一多个电阻器件,每个电阻器件与多个导电段中的相应一个相连。 电阻器件用于在晶片的电镀期间调节通过相应的导电指状物的电流。 各种结构用于当前的小偷,并且还可以在系统中使用诸如手指的其它导电元件。 与导电段一样,通过手指的电流也可以单独控制。 根据整个系统的一个实施例,根据预定的程序自动控制对各个电阻装置的电阻的选择。

    Electrode
    4.
    发明申请
    Electrode 失效
    电极

    公开(公告)号:US20020110726A1

    公开(公告)日:2002-08-15

    申请号:US10037070

    申请日:2001-11-09

    CPC分类号: C25B11/035 C25B1/46

    摘要: The invention relates to a gas diffusion electrode (1) comprising a hydrophobic gas diffusion layer (3b), a reaction layer (3a), and a hydrophilic layer (5) arranged in the mentioned order wherein the reaction layer (3a) is arranged to a barrier layer (4), which barrier layer (4), on its opposite side, is arranged to the hydrophilic layer (5). The invention also relates to a method for manufacturing such a gas diffusion electrode (1), and to an electrolytic cell, and use thereof.

    摘要翻译: 本发明涉及一种气体扩散电极(1),包括疏水性气体扩散层(3b),反应层(3a)和亲水层(5),其中反应层(3a)被布置成 阻挡层(4),其相对侧上的阻挡层(4)布置在亲水层(5)上。 本发明还涉及这种气体扩散电极(1)的制造方法和电解槽,及其用途。

    Electrolytic electrode and process of producing the same
    5.
    发明申请
    Electrolytic electrode and process of producing the same 有权
    电解电极及其制造方法

    公开(公告)号:US20040226817A1

    公开(公告)日:2004-11-18

    申请号:US10839246

    申请日:2004-05-06

    发明人: Masashi Hosonuma

    IPC分类号: C25D017/10

    摘要: An electrolytic electrode having an interlayer having more excellent peeling resistance and corrosion resistance and longer electrolytic life than conventional electrolytic electrodes and capable of flowing a large amount of current at the industrial level and a process of producing the same are provided. The electrolytic electrode includes a valve metal or valve metal alloy electrode substrate on the surface of which is formed a high-temperature oxidation film by oxidation, and which is coated with an electrode catalyst. The high-temperature oxidation film is integrated with the electrode substrate, whereby peeling resistance is enhanced. Further, by heating the high-temperature oxidation film together with the electrode catalyst, non-electron conductivity of the interlayer is modified, thereby making it possible to flow a large amount of current.

    摘要翻译: 提供一种具有中间层的电解电极,其具有比常规电解电极更好的耐剥离性,耐腐蚀性和更长的电解寿命,并且能够在工业级流动大量电流及其制造方法。 电解电极包括阀金属或阀金属合金电极基板,其表面通过氧化形成高温氧化膜,并且涂覆有电极催化剂。 高温氧化膜与电极基板一体化,从而提高耐剥离性。 此外,通过与电极催化剂一起加热高温氧化膜,改变了中间层的非电子传导性,从而可以流过大量的电流。

    Oxygen permeable electrode system
    6.
    发明申请
    Oxygen permeable electrode system 有权
    氧气渗透电极系统

    公开(公告)号:US20040084303A1

    公开(公告)日:2004-05-06

    申请号:US10065943

    申请日:2002-12-02

    摘要: An electrochemical device (18) for generating a desired gas of the type includes an ionically conductive electrolyte layer (20), a porous electrode layer (22), and a current collector layer (16) that has a high electrical conductivity and is porous to a desired gas (24) generated by the electrochemical device (18). The current collector layer (16) is substantially formed as a film comprised of a layer of spherical refractory material objects (26) having a conductive coating (12) of a precious metal. The coated spherical objects (26) have a desired diameter (28) making them suitable for forming into the film.

