Forming an insulating film for a photosensitive resin composition

    公开(公告)号:JP5369420B2

    公开(公告)日:2013-12-18

    申请号:JP2007275306

    申请日:2007-10-23

    Abstract: PROBLEM TO BE SOLVED: To provide a photosensitive resin composition for forming an electrical insulating film that can give a cured film excellent in resolution, electrical insulation, cohesiveness, adhesion, etc. SOLUTION: The photosensitive resin composition for forming an insulating film comprises (A) a resin containing a structural unit having a phenolic hydroxyl group, (B) at least one kind of the compounds selected from the compounds represented by formula (b1) and (b2), (C) a photosensitive acid generator, and (D) a solvent, wherein, (b1) is (R) n Si(OR 1 ) 4-n and (b2) is (R 2 )[R 3 Si(OR 1 ) 3 ] m , and R represents a hydrogen atom or a hydrocarbon group that may have a substituent group such as an epoxy and oxetanyl, R 1 represents a 1-5C alkyl group, n is an integer of 0-2, R 2 represents a m-valent group selected from an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a heterocyclic group, R 3 represents a methylene group or a 2-5C alkylene group, and m is an integer of 1-10. COPYRIGHT: (C)2009,JPO&INPIT

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