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    DEFECT-INDUCED CONTROL OF THE STRUCTURE OF BORON NITRIDE
    52.
    发明申请
    DEFECT-INDUCED CONTROL OF THE STRUCTURE OF BORON NITRIDE 审中-公开
    硼酸盐结构的缺陷诱导控制

    公开(公告)号：WO1992009717A1

    公开(公告)日：1992-06-11

    申请号：PCT/US1991008912

    申请日：1991-11-26

    Applicant: MOUSTAKAS, Theodore, D.

    IPC: C23C14/00

    CPC classification number: C30B29/403 ,  C23C14/0647 ,  C23C16/342 ,  C30B23/002

    Abstract: A method of controlling defects in boron nitride films in order to stabilize certain crystallographic structures is disclosed. Such defects include, for example, nitrogen vacancies, boron interstitials, and substitutional dopants. In particular, films produced by the method of sputtering in pure inert gas atmospheres have a tetrahedrally coordinated structure and are rich in nitrogen vacancies. Films produced by the same method in inert gas with a sufficient nitrogen overpressure have a completely stoichiometric graphitic structure. These results are expected for any defect type having a greater free energy of formation in the graphitic form of boron nitride than in the tetrahedral forms. The methods of the invention are applicable to any film growth technique capable of incorporating such defects.

    Abstract translation: 公开了一种控制氮化硼膜缺陷的方法，以稳定某些晶体结构。 这些缺陷包括例如氮空位，硼间隙和替代掺杂剂。 特别地，通过溅射在纯惰性气体气氛中的方法生产的膜具有四面体配位结构并且富含氮空位。 通过相同方法在具有足够的氮气超压的惰性气体中制备的膜具有完全化学计量的石墨结构。 对于具有比在四面体形式中的氮化硼的石墨形式的更大的自由形成能量的任何缺陷类型，预期这些结果。 本发明的方法适用于能够引入这种缺陷的任何成膜技术。

    PROCESS OF FILLING THE HIGH ASPECT RATIO TRENCHES BY CO-FLOWING LIGANDS DURING THERMAL CVD
    55.
    发明申请
    PROCESS OF FILLING THE HIGH ASPECT RATIO TRENCHES BY CO-FLOWING LIGANDS DURING THERMAL CVD 审中-公开
    在热CVD期间通过共流配置填充高比例斜率的方法

    公开(公告)号：WO2016160811A1

    公开(公告)日：2016-10-06

    申请号：PCT/US2016/024723

    申请日：2016-03-29

    Applicant: APPLIED MATERIALS, INC.

    Inventor： MANNA, Pramit ,  CHENG, Rui ,  CHAN, Kelvin ,  MALLICK, Abhijit Basu

    IPC: H01L21/205 ,  C23C16/44

    CPC classification number: H01L21/76846 ,  C23C16/045 ,  C23C16/16 ,  C23C16/342 ,  C23C16/46 ,  H01L21/28556 ,  H01L21/76864 ,  H01L21/76877

    Abstract: Implementations of the present disclosure generally relate to methods for forming thin films in high aspect ratio feature definitions. In one implementation, a method of processing a substrate in a process chamber is provided. The method comprises flowing a boron-containing precursor comprising a ligand into an interior processing volume of a process chamber, flowing a nitrogen-containing precursor comprising the ligand into the interior processing volume and thermally decomposing the boron-containing precursor and the nitrogen-containing precursor in the interior processing volume to deposit a boron nitride layer over at least one or more sidewalls and a bottom surface of a high aspect ratio feature definition formed in and below a surface of a dielectric layer on the substrate.

    Abstract translation: 本公开的实施方式一般涉及用于在高纵横比特征定义中形成薄膜的方法。 在一个实施方式中，提供了一种在处理室中处理衬底的方法。 该方法包括将包含配体的含硼前体流入处理室的内部处理体积，将含有配体的含氮前体流入内部处理体积并热分解含硼前体和含氮前体 在内部处理体积中，在形成在基板上的电介质层的表面中和下方的高纵横比特征定义的至少一个或多个侧壁和底表面上沉积氮化硼层。

    SOLE OF AN IRON HAVING IMPROVED GLIDING AND ABRASION-RESISTANCE PROPERTIES
    58.
    发明申请
    SOLE OF AN IRON HAVING IMPROVED GLIDING AND ABRASION-RESISTANCE PROPERTIES 审中-公开
    具有改进的玻璃和抗磨损性能的铁

    公开(公告)号：WO2014079982A4

    公开(公告)日：2014-08-21

    申请号：PCT/EP2013074506

    申请日：2013-11-22

    Applicant: SEB SA ,  UNIV LORRAINE ,  CENTRE NAT RECH SCIENT

    Inventor： ALLEMAND SIMON ,  PACCAUD DENIS ,  TUFFE STÉPHANE ,  PIERSON JEAN-FRANÇOIS

    IPC: D06F75/38 ,  C23C4/10

    CPC classification number: D06F75/38 ,  C23C14/0647 ,  C23C14/067 ,  C23C14/3485 ,  C23C14/35 ,  C23C16/342 ,  C23C16/38 ,  C23C16/50

    Abstract: The present invention relates to a sole (1) of an iron comprising a metal sole body (11; 21) having a ceramic gliding surface (12; 22) intended for ironing. - According to the invention, the sole body has a hardness greater than or equal to 150 HV and forms a substrate bearing a surface layer of transition metal boronitride or boride forming the gliding surface. The present invention also relates to an iron comprising a sole of the aforementioned type associated with a heating body (4) comprising electric heating means (5), and to a method for producing a sole of the aforementioned type.

    Abstract translation: 本发明涉及一种熨斗的鞋底（1），其包括具有用于熨烫的陶瓷滑动表面（12; 22）的金属鞋底本体（11; 21）。 - 根据本发明，鞋底的硬度大于或等于150HV，并且形成承载形成滑动表面的过渡金属硼氮化物或硼化物的表面层的衬底。 本发明还涉及一种熨斗，其包​​括与包括电加热装置（5）的加热体（4）相关联的上述类型的鞋底，以及一种上述类型的鞋底的制造方法。

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