    摘要翻译: 用于产生所需类型的所需气体的电化学装置(18)包括离子导电电解质层(20),多孔电极层(22)和集电极层(16),其具有高电导率并且是多孔的 由电化学装置(18)产生的所需气体(24)。 集电器层(16)基本形成为由具有贵金属导电涂层(12)的球形耐火材料物体(26)构成的膜。 涂覆的球形物体(26)具有期望的直径(28),使得它们适合于形成膜。

    Embedded metallic deposits
    7.
    发明申请
    Embedded metallic deposits 审中-公开
    嵌入金属矿床

    公开(公告)号:US20040000371A1

    公开(公告)日:2004-01-01

    申请号:US10307635

    申请日:2002-12-02

    CPC分类号: G01N27/403 H05K3/045

    摘要: A method of making a set of metallic deposits includes injection molding a substrate, where a pattern of channels is in a surface of the substrate, applying a metallic layer on the surface, to form metallic deposits in the pattern, and removing a portion of the metallic layer, to expose a portion of the surface. The set of metallic deposits can form an electrode set for an electrochemical sensor strip.

    摘要翻译: 制造一组金属沉积物的方法包括注入模塑基底,其中通道图案在基底的表面中,在表面上施加金属层,以形成图案中的金属沉积物,并且去除部分 金属层,以露出表面的一部分。 该组金属沉积物可以形成用于电化学传感器条的电极组。

    Electromedical electrode with a snap connecting means
    8.
    发明申请
    Electromedical electrode with a snap connecting means 审中-公开
    具有卡扣连接装置的电磁电极

    公开(公告)号:US20030178298A1

    公开(公告)日:2003-09-25

    申请号:US10333780

    申请日:2003-04-30

    IPC分类号: C25D017/10

    CPC分类号: A61B5/0416

    摘要: The electrode comprises a plate-shaped part (2) having a portion for establishing contact with the skin of a patient, and a flange part (5) connected with the plate-shaped part. Snap connecting means (6) are provided on the flange part and includes a stud portion (7) for establishing connection to a lead wire connector means of a measuring apparatus and a base portion (8) formed integrally with the stud portion. A conductive area (4) extends between the skin contact establishing portion and the snap connecting means (6). Fastening means for fastening the snap connecting means to the electrode is formed integrally with the base portion and comprises a plurality of legs (9) which protrude from the base portion. The legs are folded to a position in which they abut against the conductive area (4).

    摘要翻译: 电极包括具有用于与患者的皮肤建立接触的部分的板状部分(2)和与板状部分连接的凸缘部分(5)。 卡扣连接装置(6)设置在凸缘部分上,并且包括用于建立与测量装置的引线连接器装置的连接的螺柱部分(7)和与螺柱部分一体形成的基部(8)。 导电区域(4)在皮肤接触建立部分和卡扣连接装置(6)之间延伸。 用于将卡扣连接装置固定到电极的紧固装置与基部一体地形成,并且包括从基部突出的多个支脚(9)。 腿部被折叠到与导电区域(4)抵接的位置。

    Electrode
    10.
    发明申请
    Electrode 审中-公开
    电极

    公开(公告)号:US20030116431A1

    公开(公告)日:2003-06-26

    申请号:US10322316

    申请日:2002-12-19

    申请人: AKZO NOBEL N.V.

    IPC分类号: C25D017/10

    CPC分类号: C25B11/00 C25B11/02

    摘要: The invention relates to a method for preparing a substantially lead-free turbulence promoting electrode, wherein an amount of turbulence promoting particles having a particle size from about 30 to about 2000 nullm are contacted with at least one electrode and brought to adhere thereto, such that from about 5 to about 50% of the projected electrode surface area is covered with the particles. The invention also relates to a turbulence promoting electrode obtainable by the method and an electrode comprising turbulence promoting elevated parts arranged on at least one surface of the electrode. The height of the elevated parts is from about 30 to about 2000 nullm. The invention further relates to the use of the electrode in an electrolytic cell for the production of alkali metal chlorate and alkali metal hydroxide.

    摘要翻译: 本发明涉及一种制备基本无铅湍流促进电极的方法,其中将粒径约30至约2000μm的湍流促进颗粒的量与至少一个电极接触并附着在其上,使得 投影电极表面积的约5至约50%被颗粒覆盖。 本发明还涉及通过该方法获得的湍流促进电极和包括排列在电极的至少一个表面上的湍流促进升高部分的电极。 升高部分的高度为约30至约2000μm。 本发明还涉及电极在电解池中用于生产碱金属氯酸盐和碱金属氢氧化物的用途。